JP2858563B2 - Dielectric barrier discharge lamp - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dielectric barrier discharge lamp, and more particularly, to an ultraviolet exposure for a semiconductor exposure apparatus, which forms excimer molecules by dielectric barrier discharge and uses light emitted from the excimer molecules. The present invention relates to a dielectric barrier discharge lamp used for a light source or the like.

[0002]

2. Description of the Related Art Hitherto, various dielectric barrier discharge lamps utilizing a dielectric barrier discharge have been proposed (for example, JP-A-2-7353, JP-A-6-33830).
No. 1). FIG. 5 shows a configuration diagram of a conventional dielectric barrier discharge lamp described in JP-A-2-7353. In this figure, this dielectric barrier discharge lamp is configured such that a discharge vessel 4 in which dielectrics 3 and 5 are arranged opposite to each other is filled with a discharge gas for forming excimer molecules, and a metal electrode 2 having a reflection function on the dielectric 3 is provided. By applying an AC voltage from the power supply 1 to the reticulated metal electrode 6 formed on the dielectric 5, excimer molecules are formed by dielectric barrier discharge, and light emitted from the excimer molecules is extracted.

As a conventional dielectric barrier discharge lamp having a high radiance, a dielectric barrier discharge lamp having a structure as shown in FIG.
No. 8301). In the figure, flat plate-shaped dielectrics 3 and 4 are spaced apart and opposed to each other, and a light extraction member 7 and a side plate 8 are provided in a peripheral portion to form a discharge vessel. The discharge gas is filled, and a part of the discharge vessel doubles as a dielectric for dielectric discharge. A reflection film 13 is deposited outside the side plate 8.
Further, a condenser lens 9 is provided immediately adjacent to the light extraction window member 7 (a part of the condenser lens 9 may also serve as the light extraction window member).

In this conventional dielectric barrier discharge lamp, when an AC voltage is applied from the power supply 1 to the electrodes 10 and 11 formed on the surfaces of the dielectrics 3 and 4 opposite to the surfaces facing each other, Discharge plasma 12 is generated, excimer molecules are generated, and excimer light is emitted. Since the discharge plasma is thin and travels without being absorbed over a long distance in the discharge space, the above-described excimer light can be extracted by providing the condensing lens 9 in parallel with the discharge path of the dielectric barrier discharge. And is radiated through the condenser lens 9.

The above-mentioned conventional dielectric barrier discharge lamp is
Since it can emit ultraviolet rays having a wavelength region of 200 nm or less, it is used as a light source for ultraviolet exposure of a semiconductor exposure apparatus to increase the resolution in photolithography technology and realize ultra-fine processing of a semiconductor device.

[0006]

However, among the above-mentioned conventional dielectric barrier discharge lamps, the one shown in FIG. 5 has a problem that sufficient radiance cannot be obtained. Further, in the conventional dielectric barrier discharge lamp shown in FIG. 6, since the excimer light is condensed by the condensing lens 9, some high brightness can be obtained, but of the light radiated in all directions, Since only the excimer light emitted in the direction of the light extraction window member 7 is collected, only a part of the emitted light is used, and there is a problem that the light collection efficiency is poor.

[0007] The present invention has been made in view of the above points,
An object of the present invention is to provide a dielectric barrier discharge lamp capable of emitting high-intensity light.

Another object of the present invention is to provide a dielectric barrier discharge lamp having a high light-collecting efficiency.

[0009]

In order to achieve the above object, a first aspect of the present invention is arranged so as to be spaced apart from each other, the opposing surfaces are flat, and the opposing surfaces are opposite to each other. The surface is formed to be a convex curved surface, and the first and second dielectrics respectively constitute a part of a discharge vessel in which a discharge gas for forming excimer molecules by dielectric barrier discharge is filled. A first metal electrode having a reflection-light-condensing function formed so that a concave curved surface is in close contact with the convex-curved surface of the first dielectric; This is a configuration having the formed reticulated second metal electrode.

In the first invention, light emitted from excimer molecules generated in the discharge space of the discharge vessel by applying an AC voltage between the first and second metal electrodes is collected by the first metal electrode. is light and reflective, and the second to be focused by a dielectric, all of the light emitted from the excimer molecules are formed on the second dielectric, the second metal electrode of the mesh electrode Radiated through nonexistent parts.

