JP2884689B2 - Extractor - Google Patents

Extractor

Info

Publication number
JP2884689B2
JP2884689B2 JP2101360A JP10136090A JP2884689B2 JP 2884689 B2 JP2884689 B2 JP 2884689B2 JP 2101360 A JP2101360 A JP 2101360A JP 10136090 A JP10136090 A JP 10136090A JP 2884689 B2 JP2884689 B2 JP 2884689B2
Authority
JP
Japan
Prior art keywords
water
temperature
thermistor
extraction
temperature detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2101360A
Other languages
Japanese (ja)
Other versions
JPH03297423A (en
Inventor
健治 岡村
直美 木村
行義 西口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2101360A priority Critical patent/JP2884689B2/en
Publication of JPH03297423A publication Critical patent/JPH03297423A/en
Application granted granted Critical
Publication of JP2884689B2 publication Critical patent/JP2884689B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 産業上の利用分野 本発明はコーヒーメーカーなどの抽出機に関する。Description: TECHNICAL FIELD The present invention relates to an extractor such as a coffee maker.

従来の技術 近年、コーヒーメーカーなどの抽出機は広く普及し、
使い勝手を向上させることが求められている。
2. Description of the Related Art In recent years, extractors such as coffee makers have become widespread,
There is a demand for improved usability.

従来のこの種の抽出機は第7図に示すような構成が一
般的であった。以下、その構成について説明する。
A conventional extractor of this type generally has a configuration as shown in FIG. Hereinafter, the configuration will be described.

図に示すように、容器1の下方周部には発熱体2を装
着し、底面外部には温度調節器3を配設している。容器
1の上方には、容器蓋4を容器1と密閉状態に設けてい
る。容器蓋4の上方にはタンク5を設け、タンク5の底
面に第1の開口部5aを設け、この第1の開口部5aに一端
を取着し、他端を容器1内の下方に開口した給水パイプ
6を設け、この給水パイプ6を容器蓋4の第2の開口部
4aに貫通させて配設している。容器蓋4の第3の開口部
4bはタンク5の上方で開口する空気筒7と貫通させて設
けている。容器蓋4の第4の開口部4cは導水パイプ8の
貫通穴として設け、この導水パイプ8は一端を容器1内
の上方に位置させた吸水口8aと略U字状に折曲して他端
に吐出口8bを設けている。吐出口8bの下方にはコーヒー
粉などを収納するバスケット9およびバスケット9の下
方にコーヒー液などを溜めるデカンタ10を配している。
タンク5の上方には水を入れる給水口11aを設けた蓋11
を配している。
As shown in the figure, a heating element 2 is mounted on a lower peripheral portion of a container 1, and a temperature controller 3 is disposed outside a bottom surface. A container lid 4 is provided above the container 1 in a state of being sealed with the container 1. A tank 5 is provided above the container lid 4, a first opening 5 a is provided on the bottom surface of the tank 5, one end is attached to the first opening 5 a, and the other end is opened downward in the container 1. Water pipe 6 is provided, and the water pipe 6 is connected to the second opening of the container lid 4.
4a is penetrated and arranged. Third opening of container lid 4
4b is provided so as to penetrate the air cylinder 7 opening above the tank 5. The fourth opening 4c of the container lid 4 is provided as a through hole of the water guide pipe 8, and the water guide pipe 8 is bent at one end into a substantially U-shape with a water suction port 8a located above the inside of the container 1, and the other. A discharge port 8b is provided at the end. A basket 9 for storing coffee powder and the like and a decanter 10 for storing coffee liquid and the like are arranged below the basket 9 below the discharge port 8b.
A lid 11 having a water supply port 11a for supplying water is provided above the tank 5.
Is arranged.

上記構成において動作を説明する。給水口11aより水
を入れると、タンク5の第1の開口部5aより給水パイプ
6を介して容器1内に水が入る。容器1内の水位が上昇
して導水パイプ8の上方迄給水されると、容器1内の水
は導水パイプ8を通じて吐出口8bより排水される。排水
されて水位が下がり、吸水口8aと同水位になると、容器
1内へは空気筒7により空気が同時に入ってきているの
で、導水パイプ8内へも吸水口8aより空気が入り、導水
パイプ8内においてサイフォンの原理が働かなくなり、
排水が停止する。この状態で発熱体2に電気を通して加
熱すると、容器1の水は加熱される。水温が上昇して温
度調節器3の設定温度になると、温度調節器3が動作し
て発熱体2への通電を停止する。この後バスケット9に
コーヒー粉をいれてセットし、給水口11aより再び水を
供給すると、容器1内の加熱された湯が、導水パイプ8
を介して吐出口8bから排出され、バスケット9内のコー
ヒー粉上に注がれ、デカンタ10へコーヒー液が滴下す
る。
The operation of the above configuration will be described. When water is supplied from the water supply port 11a, the water enters the container 1 through the water supply pipe 6 from the first opening 5a of the tank 5. When the water level in the container 1 rises and water is supplied above the water pipe 8, the water in the container 1 is drained from the discharge port 8 b through the water pipe 8. When the water is drained and the water level drops, and reaches the same water level as the water intake port 8a, air enters the container 1 at the same time by the air cylinder 7, so that air also enters the water pipe 8 through the water intake port 8a. 8, the principle of siphon stopped working,
Drainage stops. When electricity is passed through the heating element 2 in this state, the water in the container 1 is heated. When the water temperature rises and reaches the set temperature of the temperature controller 3, the temperature controller 3 operates to stop energizing the heating element 2. Thereafter, coffee powder is put into the basket 9 and set, and water is supplied again from the water supply port 11a.
The coffee liquid is discharged from the discharge port 8b through the outlet, is poured onto the coffee powder in the basket 9, and the coffee liquid drops onto the decanter 10.

発明が解決しようとする課題 このような従来の抽出機においては、湯の吐出時間が
約3分くらいかかり、さらにバスケット9内でコーヒー
粉とふれあって抽出が完了するには更に1〜2分の時間
が必要である。しかも抽出中であるかどうかは、バスケ
ット9とデカンタ10の間の間隙からコーヒー液の滴下を
確認するしか方法がなく、しかも見えにくいため、抽出
中にバスケット9を引き出して抽出中のコーヒー液をこ
ぼしたり、火傷をするなどの課題があった。
Problems to be Solved by the Invention In such a conventional extractor, it takes about 3 minutes to discharge hot water, and it takes another 1 to 2 minutes for the extraction to be completed by touching the coffee powder in the basket 9. Time is needed. In addition, the only way to determine whether or not the coffee is being extracted is to check the dripping of the coffee liquid from the gap between the basket 9 and the decanter 10, and since it is difficult to see, the basket 9 is pulled out during the extraction and the coffee liquid being extracted is removed. There were issues such as spills and burns.

本発明は上記課題を解決するもので、抽出時にお湯が
通る導水パイプの温度を検出する温度検出素子の受感特
性を向上してお湯の吐出開始から抽出完了までの間、精
度よく表示することを第1の目的としている。また、導
水パイプ中のお湯の通過をスムーズにして温度検出素子
の受感特性と抽出との相関をとりやすくし、抽出工程表
示の信頼性を向上することを第2の目的としている。
The present invention solves the above-described problems, and improves the sensitivity characteristics of a temperature detection element that detects the temperature of a water guide pipe through which hot water passes during extraction to accurately display the temperature from the start of hot water discharge to the completion of extraction. Is the first object. It is a second object of the present invention to make the passage of hot water in the water guide pipe smooth and make it easy to correlate the sensitivity with the temperature detection element and the extraction, thereby improving the reliability of the display of the extraction step.

課題を解決するための手段 本発明は上記第1の目的を達成するために、水を加熱
する発熱体と、加熱された湯を抽出装置へ供給する導水
パイプと、前記導水パイプ内に装着した温度検出素子
と、表示灯とを有し、前記温度検出素子が所定温度以上
を検出すると前記表示灯を点滅させるとともに、前記検
出素子はサーミスタで構成し、このサーミスタを熱収縮
チューブで覆うようにしたことを第1の課題解決手段と
している。
Means for Solving the Problems In order to achieve the first object, the present invention has a heating element for heating water, a water pipe for supplying heated water to the extraction device, and a pipe mounted inside the water pipe. A temperature detecting element, and an indicator light, and when the temperature detecting element detects a predetermined temperature or higher, the indicator light blinks, and the detecting element is formed of a thermistor, and the thermistor is covered with a heat-shrinkable tube. This is defined as a first problem solving means.

