JP2893654B2 - Waste liquid separation and recovery method and apparatus - Google Patents
Waste liquid separation and recovery method and apparatusInfo
- Publication number
- JP2893654B2 JP2893654B2 JP21881791A JP21881791A JP2893654B2 JP 2893654 B2 JP2893654 B2 JP 2893654B2 JP 21881791 A JP21881791 A JP 21881791A JP 21881791 A JP21881791 A JP 21881791A JP 2893654 B2 JP2893654 B2 JP 2893654B2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- liquid
- waste liquid
- waste
- type
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【０００１】[0001]
【産業上の利用分野】本発明は、廃液の分別回収方法及
びその装置に係り、特にクリーンルーム等の半導体製造
設備で使用される廃液の分別回収方法及びその装置に関
する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for separating and recovering waste liquid, and more particularly to a method and an apparatus for separating and recovering waste liquid used in semiconductor manufacturing equipment such as a clean room.
【０００２】[0002]
【従来の技術】クリーンルーム等の半導体設備では、半
導体ウエハ、マスクパターン等の洗浄等の為に種々の溶
剤が用いられる。例えば、このような溶剤として、シン
ナー、イソプロピルアルコール、アセトン、純水等が挙
げられる。従来このような溶剤は、溶剤ごとのタンクを
作業室内に持込み、作業終了後の廃液は各タンク毎に室
外に持ち出して処理していた。2. Description of the Related Art In a semiconductor facility such as a clean room, various solvents are used for cleaning a semiconductor wafer, a mask pattern and the like. For example, such solvents include thinner, isopropyl alcohol, acetone, pure water and the like. Conventionally, such a solvent has been carried out by bringing a tank for each solvent into the working room and taking out the waste liquid after the work is carried out outside the room for each tank.
【０００３】[0003]
【発明が解決しようとする課題】しかしながら、このよ
うな手作業による廃液の回収方法は、大規模な半導体製
造設備には不向きである。また、このような溶剤の廃液
処理を自動的に行おうとすると、異種の廃液の混合を防
止する為に使用済みの溶剤毎に廃液タンクを設け、その
配管系も溶剤毎に設けなければならず装置が大がかりに
なる欠点がある。However, such a manual waste liquid recovery method is not suitable for a large-scale semiconductor manufacturing facility. Also, in order to automatically perform the waste liquid treatment of such a solvent, a waste liquid tank must be provided for each used solvent and a piping system must be provided for each solvent in order to prevent mixing of different kinds of waste liquid. There is a disadvantage that the device becomes large.
【０００４】本発明は、このような事情に鑑みてなされ
たもので簡単な構造で自動的に廃液の分別回収が出来る
方法及びその装置を提案することを目的とする。The present invention has been made in view of such circumstances, and has as its object to propose a method and apparatus for automatically separating and recovering waste liquid with a simple structure.