Further, in order to achieve the above object, the second invention provides a dielectric multilayer reflective film having a condensing function, wherein the concave curved surface is formed on the convex curved surface of the first dielectric, and The third dielectric having a flat surface formed on the dielectric multilayer reflective film and the third metal electrode having a flat plate shape formed on the third dielectric are combined with the first dielectric in the first invention. This is a configuration provided in place of the metal electrode.

In the second invention, light emitted from excimer molecules generated in the discharge space of the discharge vessel by applying an AC voltage between the second and third metal electrodes is collected by the dielectric multilayer reflective film. All light emitted from the excimer molecule is emitted through the non- electrode- free portion of the reticulated second metal electrode because the light is reflected and reflected by the second dielectric.

According to a third aspect of the present invention, in order to achieve the above object, the position of a light-collecting point by the first metal electrode in the first and second inventions, and the position of a light-collecting point by a second dielectric having a light-collecting function. The light spot position is set outside the discharge vessel and at the same position on the side where the second metal electrode is provided. According to the third aspect of the invention, since the position of the focal point by the first metal electrode is the same as the position of the focal point by the second dielectric, a high-intensity point light source can be formed.

Further, in the fourth and fifth inventions, a plurality of sets of first and second dielectrics are provided in the same discharge vessel in an array, respectively, and in the fourth invention, the first and second metal electrodes are provided. In the fifth aspect, an AC voltage is applied between the second and third metal electrodes, and light emitted from the excimer molecules generated in an array in the discharge space of the discharge vessel by applying an AC voltage between the second and third metal electrodes, A point light source array is formed by radiating light through a portion of the mesh- shaped second metal electrode where no electrode exists.

According to a sixth aspect of the present invention, the light from the point light source array according to the fourth or fifth aspect of the present invention is condensed by a condensing lens, and Irradiation is performed on a mask or a reticle disposed on the substrate. According to the sixth aspect, it is possible to irradiate the mask or the reticle with illumination light having a uniform light intensity.

[0016]

Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 shows a configuration diagram of a first embodiment of a dielectric barrier discharge lamp according to the present invention. In the figure, dielectrics 1 which are arranged to face each other are separated from each other.
The discharge vessel 5 and the dielectric 16 constitute a part of a discharge vessel, and the discharge vessel is filled with a discharge gas for forming excimer molecules by dielectric barrier discharge. Further, the dielectric 15 and the dielectric 16 are formed such that their opposing surfaces are flat, and the surface opposite to the opposing surface is a convex curved surface. Thus, at least the dielectric 16 has a condensing function by setting the radius of curvature of the convex curved surface.

Further, on the convex curved surface of the dielectric 15, a concave curved surface of the metal electrode 18, one of which is a concave curved surface and the other is a flat surface, is formed closely. The metal electrode 18 has a condensing function and a reflecting function by a concave curved surface. A reticulated metal electrode 19 is formed on the convex curved surface of the dielectric 16. Further, the metal electrodes 18 and 19 are connected to the AC power supply 1.

To explain the operation of this embodiment, when an AC voltage is applied to the electrodes 18 and 19 from the power supply 1, a discharge plasma 20 is generated in a discharge space 17 in a discharge vessel, and excimer molecules are generated. Excimer light is emitted. Since the dielectric 16 has a convex curved surface, it has a condensing function, and since the metal electrode 18 has a reflecting function and a condensing function, this excimer light transmits through the dielectric 16. And further radiated to the outside through the portion of the mesh metal electrode 19 where no electrode is present.

Here, the radii of curvature are set such that the light condensing position by the dielectric 16 and the light condensing position by the metal electrode 18 are at the same position below the reticulated metal electrode 19 in the figure. Therefore, a high-luminance point light source can be formed, and all of the emitted excimer light is collected, so that the light utilization rate can be improved.

Next, a second embodiment of the present invention will be described. FIG. 2 shows a configuration diagram of a second embodiment of the dielectric barrier discharge lamp according to the present invention. In the figure, the same components as those of FIG. 1 are denoted by the same reference numerals, and description thereof will be omitted.
In FIG. 2, a dielectric multilayer reflective film 22 such as MgF ₂ is formed on a convex curved surface of a dielectric 15, and a dielectric 21 is embedded on the dielectric multilayer reflective film 22 so that the surface becomes flat. Is done. On the surface of the dielectric 21, a flat metal electrode 23 is formed. The dielectric multilayer reflective film 22
Has a condensing function by setting the radius of curvature of the curved surface.

