JP2794327B2 - Fluid ejection nozzle - Google Patents
Fluid ejection nozzleInfo
- Publication number
- JP2794327B2 JP2794327B2 JP16829190A JP16829190A JP2794327B2 JP 2794327 B2 JP2794327 B2 JP 2794327B2 JP 16829190 A JP16829190 A JP 16829190A JP 16829190 A JP16829190 A JP 16829190A JP 2794327 B2 JP2794327 B2 JP 2794327B2
- Authority
- JP
- Japan
- Prior art keywords
- fluid
- ejection nozzle
- fluid ejection
- hemispherical shell
- flow
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Gas Burners (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は流体噴出ノズルに関し、さらに詳しくはガス
状、気液混相（例えば噴霧状）または液体などの噴出ノ
ズルの構造に関し、燃料ガスの燃焼バーナ、ジェットの
噴出ノズル、レジスト滴下ノズル等に利用可能なもので
ある。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fluid ejection nozzle, and more particularly, to a structure of a gas, gas-liquid multi-phase (for example, spray) or liquid ejection nozzle, and relates to combustion of fuel gas. It can be used for burners, jet ejection nozzles, resist dropping nozzles, and the like.
流体を噴出するノズルは、用途によって種々のものが
あるが、高速流を乱流、脈流などのない安定した状態で
噴出するノズルは知られていない。There are various types of nozzles for ejecting a fluid, depending on the application, but there is no known nozzle that ejects a high-speed flow in a stable state without turbulence or pulsation.
しかし、このような要請は、例えば半導体のドーパン
ト塗布、半導体のフォトリソグラフィの前工程であるフ
ォトレジスト塗布技術バーナー燃焼反応の安定化、被加
熱領域のばらつきの削減、印刷用インクジェット技術、
研削用ジェット技術、ジェットエンジンの効率向上な
ど、技術の各分野にわたって広く存在する。However, such demands include, for example, semiconductor dopant application, photoresist coating technology which is a pre-process of semiconductor photolithography, stabilization of burner combustion reaction, reduction of variations in heated regions, printing inkjet technology,
There is a wide range of technologies, including jet technology for grinding and improving the efficiency of jet engines.
本発明はこのような要請に対応する新規な流体噴出ノ
ズルを提供することを目的とする。An object of the present invention is to provide a novel fluid ejection nozzle that meets such a demand.
本発明は、小径端を噴出口とするレデューサと、その
大径側は接続した半球殻体と、この半球殻体内面に沿っ
て流体を供給する供給口とからなることを特徴とする流
体噴出ノズルである。The present invention provides a fluid ejecting apparatus comprising: a reducer having a small-diameter end as an ejection port; a large-diameter side having a connected hemispherical shell; and a supply port for supplying a fluid along the inner surface of the hemispherical shell. Nozzle.
レデューサと半球殻体との間に直管を介装してもよ
い。A straight pipe may be interposed between the reducer and the hemispherical shell.
また、導入流体を燃料及び支燃ガスとすればバーナと
なる。軸心に半球体殻側からレデューサ側に突出する棒
体を設けると流れの安定化に寄与する。If the introduced fluid is a fuel and a supporting gas, it becomes a burner. Providing a rod projecting from the hemispherical shell side to the reducer side at the axis contributes to the stabilization of the flow.
また、導入流体は気液混相体でも液体でもよい。 Further, the introduced fluid may be a gas-liquid mixed phase body or a liquid.
軸対象の拡大または縮小流路に、この流路と同心の環
状と流速極小部を有する軸流方向の流体流を形成する
と、流体流中に旋回速度成分を自生する。この現象は、
流れの乱れエネルギーをうまく旋回速度エネルギーに置
換すれば、乱流を制御することができることを示唆して
いる。When a fluid flow in the axial flow direction having an annular shape and a minimum flow velocity portion concentric with the flow passage is formed in an expansion or contraction flow passage having an axial symmetry, a swirling speed component is generated in the fluid flow. This phenomenon is
It suggests that turbulence can be controlled if the turbulence energy of the flow is successfully replaced by the swirl velocity energy.
