JP2869332B2 - Dielectric filter and method of manufacturing the same - Google Patents

Dielectric filter and method of manufacturing the same

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Publication number
JP2869332B2
JP2869332B2 JP7412894A JP7412894A JP2869332B2 JP 2869332 B2 JP2869332 B2 JP 2869332B2 JP 7412894 A JP7412894 A JP 7412894A JP 7412894 A JP7412894 A JP 7412894A JP 2869332 B2 JP2869332 B2 JP 2869332B2
Authority
JP
Japan
Prior art keywords
dielectric substrate
dielectric
conductor
groove
concave groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7412894A
Other languages
Japanese (ja)
Other versions
JPH07263913A (en
Inventor
明司 宮下
智 三好
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toko Inc
Original Assignee
Toko Inc
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Filing date
Publication date
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Priority to JP7412894A priority Critical patent/JP2869332B2/en
Publication of JPH07263913A publication Critical patent/JPH07263913A/en
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Publication of JP2869332B2 publication Critical patent/JP2869332B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、誘電体フィルタとその
製造方法に係るもので、小型で量産性に優れた、誘電体
基板を貼り合わせる構造の誘電体フィルタとその製造方
法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric filter and a method of manufacturing the same, and more particularly, to a dielectric filter having a small size and excellent mass productivity, and having a structure in which a dielectric substrate is bonded, and a method of manufacturing the same. .

【0002】[0002]

【従来の技術】高周波用のフィルタとして各種誘電体フ
ィルタが用いられている。貫通孔を有する誘電体に内導
体、外導体および短絡導体を形成した同軸型の誘電体共
振器を用いたものが一般的であるが、小型化のためにス
トリップラインを用いたものや積層LCタイプのもの等
も用いられている。
2. Description of the Related Art Various dielectric filters have been used as high frequency filters. In general, a coaxial dielectric resonator in which an inner conductor, an outer conductor, and a short-circuit conductor are formed in a dielectric having a through hole is used. Types are also used.

【0003】同軸型の誘電体共振器は成型上の問題等か
ら2mm角程度が限界となっている。また、積層LCフィ
ルタはQが小さく、所望の特性を得ることが難しい。そ
こで、発明者は小型化を実現するために、特願平4-1860
99において二枚の誘電体基板を貼り合わせる構造の誘電
体フィルタを提案した。これは、基板の一表面に複数の
凹溝を設けた誘電体基板と平板の誘電体基板を貼り合わ
せ、内導体、外導体および短絡導体を形成して、複数の
誘電体共振器を具えた誘電体フィルタとするものであ
る。
The limit of a coaxial dielectric resonator is about 2 mm square due to molding problems and the like. Further, the laminated LC filter has a small Q, and it is difficult to obtain desired characteristics. Therefore, the inventor has made Japanese Patent Application No. 4-1860 to realize miniaturization.
In 99, we proposed a dielectric filter with a structure in which two dielectric substrates are bonded. This was provided with a plurality of dielectric resonators by bonding a dielectric substrate having a plurality of grooves on one surface of the substrate and a flat dielectric substrate to form an inner conductor, an outer conductor, and a short-circuit conductor. This is a dielectric filter.

【0004】[0004]

【発明が解決しようとする課題】上記のような誘電体フ
ィルタにおいては、二枚の誘電体基板をガラス等で接着
する際に接着剤が凹溝内に流出し、並列した凹溝の対向
する壁面に付着してしまう。その接着剤が付着した壁面
の表面に内導体が形成されるので、内導体の間隔に誤差
を生じて共振器間の結合を安定させることが難しくな
る。
In the above-described dielectric filter, when the two dielectric substrates are bonded with glass or the like, the adhesive flows out into the concave grooves and the parallel concave grooves face each other. It will adhere to the wall. Since the inner conductor is formed on the surface of the wall surface to which the adhesive has adhered, an error occurs in the interval between the inner conductors, and it becomes difficult to stabilize the coupling between the resonators.