【０００５】[0005]
【課題を解決するための手段】本発明は、前記目的を達
成する為に、２種類以上の廃液容器からの廃液を、枝管
を介して合流管に導き切換弁により種類ごとに分別する
と共に前記合流管から分岐した種類ごとの枝管を介して
各回収タンクに回収する廃液の分別回収方法に於いて、
洗浄液又は、前記廃液容器から流下する最初の廃液によ
り前記合流管内の残存液を洗浄すると共に、この洗浄し
た液を前記切換弁を切り換えて前記合流管から分岐した
洗浄液用の枝管を介して混合液タンクに回収し、その
後、前記切換弁を切り換えて前記廃液容器からの廃液を
廃液の種類ごとに回収タンクに回収することを特徴とす
る。また、本発明は、前記目的を達成する為に、室内作
業域に溶剤を種類ごとに貯留する作業タンクと、前記溶
剤を使用した後の各廃液が廃液の種類ごとに一時的に貯
留される中間廃液タンクと、前記各廃液の混合液が一時
的に貯留される中間混合液タンクと、作業タンクと中間
廃液タンク並びに中間混合液タンクとの間の配管系に設
けられ、各作業タンクからの廃液と混合液を対応する各
中間廃液タンクと中間混合液タンクとに振り分ける第１
切換弁と、各作業タンクからの廃液の種類、混合液を検
知して第１切換弁の作動をコントロールする第１検知手
段と、各廃液の種類ごとに対応して設けられた最終廃液
タンクと、各廃液の混合液を貯留する最終混合液タンク
と、中間廃液タンク並びに中間混合液タンクと、最終廃
液タンク並びに最終混合液タンクとの間の配管系に設け
られ、中間廃液タンクからの廃液並びに中間混合液タン
クからの混合液を、対応する各最終回収タンクと最終混
合液タンクとに振り分ける第２切換弁と、中間廃液タン
クからの廃液の種類、中間混合液タンクからの混合液を
検知して第２切換弁の作動をコントロールする第２検知
手段と、から成ることを特徴とする。According to the present invention, in order to achieve the above object, waste liquids from two or more waste liquid containers are guided to a junction pipe via a branch pipe and separated by a switching valve for each type. In the method for separating and collecting waste liquid to be collected in each collection tank via a branch pipe for each type branched from the junction pipe,
The remaining liquid in the merge pipe is washed with the cleaning liquid or the first waste liquid flowing down from the waste liquid container, and the washed liquid is mixed via the branch pipe for the cleaning liquid branched from the merge pipe by switching the switching valve. And collecting the waste liquid from the waste liquid container in the recovery tank for each type of waste liquid by switching the switching valve. Further, according to the present invention, in order to achieve the above object, a work tank for storing a solvent for each type in an indoor work area, and each waste liquid after using the solvent is temporarily stored for each type of waste liquid. An intermediate waste liquid tank, an intermediate mixed liquid tank for temporarily storing the mixed liquid of each of the waste liquids, and a pipe provided between the work tank, the intermediate waste liquid tank and the intermediate mixed liquid tank, A first method in which the waste liquid and the mixed liquid are distributed to corresponding intermediate waste liquid tanks and intermediate mixed liquid tanks, respectively.
A switching valve, first detection means for detecting the type of waste liquid from each work tank and the mixed liquid to control the operation of the first switching valve, and a final waste liquid tank provided for each type of waste liquid; , A final mixed liquid tank for storing a mixed liquid of each waste liquid, an intermediate waste liquid tank and an intermediate mixed liquid tank, provided in a piping system between the final waste liquid tank and the final mixed liquid tank, and a waste liquid from the intermediate waste liquid tank and A second switching valve for distributing the mixed liquid from the intermediate mixed liquid tank to the corresponding final recovery tank and final mixed liquid tank, and detecting the type of waste liquid from the intermediate mixed liquid tank and the mixed liquid from the intermediate mixed liquid tank. And a second detecting means for controlling the operation of the second switching valve.
【０００６】[0006]
【作用】本発明では、作業タンクからの使用済溶剤は第
１検知手段により溶剤の種類が特定され、溶剤の種類に
より第１切換弁が作動し、廃液は対応する中間タンクに
一時的に貯留される。即ち、廃液は対応した種類毎の中
間廃液タンクに貯留され、洗浄液は中間混合液タンクに
貯留される。According to the present invention, the type of the used solvent from the work tank is specified by the first detecting means, the first switching valve is operated according to the type of the solvent, and the waste liquid is temporarily stored in the corresponding intermediate tank. Is done. That is, the waste liquid is stored in the corresponding intermediate waste liquid tank, and the cleaning liquid is stored in the intermediate mixed liquid tank.
【０００７】また、中間タンクが廃液で満たされると、
廃液は中間タンクから最終タンクに向けて送られる。最
終タンクは、各溶剤ごとの最終廃液タンクと最終混合液
タンクとが設けられ、第２検出手段により第２切換弁を
切換えて廃液ごとに対応する最終タンクに分別回収され
る。When the intermediate tank is filled with waste liquid,
The waste liquid is sent from the intermediate tank to the final tank. The final tank is provided with a final waste liquid tank and a final mixed liquid tank for each solvent, and switches the second switching valve by the second detection means to separate and collect the waste liquid into a corresponding final tank.
【０００８】[0008]
【実施例】以下添付図面に従って本発明に係る廃液の分
別回収方法の好ましい実施例を詳説する。図１において
クリーンルームの洗浄エリア１０の下方にはグレーチン
グ床１２を介して床下空間１４が形成されている。清浄
エリア１０の上方には、図示しない天井室のＨＥＰＡフ
イルタを通って清浄エアを吹き出す吹出口が設けられ、
清浄エリア１０に吹き出された清浄エアがグレーチング
床１２を通って床下空間１４に送られ、その後再び天井
室に送られて循環使用される。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the method for separating and recovering waste liquid according to the present invention will be described below in detail with reference to the accompanying drawings. In FIG. 1, an underfloor space 14 is formed below a cleaning area 10 of a clean room via a grating floor 12. Above the clean area 10, an outlet for blowing clean air through a HEPA filter of a ceiling room (not shown) is provided.
The clean air blown out to the clean area 10 is sent to the underfloor space 14 through the grating floor 12, and then sent again to the ceiling room for circulating use.
【０００９】清浄エリア１０には複数の作業タンク１
６、１６…、作業タンク１８、１８…が設置される。作
業タンク１６には溶剤Ａ（例えばシンナー）が入ってお
り、作業タンク１８には溶剤Ｂ（例えばイソプロピルア
ルコール）が入っている。これらの溶剤Ａ、Ｂは半導体
ウエハ、マスクパターンの洗浄に用いられる。床下空間
１４には、溶剤Ａを一時的に貯留する中間廃液タンク２
０、溶剤Ｂを一時的に貯留する中間廃液タンク２２、洗
浄液等の混合液を一時的に貯留する中間混合液タンク２
４が配置される。作業タンク１６は、枝管２６、合流管
２８、切換弁３０、枝管３２を介して中間廃液タンク２
０と連通可能となっている。また作業タンク１８は、枝
管３４、合流管２８、切換弁３０、枝管３６を介して中
間廃液タンク２２と連通可能となっている。また、合流
管２８は切換弁３０、枝管３８を介して中間混合液タン
ク２４と連通可能となっている。A plurality of work tanks 1 are provided in the clean area 10.
, 6 and 16 and work tanks 18 and 18 are installed. The work tank 16 contains a solvent A (for example, thinner), and the work tank 18 contains a solvent B (for example, isopropyl alcohol). These solvents A and B are used for cleaning a semiconductor wafer and a mask pattern. In the underfloor space 14, the intermediate waste liquid tank 2 for temporarily storing the solvent A is provided.
0, an intermediate waste liquid tank 22 for temporarily storing the solvent B, and an intermediate mixed liquid tank 2 for temporarily storing a mixed liquid such as a cleaning liquid.
4 are arranged. The work tank 16 is connected to the intermediate waste liquid tank 2 through a branch pipe 26, a merge pipe 28, a switching valve 30, and a branch pipe 32.
Communication with 0 is possible. The work tank 18 can communicate with the intermediate waste liquid tank 22 via the branch pipe 34, the merge pipe 28, the switching valve 30, and the branch pipe 36. The junction pipe 28 can communicate with the intermediate mixed liquid tank 24 via the switching valve 30 and the branch pipe 38.
【００１０】クリーンルームの屋外には、最終廃液タン
ク４０、最終廃液タンク４２、最終混合液タンク４４が
設けられている。中間廃液タンク２０は、枝管４６、合
流管４８、ギアードポンプ５０、逆止弁５２、切換弁５
４、枝管５６を介して最終廃液タンク４０に連通可能と
されている。中間廃液タンク２２は、枝管５８、合流管
４８、ギアードポンプ５０、逆止弁５２、切換弁５４、
枝管６０を介して最終廃液タンク４２に連通可能とされ
ている。A final waste liquid tank 40, a final waste liquid tank 42, and a final mixed liquid tank 44 are provided outside the clean room. The intermediate waste liquid tank 20 includes a branch pipe 46, a merge pipe 48, a geared pump 50, a check valve 52, and a switching valve 5.
4. It can communicate with the final waste liquid tank 40 via the branch pipe 56. The intermediate waste liquid tank 22 includes a branch pipe 58, a merging pipe 48, a geared pump 50, a check valve 52, a switching valve 54,
It can communicate with the final waste liquid tank 42 through the branch pipe 60.
【００１１】中間混合液タンク２４は、枝管６２、合流
管４８、ギアードポンプ５０、逆止弁５２、切換弁５
４、枝管６４を介して最終混合液タンク４４に連通可能
とされている。更に合流管２８には、液検知センサ６６
が設けられ、液検知センサ６６は液種に応じて切換弁３
０を切換制御する。同様に合流管５６には、液検知セン
サ６８が設けられ、液検知センサ６８は液種に応じて切
換弁54を切換制御する。このような液検知センサ６６、
６８は、濃度センサ、ガスクロマトグラフィ、赤外線波
長分析計、電気伝導計等が用いられる。The intermediate mixed liquid tank 24 includes a branch pipe 62, a merge pipe 48, a geared pump 50, a check valve 52, and a switching valve 5.
4. It can communicate with the final mixed liquid tank 44 via the branch pipe 64. Further, a liquid detecting sensor 66 is
Is provided, and the liquid detection sensor 66 switches the switching valve 3 according to the liquid type.
0 is switched and controlled. Similarly, the merging pipe 56 is provided with a liquid detection sensor 68, and the liquid detection sensor 68 controls the switching of the switching valve 54 according to the liquid type. Such a liquid detection sensor 66,
Reference numeral 68 denotes a concentration sensor, gas chromatography, infrared wavelength analyzer, electric conductivity meter, or the like.
【００１２】前記の如く構成された本発明に係る廃液の
分別回収方法及びその装置の作用は次の通りである。最
初に合流管２８の洗浄が行われ、合流管２８の洗浄は図
示しない洗浄液タンクからの洗浄水、又は作業タンク１
６、１８からの溶剤ＡまたはＢを流すことによって合流
管２８の残存液を洗浄する。液検知センサ６８は合流管
２８を流れてくる液が洗浄水の場合または溶剤Ａと溶剤
Ｂとの混合液である場合には切換弁３８を切換え、合流
管２８を枝管３８に連通し、洗浄液は中間混合液タンク
２４に送られる。合流管２８内が洗浄され、溶剤Ａ又は
Ｂの純度が高くなると、液検知センサ６６はこれを検知
し、液種に応じて切換弁３０を枝管３２又は枝管３６に
切換えて、中間廃液タンク２０又は中間廃液タンク２２
に溶剤Ａ又はＢを一時的に貯留する。The operation of the method and the apparatus for separating and recovering waste liquid according to the present invention having the above-mentioned structure is as follows. First, the merging pipe 28 is washed, and the merging pipe 28 is washed with washing water from a cleaning liquid tank (not shown) or the working tank 1.
The remaining liquid in the merge pipe 28 is washed by flowing the solvent A or B from 6, 18. The liquid detection sensor 68 switches the switching valve 38 when the liquid flowing through the merging pipe 28 is washing water or a mixed liquid of the solvent A and the solvent B, and connects the merging pipe 28 to the branch pipe 38. The cleaning liquid is sent to the intermediate mixed liquid tank 24. When the inside of the junction pipe 28 is washed and the purity of the solvent A or B becomes high, the liquid detection sensor 66 detects this, and switches the switching valve 30 to the branch pipe 32 or the branch pipe 36 according to the type of the liquid, so that the intermediate waste liquid is removed. Tank 20 or intermediate waste liquid tank 22
Temporarily store the solvent A or B.