このような流れは次の〜の条件を満足すれば生成
することができる。すなわち、 軸対象の拡大または縮小流れ場 旋回方向速度成分がゼロに近い軸方向流 円環状の極小点をもつ主流速分布 自生旋回流動では、旋回か自生することによって従来
乱流の乱れのエネルギーとしてあらわれていた流体エネ
ルギーが旋回速度エネルギーに置換される。したがって
従来の同じレイノルズ数の流れと比較すると流れの乱れ
度が小さくなる。このようにして、自生旋回流動により
乱流を抑制することができる。Such a flow can be generated if the following conditions are satisfied. In other words, the expansion or contraction flow field of the axial object The axial flow whose swirl velocity component is close to zero Main flow velocity distribution with an annular minimum point In the spontaneous swirl flow, the turbulence of conventional turbulent Appeared fluid energy is replaced by swirl velocity energy. Therefore, the turbulence of the flow is smaller than that of the conventional flow having the same Reynolds number. In this manner, turbulence can be suppressed by the natural swirling flow.
本発明は以上の基本原理に基づいており、上記構成の
流体噴出ノズルは一様な流動状態のガスを噴出し、スポ
ット加熱可能なバーナとか一様塗布するレジスト塗布ノ
ズル等に用いることができる。The present invention is based on the above basic principle, and the fluid ejection nozzle having the above-described configuration ejects a gas in a uniform flowing state and can be used for a burner capable of spot heating, a resist application nozzle for uniform application, and the like.
第１図は本発明の流体噴出ノズルの実施例の縦断面図
を示すものである。この流体噴出ノズルは、小径端が噴
出口のなっているレデューサ１と、このレデューサ１の
大径側に接続した半球殻体２と、この半球殻体２の内面
に沿って流体を供給する供給口４から構成されている。
この例ではレデューサ１と半球殻体２との間に直管３を
介装している。流体５は半球殻体２の内面に沿って供給
される。この流体５を燃料と空気とし、イグナイタ６を
棒７の先端に設けるとバーナとなる。FIG. 1 is a longitudinal sectional view of an embodiment of the fluid ejection nozzle of the present invention. The fluid ejection nozzle includes a reducer 1 having a small-diameter end serving as an ejection port, a hemispherical shell 2 connected to the large diameter side of the reducer 1, and a supply for supplying fluid along the inner surface of the hemispherical shell 2. The mouth 4 is configured.
In this example, a straight pipe 3 is interposed between the reducer 1 and the hemispherical shell 2. The fluid 5 is supplied along the inner surface of the hemispherical shell 2. When this fluid 5 is used as fuel and air, and an igniter 6 is provided at the tip of the rod 7, a burner is obtained.
第２図は第１図と同じ構成のもので半球体側からレデ
ューサ側に向かって、装置の軸心に細長い棒体８を突出
したもので、この棒体によって、速やかに安定した旋回
を伴う乱流抑制流れを生成する。FIG. 2 shows the same configuration as that of FIG. 1, in which an elongated rod 8 protrudes from the hemisphere toward the reducer toward the axis of the apparatus. Generate a flow suppression flow.
この棒体８の先端にイグナイタ６を設けると、非常に
安定性の高いバーナを構成することができる。When the igniter 6 is provided at the tip of the rod 8, a very stable burner can be formed.
次に第３図に、本発明のバーナの性能試験を行った実
験装置を示した。Next, FIG. 3 shows an experimental apparatus for performing a performance test of the burner of the present invention.