また上記第2の目的を達成するために、上記第1の課
題解決手段に加えて、サーミスタは導水パイプ内に位置
させかつ素子の長手方向を導水パイプの水路と平行に配
設したことを第2の課題解決手段としている。
In order to achieve the second object, in addition to the first means for solving the above-mentioned problems, the thermistor is located in the water pipe and the longitudinal direction of the element is arranged parallel to the water channel of the water pipe. This is the second problem solving means.

作用 本発明は上記した第1の課題解決手段により、コーヒ
ー抽出用のお湯が導水パイプを通過すると、温度検出素
子で温度上昇を検出し、温度検出回路を介して表示灯が
点灯し、お湯が導水パイプを通過し終わると温度検出素
子の温度が低下して表示灯は消灯し、抽出工程を表示で
きる。しかも、サーミスタと熱収縮チューブの間を極力
小さくでき、導水パイプ内をお湯が通過するときサーミ
スタの受感特性を向上でき、点灯および消灯特性をよく
できる。また、第2の課題解決手段により、通常サーミ
スタは前後のリード部はサーミスタの径より小さくなっ
ているので、導水パイプ内のお湯が通過するとき、熱収
縮チューブの小径部より順次大径部を通過することにな
り、お湯の通過がスムーズになる。
According to the first aspect of the present invention, when the hot water for coffee extraction passes through the water guide pipe, the temperature detecting element detects the temperature rise, the indicator light is turned on via the temperature detecting circuit, and the hot water is discharged. After passing through the water guide pipe, the temperature of the temperature detecting element decreases, the indicator light turns off, and the extraction process can be displayed. In addition, the space between the thermistor and the heat shrink tube can be made as small as possible, so that the sensitivity of the thermistor when hot water passes through the water guide pipe can be improved, and the lighting and extinguishing characteristics can be improved. Also, according to the second means for solving the problem, since the front and rear lead portions of the thermistor are usually smaller than the diameter of the thermistor, when the hot water in the water guide pipe passes, the large diameter portion is sequentially reduced from the small diameter portion of the heat shrink tube. It will pass, and the passage of hot water will be smooth.

実施例 以下、本発明の一実施例について第1図から第5図を
参照しながら説明する。なお、従来例と同じ構成のもの
は同一符号を付して説明を省略する。
Embodiment An embodiment of the present invention will be described below with reference to FIGS. The same components as those in the conventional example are denoted by the same reference numerals, and description thereof is omitted.

図に示すように、温度検出素子12は導水パイプ8内に
装着し、サーミスタ13とこのサーミスタ13の外部を熱収
縮チューブ14で覆い、加熱して熱収縮チューブ14を収縮
させて構成している。このため、サーミスタ13と熱収縮
チューブ14の間は間隔が小さくなっている。また通常、
サーミスタ13の前後のリード部はサーミスタ13の径より
小さくなっているので、サーミスタ13を熱収縮チューブ
14で覆うと、第2図のようにリード部の部分は熱収縮チ
ューブ14の外径も小さくなる。この温度検出素子12を第
3図のように導水パイプ8を長手方向と平行に配設し、
ゴムで形成したシール材15で取り付けている。温度検出
回路16は温度検出素子12の出力を受け、設定された基準
値と比較しA点の電圧が基準値より高い場合(温度検出
素子12の温度が高い場合)比較器17の出力は低となり、
表示灯18が点灯する。この表示灯18は機体の外部より確
認できる位置に配している。表示灯18の点灯は温度検出
素子12の温度が高い間つづき、温度検出素子12の温度が
低下すると、A点の電圧が基準値より低くなり、比較器
17の出力は高レベルとなり表示灯18は消灯する。実験に
よれば、温度検出素子12の温度が70℃位になったとき抽
出が完了するので、この温度のときの温度検出素子12の
出力を基準値としている。また抽出を開始したときにこ
の温度に温度検出素子12が到達するまでの時間は約4〜
5秒である。
As shown in the figure, the temperature detecting element 12 is mounted in the water pipe 8, the thermistor 13 and the outside of the thermistor 13 are covered with a heat-shrinkable tube 14, and the heat-shrinkable tube 14 is contracted by heating. . Therefore, the space between the thermistor 13 and the heat-shrinkable tube 14 is small. Also, usually
The lead portions before and after the thermistor 13 are smaller than the diameter of the thermistor 13, so the thermistor 13 is connected to a heat shrink tube.
When covered with 14, the outer diameter of the heat-shrinkable tube 14 is reduced in the lead portion as shown in FIG. As shown in FIG. 3, the temperature detecting element 12 is provided with the water guide pipe 8 arranged in parallel with the longitudinal direction.
It is attached with a sealing material 15 made of rubber. The temperature detection circuit 16 receives the output of the temperature detection element 12 and compares it with a set reference value. When the voltage at the point A is higher than the reference value (when the temperature of the temperature detection element 12 is high), the output of the comparator 17 is low. Becomes
The indicator light 18 turns on. This indicator light 18 is arranged at a position where it can be checked from outside the fuselage. The lighting of the indicator lamp 18 continues while the temperature of the temperature detecting element 12 is high. When the temperature of the temperature detecting element 12 decreases, the voltage at the point A becomes lower than the reference value and the comparator
The output of 17 becomes a high level, and the indicator lamp 18 goes out. According to the experiment, since the extraction is completed when the temperature of the temperature detecting element 12 reaches about 70 ° C., the output of the temperature detecting element 12 at this temperature is used as the reference value. The time required for the temperature detection element 12 to reach this temperature when the extraction is started is about 4 to
5 seconds.