【0005】また、二枚の誘電体板を接着して切断する
製造方法が可能となるが、凹溝に平行な方向および直角
な方向に共振器が並ぶ平面でしか切断できないので、量
産性の面では十分とは言えなかった。
[0005] In addition, a manufacturing method in which two dielectric plates are bonded and cut can be performed. However, since cutting can be performed only on a plane in which resonators are arranged in a direction parallel to the concave groove and in a direction perpendicular to the groove, mass productivity is reduced. It was not enough in terms of terms.

【0006】本発明は、このような課題を解決して、小
型でしかも安定した結合の得られる、量産に適した誘電
体フィルタを提供するものである。
SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and provides a dielectric filter suitable for mass production, which can obtain a small and stable coupling.

【0007】[0007]

【課題を解決するための手段】本発明は、凹溝を具えた
誘電体基板と二枚の平板の誘電体基板を組み合わせて接
着する構造および方法を採用することによって、上記の
課題を解決するものである。
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems by employing a structure and a method of bonding a dielectric substrate having a groove and two flat dielectric substrates in combination. Things.

【0008】すなわち、一表面とその反対側の表面に平
行に伸びる凹溝を具えた第一の誘電体基板の凹溝ある表
面に第二の誘電体基板が接着されるように、第一の誘電
体基板と平板の第二の誘電体基板とを交互に配置し、凹
溝内と第二の誘電体基板の凹溝に対向する表面に内導体
が形成され、第一の誘電体基板と第二の誘電体基板の凹
溝の伸びる方向に平行な外周面に外導体が形成され、凹
溝が開口する端面の一方に短絡導体を具えたことに特徴
を有するものである。
That is, the first dielectric substrate is bonded to the grooved surface of the first dielectric substrate having a groove extending in parallel with one surface and the opposite surface, so that the first dielectric substrate is bonded to the first dielectric substrate. The dielectric substrate and the flat second dielectric substrate are alternately arranged, and an inner conductor is formed in the concave groove and on the surface of the second dielectric substrate facing the concave groove, and the first dielectric substrate and An outer conductor is formed on an outer peripheral surface of the second dielectric substrate parallel to a direction in which the concave groove extends, and a short-circuit conductor is provided on one of the end faces where the concave groove opens.

【0009】また、一表面とその反対側の表面に平行に
伸びる凹溝を具えた第一の誘電体基板と平板の第二の誘
電体基板とを交互に、第一の誘電体基板の凹溝のある表
面にそれぞれ平板の第二の誘電体基板が位置するように
して接着し、凹溝内と第二の誘電体基板の凹溝に対向す
る表面に導体膜を形成して内導体を形成し、第一の誘電
体基板と第二の誘電体基板の凹溝の伸びる方向に平行な
外周面に導体膜を形成して外導体を形成し、凹溝が開口
する端面の一方に導体膜を形成して短絡導体を形成する
ことに特徴を有するものである。
Further, the first dielectric substrate having a concave groove extending parallel to one surface and the opposite surface and the second dielectric substrate of a flat plate are alternately formed on the first dielectric substrate. The flat plate second dielectric substrate is bonded to the grooved surface so that the inner conductor is formed by forming a conductive film in the groove and on the surface of the second dielectric substrate facing the groove. Forming a conductor film on an outer peripheral surface parallel to a direction in which the concave groove of the first dielectric substrate and the second dielectric substrate extends to form an outer conductor, and forming a conductor on one of the end faces where the concave groove is opened It is characterized in that a short-circuit conductor is formed by forming a film.

【0010】[0010]

【作用】隣接する共振器間で、二種類の誘電体基板の接
着部分同士が対向することが少なくなるので、安定した
結合が得られるとともに、従来よりも面積で30%程度、
体積で50%程度と、小型化が可能となる。また、一枚の
基板に多数の素子を得るための複数の凹溝を形成して接
着し、切断することによって大量生産も可能となる。
[Function] Since the bonded portions of the two types of dielectric substrates are less likely to face each other between adjacent resonators, stable coupling can be obtained, and the area is about 30% smaller than in the past.
The size can be reduced to about 50% by volume. In addition, mass production is possible by forming a plurality of concave grooves for obtaining a large number of elements on a single substrate, bonding the grooves, and cutting the grooves.

