JP2806711B2 - IC wire bonder - Google Patents

IC wire bonder

Info

Publication number
JP2806711B2
JP2806711B2 JP4287219A JP28721992A JP2806711B2 JP 2806711 B2 JP2806711 B2 JP 2806711B2 JP 4287219 A JP4287219 A JP 4287219A JP 28721992 A JP28721992 A JP 28721992A JP 2806711 B2 JP2806711 B2 JP 2806711B2
Authority
JP
Japan
Prior art keywords
wire
clamp
bonding
clamper
bonder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP4287219A
Other languages
Japanese (ja)
Other versions
JPH06140476A (en
Inventor
修 高崎
Original Assignee
九州日本電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 九州日本電気株式会社 filed Critical 九州日本電気株式会社
Priority to JP4287219A priority Critical patent/JP2806711B2/en
Publication of JPH06140476A publication Critical patent/JPH06140476A/en
Application granted granted Critical
Publication of JP2806711B2 publication Critical patent/JP2806711B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78Apparatus for connecting with wire connectors
    • H01L2224/786Means for supplying the connector to be connected in the bonding apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/851Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector the connector being supplied to the parts to be connected in the bonding apparatus
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001Technical content checked by a classifier
    • H01L2924/00014Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Wire Bonding (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明はICワイヤボンダに関
し、特に超音波ウェッジボンダのワイヤクランパに関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an IC wire bonder, and more particularly to a wire clamper for an ultrasonic wedge bonder.

【0002】[0002]

【従来の技術】従来のICワイヤボンダにおけるワイヤ
クランパは、図6の正面図、図7の側面図、図8の先端
部拡大図、図9の下面図に示すように、左右一対のクラ
ンパ1からなり、クランパ1先端部のワイヤクランプ面
12はフラットである。そして、ボンディング用ワイヤ
3へのクランプ力は左右一対のクランパ間に取り付けら
れたクランプばね13のばね力に依存している。また、
ワイヤクランパを左右に開くシリンダ2が片方のクラン
パ1に取り付けられており、シリンダ2を駆動すること
で左右一対のクランパは上部の回転軸を中心に左右に開
閉する機構となっている。ワイヤクランパはリニアウェ
イベアリング6に沿って上下方向に移動でき、また、ボ
ンディング用ワイヤ3はワイヤクランパを経由して、超
音波振動子4に取り付けられたボンディングツール5に
よりIC素子およびICケース内部リードに超音波ボン
ディングされる。
2. Description of the Related Art As shown in a front view of FIG. 6, a side view of FIG. 7, an enlarged view of a tip portion of FIG. 8, and a bottom view of FIG. That is, the wire clamp surface 12 at the tip of the clamper 1 is flat. The clamping force on the bonding wire 3 depends on the spring force of the clamp spring 13 attached between the pair of right and left clampers. Also,
A cylinder 2 that opens the wire clamper to the left and right is attached to one of the clampers 1. By driving the cylinder 2, a pair of left and right clampers open and close left and right about the upper rotation axis. The wire clamper can move up and down along the linear way bearing 6, and the bonding wire 3 passes through the wire clamper and is connected to the IC element and the lead inside the IC case by the bonding tool 5 attached to the ultrasonic vibrator 4. Is ultrasonically bonded.

【0003】[0003]

【発明が解決しようとする課題】この従来のワイヤクラ
ンパでは、ボンディング用ワイヤをフラットなクランプ
面で左右からクランプすることによって保持しているた
め、ワイヤボンディング中に左右のクランパを開くとボ
ンディング用ワイヤのたるみや振動でクランプ面からボ
ンディングワイヤが外れてしまうという問題点がある。
In this conventional wire clamper, the bonding wire is held by being clamped from the left and right on a flat clamping surface. Therefore, when the left and right clampers are opened during the wire bonding, the bonding wire is removed. There is a problem that the bonding wire comes off from the clamp surface due to slack or vibration.

【0004】[0004]

【課題を解決するための手段】本発明のICワイヤボン
ダは、ワイヤクランパのクランプ面からボンディング用
ワイヤが外れないための中空円筒状のワイヤ供給部と、
ワイヤ供給部の下端に設けられボンディング用ワイヤを
クランプするための2つ以上に等分割されたコレット状
のクランプ部と、ボンディング用ワイヤに対しクランプ
荷重を発生させるためのコイルばねと、クランプ部が挿
入されるテーパ穴を有するガイドと、ワイヤ供給部をワ
イヤクランパ本体内で可動させ前記テーパ穴によりクラ
ンプ部を開閉させるシリンダとを備えたワイヤクランパ
を有する。
According to the present invention, there is provided an IC wire bonder comprising: a hollow cylindrical wire supply portion for preventing a bonding wire from coming off a clamp surface of a wire clamper;
The bonding wire provided at the lower end of the wire supply section
A collet-shaped clamp portion equally divided into two or more for clamping, a coil spring for generating a clamp load on the bonding wire, a guide having a tapered hole into which the clamp portion is inserted, and a wire supply And a cylinder for moving the part in the wire clamper main body and opening and closing the clamp part by the tapered hole.

【0005】[0005]

【実施例】次に本発明について図面を参照して説明す
る。図1は本発明の一実施例の正面図、図2はその側面
図、図3は図1の部分拡大断面図、図4および図5はそ
れぞれ図3のクランプ部先端の下面図である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, the present invention will be described with reference to the drawings. FIG. 1 is a front view of one embodiment of the present invention, FIG. 2 is a side view thereof, FIG. 3 is a partially enlarged cross-sectional view of FIG. 1, and FIGS. 4 and 5 are bottom views of the tip of the clamp portion of FIG.

【0006】本実施例におけるICワイヤボンダ用のワ
イヤクランパ機構は、ボンディング用ワイヤ3が中空円
筒状のワイヤ供給部11の軸方向に通され、ワイヤ供給
部11の下端に設けられたクランプ部8先端のワイヤク
ランプ面12がボンディング用ワイヤ3の外形と同じ円
弧面を有し、また、コイルばね10とテーパ穴を有する
ガイド9がワイヤクランパ本体7内に取り付けられ、ワ
イヤ供給部11が弾力的にワイヤクランパ本体7内を可
動できるようになっている。
A wire clamper mechanism for an IC wire bonder according to the present embodiment is configured such that a bonding wire 3 is passed in the axial direction of a hollow cylindrical wire supply unit 11 and a tip end of a clamp unit 8 provided at a lower end of the wire supply unit 11. Has a circular arc surface identical to the outer shape of the bonding wire 3, a coil spring 10 and a guide 9 having a tapered hole are mounted in the wire clamper body 7, and the wire supply portion 11 is elastically The inside of the wire clamper main body 7 can be moved.

【0007】本実施例の動作は、コイルばね10のばね
力をワイヤクランパ本体7に固定されたテーパ穴付きの
ガイド9からワイヤ供給部11と一体であるクランプ部
8の外側テーパ部へ伝え、クランプ部8が閉じる際にこ
の力がワイヤクランプ面12のワイヤクランプ力として
働く。クランプ部8は複数個に等分割されたコレットチ
ャック構造とし、例えば、図4に示すように2分割でも
よいし、図5のように4分割としてもよい。また、ワイ
ヤボンディング結線中には、シリンダ2の駆動力でワイ
ヤ供給部11をボンディング用ワイヤ3の進行方向に移
動させ、ガイド9とクランプ部8とのテーパ面に隙間を
つくり、ワイヤクランプ面12が開いてクランプ力を小
さくする。
In the operation of the present embodiment, the spring force of the coil spring 10 is transmitted from the guide 9 having a tapered hole fixed to the wire clamper body 7 to the outer tapered portion of the clamp portion 8 integrated with the wire supply portion 11, This force acts as a wire clamping force on the wire clamping surface 12 when the clamp portion 8 is closed. The clamp portion 8 has a collet chuck structure divided into a plurality of equal parts. For example, the clamp part 8 may be divided into two parts as shown in FIG. 4 or four parts as shown in FIG. Further, during wire bonding connection, the wire supply unit 11 is moved in the traveling direction of the bonding wire 3 by the driving force of the cylinder 2 to form a gap in the taper surface between the guide 9 and the clamp unit 8, and the wire clamp surface 12 is formed. Opens to reduce the clamping force.

【0008】[0008]

【発明の効果】以上説明したように本発明は、中空円筒
状のワイヤ供給部11の先端にあるクランプ部をコレッ
ト構造としたので、ボンディング用ワイヤ3がワイヤク
ランプ面から外れることがなくなる。
As described above, according to the present invention, the clamp portion at the tip of the hollow cylindrical wire supply portion 11 is provided with a collet.
The bonding structure prevents the bonding wire 3 from coming off the wire clamp surface.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例の正面図である。FIG. 1 is a front view of one embodiment of the present invention.