According to this embodiment, the dielectric 21, the dielectric multilayer reflective film 22 with a light-collecting function, and the metal electrode 23
Since it has the same condensing and reflecting function as the metal electrode 18 with the reflecting and condensing function of the first embodiment, it has the same features as the first embodiment.

Next, a third embodiment of the present invention will be described. FIG. 3 shows a configuration diagram of a third embodiment of the dielectric barrier discharge lamp according to the present invention. In the figure, the same components as those in FIG. 1 are denoted by the same reference numerals. In FIG.
Dielectrics 15 ₁ and 1 arranged opposite to each other
6 _1, the dielectric 15 ₂ and 16 _2, the dielectric 15 ₃ and 16 _3, the dielectric 15 ₄ and 16 ₄ are formed in an array on each the same discharge vessel, the discharge space of the discharge vessel 17 The inside is filled with a discharge gas for forming excimer molecules by dielectric barrier discharge.

The dielectric 15₁~ 15_FourAnd dielectric 16₁
~ 16_FourAre mutually flat surfaces, and
The surface opposite to the opposite surface is formed to be a convex curved surface.
You. Dielectric 16₁~ 16_FourDepends on the radius of curvature of the convex surface.
It has a light-collecting function. Dielectric 15₁
~ 15_FourOn the convex surface of the metal electrode 1
8 are closely formed. Furthermore, dielectric 1
6₁~ 16_FourOn the side of the convex curved surface of But
Is formed. With these, the primary light source array 25
Is formed.

[0024] In operation of this embodiment, the metal electrodes 18 and 19, when an AC voltage is applied from the power source 1, the dielectric 15 _{1-15 4} facing the discharge vessel and the dielectric _{161-164 4} of the discharge plasma 20 in each of the discharge space 17 is generated in an array, are generated excimer molecules are excimer light emission, the excimer light is transmitted through the dielectric _161-164, further mesh metal electrodes It is radiated to the outside through a portion where no 19 electrodes are present.

Here, the light-condensing position by the dielectrics 16 _{1 to} 16 ₄ and the light-condensing position by the metal electrode 18 are different from each other.
Figure than 9, so that the same position of the lower, because their radius of curvature is set, high-intensity focal point 26 ₁
To 26 secondary light source array (point light source array) consisting of ₄ 27
Can be formed. Also, in this embodiment, all the emitted excimer light is collected, so that the light utilization rate can be improved.

For convenience of illustration, FIG.
And fourteen pairs are provided, but the number of pairs is not limited to this.

Next, an application example of the present invention will be described.
FIG. 4 shows a configuration diagram of an application example of the dielectric barrier discharge lamp according to the present invention. 3, the same components as those of FIG. 3 are denoted by the same reference numerals. In FIG. 4, light in the ultraviolet region, for example, having a wavelength of 157 nm, emitted from the primary light source array 25 having the same configuration as that shown in FIG.
, And a mask or reticle 29 is arranged at the position where the light is focused.

As a result, the light condensing position of the condenser lens 28 is irradiated with illumination light having a uniform illumination light intensity, so that an ultra-fine pattern on the mask or reticle 29 can be faithfully transferred and exposed. That is, this embodiment is characterized in that the primary light source array 25 is used as a light source for ultraviolet exposure of an exposure apparatus.

In FIGS. 3 and 4, the primary light source array 25 has a configuration in which a plurality of the embodiments shown in FIG. 1 are provided, but a configuration in which a plurality of the embodiments shown in FIG. 2 are provided. Of course it is good.

[0030]

As described above, according to the first and second aspects of the present invention, the light emitted from the excimer molecules generated in the discharge space of the discharge vessel is condensed and reflected by the first metal electrode. And all the light collected by the second dielectric and emitted from the excimer molecules is emitted through the electrode- free portion of the mesh-like second metal electrode formed on the second dielectric. With this configuration, the light utilization rate can be improved as compared with a conventional dielectric barrier discharge lamp that collects only excimer light emitted in the direction of the light extraction window member.

