JP2870794B2 - Vertical heat treatment furnace equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (1) Object of the Invention [Industrial Application Field] The present invention relates to a vertical heat treatment furnace apparatus, and in particular, to a plurality of vertical heat treatment furnaces via a common elevating device. The present invention relates to a vertical heat treatment furnace apparatus which supplies a heat treatment member and takes out the heat treatment target members from a plurality of vertical heat treatment furnaces after the heat treatment.

[Prior art] Conventionally, as this type of vertical heat treatment furnace apparatus, a large number of heat treatment members to be heat-treated are simultaneously supplied to a single large vertical heat treatment furnace via an elevating device, and after the heat treatment, What was taken out at the same time was proposed.

[Problems to be Solved] However, in the conventional vertical heat treatment furnace apparatus, since the vertical heat treatment furnace is large and single, (i) a large number of heat-treated members (that is, semiconductor wafers) can be produced with a small number of products. Although suitable for batch heat treatment, it has drawbacks that it is not suitable for heat treatment of a small number of members to be heat-treated (ie, semiconductor wafers) in many kinds at the same time, and (ii) heat treatment efficiency (for example, power efficiency and space efficiency) ) Had the disadvantage of worsening.

In order to eliminate these drawbacks, the present invention provides a plurality of vertical heat treatment furnaces by supplying a member to be heat-treated by a common elevating device, and after the heat treatment, heat-treating the members from the plurality of vertical heat treatment furnaces. It is intended to provide a vertical heat treatment furnace apparatus taken out.

(2) Configuration of the Invention [Means for Solving the Problems] The means for solving the problems provided by the present invention are as follows: (a) a plurality of vertical heat treatment furnaces arranged in multiple stages along the vertical direction in the housing; (B) being disposed with respect to the housing, transferring the heat-treated member between a transfer position located outside the housing and other transfer positions located in the vicinity of the plurality of vertical heat treatment furnaces, respectively. (C) a plurality of transfer devices for transferring a member to be heat-treated with the lift device at a transfer position located near each of the plurality of vertical heat treatment furnaces; A) a plurality of insertion / removal for transferring the member to be heat-treated between a plurality of transfer positions immediately below the plurality of vertical heat treatment furnaces, and inserting / removing the member to be heat-treated into / from the plurality of vertical heat treatment furnaces; A vertical heat treatment apparatus comprising Furnace equipment ”.

[Operation] Since the vertical heat treatment furnace apparatus according to the present invention has the above-described configuration, (i) an operation to ensure that a variety of members to be heat-treated are heat-treated in small numbers at a time, and (ii) heat treatment efficiency (For example, power efficiency and space efficiency), and (iii) it facilitates repair work.

EXAMPLES Next, the vertical heat treatment furnace apparatus according to the present invention will be specifically described with reference to preferred examples. However, the embodiments described below are described for facilitating or facilitating the understanding of the present invention, but not for limiting the present invention. In other words, each member disclosed in the embodiments described below includes all design changes and equivalent replacements that fall within the spirit and scope of the present invention.

Figure 1 (a) is a partial sectional view taken along a I _a -I _a line indicating the first operating state of an embodiment of a vertical heat-treating furnace according to the present invention, the lifting device 20 is to be This shows a state where the heat treatment member M is held at the transfer position located near the vertical heat treatment furnaces 10A and 10C .

FIG. 1B is a cross-sectional view taken along the line _{Ib- Ib,} and shows a distal end portion 22b of the support arm 22 included in the lifting device 20.
Tip 32b of support arm 32 included in transfer device 30 and tip 42b of support arm 42 included in insertion / extraction device 40
3 shows a positional relationship between.

Supporting the second view (a) is a partial sectional view taken along the II _a -II _a line indicating the second operating state of FIG. 1 (a) embodiment, which is inclusions into the transfer device 30 This shows a state in which the distal end portion 32b of the arm 32 is stopped immediately below the distal end portion 22b of the support arm 22 included in the elevating device 20 .

Figure 2 (b) is the II _b -II a _b line cross-sectional view taken along the distal end portion 22b of the support arm 22 which is inclusions to the lifting device 20
Tip 32b of support arm 32 included in transfer device 30 and tip 42b of support arm 42 included in insertion / extraction device 40
3 shows a positional relationship between.

Figure 3 (a) is a third partial section view taken along III _a -III _a line indicating the operating state of FIG. 1 (a) embodiment, the support is inclusions into the transfer device 30 This shows a state in which the heat-treated member M is about to be delivered between the distal end portion 32b of the arm 32 and the distal end portion 22b of the support arm 22 included in the elevating device 20 .

Figure 3 (b) is the III _b -III A _b line cross-sectional view taken along, the support arm 22 which is inclusions to the lifting device 20 the distal end portion 22
b and the tip 32b of the support arm 32 included in the transfer device 30 and the tip 42b of the support arm 42 included in the insertion / extraction device 40
3 shows a positional relationship between.

Supporting FIG. 4 (a) is a partial sectional view taken along the IV _a -IV _a line showing a fourth operation state of FIG. 1 (a) embodiment, which is inclusions into the transfer device 30 The tip 32b of the arm 32 slightly rises after receiving the member to be heat-treated M from the tip 22b of the support arm 22 included in the lifting device 20 , or the transfer device.
30 the tip portion 32b is lifting device of the support arm 32 which is inclusions 20
3 shows a state in which the member to be processed is positioned slightly above and stopped prior to the transfer of the member to be processed M to the tip end portion 22b of the support arm 22 included in FIG.

Figure 4 (b) is the IV _b -IV a _b line cross-sectional view taken along the distal end portion 22b of the support arm 22 which is inclusions to the lifting device 20
Tip 32b of support arm 32 included in transfer device 30 and tip 42b of support arm 42 included in insertion / extraction device 40
3 shows a positional relationship between.

Supporting FIG. 5 (a) is a partial sectional view taken along the V _a -V _a line showing a fifth operation state of FIG. 1 (a) embodiment, which is inclusions into the transfer device 30 This shows a state where the arm 32 is stopped immediately below the vertical heat treatment furnace 10A while holding the member M to be heat treated.

FIG. 5 (b) is a cross-sectional view taken along the line _Vb - _Vb, and shows the distal end portion 22b of the support arm 22 included in the elevating device 20.
Tip 32b of support arm 32 included in transfer device 30 and tip 42b of support arm 42 included in insertion / extraction device 40
3 shows a positional relationship between.

Supporting FIG. 6 (a) is a sixth partial sectional view taken along the VI _a -VI _a line indicating the operating state of FIG. 1 (a) embodiment, which is inclusions into the transfer device 30 A state is shown in which the heat-treated member M is about to be delivered between the distal end portion 32b of the support arm 32 of the arm 32 and the distal end portion 42b of the support arm 42 included in the insertion / extraction device 40 .

Figure 6 (b) is the VI _b -VI a _b line cross-sectional view taken along the distal end portion 22b of the support arm 22 which is inclusions to the lifting device 20
Tip 32b of support arm 32 included in transfer device 30 and tip 42b of support arm 42 included in insertion / extraction device 40
3 shows a positional relationship between.

Supporting FIG. 7 (a) is a seventh partial sectional view taken along the VII _a -VII _a line indicating the operating state of FIG. 1 (a) embodiment, which is inclusions in the insertion and take-out apparatus 40 The arm 42 is a member to be processed M
Shows a state in which you are trying to drop from an elevated or vertical heat treatment furnace 10A toward the vertical heat treatment furnace 10A while holding the.

Figure 7 (b) is the VII _b -VII a _b line cross-sectional view taken along, the support arm 22 which is inclusions to the lifting device 20 the distal end portion 22
b and the tip 32b of the support arm 32 included in the transfer device 30 and the tip 42b of the support arm 42 included in the insertion / extraction device 40
3 shows a positional relationship between.

First, the configuration of an embodiment of a vertical heat treatment furnace apparatus according to the present invention will be described in detail with reference to FIGS. 1 (a) to 7 (b).

Reference numeral 10 denotes a vertical heat treatment furnace apparatus according to the present invention, in which a plurality of (here, four; hereinafter, this case is described) vertical heat treatment furnaces 10A , ..., 10D are disposed in a housing 11. .

Reference numeral 20 denotes a transfer position (not shown) disposed outside the housing 11 with respect to the housing 11, and transfer positions located in the vicinity of the plurality of vertical heat treatment furnaces 10A to 10D. A lifting and lowering device for transporting the heat-treated member M between the housing 11 and the through-hole 1 formed in the base 11A of the housing 11.
A drive shaft 21 disposed to extend vertically through a through hole 11b formed in the intermediate partition 11B of the housing 11 and a base end 22a is attached to the drive shaft 21. And a support arm 22 which is vertically moved by the drive shaft 21 in a state where the member M to be heat-treated is placed on the portion 22b.

Numeral 30 denotes a plurality of transfer devices provided in the housing 11 corresponding to the plurality of vertical heat treatment furnaces 10A , ..., 10D , respectively, which are arranged in parallel with the drive shaft 21 of the elevating device 20. The provided drive shaft 31 and a support arm 32 to which a base end portion 32a is attached to the drive shaft 31 and a distal end portion 32b transfers the heat-treated member M between the distal end portion 22b and the distal end portion 22b of the support arm 22. Each has it.

