JP2847932B2 - Measuring method of angle deviation of polygon mirror - Google Patents
Measuring method of angle deviation of polygon mirrorInfo
- Publication number
- JP2847932B2 JP2847932B2 JP22936390A JP22936390A JP2847932B2 JP 2847932 B2 JP2847932 B2 JP 2847932B2 JP 22936390 A JP22936390 A JP 22936390A JP 22936390 A JP22936390 A JP 22936390A JP 2847932 B2 JP2847932 B2 JP 2847932B2
- Authority
- JP
- Japan
- Prior art keywords
- polygon mirror
- mirror
- deviation
- autocollimator
- measuring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Testing Of Optical Devices Or Fibers (AREA)
- Mechanical Optical Scanning Systems (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、光学部品等の、角度偏差の計測に有効な計
測方法に関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measurement method effective for measuring an angle deviation of an optical component or the like.
従来の技術 近年、高速印字プリンタとして、レーザプリンタが実
用化されてきている。これに用いられるレーザ光学系の
構成要素である多面鏡の反射面の角度偏差が、レーザプ
リンタの印字品質を決定する重要な要素の一つとなって
いる。2. Description of the Related Art In recent years, laser printers have been put into practical use as high-speed printing printers. The angular deviation of the reflection surface of the polygon mirror, which is a component of the laser optical system used for this purpose, is one of the important factors that determine the printing quality of a laser printer.
従来、多面鏡の反射面の角度偏差を計測する方法とし
て、JIS Ｂ 7432に示すようなピラミッド偏差の計測
方法を援用することが一般的であった。以下、その方法
について第３図および第４図を参照しながら説明する。Conventionally, as a method of measuring the angle deviation of the reflection surface of a polygon mirror, a method of measuring a pyramid deviation as shown in JIS B 7432 has been generally used. Hereinafter, the method will be described with reference to FIG. 3 and FIG.
第３図に示すように、JIS Ｂ 7513（精密定盤）の
１級以上の定盤１の上に、底面に対する反射面の直角度
が既知である基準反射鏡２とオートコリメータ４を配置
し、オートコリメータの読みを計測する。As shown in FIG. 3, a reference reflector 2 and an autocollimator 4 having a known perpendicularity of a reflection surface with respect to a bottom surface are arranged on a surface plate 1 of JIS B 7513 (precision surface plate) or higher. , Measure the reading of the autocollimator.
基準反射鏡２に替えて多面鏡６を底面を下にして定盤
１の上に置き、オートコリメータ４の読みを計測し、両
者の差から、多面鏡６のピラミッド偏差を求める。Instead of the reference reflecting mirror 2, the polygon mirror 6 is placed on the surface plate 1 with the bottom face down, the reading of the autocollimator 4 is measured, and the pyramid deviation of the polygon mirror 6 is determined from the difference between the two.
発明が解決しようとする課題 このような従来の、多面鏡のピラミッド偏差の計測方
法では、第５図に示すように、定盤１と多面鏡６の底面
７および基準反射鏡２の底面３との間に、異物等が介在
することにより、基準反射鏡２の底面３に対する、多面
鏡６の底面７の位相に誤差が生じると、前記オートコリ
メータ４の読みの差に誤差を生じ、これにより多面鏡６
のピラミッド偏差の計測値に誤差が加わる。According to such a conventional method for measuring the pyramid deviation of a polygon mirror, as shown in FIG. 5, the base plate 1, the bottom surface 7 of the polygon mirror 6, and the bottom surface 3 of the reference reflection mirror 2 If an error occurs in the phase of the bottom surface 7 of the polygon mirror 6 with respect to the bottom surface 3 of the reference reflecting mirror 2 due to the presence of a foreign substance or the like, an error occurs in the reading difference of the autocollimator 4. Polygon mirror 6
An error is added to the measured value of the pyramid deviation.
本発明は上記課題を解決するもので、多面鏡のピラミ
ッド偏差をはじめとする、角度偏差を精度よく計測する
方法を提供することを目的としている。An object of the present invention is to solve the above-mentioned problem, and an object of the present invention is to provide a method for accurately measuring an angular deviation including a pyramid deviation of a polygon mirror.