【0011】[0011]

【実施例】以下、図面を参照して、本発明の実施例につ
いて説明する。
Embodiments of the present invention will be described below with reference to the drawings.

【0012】図1は、本発明の実施例を示す斜視図であ
る。誘電体フィルタ10は五枚の誘電体基板を接着して所
定の導体膜を形成したものである。対向する二面に凹溝
の形成された二枚の誘電体基板11、12が用いられ、凹溝
の形成された面には平板の三枚の誘電体基板13〜15がそ
れぞれ接着されて、凹溝を有する誘電体基板の両端と中
間に平板の誘電体基板が配置されて一体化された誘電体
ブロックが構成される。
FIG. 1 is a perspective view showing an embodiment of the present invention. The dielectric filter 10 is formed by bonding five dielectric substrates to form a predetermined conductor film. Two dielectric substrates 11 and 12 having concave grooves formed on two opposing surfaces are used, and three flat dielectric substrates 13 to 15 are adhered to the surfaces on which the concave grooves are formed, respectively. A flat dielectric substrate is arranged between both ends and a middle of a dielectric substrate having a concave groove to constitute an integrated dielectric block.

【0013】凹溝の部分にできる貫通孔16〜19の表面に
は導体膜が形成され、内導体となる。また、凹溝の伸び
る方向に平行な外周面にも導体膜が形成されて外導体と
される。貫通孔16〜19が開口する面の一方には(図示し
ないが)導体膜が形成されて短絡導体が形成され、反対
側の端面は誘電体が露出する開放端面とされる。通常、
外導体の一部が除去されてその部分に端子電極20が形成
される。
A conductor film is formed on the surface of the through holes 16 to 19 formed in the concave groove portion, and becomes an inner conductor. In addition, a conductor film is also formed on the outer peripheral surface parallel to the direction in which the groove extends, and is used as an outer conductor. A conductor film (not shown) is formed on one of the surfaces where the through holes 16 to 19 are opened to form a short-circuit conductor, and the opposite end surface is an open end surface from which the dielectric is exposed. Normal,
A part of the outer conductor is removed, and the terminal electrode 20 is formed in that part.

【0014】図2は、本発明による誘電体フィルタの組
立前の斜視図である、凹溝を具えた誘電体基板21、22
と、その両端に二枚の誘電体基板23、25を貼り合わせ、
誘電体基板21、22の間には平板の誘電体基板24を配置す
ることは前記の例と同様である。
FIG. 2 is a perspective view before assembling a dielectric filter according to the present invention. The dielectric substrates 21 and 22 having concave grooves are shown in FIG.
And two dielectric substrates 23 and 25 are attached to both ends thereof,
Placing a flat dielectric substrate 24 between the dielectric substrates 21 and 22 is the same as in the above-described example.

【0015】また、平板の誘電体基板23、25の接着面に
入出力用の導体膜31を形成しておくことができる。この
導体膜31は、インピーダンス整合点で内導体と接続する
ように形成しても、内導体との間に容量的に結合するよ
うな構造としてもよい。この導体膜31は、誘電体基板2
3、25の端面まで引出し、組み立て後に図1で示した端
子電極20と接続するとよい。
An input / output conductor film 31 can be formed on the bonding surfaces of the flat dielectric substrates 23 and 25. The conductor film 31 may be formed so as to be connected to the inner conductor at the impedance matching point, or may be configured to be capacitively coupled to the inner conductor. The conductor film 31 is formed on the dielectric substrate 2
It is preferable to pull out to the end surfaces of 3 and 25, and after assembly, connect to the terminal electrode 20 shown in FIG.

