JP2815683B2 - Grating manufacturing apparatus and manufacturing method - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to an apparatus and a method for manufacturing a grating.

2. Description of the Related Art Conventionally, various methods have been considered for producing a grating on the surface of an optical information recording medium such as an optical disk. For example, one example is disclosed in JP-A-53-116105. Therefore, this will now be described with reference to FIG.

First, as shown in FIG. 3 (a), a stamper (die) 3 is fixed on a support plate 2 placed below a U-shaped arm 1, and an ultraviolet ray is applied to the surface of the stamper 3. The hardened resin 4 is poured. On the other hand, the acrylic plate 7 is vacuum-chucked at the peripheral portion of the holder 6 fixed to the upper cylinder 5, and air is introduced between the holder 6 and the acrylic plate 7 to make the acrylic plate 7 convex. . Then, as shown in FIG. 3 (b), the acrylic plate 7 is lowered in this state, pressed from above the ultraviolet curable resin 4 to bring the acrylic plate 7 into close contact with the stamper 3, and then the holder 6 is detached. I do. Then, in a state where the acrylic plate 7 and the stamper 3 are brought into close contact with each other, as shown in FIG. 4, ultraviolet rays (UV) are exposed from the acrylic plate 7 side and cured, and then the stamper 3 is peeled off. Thus, a desired optical disk can be manufactured.

Problems to be Solved by the Invention The method using the means described above is suitable for duplicating an optical disk or the like, but the size of the acrylic plate 7 (hereinafter referred to as a substrate) is actually used as an optical pickup element. Because it is much larger than the dimensions, it must be cut to the actual dimensions after purification.

When such a substrate is cut (hereinafter referred to as “cut”), since a grating is formed on the surface of the substrate, the substrate may be cut, for example, parallel to the groove direction of the grating, or may be cut due to adhesion. There is a rather difficult problem such as severe cut dimensional accuracy. Further, at the time of such a cut, chips may damage the groove of the grating or may fill the groove, and further, the rubbing heat generated at the time of the cut is a component of the grating. It may adversely affect the ultraviolet curable resin.

Therefore, in order to solve such a problem, there is an application filed by the present applicant in Japanese Patent Application No. 1-94166 as "a method for manufacturing a grating". This is the second
As shown in the figure, a stamper fixing table 9 provided with a peeling member 8
A stamper 11 is installed in a concave portion 10 formed on the surface of the stamper 11, an ultraviolet-curing resin 12 is applied to the surface of the stamper 11, and the surface of the ultraviolet-curing resin 12 has a size that does not need to be cut. The substrate 14 on which the peeling portion 13 is formed is brought into close contact with the side surface and subjected to ultraviolet light exposure, and then the peeling portion 13 of the substrate 14 is brought into contact with the protrusion 15 of the peeling member 8 and pushed up. Peel from stamper 11,
Thus, a grating (not shown) is formed on the substrate 14.

By duplicating the grating in this manner, various problems that have occurred when cutting the substrate 14 as described above can be eliminated. However, in this case, when the screw 16 is turned to push up the peeling portion 13 of the substrate 14 which is in contact with the protrusion 15 of the peeling member 8, the fulcrum P, which is the center of rotation of the peeling member 8, moves away from the substrate 14 away from the protrusion 15. Since it is provided on the left side of the substrate 14, the probability of occurrence of cracks or the like in the substrate 14 at the time of peeling increases, which has been a factor of reducing the yield.

Means for Solving the Problems Therefore, in order to solve such a problem, the present invention provides a stamper fixing base having a concave portion, and one end of the stamper fixing base is formed as a rotatable fulcrum on the upper part of the stamper fixing base. Provide a flat stripping member whose end can be moved up and down by screw,
A stamper is installed in the concave portion of the stamper fixing base, and a peeling protrusion is formed at a position near the fulcrum on a surface of the peeling member facing the stamper, and the stamper is separated from the peeling protrusion. A pressing plate for producing a grating was provided at a position on the side of the fixing base where the screw was provided.

In addition, a stamper is installed in a concave portion of the stamper fixing base, and a plate-shaped peeling member having one end rotatable as a fulcrum and the other end movable up and down by a screw is provided on the upper part of the stamper fixing base. A UV curable resin is applied to the surface, and the UV curable resin is brought into close contact with a grating substrate having a size that does not need to be cut and having a peeled surface located on the fulcrum side and exposed to UV light. After that, the peeling surface of the grating substrate is set in a state of being in contact with a peeling protrusion provided near the fulcrum side of the peeling member, and the screw is turned, with the rotation of the screw. To rotate the peeling member around its fulcrum,
By rotating the peeling member about the fulcrum, the grating substrate is pushed up by the peeling surface side at the other end while the grating substrate is supported at one end by a pressing plate for making a grating, and the grating is peeled from the stamper. The grating was duplicated on the substrate for use.

In this manner, the fulcrum, which is the center of rotation of the peeling member, is provided at a position close to the peeling protrusion that pushes up the peeling surface of the grating substrate, so that when the grating substrate is peeled, excessive force is applied to the grating substrate. Is not added, thereby preventing the substrate from cracking, so that the yield at the time of grating replication can be further improved.

Embodiment An embodiment of the present invention will be described with reference to FIG. First, the overall configuration of the present apparatus will be described. Stamper fixing stand
A concave portion 17a is formed on the upper surface of the
At 7a, a stamper 18 is installed. On the upper portion of the stamper fixing base 17, a plate-like peeling member 20 having one end rotatable as a fulcrum P and the other end vertically movable by a screw 19 is provided.
Is installed. A peeling protrusion 20a is formed at a position near the fulcrum P on a surface of the peeling member 20 facing the stamper 18, and the peeling protrusion 2a is formed.
A grating-producing pressing plate 21 is provided on the side of the stamper fixing base 17 on which the screw 19 is provided, which is separated from Oa.

In such a configuration, a method for manufacturing a grating will be described. First, the stamper 18 is installed in the concave portion 17a of the stamper fixing base 17. At this time, the height of the stamper 18 is set slightly lower than the height of the stamper fixing base 17. Next, an ultraviolet curable resin 22 is applied to the surface of the stamper 18, and a grating substrate 23 having a peeled surface 23 a formed thereon is brought into close contact with the surface of the ultraviolet curable resin 22 at a position close to the fulcrum P side. In this state, ultraviolet (UV) exposure is performed. Next, the screw 19 is turned while the peeling surface 23a of the grating substrate 23 is set in contact with the peeling projection 20a of the peeling member 20. Next, in a state where one end of the grating substrate 23 is supported by the grating manufacturing pressing plate 21, the peeling member 20 is rotated around the fulcrum P with the rotation of the screw 19, and the peeling surface 23a at the other end is rotated. It is pushed up by the peeling projection 20a. Thus, the grating can be duplicated on the grating substrate 23 by peeling the grating substrate 20 from the stamper 18.

As described above, with the peeling surface 23a of the grating substrate 23 in contact with the peeling projection 20a provided in the vicinity of the fulcrum P side of the peeling member 20, the screw 19 is turned to pivot the peeling member 20 on the fulcrum. By pushing upwards around P,
The substrate 23 for the grating 7 can be peeled from the stamper 18. Accordingly, when the grating substrate 23 is peeled off, no excessive force is applied to the substrate, so that the substrate is not cracked.
The yield in the case of a plurality of gratings can be further improved as compared with the conventional case. It should be noted that the provision of the grating manufacturing push plate 21 can prevent the grating substrate 23 from vigorously jumping upward during peeling.

Advantageous Effects of the Invention The present invention provides a stamper fixing base having a concave portion, and a flat plate-like peeling member having one end rotatable as a fulcrum and the other end vertically movable by a screw is provided on the upper part of the stamper fixing base, A stamper is installed in the concave portion of the stamper fixing base, and a peeling protrusion is formed at a position near the fulcrum on a surface of the peeling member facing the stamper, and the stamper is separated from the peeling protrusion. Since the pressing plate for producing the grating is provided at the position of the fixing base on the side where the screw is provided, when the grating substrate is peeled, no excessive force is applied to the grating substrate. Since the occurrence of cracks is eliminated, the yield at the time of grating duplication can be further improved.

[Brief description of the drawings]

FIG. 1 is a block diagram showing an embodiment of the present invention, FIG. 2 is a block diagram showing the contents of a prior application filed by the present applicant, and FIGS. 3 and 4 are process diagrams showing a conventional method for manufacturing a grating. It is. 17 ... Stamp fixing stand, 17a ... Recess, 18 ... Stamper, 19 ... Screw, 20 ... Releasable member, 20a ... Releasable protrusion, 21 ... Grating manufacturing press plate, 22 ... UV curing Resin, 23 ... Grating substrate, 23a ... Released surface

Claims (2)

(57) [Claims] A stamper fixing base having a concave portion is provided, and a flat plate-like peeling member is provided on an upper part of the stamper fixing base, one end of which is rotatable as a fulcrum, and the other end is vertically movable by a screw. A stamper is installed in the concave portion of the fixing base, a peeling projection is formed at a position near the fulcrum on a surface of the peeling member facing the stamper, and the stamper fixing base is separated from the peeling projection. A grating manufacturing push plate is provided at a position where the screw is provided. 2. A stamper is installed in a concave portion of a stamper fixing base, and a plate-like peeling member is provided at an upper part of the stamper fixing base, one end of which is rotatable as a fulcrum and the other end is vertically movable by a screw. An ultraviolet-curing resin is applied to the surface of the stamper, and a grating substrate having a size that does not need to be cut on the ultraviolet-curing resin and having a release surface formed on the fulcrum side is brought into close contact therewith. Perform ultraviolet exposure, and then set the peeling surface of the grating substrate in contact with a peeling protrusion provided near the fulcrum side of the peeling member, turn the screw, and rotate the screw. With the rotation, the peeling member is rotated about its fulcrum, and one end of the grating substrate is supported by a pressing plate for grating production by the rotation of the peeling member about the fulcrum. Grating manufacturing method of which is characterized in that so as to replicate the grating on the grating on the substrate for by performing peeling from the stamper push the releasable side of the other end in the state.