Reference numeral 40 denotes a plurality of insertion / extraction devices disposed in the housing 11 corresponding to the plurality of vertical heat treatment furnaces 10A , ..., 10D , which are disposed in parallel with the drive shaft 21 of the elevating device 20. The drive shaft 41 and the base end 42a are attached to the drive shaft 41, and the distal end 42b transfers the member to be heat-treated between the distal end 32b of the support arm 32 and the vertical heat treatment furnaces 10A and 10A , respectively.
, And a support arm 42 to be inserted into and taken out from 10D .

Further, the operation of one embodiment of the vertical heat treatment furnace apparatus according to the present invention will be described in detail with reference to FIGS. 1 (a) to 7 (b).

(Insertion into the vertical heat treatment furnaces 10A , ..., 10D ) At the transfer position located outside the housing 11, the support arm 22 included in the lifting device 20 by appropriate transfer means.
When the heat-treated member M is placed on the tip 22b of
Appropriate driving source support arm 22 via a drive shaft 21 (not shown) allowed to rise as indicated by arrow A _1. The support arm 22 is provided at a transfer position (for example, the support arm 42 of the insertion / extraction device 40 ) located in the vicinity of each of the plurality of vertical heat treatment furnaces 10A to 10D (here, the vertical heat treatment furnace 10A will be described as an example). When it reaches the same height position), it is stopped by the drive shaft 21 (see FIG. 1A).

When the support arm 22 reaches a predetermined transfer position, the support arm 32 is rotated in the arrow B ₁ direction by the drive shaft 31 of the transfer device 30 (see FIG. 1 (b)). The support arm 32 is stopped when the distal end portion 32b thereof reaches just below the distal end portion 22b of the support arm 22 (see FIGS. 2A and 2B).

Then, the support arm 32 which is inclusions into the transfer device 30 is raised in the arrow B ₂ direction by the drive shaft 31 (FIG. 2 (a) see). When the support arm 32 reaches the same height position as the support arm 22, the support arm 2
The member to be heat-treated M is received from the second tip 22b (see FIGS. 3 (a) and 3 (b)).

After that, the support arm 32 is further raised in the arrow B ₃ direction (see FIG. 3 (a)). When the support arm 32 reaches a predetermined height position (that is, a position where the support arm 32 does not interfere with the support arm 22 during rotation), the support arm 32 is stopped (see FIGS. 4A and 4B).

Support arm 32 is caused to rotate in the arrow B ₄ direction by the drive shaft 31 (see FIG. 4 (b)). The support arm 32
When the distal end 32b reaches just above the distal end 42b of the support arm 42 included in the insertion / extraction device 40 , it is stopped (see FIGS. 5 (a) and 5 (b)). Then support arm
32 is caused to drop in the arrow B ₅ direction (FIG. 5 (a) refer).

When the support arm 32 reaches the same height position as the support arm 42, the insertion / extraction device 40 from the distal end 32b of the support arm 32.
The member to be heat-treated M is delivered to the distal end portion 42b of the support arm 42 included in the above (see FIGS. 6 (a) and 6 (b)).

Support arm 32 is caused to drop further in the arrow B ₆ direction (see FIG. 6 (a)), is stopped at a position that does not interfere with the support arm 42 (FIG. 7 (a) (b) refer).

The insertion / extraction device 40 is moved by the drive device 41 in the direction of arrow C to move the support arm 42 in the vertical heat treatment furnace.
Insert the member to be heat treated M into 10A (FIG. 7 (a)
(B)).

When the heat-treated member M is inserted into the vertical heat treatment furnace 10A ,
An appropriate heat treatment is performed in a well-known manner.

( Removal from vertical heat treatment furnaces 10A , ..., 10D ) Vertical heat treatment furnaces 10A , ..., 10D (here, vertical heat treatment furnace 10
When the heat-treated member M is subjected to an appropriate heat treatment in ( A will be described as an example), the insertion / extraction device 40 causes the drive shaft 41 to lower the support arm 42 in the direction of arrow D. When the support arm 42 descends to a predetermined position (ie, the initial position), it is stopped (FIG. 7A).
reference). When the support arm 42 of the insertion and take-out apparatus 40 is caused to stop, the support arm 32 of the transfer device 30 is raised in the arrow E ₁ direction by the drive shaft 31 (FIG. 7 (a) (b) refer).

When the support arm 32 ascends to the same height as the support arm 42, it receives the heat-treated member M from the distal end 42b of the support arm 42 (see FIGS. 6A and 6B). Support arm 32 is further raised toward the arrow E ₂ direction to a predetermined height position (i.e. a position that does not interfere with the support arm 42 upon rotation) (FIG. 6 (a) (b) and the fifth
Figure (a) (b) see) later, it was allowed to rotate in the arrow E ₃ backward reference (FIG. 5 (b)).

The support arm 32 is stopped when its distal end 32b reaches a position immediately above the distal end 22b of the support arm 22 included in the elevating device 20 (see FIGS. 4 (a) and 4 (b)).
Support arm 32 is caused to drop in the arrow E ₄ direction further by the drive shaft 31 (see FIG. 4 (a)). Vertical heat treatment furnace 10A support arm 22 and support arm 32 to the same height position which is allowed to stop the mounting position, located in the vicinity of is made to drop after that is raised in advance by the drive shaft 21 for example in direction of arrow F ₁ Then, the member to be processed M is transferred from the distal end portion 32b of the support arm 32 to the distal end portion 22b of the support arm 22 (see FIGS. 7A and 3A and 3B).

Thereafter the support arm 32 is caused to drop in the arrow E ₅ direction (FIG. 3 (a) and FIG. 2 (a) see), is caused to rotate in the arrow E ₆ direction to return to the initial position (first 2 (b) and FIGS. 1 (a) and 1 (b)).

The elevating device 20 moves the support arm 22 by the drive shaft 21 with an arrow.
F ₂ direction allowed drop, taking out the heat treatment member M toward the transfer position, located outside the housing 11.

(3) Effects of the Invention As is clear from the above description, the vertical heat treatment furnace apparatus according to the present invention has the following effects: (i) it is possible to ensure that heat treatment of a variety of members to be heat-treated is carried out in small numbers simultaneously; ii) It has the effect of improving heat treatment efficiency (eg, power efficiency and space efficiency), and (iii) has the effect of facilitating repair work.

[Brief description of the drawings]

Figure 1 (a) is a partial sectional view taken along a I _a -I _a line indicating the first operating state of an embodiment of a vertical heat-treating furnace according to the present invention, FIG. 1 (b) is the same I FIG. 2 (a) is a sectional view taken along the line _{b- Ib,} and FIG. 2 (a) shows a second operation state of the embodiment of FIG. 1 (a).
_a -II _a line partial section along the view, the second view (b) is the II _b -I
I _b line cross-sectional view taken along a third diagram (a) is a partial sectional view taken along the III _a -III _a line indicating the third operating state of FIG. 1 (a) embodiment, FIG. 3 (b ) is a sectional view taken along the III _b -III _b line,
Figure 4 (a) is a partial sectional view taken along the IV _a -IV _a line showing a fourth operation state of FIG. 1 (a) embodiment, FIG. 4 (b) is the same
IV _b -IV _b line cross-section along the view, FIG. 5 (a) is a partial sectional view taken along the V _a -V _a line showing a fifth operation state of FIG. 1 (a) embodiment, the 5 Figure (b) is a sectional view taken along the V _b -V _b line, FIG. 6 (a) is taken along VI _a -VI _a line showing a sixth operation state of FIG. 1 (a) example Partial sectional view, FIG. 6 (b)
Sectional view, FIG. 7 (a) is a partial sectional view taken along the VII _a -VII _a line showing a seventh operation state of FIG. 1 (a) embodiment along the VI _b -VI _b line, Figure 7 (b) is a sectional view along the VII _b -VII _b line. 10 Vertical heat treatment furnace device 10A , ..., 10D Vertical heat treatment furnace 11 Housing 11A Base 11a Through hole 11B Intermediate partition wall 11b Through hole 20 Lifting device 21 Drive shaft 22 ... Support arm 22a ... Base end 22b ... Top end 30 ... Transfer device 31 ... Drive shaft 32 ... Support arm 32a ... Base end 32b ... Top end 40 ... Insertion and removal Device 41: Drive shaft 42: Support arm 42a: Base end 42b: Tip M: Member to be heat treated

Continuation of the front page (58) Field surveyed (Int.Cl. ⁶ , DB name) C21D 1/00 F27B 1/02 H01L 21/22

Claims (1)

(57) [Claims] (A) a plurality of vertical heat treatment furnaces arranged in multiple stages along a vertical direction in a housing; and (b) a transfer heat treatment furnace which is arranged with respect to the housing and located outside the housing. A lifting / lowering device for transporting a member to be heat-treated between the position and another transfer position located near each of the plurality of vertical heat treatment furnaces; and (c) located near each of the plurality of vertical heat treatment furnaces. At the transfer position, a plurality of transfer devices for transferring the member to be processed to and from the lifting / lowering device, respectively; and (d) a plurality of transfer devices directly below the plurality of vertical heat treatment furnaces and between the plurality of transfer positions. A vertical heat treatment furnace device comprising: a plurality of insertion / extraction devices for delivering a heat treatment member and inserting / extracting a heat treatment target member with respect to each of the plurality of vertical heat treatment furnaces.