課題を解決するための手段 本発明は上記目的を達成するために、多面鏡の反射面
の方向に第一の計測器を配置し、基準面である底面の方
向に第二の計測器を配置し、第一の計測器で基準反射鏡
の反射面と多面鏡の反射面の角度偏差を計測し、第二の
計測器で基準反射鏡の基準面である底面と多面鏡の基準
面である底面との角度偏差を計測する事により、前記の
二つの角度偏差の差から多面鏡の角度偏差を計測する方
法を提供するものである。Means for Solving the Problems In order to achieve the above object, the present invention arranges a first measuring instrument in the direction of a reflecting surface of a polygon mirror and arranges a second measuring instrument in a direction of a bottom surface which is a reference surface. Then, the first measuring instrument measures the angular deviation between the reflecting surface of the reference reflecting mirror and the reflecting surface of the polygon mirror, and the second measuring instrument is the reference surface of the reference reflecting mirror and the bottom surface and the reference surface of the polygon mirror. An object of the present invention is to provide a method of measuring an angular deviation of a polygon mirror from a difference between the two angular deviations by measuring an angular deviation from a bottom surface.
作用 本発明は上記した方法により、多面鏡の角度偏差の計
測値に加わる誤差を小さくすることができるものであ
る。Operation According to the present invention, the error added to the measured value of the angular deviation of the polygon mirror can be reduced by the above-described method.
実施例 以下、本発明の一実施例について説明する。Example Hereinafter, an example of the present invention will be described.
なお、実施例は一つの例示であって、本発明の技術思
想を逸脱しない範囲で種々の変更あるいは改良を行いう
ることは言うまでもない。It should be noted that the embodiments are merely examples, and it is needless to say that various changes or improvements can be made without departing from the technical idea of the present invention.
第１図および第２図に本発明の一実施例を示す。図に
示すように、定盤１の上に、基準反射鏡２を、基準反射
鏡の底面３を上にして置き、基準反射鏡２の反射面の方
向に、第１のオートコリメータ４を配置し、基準反射鏡
の底面３の方向に第２のオートコリメータ５を配置し、
第１のオートコリメータ４および第２のオートコリメー
タ５の読みを計測する。1 and 2 show an embodiment of the present invention. As shown in the figure, a reference reflecting mirror 2 is placed on a surface plate 1 with a bottom surface 3 of the reference reflecting mirror facing upward, and a first autocollimator 4 is arranged in a direction of a reflecting surface of the reference reflecting mirror 2. Then, the second autocollimator 5 is arranged in the direction of the bottom surface 3 of the reference reflecting mirror,
The readings of the first autocollimator 4 and the second autocollimator 5 are measured.
基準反射鏡２に替えて、多面鏡６を多面鏡の底面７を
上にして置き、第１のオートコリメータ４および第２の
オートコリメータ５の読みを計測する。Instead of the reference reflecting mirror 2, the polygon mirror 6 is placed with the bottom face 7 of the polygon mirror facing upward, and the readings of the first autocollimator 4 and the second autocollimator 5 are measured.
第１のオートコリメータ４による、前記基準反射鏡の
反射面の計測値に対する多面鏡の反射面の計測値の偏差
と、第２のオートコリメータ５による前記基準反射鏡の
底面の計測値に対する多面鏡の底面の計測値の偏差との
差を求めることにより、多面鏡の角度偏差が計測され
る。The deviation of the measurement value of the reflection surface of the polygon mirror with respect to the measurement value of the reflection surface of the reference mirror by the first autocollimator 4 and the polygon mirror of the measurement value of the bottom surface of the reference mirror by the second autocollimator 5 The angle deviation of the polygon mirror is measured by calculating the difference from the deviation of the measurement value of the bottom surface of the polygon.
上記構成において、第２のオートコリメータ５による
計測値の前記偏差は、基準反射鏡の底面３と多面鏡の底
面７との位相の誤差により生じる。第１のオートコリメ
ータ４による計測値の前記偏差は、基準反射鏡の底面３
と多面鏡の底面７との位相の誤差が、基準反射鏡の反射
面と多面鏡の反射面との位相の誤差として現れた量と、
多面鏡６の角度偏差の和により生じる。このため、オー
トコリメータ４による、計測値の前記偏差と、第１のオ
ートコリメータ５による、計測値の前記偏差との差を求
めることにより、多面鏡の角度偏差が計測される。In the above configuration, the deviation of the value measured by the second autocollimator 5 is caused by a phase error between the bottom surface 3 of the reference reflecting mirror and the bottom surface 7 of the polygon mirror. The deviation of the value measured by the first autocollimator 4 is calculated based on the bottom surface 3 of the reference mirror.
The amount of the phase error between the reflection surface of the reference mirror and the reflection surface of the polygon mirror as a phase error between the reference surface and the bottom surface 7 of the polygon mirror;
This is caused by the sum of the angular deviations of the polygon mirror 6. Therefore, the angle deviation of the polygon mirror is measured by calculating the difference between the deviation of the measurement value by the autocollimator 4 and the deviation of the measurement value by the first autocollimator 5.
また実施例では、多面鏡の反射面のうちの一つの面に
おいて説明したが、多面鏡を回転テーブル等の上に置い
て回転させ、反射面を順次計測する場合にも、本発明に
よる計測方法が適用できる。Further, in the embodiment, one of the reflection surfaces of the polygon mirror has been described. However, the measurement method according to the present invention is also applicable to a case where the polygon mirror is rotated on a rotary table or the like to measure the reflection surface sequentially. Can be applied.
なお、実施例では多面鏡において説明したが、一面鏡
の場合でも本発明による計測方法が適用できることは言
うまでもない。Although the description has been given of the polygon mirror in the embodiment, it goes without saying that the measurement method according to the present invention can be applied to the case of a single mirror.
発明の効果 以上の実施例から明らかなように、本発明の計測方法
によれば、基準反射鏡の底面のように基準とする面と、
多面鏡の底面のように基準とする面との、位相の誤差に
より生じる計測誤差に影響されることなく、多面鏡の角
度偏差を計測することができる。As is clear from the above embodiments, according to the measurement method of the present invention, a reference surface such as a bottom surface of a reference reflector,
The angle deviation of the polygon can be measured without being affected by a measurement error caused by a phase error with respect to a reference plane such as the bottom of the polygon.
第１図および第２図は本発明の一実施例の説明図、第３
図および第４図は従来技術の説明図、第５図は計測誤差
の説明図である。 １……定盤、２……基準反射鏡、４……第１のオートコ
リメータ、５……第２のオートコリメータ、６……多面
鏡。1 and 2 are explanatory views of an embodiment of the present invention, and FIG.
FIGS. 4 and 5 are explanatory diagrams of the prior art, and FIG. 5 is an explanatory diagram of measurement errors. Reference numeral 1 denotes a surface plate, 2 denotes a reference reflector, 4 denotes a first autocollimator, 5 denotes a second autocollimator, 6 denotes a polygon mirror.
Claims (1)
配置し、基準面である底面の方向に第二の計測器を配置
し、第一の計測器で基準反射鏡の反射面と多面鏡の反射
面の角度偏差を計測し、第二の計測器で基準反射鏡の基
準面である底面と多面鏡の基準面である底面との角度偏
差を計測する事により、前記の二つの角度偏差の差から
多面鏡の角度偏差を計測する多面鏡の角度偏差の計測方
法。A first measuring instrument is arranged in a direction of a reflecting surface of a polygonal mirror, a second measuring instrument is arranged in a direction of a bottom surface which is a reference surface, and a first measuring instrument is used for a reference reflecting mirror. By measuring the angular deviation between the reflecting surface and the reflecting surface of the polygon mirror, and measuring the angular deviation between the bottom surface, which is the reference surface of the reference reflecting mirror, and the bottom surface, which is the reference surface of the polygon mirror, with the second measuring device, A method for measuring the angular deviation of a polygon mirror by measuring the angular deviation of a polygon mirror from the difference between the two angular deviations.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22936390A JP2847932B2 (en) | 1990-08-29 | 1990-08-29 | Measuring method of angle deviation of polygon mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP22936390A JP2847932B2 (en) | 1990-08-29 | 1990-08-29 | Measuring method of angle deviation of polygon mirror |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04109105A JPH04109105A (en) | 1992-04-10 |
| JP2847932B2 true JP2847932B2 (en) | 1999-01-20 |
Family
ID=16890997
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP22936390A Expired - Lifetime JP2847932B2 (en) | 1990-08-29 | 1990-08-29 | Measuring method of angle deviation of polygon mirror |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2847932B2 (en) |
-
1990
- 1990-08-29 JP JP22936390A patent/JP2847932B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH04109105A (en) | 1992-04-10 |
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