バーナ出口孔の径が10mmφの本発明の実施例のバーナ
10と通常のブンゼンバーナにて都市ガスを燃焼させ、距
離ｄが10cmの位置に置いた耐熱ガラス11を直接直火で加
熱し、この耐熱ガラス11の裏面熱分布をサーモグラフカ
メラ（サーモビュア）12にて観察した。13は制御装置、
14はモニタである。The burner according to the embodiment of the present invention in which the diameter of the burner outlet hole is 10 mmφ
The city gas is burned with 10 and a normal Bunsen burner, and the heat-resistant glass 11 placed at a distance d of 10 cm is directly heated by an open flame, and the heat distribution on the back surface of the heat-resistant glass 11 is measured with a thermograph camera (thermoviewer) 12. Was observed. 13 is a control device,
14 is a monitor.
通常のブンゼンバーナでは第５図に示すように、サー
モグラフ（サーモビュア）13のモニタ画面14の500℃の
領域の直径D2は約20cmの円形であり、時間的に変動があ
り、この変動分を入れるとD2＝20cm±5cmであった。こ
れに対して実施例のバーナでは第４図に示すように500
℃の領域の直径D1は約10cmの円形で、時間変動も小さ
く、D1＝10cm±2cmであった。In normal Bunsen burner as shown in FIG. 5, the diameter D 2 of 500 ° C. in the area of the monitor screen 14 thermographic (thermoviewer) 13 is circular about 20 cm, there is a time-varying, the variation And D 2 = 20 cm ± 5 cm. On the other hand, in the burner of the embodiment, as shown in FIG.
The diameter D 1 in the region of ° C. was a circle of about 10 cm, the time variation was small, and D 1 = 10 cm ± 2 cm.
本発明の流体噴出ノズルをバーナとして用いるとスポ
ット加熱が可能で加熱の安定性が得られることがわかっ
た。It has been found that when the fluid ejection nozzle of the present invention is used as a burner, spot heating can be performed and heating stability can be obtained.
本発明によれば、高速流を乱流、脈流などのない状態
で噴出することができ、燃焼反応の安定したバーナ、一
様塗布のできるレジスト噴出ノズルその他各分野の流体
噴出ノズルとして寄与するところが大である。ADVANTAGE OF THE INVENTION According to this invention, a high-speed flow can be jetted in the state without a turbulent flow, a pulsating flow, etc., and it contributes as a burner with a stable combustion reaction, a resist jet nozzle which can apply uniformly, and a fluid jet nozzle in various fields. However, it is big.
第１図、第２図は本発明の実例例の縦断面図、第３図は
本発明装置の効果を説明する実験装置の模式図、第４
図、第５図はその結果を示すサーモビュアの見取り図で
ある。 １……レデューサ、２……半球殻体 ３……直管、４……流入口 ５……ガス、６……イグナイタ ７……棒、８……棒体 10……バーナ、11……耐熱ガラス 12……サーモグラフカメラ（サーモビュア） 13……制御装置、14……モニタ1 and 2 are longitudinal sectional views of an example of the present invention, FIG. 3 is a schematic view of an experimental apparatus for explaining the effect of the apparatus of the present invention, and FIG.
FIG. 5 is a sketch of the thermoviewer showing the results. DESCRIPTION OF SYMBOLS 1 ... Reducer, 2 ... Hemisphere shell 3 ... Straight pipe, 4 ... Inflow port 5 ... Gas, 6 ... Igniter 7 ... Bar, 8 ... Bar body 10 ... Burner, 11 ... Heat resistant Glass 12: Thermographic camera (thermoviewer) 13: Controller, 14: Monitor
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特公 昭46−32112（ＪＰ，Ｂ２) 特公 昭57−108（ＪＰ，Ｂ２) (58)調査した分野(Int.Cl.6，ＤＢ名) F15D 1/00 - 1/08 F23D 14/48────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-B-46-32112 (JP, B2) JP-B-57-108 (JP, B2) (58) Field surveyed (Int. Cl. 6 , DB name) F15D 1/00-1/08 F23D 14/48
Claims (6)
大径側に接続した半球殻体と、該半球殻体内面に沿って
流体を供給する供給口とからなることを特徴とする流体
噴出ノズル。1. A fluid comprising a reducer having a small diameter end as an ejection port, a hemispherical shell connected to a large diameter side thereof, and a supply port for supplying a fluid along the inner surface of the hemispherical shell body. Spout nozzle.
した請求項１記載の流体噴出ノズル。2. The fluid ejection nozzle according to claim 1, wherein a straight pipe is interposed between the reducer and the hemispherical shell.
１または２記載の流体噴出ノズル。3. The fluid ejection nozzle according to claim 1, wherein the introduced fluid is a fuel and a supporting gas.
棒体を突設した請求項３記載の流体噴出ノズル。4. The fluid ejection nozzle according to claim 3, wherein a rod is protruded from the gas hemispherical shell toward the reducer at the axis.
は２記載の流体噴出ノズル。5. The fluid ejection nozzle according to claim 1, wherein the introduction fluid is a gas-liquid mixed phase body.
記載の流体噴出ノズル。6. The method according to claim 1, wherein the introduction fluid is a liquid. 2
The fluid ejection nozzle according to any of the preceding claims.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16829190A JP2794327B2 (en) | 1990-06-28 | 1990-06-28 | Fluid ejection nozzle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16829190A JP2794327B2 (en) | 1990-06-28 | 1990-06-28 | Fluid ejection nozzle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0460205A JPH0460205A (en) | 1992-02-26 |
| JP2794327B2 true JP2794327B2 (en) | 1998-09-03 |
Family
ID=15865294
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16829190A Expired - Fee Related JP2794327B2 (en) | 1990-06-28 | 1990-06-28 | Fluid ejection nozzle |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2794327B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4839078B2 (en) * | 2005-12-12 | 2011-12-14 | 株式会社日立製作所 | Magnetic resonance imaging apparatus and electromagnet apparatus |
-
1990
- 1990-06-28 JP JP16829190A patent/JP2794327B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0460205A (en) | 1992-02-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4081129B2 (en) | Combustion method including separate injection of fuel and oxidant stream and combustion thereof | |
| EP0843796A1 (en) | Oxy-liquid fuel combustion process and apparatus | |
| JPH1073211A (en) | Oxygen fuel burner | |
| JPH09509733A (en) | Fuel nozzle introduced from the tangential direction | |
| JPH04136603A (en) | Burner and combustion equipment | |
| JPS58200911A (en) | Combustion method for liquid fuel and device therefor | |
| JP2794327B2 (en) | Fluid ejection nozzle | |
| JP2981959B2 (en) | Burner for liquid fuel | |
| JP3770356B2 (en) | Burner for liquid fuel, mounting structure thereof, and combustion method | |
| JP2764370B2 (en) | Gas burner for non-oxidizing furnace | |
| JP3107713B2 (en) | Burner for oil water heater | |
| JP2561382B2 (en) | Low NOx burner | |
| JP2948509B2 (en) | Burner mixer for liquid fuel | |
| JP4420492B2 (en) | Liquid fuel burner and operation method thereof | |
| JP3589385B2 (en) | Powder synthesis equipment | |
| JP2561074B2 (en) | Evaporative burner for all secondary air type liquid fuel | |
| JP2982437B2 (en) | Liquid fuel combustion device | |
| JP4190667B2 (en) | Liquid fuel burner | |
| JPH0335946Y2 (en) | ||
| JP4730924B1 (en) | Nozzle device and burner device provided with the nozzle device | |
| JP2004188320A (en) | Mixing apparatus | |
| JP2523777B2 (en) | Combustor | |
| JPH04225701A (en) | Burner | |
| JPS5963406A (en) | Liquid fuel burning apparatus | |
| JPS62116815A (en) | Combustion device with supersonic wave atomization unit |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |