JP2797775B2 - Image tube manufacturing method - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a proximity type image tube, and more particularly to a method for manufacturing a proximity type image tube which has an improved method of degassing a micro-channel plate and has excellent life characteristics.

[0002]

2. Description of the Related Art Conventionally, a proximity type image tube has been manufactured by the following steps.

That is, as shown in FIG. 2, a photoelectron emission surface 2 is formed on an inner surface of a light input window 3 in a photoelectron emission surface forming portion 1 installed at a position different from a tube 100 in a vacuum chamber. , The micro tube installed in the tube 100
A DC operating voltage is applied to the channel plate 6,
The electrons 8 generated by the electron gun 9 are collided with each other to release gas from the inner wall of the channel, which will be described later, to perform degassing.

[0004] Thereafter, the light input window 3 is moved to the tube 100 and sealed by the moving holder 4 operated by the moving manipulator 5.

FIG. 3 is an enlarged perspective view of a micro channel plate. The micro channel plate 6
A plate mainly composed of glass having a thickness of about 0.4 mm is provided with millions of holes or channels 12 having a diameter of about 10 μm. The number of electrons is multiplied by the secondary electron emission phenomenon.

A voltage is applied to the micro channel plate 6 with respect to electrodes 11 formed on both upper and lower end surfaces of the micro channel plate 6.

FIG. 4 shows a micro channel plate 6.
The DC voltage in the direction in which the electron emission end face 62 is positive with respect to the electron incidence end face 61 is applied by the micro-channel plate driving power supply 16, and the electrons 8 incident into the channels of the micro-channel plate 6. Is accelerated, and gas adhering to the inner wall of the channel 12 due to collision with the inner wall of the channel 12 is released.

In FIG. 4, electrons 8 are emitted from an electron gun 9, and the operation of the electron gun 9 is controlled by an electron gun control power supply 14. FIG. 4 shows a power supply 15 for electron acceleration of the electrons 8.
Are also shown.

[0009]

Since the voltage applied to the above-mentioned conventional micro channel plate is DC, the path through which electrons pass in the channel and the energy of the electrons are fixed.

[0010] For this reason, degassing in the channel causes positional nonuniformity, and degassing is not sufficiently performed in the entire micro channel plate.

As described above, in an image tube using a micro-channel plate that has not been sufficiently degassed, the degree of vacuum in the tube gradually deteriorates after sealing, and the function of the photoelectron emission surface is impaired. Deterioration of the function of the photoelectron emission surface has the disadvantage that the life characteristics of the image tube are significantly degraded.

It is an object of the present invention to provide a method of manufacturing a proximity type image tube which eliminates the above-mentioned disadvantages, sufficiently degasses the micro channel plate, and can greatly improve the life characteristics of the image tube. It is in.

[0013]

According to the present invention, there is provided a method of manufacturing an image tube, comprising: a light input window having a photoelectron emission surface on an inner surface thereof; a micro channel plate having a function of multiplying secondary electrons; And a method of manufacturing a proximity type image tube having a light output window, comprising degassing by superimposing an AC voltage on a DC operation voltage applied to the micro channel plate.

[0014]

Next, the present invention will be described with reference to the drawings.

FIG. 1 is a block diagram showing the configuration of one embodiment of the present invention.

In the embodiment shown in FIG. 1, an electron gun 8 for emitting electrons 8 radiating to the channels of a micro channel plate 6, an electron gun control power supply 14, and an electron acceleration power supply 1
5 and a micro channel plate 16 as a DC power supply applied to the micro channel plate 6 and an insulating transformer 13 directly related to the present invention. In these configurations, those having the same reference numerals as those in FIG.

Electrons 8 incident on the micro channel plate enter the channels of the micro channel plate 6 and collide with the channel walls to release gas adhering to the channel walls.

A DC voltage is applied to the micro channel plate 6 so that the electron exit end face 62 is positive with respect to the electron incident end face 61.

In this embodiment, the isolation transformer 1 is included in the DC application circuit for the micro channel plate 6.
3 is inserted, an AC voltage of 100 V is superimposed on a normal applied DC voltage of about 1 KV, and the applied voltage is changed in a range of about 900 V to 1100 V.

As described above, by superimposing the AC voltage on the DC voltage applied to Δ applied to the micro channel plate 6, randomness can be provided to the electron flight path in the channel of the micro channel plate 6. In addition to providing the energy, the energy possessed by the electrons can be given a wide range, whereby the outgassing in the channel can be performed extremely effectively.

In this embodiment, the superimposed AC is applied via the insulating transformer. However, it is needless to say that the AC may be replaced with another applying means capable of securing the same application effect.

[0022]

As described above, the present invention superimposes an AC voltage on a DC voltage applied to a micro-channel plate of a channel, thereby effectively degassing the channel, and thereby improving the life of the image tube. There is an effect that characteristics can be significantly improved.

[Brief description of the drawings]

FIG. 1 is a block diagram showing the configuration of an embodiment of the present invention.

FIG. 2 is an explanatory view schematically showing a method of manufacturing a proximity type image tube.

FIG. 3 is an enlarged perspective view of a micro channel plate.

FIG. 4 is a block diagram showing a conventional degassing process of a micro channel plate.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Photoelectron emission surface formation part 2 Photoelectron emission surface 3 Optical input window 4 Transfer holder 5 Transfer manipulator 6 Micro channel plate 7 Vacuum chamber 8 Electron 9 Electron gun 10 Photoelectron emission surface forming substance 11 Electrode 12 Channel 13 Insulation transformer 100 Tube 14 Power supply for electron gun control 15 Power supply for electron acceleration 16 Power supply for micro channel plate drive

Claims (1)

(57) [Claims] 1. A proximity type including an optical input window having a photoelectron emission surface on an inner surface thereof, a micro channel plate having a secondary electron multiplication function, and an optical output window having a fluorescent material on an inner surface thereof. In the method for manufacturing an image tube, the micro tube
In the degassing process of the channel plate,
The AC voltage is superimposed on the DC operating voltage applied to the channel plate, and the electrons generated by the electron gun collide.
A method for producing an image tube, comprising the step of: