JP2830915B2 - Particle size distribution measuring device - Google Patents
Particle size distribution measuring deviceInfo
- Publication number
- JP2830915B2 JP2830915B2 JP8266916A JP26691696A JP2830915B2 JP 2830915 B2 JP2830915 B2 JP 2830915B2 JP 8266916 A JP8266916 A JP 8266916A JP 26691696 A JP26691696 A JP 26691696A JP 2830915 B2 JP2830915 B2 JP 2830915B2
- Authority
- JP
- Japan
- Prior art keywords
- particle size
- size distribution
- distribution measuring
- light
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002245 particle Substances 0.000 title claims description 53
- 238000009826 distribution Methods 0.000 title claims description 34
- 238000005259 measurement Methods 0.000 claims description 33
- 230000001678 irradiating effect Effects 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 10
- 238000010586 diagram Methods 0.000 description 5
- 239000010419 fine particle Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000000149 argon plasma sintering Methods 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Description
【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION
【０００１】[0001]
【発明の属する技術分野】本発明は，粒径測定装置に関
し，詳しくは，半導体製造装置等の装置内の空間の清浄
度検査に適用される粒径分布測定装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a particle size measuring apparatus, and more particularly, to a particle size distribution measuring apparatus applied to a cleanliness inspection of a space in an apparatus such as a semiconductor manufacturing apparatus.
【０００２】[0002]
【従来の技術】従来の粒径分布測定装置について図面を
参照して説明する。2. Description of the Related Art A conventional particle size distribution measuring apparatus will be described with reference to the drawings.
【０００３】従来，微小粒子の粒径測定には，光散乱式
の粒径測定装置が一般的に用いられており，図３は，こ
の種の従来装置の一例である「アネルバ（株）製ＤＭ−
１００型」の構成図である。また，その測定原理は「Ｊ
ＩＳ規格 Ｂ９９２１」にも示されている。Conventionally, a light scattering type particle size measuring device is generally used for measuring the particle size of fine particles. FIG. 3 shows an example of this type of a conventional device, "Anelva Co., Ltd." DM-
100 ". FIG. The principle of measurement is "J
IS standard B9921 ".
【０００４】図３に示す粒径分布測定装置は，所定の測
定点に向けてレーザ光２を照射する半導体レーザ光源７
と，半導体レーザ光源７から照射されたレーザ光２を測
定点に集光するマイクロレンズ９と，測定点に存在する
粒子３からの散乱光を受光するフォトダイオード１０と
を含んで構成される。A particle size distribution measuring apparatus shown in FIG. 3 is a semiconductor laser light source 7 for irradiating a laser beam 2 to a predetermined measuring point.
And a microlens 9 for condensing the laser beam 2 emitted from the semiconductor laser light source 7 at the measurement point, and a photodiode 10 for receiving scattered light from the particles 3 existing at the measurement point.
【０００５】まず，半導体レーザ光源７から照射された
レーザ光２は，マイクロレンズ５１で測定点に集光され
る。このとき，測定点に粒子３が存在すると，粒子３か
らは散乱光が発生するので，この散乱光の光量をフォト
ダイオード５０で測定する。ここで，ミー散乱理論によ
り，散乱を発生する粒子の直径とその散乱光量とは，放
射角度が一定であれば一定の関係にあるので，それを利
用して，フォトダイオード５０による散乱光量測定値か
ら，粒子３の直径を求める。First, a laser beam 2 emitted from a semiconductor laser light source 7 is condensed on a measurement point by a microlens 51. At this time, if the particles 3 are present at the measurement point, scattered light is generated from the particles 3, and the amount of the scattered light is measured by the photodiode 50. Here, according to the Mie scattering theory, the diameter of a particle that generates scattering and the amount of scattered light have a fixed relationship if the radiation angle is constant. Is used to determine the diameter of the particle 3.
【０００６】以上の動作により，所定の測定点に存在す
る粒子３の直径が求められるので，１次元，２次元，お
よび３次元の粒径分布を測定する場合には，測定系全体
を，１次元，２次元，および３次元方向に機械的に走査
することになる。[0006] By the above operation, the diameter of the particles 3 existing at a predetermined measurement point is obtained. Therefore, when measuring the one-dimensional, two-dimensional, and three-dimensional particle size distribution, the entire measurement system is set to 1 This results in mechanical scanning in the dimensional, two-dimensional, and three-dimensional directions.
【０００７】[0007]
【発明が解決しようとする課題】上述した従来の粒径分
布測定装置は，測定箇所が１点であり，１次元，２次
元，および３次元的な粒径分布を測定するには，測定系
全体をｌ次元，２次元，および３次元方向に機械的に走
査する必要があるため，測定に時間がかかる，という欠
点があった。The above-mentioned conventional particle size distribution measuring apparatus has only one measuring point, and a one-dimensional, two-dimensional and three-dimensional particle size distribution is measured by a measuring system. There is a drawback that the measurement requires a long time because it is necessary to mechanically scan the whole in the l-dimensional, two-dimensional and three-dimensional directions.
【０００８】そこで，本発明の技術的課題は，測定時間
が短縮できる粒径分布測定装置を提供することにある。Therefore, a technical object of the present invention is to provide a particle size distribution measuring device capable of shortening the measuring time.
【０００９】[0009]
【課題を解決するための手段】本発明の粒径分布測定装
置では，所定の測定軸に沿った平行レーザ光束を照射す
るレーザ光照射手段と，前記測定軸上の所定の測定領域
内にある粒子からの散乱光を集光する集光レンズと，前
記測定領域内の各点が前記集光レンズにより結像される
位置にあって，かつ，前記測定軸と同一平面に配置さ
れ，前記散乱光の光量を測定する複数の受光素子を備え
た受光手段と，前記レーザ光照射手段と前記集光レンズ
と前記受光素子アレイの配置関係を一定に保ったまま，
全体を前記測定軸と直交する方向に移動させる移動ステ
ージとを含むことを特徴としている。According to the particle size distribution measuring apparatus of the present invention, a laser beam irradiating means for irradiating a parallel laser beam along a predetermined measuring axis is provided within a predetermined measuring area on the measuring axis. A condensing lens for condensing scattered light from the particles, and a point in the measurement area where each point is formed by the condensing lens and arranged on the same plane as the measurement axis. A light-receiving unit having a plurality of light-receiving elements for measuring the amount of light, a laser beam irradiation unit, the condenser lens, and the light-receiving element array, while maintaining a constant positional relationship.
A moving stage for moving the whole in a direction orthogonal to the measurement axis.
【００１０】ここで，本発明の粒径分布測定装置におい
て，前記受光手段は，複数個の受光素子を１列に並べた
１次元の受光素子アレイから実質的になることが好まし
い。Here, in the particle size distribution measuring apparatus of the present invention, it is preferable that the light receiving means is substantially composed of a one-dimensional light receiving element array in which a plurality of light receiving elements are arranged in one line.
【００１１】また，本発明の粒径分布測定装置におい
て，前記レーザ光照射手段は，平行レーザ光束を直接発
生するレーザ光源を備えていること，又は，レーザ光照
射手段は，レーザ光を照射する半導体レーザ光源と，前
側焦点位置を前記半導体レーザ光源の発光点に一致させ
て配置したコリメートレンズとを使用した手段であるこ
とが好ましい。In the particle size distribution measuring apparatus according to the present invention, the laser beam irradiating means includes a laser light source which directly generates a parallel laser beam, or the laser beam irradiating means irradiates a laser beam. It is preferable that the means is a means using a semiconductor laser light source and a collimating lens arranged such that a front focal position is coincident with a light emitting point of the semiconductor laser light source.
【００１２】さらに，本発明の粒径分布測定装置におい
て，前記集光レンズ及び前記受光素子アレイは，前記測
定軸方向において，前記散乱光の生成位置よりの前記レ
ーザ光照射手段寄りに配置されていることがより好まし
い。Further, in the particle size distribution measuring apparatus according to the present invention, the condensing lens and the light receiving element array are arranged closer to the laser light irradiation means than a position where the scattered light is generated in the measurement axis direction. Is more preferable.