【0016】なお、凹溝の位置を精度よく形成できれば
共振器間の結合の調整は不要となる。第二の誘電体基板
の対向する面に設ける凹溝の一方を他方の凹溝よりも幅
広く形成し、他方の凹溝が位置ずれを生じても対向面で
この幅以内に位置するようにする。このように、凹溝の
反対側の面の凹溝との対向する面の幅を変えておくこと
によって、加工精度上の問題によって生じる位置ずれ、
すなわち結合状態のばらつきを補正することができる。
It should be noted that if the positions of the grooves can be accurately formed, it is not necessary to adjust the coupling between the resonators. One of the grooves provided on the opposing surface of the second dielectric substrate is formed wider than the other groove so that the other groove is located within this width on the opposing surface even if the other groove is misaligned. . In this way, by changing the width of the surface opposite to the concave groove on the surface opposite to the concave groove, misalignment caused by a problem in processing accuracy,
That is, it is possible to correct the variation in the coupling state.

【0017】図3は、本発明の製造方法を示す斜視図で
ある。複数の平行な凹溝を所定の間隔で配置した誘電体
基板51、52の凹溝が水平方向に配置され、垂直となった
凹溝のある表面にそれぞれ平板の誘電体基板53〜55を接
着した後に、凹溝の間の部分で接着面に垂直な方向に切
断することによって、本発明による誘電体フィルタを製
造するものである。この方法によれば、接着されたブロ
ックから多量の誘電体フィルタ用の誘電体ブロックを切
り出すことができる。接着前に、前記のような入出力用
の導体膜を形成しておくとよい。
FIG. 3 is a perspective view showing the manufacturing method of the present invention. The grooves of the dielectric substrates 51 and 52 in which a plurality of parallel grooves are arranged at predetermined intervals are horizontally arranged, and the flat dielectric substrates 53 to 55 are respectively adhered to the surface having the vertical grooves. After that, the dielectric filter according to the present invention is manufactured by cutting in a direction perpendicular to the bonding surface at a portion between the concave grooves. According to this method, a large number of dielectric blocks for a dielectric filter can be cut out from the bonded block. Prior to bonding, the input / output conductor film as described above may be formed.

【0018】なお、本発明は、三素子または五素子(誘
電体共振器)以上の誘電体フィルタにも応用できること
はいうまでもない。また、前記のように、凹溝のサイズ
が異なる誘電体基板を貼り合わせてもよく、この場合に
は位置ずれが生じても結合状態のばらつきを防止するこ
とができ、安定した結合状態が得られる。なお、凹溝を
有する誘電体基板の凹溝を一個として端部に配置すれ
ば、奇数個の素子を形成することもできる。
It is needless to say that the present invention can be applied to a dielectric filter having three or five elements (dielectric resonators) or more. Further, as described above, the dielectric substrates having different sizes of the concave grooves may be bonded, and in this case, even if the displacement occurs, the variation of the coupling state can be prevented, and the stable coupling state can be obtained. Can be If a single groove is arranged at the end of the dielectric substrate having the groove, an odd number of elements can be formed.

【0019】[0019]

【発明の効果】本発明によれば、誘電体基板への凹溝の
形成のみが加工上の問題となるので、誘電体フィルタの
小型化の面で有利となる。幅3mm 、厚さ1mmの基板に深
さ0.5mm 程度の凹溝を形成することが可能であるので、
四素子の誘電体フィルタの断面は4.5mm ×1.5mm 程度と
することができる。
According to the present invention, only the formation of a concave groove in the dielectric substrate poses a problem in processing, which is advantageous in terms of miniaturization of the dielectric filter. Since it is possible to form a groove with a depth of about 0.5 mm on a substrate with a width of 3 mm and a thickness of 1 mm,
The cross section of the four-element dielectric filter can be about 4.5 mm × 1.5 mm.