上記構成において第6図を参照しながら動作を説明す
る。給水口11aより水を入れると、タンク5の第1の開
口部5aより給水パイプ6を介して容器1内に水が入る。
容器1の水位が上昇して導水パイプ8の上方迄給水され
ると、容器1内の水は導水パイプ8を通じて吐出口8bよ
り排水される。排水されて水位が下がり、給水口8aと同
水位になると、容器1内へは空気筒7により空気が同時
に入ってきているので、導水パイプ8内へも吸水口8aよ
り空気が入り、導水パイプ8内においてサイフォンの原
理が働かなくなり、排水が停止する。この状態で発熱体
2に電気を通して加熱すると、容器1の水は加熱され
る。水温が約95℃位迄上昇すると、温度調節器3の設定
温度になり、温度調節器3が動作して発熱体2への通電
を停止する。この後バスケット9にコーヒー粉をいれて
セットし、給水口11aより再び水を供給すると、容器1
内の加熱された湯が導水パイプ8を介して吐出口8bから
排出され、バスケット9内のコーヒー粉上に注がれ、デ
カンタ10へコーヒー液が滴下する。この抽出中温度検出
素子12はお湯の吐出が開始されると温度が上昇し、基準
値より高い温度になるので温度検出回路16において、表
示灯18へ通電され、表示灯18が点灯する。お湯の吐出が
終了すると、温度検出素子12は冷却が開始され徐々に温
度が低下する。バスケット9内でコーヒーの抽出が終了
するときの温度検出素子12の温度に前記基準値を設定し
ておくと、抽出終了時に温度検出素子12は温度検出回路
16を介して表示灯18への通電を停止する。したがって、
表示灯18によって抽出工程中の表示ができる。
The operation of the above configuration will be described with reference to FIG. When water is supplied from the water supply port 11a, the water enters the container 1 through the water supply pipe 6 from the first opening 5a of the tank 5.
When the water level of the container 1 rises and water is supplied above the water pipe 8, the water in the container 1 is drained from the discharge port 8 b through the water pipe 8. When the water is drained and the water level drops, and reaches the same water level as the water supply port 8a, the air enters the container 1 at the same time by the air cylinder 7, so that the air also enters the water guide pipe 8 from the water intake port 8a. In 8, the principle of siphon does not work and drainage stops. When electricity is passed through the heating element 2 in this state, the water in the container 1 is heated. When the water temperature rises to about 95 ° C., the temperature reaches the set temperature of the temperature controller 3, and the temperature controller 3 operates to stop energizing the heating element 2. Thereafter, the coffee powder is put into the basket 9 and set, and water is supplied again from the water supply port 11a.
The heated hot water inside is discharged from the discharge port 8b through the water guide pipe 8, is poured onto the coffee powder in the basket 9, and the coffee liquid drops onto the decanter 10. During the extraction, the temperature of the temperature detecting element 12 rises when the discharge of hot water is started and becomes higher than the reference value. Therefore, in the temperature detecting circuit 16, the indicator lamp 18 is energized and the indicator lamp 18 is turned on. When the discharge of hot water ends, the temperature detection element 12 starts cooling and the temperature gradually decreases. If the reference value is set to the temperature of the temperature detecting element 12 at the time when the coffee extraction in the basket 9 is completed, the temperature detecting element 12 is connected to the temperature detecting circuit at the end of the extraction.
The energization of the indicator lamp 18 via 16 is stopped. Therefore,
The display during the extraction process can be performed by the indicator lamp 18.