According to the third aspect of the present invention, since the position of the light-condensing point by the first metal electrode and the position of the light-condensing point by the second dielectric are the same, respectively, the brightness is higher than in the prior art. A simple point light source can be formed, which is suitable for a light source for ultraviolet exposure.

According to the fourth and fifth aspects of the invention, a high-luminance point light source array can be formed, and according to the sixth aspect of the present invention, light from the point light source array can be utilized. Since illumination light having a uniform light intensity can be applied to a mask or a reticle, an extremely fine exposure pattern can be formed, which is extremely effective for ultrafine processing of a semiconductor device.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of a first embodiment of the present invention.

FIG. 2 is a configuration diagram of a second embodiment of the present invention.

FIG. 3 is a configuration diagram of a third embodiment of the present invention.

FIG. 4 is a configuration diagram of an application example of the present invention.

FIG. 5 is a configuration diagram of a conventional example.

FIG. 6 is a configuration diagram of another conventional example.

[Explanation of symbols]

REFERENCE SIGNS LIST 1 AC power supply 15, 15 ₁ to 15 ₄ Dielectric 16, 16 _{1 to} 16 ₄ Dielectric with light condensing function 17 Discharge space 18 Metal electrode with reflection and condensing function 19 Reticulated metal electrode 20 Discharge plasma 21 Dielectric 22 Light condensing function Dielectric multilayer reflective film 23 Plate-shaped metal electrode 25 Primary light source array 26 _{1 to} 26 ₄ High-brightness light condensing point 27 Secondary light source array (high-brightness point light source array) 28 Condenser lens 29 Mask or reticle

Claims (6)

(57) [Claims] Claims: 1. An electronic device, comprising:
The opposing surfaces are flat, and the surface opposite to the opposing surface is formed to be a convex curved surface, and the inside is filled with a discharge gas for forming excimer molecules by dielectric barrier discharge. The first part of each of the discharge vessels
And a second dielectric; a first metal electrode having a reflection-light-condensing function formed so that a concave curved surface is in close contact with the convex-curved surface of the first dielectric; and the second metal electrode having a light-condensing function. And a reticulated second metal electrode formed on the convex curved surface of the dielectric of the first and second dielectric materials.
Light emitted from excimer molecules generated in the discharge space of the discharge vessel by applying an AC voltage between the metal electrodes,
A dielectric barrier discharge lamp for radiating light through an electrode- free portion of a mesh-like second metal electrode. 2. A dielectric multilayer reflective film having a light-condensing function formed such that a concave curved surface is in close contact with a convex curved surface of the first dielectric, and a surface formed on the dielectric multilayer reflective film a third dielectric is flat, and a flat-plate-shaped third metal electrode formed on the dielectric of the third, provided in place of the first metal electrode, the second and third Light emitted from excimer molecules generated in the discharge space of the discharge vessel by applying an AC voltage between the metal electrodes is emitted through a portion of the mesh- shaped second metal electrode where no electrode is present. The dielectric barrier discharge lamp according to claim 1, wherein: 3. The position of the focal point of the first metal electrode and the position of the focal point of the second dielectric having a light-condensing function are outside the discharge vessel and the second metal. 3. The dielectric barrier discharge lamp according to claim 1, wherein the electrodes are set at the same position on the side where the electrodes are provided. 4. The discharge vessel according to claim 1, wherein the first and second dielectrics are provided in a plurality of arrays in the same discharge vessel, and an AC voltage is applied between the first and second metal electrodes. electrode of the second metal electrode of the light emitted, the mesh from an excimer molecules is generated in an array in the discharge space
2. The dielectric barrier discharge lamp according to claim 1, wherein the light is radiated through a portion where there is no light to form a point light source array. 5. The discharge container according to claim 1, wherein the first and second dielectrics are provided in a plurality of arrays in the same discharge vessel, and an AC voltage is applied between the second and third metal electrodes. electrode of the second metal electrode of the light emitted, the mesh from an excimer molecules is generated in an array in the discharge space
3. The dielectric barrier discharge lamp according to claim 2, wherein the light is radiated through a portion where there is no light to form a point light source array. 6. The light from the point light source array formed is condensed by a condensing lens and irradiated on a mask or a reticle disposed at a condensing point of the condensing lens. 6. The dielectric barrier discharge lamp according to 4 or 5.