【0020】また、製造工程も導体膜の形成を除けば、
誘電体基板の貼り合わせと切断のみであるので工数を低
減できるとともに、面積の大きい誘電体基板を用いれば
極めて量産性の高い誘電体フィルタの製造方法が実現で
きる。
Also, except for the formation of the conductor film, the manufacturing process
Since only the bonding and cutting of the dielectric substrate are performed, the number of steps can be reduced, and the use of a dielectric substrate having a large area can realize a method of manufacturing a dielectric filter with extremely high productivity.

【0021】更に、接着面のガラス等の接着剤の流出に
よる影響を受けにくくできるので、共振器間の結合等の
特性の安定した誘電体フィルタが得られる。
Further, since it is possible to reduce the influence of the outflow of the adhesive such as glass on the bonding surface, it is possible to obtain a dielectric filter having stable characteristics such as coupling between resonators.

【図面の簡単な説明】[Brief description of the drawings]

【図1】 本発明の実施例を示す斜視図FIG. 1 is a perspective view showing an embodiment of the present invention.

【図2】 本発明の実施例を示す分解斜視図FIG. 2 is an exploded perspective view showing an embodiment of the present invention.

【図3】 本発明による製造方法の一例を示す斜視図FIG. 3 is a perspective view showing an example of a manufacturing method according to the present invention.

【符号の説明】[Explanation of symbols]

11、12、21、22、51、52:(凹溝を具えた)誘電体基板 13〜15、23〜25、53〜55:(平板の)誘電体基板 11, 12, 21, 22, 51, 52: Dielectric substrate (with concave groove) 13-15, 23-25, 53-55: (flat) dielectric substrate

フロントページの続き (56)参考文献 特開 平5−347504(JP,A) 特開 平2−94901(JP,A) 実開 昭58−123606(JP,U) 実開 平4−137602(JP,U) 実開 平3−56204(JP,U) (58)調査した分野(Int.Cl.6,DB名) H01P 1/20 - 1/219 H01P 7/00 - 7/10 H01P 5/08 H01P 11/00 Continuation of the front page (56) References JP-A-5-347504 (JP, A) JP-A-2-94901 (JP, A) JP-A-58-123606 (JP, U) JP-A-4-137602 (JP) , U) Hikaru Hei 3-56204 (JP, U) (58) Fields investigated (Int. Cl. 6 , DB name) H01P 1/20-1/219 H01P 7/00-7/10 H01P 5/08 H01P 11/00