このように本発明の実施例の抽出機の抽出表示装置に
よれば、温度検出素子12はサーミスタ13で構成し、この
サーミスタ13を熱収縮チューブ14で覆っているので、サ
ーミスタ13を熱収縮チューブ14との間の間隔が小さくな
り、導水パイプ8内をお湯が通るとすぐにサーミスタ13
に熱が伝わり、導水パイプ8内をお湯が通過し終るとす
ぐに冷却が開始され、サーミスタ13の受感特性が向上
し、表示灯18の点灯および消灯特性がよくなる。また、
サーミスタ13は素子の長手方向を導水パイプ8の水路と
平行に配設しているので、導水パイプ8内をお湯が通過
するときには熱収縮チューブ14の小径部より順次大径部
に流れ、お湯の通過がスムーズになり、サーミスタ13の
受感特性は抽出と相関がとりやすくなる。
As described above, according to the extraction display device of the extractor according to the embodiment of the present invention, the temperature detecting element 12 is constituted by the thermistor 13, and the thermistor 13 is covered with the heat shrinkable tube 14. The distance between the thermistor 13 and the thermistor 13 is reduced as soon as hot water passes through the water pipe 8.
As soon as the hot water has passed through the water guide pipe 8, cooling is started, the sensitivity of the thermistor 13 is improved, and the on / off characteristics of the indicator lamp 18 are improved. Also,
Since the thermistor 13 is arranged with the longitudinal direction of the element parallel to the water channel of the water guide pipe 8, when hot water passes through the water guide pipe 8, it flows sequentially from the small diameter portion of the heat shrinkable tube 14 to the large diameter portion, The passage becomes smooth, and the sensitivity characteristic of the thermistor 13 is easily correlated with the extraction.