【図2】図1の側面図であるFIG. 2 is a side view of FIG.

【図3】図1の部分拡大断面図である。FIG. 3 is a partially enlarged sectional view of FIG. 1;

【図4】図3のクランプ部先端の下面図である。FIG. 4 is a bottom view of the distal end of the clamp unit shown in FIG. 3;

【図5】図3のクランプ部先端の他の例の下面図であ
る。
FIG. 5 is a bottom view of another example of the distal end of the clamp unit in FIG. 3;

【図6】従来のICワイヤボンダにおけるワイヤクラン
パの正面図である。
FIG. 6 is a front view of a wire clamper in a conventional IC wire bonder.

【図7】図6の側面図である。FIG. 7 is a side view of FIG. 6;

【図8】図6の部分拡大図である。FIG. 8 is a partially enlarged view of FIG. 6;

【図9】図8の下面図である。FIG. 9 is a bottom view of FIG.

【符号の説明】[Explanation of symbols]

1 クランパ 2 シリンダ 3 ボンディング用ワイヤ 4 超音波振動子 5 ボンディングツール 6 リニアウェイベアリング 7 ワイヤクランパ本体 8 クランプ部 9 ガイド 10 コイルばね 11 ワイヤ供給部 12 ワイヤクランプ面 13 クランプばね DESCRIPTION OF SYMBOLS 1 Clamper 2 Cylinder 3 Bonding wire 4 Ultrasonic transducer 5 Bonding tool 6 Linear way bearing 7 Wire clamper main body 8 Clamp part 9 Guide 10 Coil spring 11 Wire supply part 12 Wire clamp surface 13 Clamp spring

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 IC素子とICケース内部リードとをボ
ンディング用ワイヤで結線するICワイヤボンダにおい
て、ボンディング用ワイヤが軸芯を通る中空円筒状のワ
イヤ供給部と、このワイヤ供給部の下端に設けられた
レット状のクランプ部と、このクランプ部が挿入される
テーパ穴を有するガイドと、このガイドを押し下げボン
ディング用ワイヤに対しクランプ荷重を発生するための
コイルばねと、前記ワイヤ供給部を可動させ前記テーパ
穴によりクランプ部を開閉させるシリンダとからなるワ
イヤクランパを有することを特徴とするICワイヤボン
ダ。
1. A IC bonder for connecting the IC element and the IC casing inner lead at the bonding wire, a hollow cylindrical wire supply part bonding wire passes through the axis, is provided at the lower end of the wire feed portion and co <br/> cmdlet shaped clamping portions, the guide having a tapered hole that the clamping part is inserted, Bonn depressing the guide
To generate a clamp load on the wire
An IC wire bonder comprising: a wire clamper including a coil spring and a cylinder that moves the wire supply unit and opens and closes a clamp unit with the tapered hole.
JP4287219A 1992-10-26 1992-10-26 IC wire bonder Expired - Fee Related JP2806711B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4287219A JP2806711B2 (en) 1992-10-26 1992-10-26 IC wire bonder

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4287219A JP2806711B2 (en) 1992-10-26 1992-10-26 IC wire bonder

Publications (2)

Publication Number Publication Date
JPH06140476A JPH06140476A (en) 1994-05-20
JP2806711B2 true JP2806711B2 (en) 1998-09-30

Family

ID=17714590

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4287219A Expired - Fee Related JP2806711B2 (en) 1992-10-26 1992-10-26 IC wire bonder

Country Status (1)

Country Link
JP (1) JP2806711B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101409460B1 (en) 2008-02-12 2014-06-19 삼성전자주식회사 Wire clamp and wire bonding apparatus having the same

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50120261A (en) * 1974-03-06 1975-09-20
JP2522452B2 (en) * 1990-08-15 1996-08-07 日本電気株式会社 Wire bonding equipment
JP3053841U (en) * 1998-05-07 1998-11-17 新興商事株式会社 Discharged water treatment device and filter tube

Also Published As

Publication number Publication date
JPH06140476A (en) 1994-05-20

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Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19980707

LAPS Cancellation because of no payment of annual fees