Claims (5)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 一表面とその反対側の表面に平行に伸び
る凹溝を具えた第一の誘電体基板の凹溝ある表面に第二
の誘電体基板が接着されるように、第一の誘電体基板と
平板の第二の誘電体基板とを交互に配置し、凹溝内と第
二の誘電体基板の凹溝に対向する表面に内導体が形成さ
れ、第一の誘電体基板と第二の誘電体基板の凹溝の伸び
る方向に平行な外周面に外導体が形成され、凹溝が開口
する端面の一方に短絡導体を具えた誘電体フィルタ。
1. A first dielectric substrate having a groove extending parallel to one surface and an opposite surface thereof, wherein the first dielectric substrate is bonded to the grooved surface of the first dielectric substrate. The dielectric substrate and the flat second dielectric substrate are alternately arranged, and an inner conductor is formed in the concave groove and on the surface of the second dielectric substrate facing the concave groove, and the first dielectric substrate and A dielectric filter comprising an outer conductor formed on an outer peripheral surface of a second dielectric substrate parallel to a direction in which a groove extends, and a short-circuit conductor provided on one of the end faces where the groove is opened.
【請求項2】 両端の第二の誘電体基板の接着面に入出
力用導体パターンが形成され、それらの導体パターンが
外周面まで引出され、外導体と絶縁された端子電極と接
続された請求項1記載の誘電体フィルタ。
2. An input / output conductor pattern is formed on an adhesion surface of a second dielectric substrate at both ends, and the conductor pattern is drawn out to an outer peripheral surface and connected to a terminal electrode insulated from an outer conductor. Item 7. The dielectric filter according to Item 1.
【請求項3】 第一の誘電体基板の両面で対向する凹溝
の一方の幅が他方の凹溝の幅と異なる請求項1記載の誘
電体フィルタ。
3. The dielectric filter according to claim 1, wherein the width of one of the grooves facing each other on both surfaces of the first dielectric substrate is different from the width of the other groove.
【請求項4】 一表面とその反対側の表面に平行に伸び
る凹溝を具えた第一の誘電体基板と平板の第二の誘電体
基板とを交互に、第一の誘電体基板のの凹溝のある表面
にそれぞれ平板の第二の誘電体基板が位置するようにし
て接着し、凹溝内と第二の誘電体基板の凹溝に対向する
表面に導体膜を形成して内導体を形成し、第一の誘電体
基板と第二の誘電体基板の凹溝の伸びる方向に平行な外
周面に導体膜を形成して外導体を形成し、凹溝が開口す
る端面の一方に導体膜を形成して短絡導体を形成する誘
電体フィルタの製造方法。
4. A first dielectric substrate having a concave groove extending parallel to one surface and a surface opposite to the first dielectric substrate and a flat second dielectric substrate. A second dielectric substrate of a flat plate is bonded to the surface having the groove so that a conductive film is formed inside the groove and on the surface of the second dielectric substrate facing the groove, thereby forming an inner conductor. Is formed, a conductor film is formed on the outer peripheral surface parallel to the direction in which the concave groove of the first dielectric substrate and the second dielectric substrate extends, and an outer conductor is formed. A method for manufacturing a dielectric filter for forming a short circuit conductor by forming a conductor film.
【請求項5】 一表面とその反対側の表面に平行に伸び
る複数の凹溝を具えた第一の誘電体基板と平板の第二の
誘電体基板とを交互に、第一の誘電体基板のの凹溝のあ
る表面にそれぞれ平板の第二の誘電体基板が位置するよ
うにして接着し、前記凹溝の中間部分を接着面に垂直な
方向に切断して複数の誘電体ブロックを形成し、誘電体
ブロックの凹溝内と第二の誘電体基板の凹溝に対向する
表面にそれぞれ導体膜を形成して内導体を形成し、第一
の誘電体基板と第二の誘電体基板の凹溝の伸びる方向に
平行な外周面に導体膜を形成して外導体を形成し、凹溝
が開口する端面の一方に導体膜を形成して短絡導体を形
成する誘電体フィルタの製造方法。
5. A first dielectric substrate comprising a first dielectric substrate having a plurality of grooves extending parallel to one surface and a surface opposite to the first dielectric substrate and a second dielectric substrate of a flat plate, alternately. A flat plate-shaped second dielectric substrate is bonded to each of the surfaces having the grooves, and a plurality of dielectric blocks are formed by cutting an intermediate portion of the grooves in a direction perpendicular to the bonding surface. Then, a conductor film is formed on the surface of the dielectric block opposite to the groove of the second dielectric substrate to form an inner conductor, and the first dielectric substrate and the second dielectric substrate are formed. A method of manufacturing a dielectric filter, wherein a conductor film is formed on an outer peripheral surface parallel to a direction in which a concave groove extends, an outer conductor is formed, and a conductive film is formed on one of the end faces where the concave groove opens to form a short-circuit conductor. .
JP7412894A 1994-03-18 1994-03-18 Dielectric filter and method of manufacturing the same Expired - Lifetime JP2869332B2 (en)

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JP7412894A JP2869332B2 (en) 1994-03-18 1994-03-18 Dielectric filter and method of manufacturing the same

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Application Number Priority Date Filing Date Title
JP7412894A JP2869332B2 (en) 1994-03-18 1994-03-18 Dielectric filter and method of manufacturing the same

Publications (2)

Publication Number Publication Date
JPH07263913A JPH07263913A (en) 1995-10-13
JP2869332B2 true JP2869332B2 (en) 1999-03-10

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Publication number Priority date Publication date Assignee Title
WO2023079903A1 (en) * 2021-11-02 2023-05-11 株式会社村田製作所 Dielectric filter

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