【００１３】中間廃液タンク２０、２２、中間混合液タ
ンク２４が満たされると、それぞれのタンクから枝管４
６、５８、６２、合流管４８を介してポンプ５０によっ
て引き抜かれる。合流管４８にも液検知センサ６８が設
けられ、洗浄液または合流管４８の残留液を含んだ混合
液に場合には切換弁５４を枝管６４と連通させて最終混
合液タンク４４に洗浄水を貯留する。また合流管４８の
溶剤Ａ又はＢの純度が高くなり、センサ６８がこれを検
知すると切換弁５４を枝管５６又は枝管６０に切換えそ
れぞれ廃液の種類の応じて最終廃液タンク４０、４２に
居留する。最終廃液タンク４０、４２最終混合液タンク
４４から廃液は図示しないタンクローリーなどの手段に
より排出される。When the intermediate waste liquid tanks 20, 22 and the intermediate mixed liquid tank 24 are filled, the branch pipe 4
6, 58, 62 are withdrawn by the pump 50 through the merging pipe 48. A liquid detection sensor 68 is also provided on the merging pipe 48, and in the case of a cleaning liquid or a mixed liquid containing the residual liquid of the merging pipe 48, the switching valve 54 is connected to the branch pipe 64 to supply the cleaning water to the final mixed liquid tank 44. To store. Further, when the purity of the solvent A or B in the merging pipe 48 becomes high and the sensor 68 detects this, the switching valve 54 is switched to the branch pipe 56 or the branch pipe 60, and is retained in the final waste liquid tanks 40 and 42 according to the type of the waste liquid, respectively. I do. The waste liquid is discharged from the final waste liquid tanks 40 and 42 from the final mixed liquid tank 44 by means such as a tank truck (not shown).
【００１４】以上説明したように本発明に係わる実施例
によれば、洗浄液などは混合液タンク４４に貯留し、ま
た廃液は溶剤の種類ごとにそれぞれの最終廃液タンク４
０、４２に居留するので、回収後の廃液は再利用するこ
とができる利点がある。As described above, according to the embodiment of the present invention, the cleaning liquid or the like is stored in the mixed liquid tank 44, and the waste liquid is stored in the final waste liquid tank 4 for each type of solvent.
Since it stays at 0 and 42, there is an advantage that the waste liquid after collection can be reused.
【００１５】[0015]
【発明の効果】以上説明したように本発明に係る廃液の
分別回収方法及びその装置によれば、簡単な装置で溶剤
毎に廃液を自動的に回収できるので、廃液を再利用等で
きる利点がある。As described above, according to the method and apparatus for separating and recovering waste liquid according to the present invention, the waste liquid can be automatically recovered for each solvent with a simple apparatus, so that the waste liquid can be reused. is there.
【図１】図１は本発明の次を実施例す配管図である。FIG. 1 is a piping diagram illustrating a next embodiment of the present invention.