発明の効果 以上の実施例から明らかなように本発明によれば、導
水パイプ内に装着した温度検出素子と、表示灯とを有
し、前記温度検出素子が所定温度以上を検出すると前記
表示灯を点滅させる構成としているので、お湯の吐出開
始から抽出完了までの間、表示灯を点灯することによっ
て精度良く抽出状態を表示できるものである。また、温
度検出素子はサーミスタで構成しこのサーミスタを熱収
縮チューブで覆うようにしているので、サーミスタと熱
収縮チューブの間を極力小さくでき、サーミスタの受感
特性を向上でき、お湯の吐出開始から抽出完了までの
間、精度よく表示でき、また、サーミスタを導水パイプ
と平行に配して設けているので、導水パイプ内をお湯が
通過するときには、熱収縮チューブの小径部より順次サ
ーミスタの大径部に流れ、お湯の通過がスムーズにな
り、サーミスタの受感特性はコーヒーの抽出と相関がと
りやすくなり、信頼性の高い抽出工程の表示ができる。
したがって、お湯の吐出開始からコーヒーの抽出完了ま
での間、表示灯を点灯させることができ外部からも目で
確認ができるので、誤ってバスケットやデカンタを引き
出すこともなく安全で、しかも簡単な構成で安価に供給
できるなど実用的価値大なるものである。
Advantageous Effects of the Invention As is clear from the above embodiments, according to the present invention, a temperature detecting element mounted in a water guide pipe, and an indicator light, the indicator light when the temperature detecting element detects a predetermined temperature or more. Is blinked, so that the extraction state can be accurately displayed by turning on the indicator lamp from the start of hot water discharge to the completion of extraction. In addition, since the temperature detecting element is composed of a thermistor and the thermistor is covered with a heat shrinkable tube, the space between the thermistor and the heat shrinkable tube can be made as small as possible, and the sensitivity of the thermistor can be improved. Until the extraction is completed, it can be displayed accurately and the thermistor is arranged in parallel with the water pipe, so when hot water passes through the water pipe, the large diameter of the thermistor is sequentially reduced from the small diameter part of the heat shrink tube. And the passage of hot water becomes smoother, the perception characteristics of the thermistor become easier to correlate with coffee extraction, and a highly reliable extraction process can be displayed.
Therefore, the indicator lamp can be turned on from the start of hot water discharge to the completion of coffee extraction and can be checked visually from the outside, so there is no need to pull out the basket or decanter by mistake. It can be supplied at low cost and is of great practical value.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の一実施例の抽出工程表示装置を具備し
た抽出機の断面図、第2図は同抽出工程表示装置の温度
検出素子の拡大断面図、第3図は同温度検出素子の取付
状態の拡大上面図、第4図は同抽出工程表示装置の電気
回路図、第5図は同抽出工程表示装置を具備した抽出機
の斜視図、第6図は同抽出工程表示装置の温度検出素子
の温度変化特性図、第7図は従来の抽出機の断面図であ
る。 2……発熱体、8……導水パイプ、12……温度検出素
子、13……サーミスタ、14……熱収縮チューブ、16……
温度検出回路、18……表示灯。
FIG. 1 is a cross-sectional view of an extractor provided with an extraction process display device according to one embodiment of the present invention, FIG. 2 is an enlarged cross-sectional view of a temperature detection element of the extraction process display device, and FIG. FIG. 4 is an electric circuit diagram of the extraction process display device, FIG. 5 is a perspective view of an extractor provided with the extraction process display device, and FIG. 6 is a view of the extraction process display device. FIG. 7 is a sectional view of a conventional extractor, showing a temperature change characteristic of the temperature detecting element. 2 ... heating element, 8 ... water pipe, 12 ... temperature detecting element, 13 ... thermistor, 14 ... heat shrinkable tube, 16 ...
Temperature detection circuit, 18 Indicator lamp.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】水を加熱する発熱体と、加熱された湯を抽
出装置へ供給する導水パイプと、前記導水パイプ内に装
着した温度検出素子と、表示灯とを有し、前記温度検出
素子が所定温度以上を検出すると前記表示灯を点滅させ
るとともに、前記検出素子はサーミスタで構成し、この
サーミスタを熱収縮チューブで覆うようにしてなる抽出
機。
1. A heating element for heating water, a water pipe for supplying heated water to an extraction device, a temperature detecting element mounted in the water pipe, and an indicator light, wherein the temperature detecting element is provided. An extractor that detects the temperature of not less than a predetermined temperature, blinks the indicator light, configures the detection element with a thermistor, and covers the thermistor with a heat-shrinkable tube.
【請求項2】サーミスタの長手方向を導水パイプの水路
と平行に配設してなる請求項1記載の抽出機。
2. The extractor according to claim 1, wherein a longitudinal direction of the thermistor is arranged in parallel with a water channel of the water guide pipe.
JP2101360A 1990-04-17 1990-04-17 Extractor Expired - Fee Related JP2884689B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2101360A JP2884689B2 (en) 1990-04-17 1990-04-17 Extractor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2101360A JP2884689B2 (en) 1990-04-17 1990-04-17 Extractor

Publications (2)

Publication Number Publication Date
JPH03297423A JPH03297423A (en) 1991-12-27
JP2884689B2 true JP2884689B2 (en) 1999-04-19

Family

ID=14298669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2101360A Expired - Fee Related JP2884689B2 (en) 1990-04-17 1990-04-17 Extractor

Country Status (1)

Country Link
JP (1) JP2884689B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4455129B2 (en) 2004-04-06 2010-04-21 キヤノン株式会社 Aberration measuring method and projection exposure apparatus using the same
JP5412528B2 (en) 2008-12-30 2014-02-12 エーエスエムエル ネザーランズ ビー.ブイ. Inspection method, inspection system, substrate, and mask

Also Published As

Publication number Publication date
JPH03297423A (en) 1991-12-27

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