【００１３】[0013]
【発明の実施の形態】次に，本発明の実施の形態につい
て図面を参照して説明する。Next, embodiments of the present invention will be described with reference to the drawings.
【００１４】図１は，本発明の第１の実施の形態による
粒径分布測定装置の概略構成を示す図である。図１に示
す粒径分布測定装置は，所定の測定軸に沿って，平行光
束のレーザ光２を照射するレーザ光照射手段としてのＡ
ｒレーザ光源１と，測定軸上の所定の測定領域内にある
粒子３からのミー散乱光を集光する集光レンズ４と，測
定領域内の各点が集光レンズ４により結像される位置に
あって，かつ，測定軸と同一平面に配置され，集光レン
ズ４で集光されたミー散乱光の光量を測定する受光手段
である複数個の受光素子を１列に並べた１次元の受光素
子アレイ５と，Ａｒレーザ光源１と集光レンズ４と受光
素子アレイ５の配置関係を一定に保ったまま，全体を測
定軸と直交する方向に移動させる移動ステージ６とを含
んで構成される。FIG. 1 is a diagram showing a schematic configuration of a particle size distribution measuring apparatus according to a first embodiment of the present invention. The particle size distribution measuring apparatus shown in FIG. 1 is a laser beam irradiating means for irradiating a laser beam 2 of a parallel light beam along a predetermined measuring axis.
An r laser light source 1, a condenser lens 4 for condensing Mie scattered light from particles 3 in a predetermined measurement area on a measurement axis, and each point in the measurement area is imaged by the condenser lens 4. A one-dimensional array in which a plurality of light receiving elements are arranged in a line at a position and are arranged on the same plane as the measurement axis and are light receiving means for measuring the amount of Mie scattered light condensed by the condenser lens 4. And a moving stage 6 for moving the whole in a direction orthogonal to the measurement axis while keeping the arrangement relationship of the Ar laser light source 1, the condenser lens 4, and the light receiving element array 5 constant. Is done.
【００１５】なお，測定軸および受光素子アレイ５は直
線であるため，測定軸と受光素子アレイ５とは完全な結
像配置にはならない。しかしながら，受光素子アレイ５
を構成する各受光素子は所定の受光面積を有するため，
結像のボケ量はこの受光面積分まで許容できる。Since the measurement axis and the light receiving element array 5 are straight lines, the measurement axis and the light receiving element array 5 do not form a perfect image. However, the light receiving element array 5
Each of the light-receiving elements constituting has a predetermined light-receiving area,
The amount of image blur can be tolerated up to this light receiving area.
【００１６】次に，図１の粒径分布測定装置の動作を説
明する。Next, the operation of the particle size distribution measuring apparatus shown in FIG. 1 will be described.
【００１７】まず，Ａｒレーザ光源１は，測定軸に沿っ
て，平行光束のレーザ光２を照射するが，このとき，レ
ーザ光２の光軸上に粒子３が存在すると，粒子３からは
ミー散乱光が発生する。次に，このミー散乱光は集光レ
ンズ４で集光されて受光素子アレイ５にてその光量が測
定されるが，このとき同時に，受光素子アレイ５上での
受光点の位置から，測定軸上での粒子３の位置が測定さ
れる。この粒子３の位置が測定されると，集光レンズ４
の配置位置から，粒子３及びレンズ４間の距離および集
光したミー散乱光の放射角度が求まり，また，粒子３及
び集光レンズ４間の距離と集光レンズ４の有効径から，
集光されたミー散乱光束の立体角が求まる。First, the Ar laser light source 1 irradiates a laser beam 2 of a parallel light flux along the measurement axis. At this time, if the particle 3 exists on the optical axis of the laser beam 2, the particle 3 Scattered light is generated. Next, the Mie scattered light is condensed by the condensing lens 4 and its light quantity is measured by the light receiving element array 5. At this time, at the same time, the position of the light receiving point on the light receiving element array 5 The position of particle 3 above is measured. When the position of the particle 3 is measured, the condensing lens 4
The distance between the particles 3 and the lens 4 and the emission angle of the collected Mie scattered light are obtained from the arrangement position of.
The solid angle of the collected Mie scattered light beam is determined.
【００１８】ここで，ミー散乱理論によれば，微小粒子
から発生するミー散乱光の放射角度とその方向の強度
は，粒径と所定の相関関係を有している。従って，この
うちの放射角度と強度は上述の動作により既知となるた
め，ミー散乱理論に基づいて，粒子３の直径が求まる。Here, according to the Mie scattering theory, the emission angle of Mie scattered light generated from fine particles and the intensity in that direction have a predetermined correlation with the particle size. Therefore, since the radiation angle and the intensity are known by the above operation, the diameter of the particle 3 is obtained based on the Mie scattering theory.
【００１９】以上により，所定の測定軸上に存在する粒
子３の，１次元の粒径分布が測定される。また，２次
元，および３次元の粒径分布の測定は，移動ステージ６
により，測定系全体をレーザ光２の光軸と直交する方向
に機械的に走査することで行う。As described above, the one-dimensional particle size distribution of the particles 3 existing on the predetermined measurement axis is measured. In addition, the measurement of the two-dimensional and three-dimensional particle size distribution is performed by the moving stage
Thus, the entire measurement system is mechanically scanned in a direction orthogonal to the optical axis of the laser beam 2.
【００２０】図２は本発明の第２の実施の形態による粒
径分布測定装置の概略構成を示す図である。図２に示す
粒径分布測定装置は，レーザ光照射手段が，レーザ光２
を照射する半導体レーザ光源７と，前側焦点位置を半導
体レーザ光源７の発光点に一致させて配置したコリメー
トレンズ８とで構成される以外は，図１に示す第１の実
施の形態による粒径分布測定装置と同一構成を備えてお
り，動作も同一である。FIG. 2 is a diagram showing a schematic configuration of a particle size distribution measuring apparatus according to a second embodiment of the present invention. In the particle size distribution measuring apparatus shown in FIG.
1 and a collimating lens 8 arranged so that the front focal position is aligned with the light emitting point of the semiconductor laser light source 7, and the particle diameter according to the first embodiment shown in FIG. It has the same configuration as the distribution measurement device, and the operation is the same.
【００２１】[0021]
【発明の効果】以上説明したように，本発明の粒径分布
測定装置は，１次元上での粒径分布が機械的走査なしに
測定でき，また，２次元，３次元の粒径分布を測定する
場合には，機械的走査が１次元分不要になるため，測定
時間が短縮できるという効果がある。As described above, the particle size distribution measuring apparatus according to the present invention can measure a one-dimensional particle size distribution without mechanical scanning, and can measure a two-dimensional or three-dimensional particle size distribution. In the case of measurement, one-dimensional mechanical scanning is not required, so that there is an effect that the measurement time can be reduced.
【図１】本発明の第１の実施の形態による粒径分布測定
装置の概略構成を示す図である。FIG. 1 is a diagram showing a schematic configuration of a particle size distribution measuring device according to a first embodiment of the present invention.
【図２】本発明の第２の実施の形態による粒径分布測定
装置の概略構成を示す図である。FIG. 2 is a diagram showing a schematic configuration of a particle size distribution measuring device according to a second embodiment of the present invention.
【図３】従来技術による粒径分布測定装置の一例の概略
構成を示す図である。FIG. 3 is a diagram showing a schematic configuration of an example of a particle size distribution measuring device according to a conventional technique.
１ Ａｒレーザ光源 ２ レーザ光 ３ 粒子 ４ 集光レンズ ５ 受光素子アレイ ６ 移動ステージ ７ 半導体レーザ光源 ８ コリメートレンズ ５１ マイクロレンズ ５０ フォトダイオード DESCRIPTION OF SYMBOLS 1 Ar laser light source 2 Laser light 3 Particle 4 Condensing lens 5 Light receiving element array 6 Moving stage 7 Semiconductor laser light source 8 Collimating lens 51 Micro lens 50 Photodiode
Claims (5)
照射するレーザ光照射手段と，前記測定軸上の所定の測
定領域内にある粒子からの散乱光を集光する集光レンズ
と，前記測定領域内の各点が前記集光レンズにより結像
される位置にあって，かつ，前記測定軸と同一平面に配
置され，前記散乱光の光量を測定する複数の受光素子を
備えた受光手段と，前記レーザ光照射手段と前記集光レ
ンズと前記受光手段の配置関係を一定に保ったまま，全
体を前記測定軸と直交する方向に移動させる移動ステー
ジとを含むことを特徴とする粒径分布測定装置。1. A laser beam irradiation means for irradiating a parallel laser beam along a predetermined measurement axis, a condenser lens for condensing scattered light from particles in a predetermined measurement area on the measurement axis, A light-receiving element including a plurality of light-receiving elements for measuring the amount of the scattered light, wherein each point in the measurement area is located at a position where an image is formed by the condenser lens and is arranged on the same plane as the measurement axis And a moving stage for moving the laser beam irradiating means, the condenser lens, and the light receiving means in a direction perpendicular to the measurement axis while maintaining a fixed positional relationship. Diameter distribution measuring device.
て，前記受光手段は，複数個の受光素子を１列に並べた
１次元の受光素子アレイから実質的になることを特徴と
する粒径分布測定装置。2. A particle size distribution measuring apparatus according to claim 1, wherein said light receiving means is substantially composed of a one-dimensional light receiving element array in which a plurality of light receiving elements are arranged in one line. Diameter distribution measuring device.
て，前記レーザ光照射手段は，平行レーザ光束を直接発
生するレーザ光源を備えていることを特徴とする粒径分
布測定装置。3. The particle size distribution measuring device according to claim 1, wherein said laser beam irradiation means includes a laser light source for directly generating a parallel laser beam.
て，レーザ光照射手段は，レーザ光を照射する半導体レ
ーザ光源と，前側焦点位置を前記半導体レーザ光源の発
光点に一致させて配置したコリメートレンズとを使用し
た手段であることを特徴とする粒径分布測定装置。4. A particle size distribution measuring apparatus according to claim 1, wherein the laser light irradiating means is arranged such that a semiconductor laser light source for irradiating the laser light and a front focal position coincide with an emission point of the semiconductor laser light source. A particle size distribution measuring device characterized by using a collimating lens.
粒径分布測定装置において，前記集光レンズ及び前記受
光素子アレイは，前記測定軸方向において，前記散乱光
の生成位置よりの前記レーザ光照射手段寄りに配置され
ていることを特徴とする粒径分布測定装置。5. The particle size distribution measuring apparatus according to claim 2, wherein the converging lens and the light receiving element array are located in a direction of the measurement axis from a position where the scattered light is generated. A particle size distribution measuring device arranged near the laser beam irradiation means.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8266916A JP2830915B2 (en) | 1996-10-08 | 1996-10-08 | Particle size distribution measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8266916A JP2830915B2 (en) | 1996-10-08 | 1996-10-08 | Particle size distribution measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH10111231A JPH10111231A (en) | 1998-04-28 |
| JP2830915B2 true JP2830915B2 (en) | 1998-12-02 |
Family
ID=17437460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8266916A Expired - Fee Related JP2830915B2 (en) | 1996-10-08 | 1996-10-08 | Particle size distribution measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2830915B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111678847B (en) * | 2020-06-12 | 2023-05-30 | 中国人民解放军战略支援部队航天工程大学 | Two-dimensional spray field particle size distribution detection device |
-
1996
- 1996-10-08 JP JP8266916A patent/JP2830915B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH10111231A (en) | 1998-04-28 |
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