１６、１８…作業タンク ２０、２２…中間廃液タンク ２４…中間混合液タンク ３０…切換弁 ４０、４２…最終廃液タンク ４４…最終混合液タンク ５４…切換弁 ６６、６８…液検知センサ 16, 18 ... Work tank 20, 22 ... Intermediate waste liquid tank 24 ... Intermediate mixed liquid tank 30 ... Switching valve 40, 42 ... Final waste liquid tank 44 ... Final mixed liquid tank 54 ... Switching valve 66, 68 ... Liquid detection sensor
───────────────────────────────────────────────────── フロントページの続き (72)発明者 樫原 稔 東京都千代田区内神田１丁目１番14号 日立プラント建設株式会社内 (72)発明者 平 久男 北海道亀田郡七飯町字中島145番地 日 立北海セミコンダクタ株式会社内 (56)参考文献 特開 平４−95700（ＪＰ，Ａ) (58)調査した分野(Int.Cl.6，ＤＢ名) C02F 1/00 F17D 1/08 F17D 3/03 H01L 21/304 641 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Minoru Kashihara 1-1-1 Uchikanda, Chiyoda-ku, Tokyo Inside Hitachi Plant Construction Co., Ltd. (72) Inventor Hisao Hira 145 Nakajima, Nanae-cho, Kameda-gun, Hokkaido (56) References JP-A-4-95700 (JP, A) (58) Fields investigated (Int. Cl. 6 , DB name) C02F 1/00 F17D 1/08 F17D 3/03 H01L 21/304 641
Claims (2)
管を介して合流管に導き切換弁により種類ごとに分別す
ると共に前記合流管から分岐した種類ごとの枝管を介し
て各回収タンクに回収する廃液の分別回収方法に於い
て、 洗浄液又は、前記廃液容器から流下する最初の廃液によ
り前記合流管内の残存液を洗浄すると共に、この洗浄し
た液を前記切換弁を切り換えて前記合流管から分岐した
洗浄液用の枝管を介して混合液タンクに回収し、その後、前記切換弁を切り換えて前記 廃液容器からの廃
液を廃液の種類ごとに回収タンクに回収することを特徴
とする廃液の分別回収方法。1. A waste solution from two or more waste solution containers is branched.
Separate each type by guiding to the confluence pipe via pipe
Through the branch pipes of each type branched from the merge pipe.
Te recovered in the recovery tank at the fractional recovery method of the waste liquid, the cleaning liquid or with cleaning the remaining liquid of the merging pipe by the initial waste liquid flowing down from the waste fluid container, the washed liquid switches the switching valve Branch off from the junction
Collecting the waste liquid from the waste liquid container into the recovery tank for each type of waste liquid by switching the switching valve to collect the waste liquid in the recovery tank through a branch pipe for the cleaning liquid. .
作業タンクと、前記溶剤を使用した後の各廃液が廃液の種類ごとに一時
的に 貯留される中間廃液タンクと、前記各廃液の混合液が一時的に 貯留される中間混合液タ
ンクと、 作業タンクと中間廃液タンク並びに中間混合液タンクと
の間の配管系に設けられ、各作業タンクからの廃液と混
合液を対応する各中間廃液タンクと中間混合液タンクと
に振り分ける第１切換弁と、 各作業タンクからの廃液の種類、混合液を検知して第１
切換弁の作動をコントロールする第１検知手段と、 各廃液の種類ごとに対応して設けられた最終廃液タンク
と、 各廃液の混合液を貯留する最終混合液タンクと、 中間廃液タンク並びに中間混合液タンクと、最終廃液タ
ンク並びに最終混合液タンクとの間の配管系に設けら
れ、中間廃液タンクからの廃液並びに中間混合液タンク
からの混合液を、対応する各最終回収タンクと最終混合
液タンクとに振り分ける第２切換弁と、 中間廃液タンクからの廃液の種類、中間混合液タンクか
らの混合液を検知して第２切換弁の作動をコントロール
する第２検知手段と、 から成ることを特徴とする廃液の分別回収装置。2. A chamber and the working tank for storing a solvent for each type in the work area, the waste liquid after use of the solvent temporary for each type of waste
An intermediate waste liquid tank which is to stored, the intermediate liquid mixture tank mixture of the waste is temporarily stored, is provided in the piping system between the working tank and the intermediate waste liquid tank and the intermediate liquid mixture tank, A first switching valve for distributing a waste liquid and a mixed liquid from each work tank to a corresponding intermediate waste liquid tank and an intermediate mixed liquid tank, and a first switch valve for detecting the type of waste liquid and the mixed liquid from each work tank, and
First detecting means for controlling the operation of the switching valve, a final waste liquid tank provided for each type of waste liquid, a final mixed liquid tank for storing a mixed liquid of each waste liquid, an intermediate waste liquid tank and intermediate mixing The liquid tank, the final waste liquid tank and the final mixed liquid tank are provided in a piping system, and the waste liquid from the intermediate waste liquid tank and the mixed liquid from the intermediate mixed liquid tank are supplied to the corresponding final recovery tank and final mixed liquid tank, respectively. wherein a second switching valve, the type of waste from the intermediate waste liquid tank, and a second detecting means for controlling the operation of the second switching valve mixture by detecting from the intermediate liquid mixture tank, in that it consists of allocating bets fractional recovery apparatus of the waste to be.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21881791A JP2893654B2 (en) | 1991-08-29 | 1991-08-29 | Waste liquid separation and recovery method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21881791A JP2893654B2 (en) | 1991-08-29 | 1991-08-29 | Waste liquid separation and recovery method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0557271A JPH0557271A (en) | 1993-03-09 |
| JP2893654B2 true JP2893654B2 (en) | 1999-05-24 |
Family
ID=16725814
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21881791A Expired - Fee Related JP2893654B2 (en) | 1991-08-29 | 1991-08-29 | Waste liquid separation and recovery method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2893654B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004182517A (en) | 2002-12-02 | 2004-07-02 | Sony Corp | Recycling equipment of used sulfuric acid |
| JP4799464B2 (en) | 2007-03-29 | 2011-10-26 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
| CN114200070A (en) * | 2021-12-14 | 2022-03-18 | 嘉兴市唯真生物科技有限公司 | Liquid chromatography device |
-
1991
- 1991-08-29 JP JP21881791A patent/JP2893654B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0557271A (en) | 1993-03-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5248393A (en) | Solvent reprocessing system | |
| US5443734A (en) | Programmable solid phase extraction and elution device | |
| US5474411A (en) | Multistory structure for chemical plants | |
| US4601181A (en) | Installation for cleaning clothes and removal of particulate contaminants especially from clothing contaminated by radioactive particles | |
| US4795497A (en) | Method and system for fluid treatment of semiconductor wafers | |
| JP3272719B2 (en) | Hydrodynamic fume scrubber | |
| US4899767A (en) | Method and system for fluid treatment of semiconductor wafers | |
| US4508545A (en) | Closed loop water treating system and method | |
| US3409409A (en) | Controlled ph scrubber system | |
| WO2017121106A1 (en) | Automatic off-line mbr membrane bioreactor having air and water combined flushing | |
| EP0572035A2 (en) | Cleaning water production system | |
| US4764272A (en) | Apparatus for recovery of hydrocarbons from hydrocarbon/water mixtures | |
| JP2893654B2 (en) | Waste liquid separation and recovery method and apparatus | |
| US5259931A (en) | Stripping tower system for removing volatile components from water containing the same | |
| US5431827A (en) | Device and apparatus for recovery of dry cleaning fluid, and purification of water from dry cleaning water | |
| US20220314863A1 (en) | Mobile unit for thorough wet decontamination of persons | |
| US4828691A (en) | Submersible purification system for radioactive water | |
| US3174490A (en) | Filter washing machine | |
| US4148727A (en) | Method of decontaminating liquids | |
| US5820658A (en) | Apparatus and method for processing exhaust gas | |
| JPH02237693A (en) | Sewage treating device | |
| US5171334A (en) | Diffused air stripping system | |
| KR100253281B1 (en) | Automatic drain collecting and exhausting apparatus for semiconductor fabrication system | |
| JP2003521359A (en) | Bulk chemical supply system | |
| US3012949A (en) | Device for diverting reflux |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |