JP2790698B2 - Scale detector - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Field of Industrial Application) The present invention relates to a scale detection device useful for error correction of a drive system or the like in an NC processing machine.

(Prior Art) As a drive system in a conventional NC processing machine, there are examples of a drive system using a semi-closed loop control system and a drive system using a full closed loop control system.

As is well known, in the former, a servomotor is provided with a position detector such as a rotary encoder or a resolver, and a moving body is driven via a power transmission mechanism using a ball screw or a rack and pinion. In the latter, the actual moving position of the moving body is detected by a highly accurate position detector such as a so-called optical scale.

However, in a control system using a semi-closed loop, there is a problem that a thermal distortion of a power transmission mechanism including a ball screw or a rack and pinion and a thermal distortion of a frame affect a speed reduction mechanism, thereby causing a processing error.

Comparing the ball screw and the rack and pinion, the thermal effect of the ball screw is larger, but it is difficult to say that the rack and pinion is originally superior because the positioning accuracy of the rack and pinion is lower.

Further, when the control of the full closed loop is used, thermal distortion of the power transmission mechanism is removed, but an error due to thermal distortion of the work or the frame cannot be detected. In addition, the optical scale is very expensive, and is liable to be physically damaged due to vibration during processing, causing problems such as loss of synchronism in the scale signal. Furthermore, since the feedback signal is always supplied to the servo system, the response speed is limited, and the motor speed is limited. Further, there is a problem that the servo system becomes unstable due to the rigidity of the drive system and hunting occurs, which is advantageous and disadvantageous to the semi-closed loop.

Therefore, by detecting the moving state of the moving body at a fixed position in a manner that can be converted to a constant temperature, by comparing this detection value with the detection value in the closed loop control system,
It is conceivable to control the closed-loop control system such that the actual machining position matches the command value at the constant temperature.

In this case, the moving state of the moving object is detected by using another scale, separately from the position detection of the closed loop control system, and the detected value is compared with the position detected by the closed loop control system.

(Problems to be Solved by the Invention) However, the scale detection device considered as described above has a configuration in which a specially provided scale is detected by, for example, an optical sensor along with the movement of the moving body. It is difficult to read marks on the scale accurately.

For example, a commercially available optical sensor has a detection timing delay of 30 μs or more, and a nearby sensor has a detection timing delay of 500 μs or more, so if the moving speed is 50 m / min and the response delay is 1 ms, 0.83
A shift of 3 mm will occur.

Further, even if an offset is given to the response delay as a whole, it is difficult to give this kind of offset if speed variation occurs when real-time detection is desired in accordance with actual machining.

Therefore, the present invention provides a scale detection device that detects the moving state of a moving object using a scale provided separately from a position detector of a closed-loop control system. An object of the present invention is to perform high-accuracy position detection by converting the data into velocity data.

[Constitution of the Invention] (Means for Solving the Problems) The present invention for achieving the above object is an apparatus for detecting a scale having a plurality of marks arranged along a moving body of a processing machine in accordance with the movement of the moving body. Detecting the passing timing of the mark input end and the output end, detecting the latch speed based on the time difference between the passing timings of both ends, and managing the closed loop of the moving body at that time at one end. A data latch circuit for latching moving position data, a data table for storing a relation table between the latch data and the latch speed, and using the data table to correct the data latched by the data latch circuit to one corresponding to a reference speed. A data correction circuit.

(Operation) In the scale detection device of the present invention, the passage time of the input end and the output end of the mark on the scale is measured, and the movement position data managed by the closed loop at one end is latched and passed. The position data latched according to the time, that is, the passing speed, is corrected to the value corresponding to the reference speed.

(Example) Hereinafter, an example of the present invention will be described.

FIG. 2 is an explanatory view showing an example of a positioning device in which the present invention is applied to a punch press. The drive system is shown as an example of a semi-closed loop.

In the figure, a table 1 that is movable in the left-right direction (X direction) is fixed to a table bracket 2.
The table bracket 2 is movable in the X direction according to the rotation of the ball screw 4 by screwing a ball screw 4 extending in the X direction to a nut 3 embedded above the table bracket 2.

Both ends of the ball screw 4 are rotatably supported by bearings 5. One end of the ball screw 4 is connected to a servomotor 7 via a reduction gear 6.

The servomotor 7 is provided with a tachogenerator 8 and an incremental type rotary encoder 9.

A work clamp device 10 is provided on the table 1 so as to be movable in a Y direction orthogonal to the X direction (a method orthogonal to the paper surface in the figure), and moves the gripped work W in the Y direction on the table 1. It is possible. Therefore, the work W can be freely moved in the X and Y planes by driving the servo motor 7 in the X direction and driving the work lamp device 10 in the Y direction.

A fixed frame portion below the table 1 is provided with a master scale 12 for the X-axis, which is supported at one point by a pin 11 at the origin position and is extendable in the X direction.

The master scale 12 is formed in a band shape using a homogeneous material having a known coefficient of thermal expansion, and a plurality of optical sensor dog holes Pn (P1, P2, P3) are sequentially formed at a constant pitch (for example, 100 mm pitch) with respect to the pins 11. , ..., PN) are provided. Since the pitch is measured and used as described later, it is not always necessary to manufacture it with high precision. However, it is necessary to make the hole dimensions of each hole Pn constant.

An optical proximity sensor 13 for detecting the dog hole Pn with the movement of the table 1 is provided on the lower surface of the table 1.
Is provided.

In this example, a crankshaft 13 is provided above the table 1, and a ram (not shown) attached to the crankshaft 13 is driven up and down to press a mold provided above and below the work W. It is designed to be punched. A top dead center dog 14 is provided at one position of the crankshaft 13, and by detecting this with a proximity sensor 15, the top dead center, that is, a non-punch state can be identified.

The frame is provided with a temperature sensor TS for detecting the temperature as a representative value of the environmental temperature.

On the other hand, the control device for controlling the punch press having the above configuration is
The control device is mainly composed of an NC device and a programmable controller connected to the NC device.A counter circuit 16 is provided in, for example, the programmable controller of the control device, and the counter circuit 16 includes a transmission / reception arithmetic processing device 17 and a servo parameter storage unit 18. Connected to the servo system 19 provided. The general servo system 19 has a position loop and a speed loop, and inputs a positioning target value output from the NC device, and controls the moving body, that is, the table 1 at the target speed at the target value. It is something.

The counter circuit 16 inputs a detection signal of the dog hole Pn of the master scale 12 at a predetermined timing, latches a position signal detected by the encoder 9 at that time, and transmits this value to the transmission / reception arithmetic unit 17. .

The transmission / reception arithmetic processing unit 17 has a buffer therein, inputs each pitch distance, the detection data of the dog hole Pn, sets a servo parameter in the servo parameter storage unit 18, and rewrites the set parameter. It is.

In the apparatus having the above-described configuration, the following description will be made in the order of the initial setting, the principle of correction, the process of changing the servo parameters during machining, the machine material correspondence method, and the dog hole detection method.

At the time of assembling, a laser mirror is attached to a placket or the like of the table 1, and a difference δ of an actual operation with respect to an NC command value is stored by a laser distance meter.

For example, assuming that the actual movement amount by laser detection is 100.05 mm with respect to a command value of 100 mm, a difference of 100.05−
100 = 0.05 is recorded, and the value is given to the arithmetic processing unit 17.

Therefore, after making the measurement value of the encoder accurate by the difference δ accurately measured by the laser distance meter, the pitch interval is measured, and this is converted to 20 ° C. to obtain the true pitch interval T (n, f4). And this is stored in the servo parameter storage unit 18.

Specifically, the premise here is that the processing accuracy of the gauge is not known on the order of microns, that the latch delay occurs due to the response speed of the optical sensor, and that the measurement latch Recognizing that the data is different, the initial value of scale 12 must be determined.

First of all, it can be obtained by measuring the scale alone with a measuring instrument, but since it depends on the mounting position (the state with the sliding surface and the mounting reference hole position), it is conceivable to obtain the reference value of the scale 12 using this means. Absent.

Therefore, the scale 12 is attached as shown in the drawing.
In addition, a mold is set and processing is prepared.

Set the axis speed to the override value F4, and input a command value C1mm (so as to be as large as possible with the measurable stroke of the measuring instrument) from the NC console for processing.

Next, input and process C2mm (near the origin of the work and around 10mm).

At this time, it is supposed that the processed plate was laid down all day and night under the control of 20 ° C. with a measuring instrument, and the measured values at this time were M1 mm and M2 mm, respectively.

Further, following the past, measurement is performed at the axis speed F4 (under the same environment as the processing), and the counter latch coordinates Lnmm (x1, x2,..., XN) are stored at all pitch points.

Similarly, the above measurement is repeated for each of the shaft velocities F3, F2, and F1, and the latch coordinates are stored. From these, a latch coordinate table shown in FIG. 3 is created.

Here, the average D of the delay at F3 compared to F4 (4-3)
Ask for.

D (4-3) = Σ (L (n, f3) −L (n, f4)) / N Similarly, compared with F4, the average of the delay at F2 and F1 D (4−3)
2) Find D (4-1).

D (4-2) = Σ (L (n, f2) −L (n, f4)) / N D (4-1) = Σ (L (n, f1) −L (n, f4)) / N The reason for calculating the average value is to keep the data to be managed as small as possible.
(N, f4) and D (4-3), D (4-2), D (4-1)
It is. FIG. 4 shows the relationship between the error and the speed f4.

 Next, T (n, f4) of the dimension to be obtained is obtained.

T (n, f3) = T (n, f4) + D (4-3) T (n, f2) = T (n, f4) + D (4-2) T (n, f1) = T (n, f4) ) + D (4-1) The value obtained as described above is stored in advance in a buffer in the transmission / reception arithmetic processing unit 17 as a 20 ° C. converted value, and the value of each pitch is determined according to the environmental temperature, and this is used as a servo parameter. , And a well-known pitch error correction.

<Correction principle> As described above, the position of each dowel hole Pn of the master scale 12 is
The position is managed after conversion to 20 ° C. In other words,
No matter how the environmental temperature changes, an actual machining deviation can be detected by detecting the dog hole Pn position of the master scale 12, and an appropriate correction value can be given according to the difference.

The basic operation is as follows: If a work plate made of iron is placed in an environment of 25 ° C, 11.7μm / 20mC per 1m
℃ · mx (25-20) = 58.5 µm. When this plate was processed to have high rigidity and processed according to the theoretical value, and this plate was cooled to 20 ° C., it was conversely processed to be smaller by 58.5 μm.

So, in order not to do this, master scale 12
The position of the processing machine may be corrected at the latch point of the hole Pn.

It should be noted that this correction value is obtained by detecting the actual machining position on an accurate scale with a temperature correction function, so that not only mechanical distortion and temperature distortion of the power transmission mechanism,
This also cancels out the influence of the temperature of the work and the frame, and means that processing can be performed with the measurement accuracy of the master scale 12 and its measurement system.

A specific example will now be described.
Is slightly higher than the work temperature Tw, the distortion of the ball screw is △ 1, the error due to the expansion of the work W is △ 2, and the distortion of the other frame is △ 3, these values △ 1, △ 2,
Regardless of Δ3, it does not matter.

Therefore, if the servo parameters are appropriately corrected in accordance with a change in the condition, particularly, a change in the temperature, machining with little error can be permanently maintained.

In addition, comparing the effect of this semi-closed loop with that of a fully closed loop, from the practical point of view that high-speed machining is possible, there is no fear of step-out, and in addition, it can be designed at low cost, etc. The semi-closed loop is better. The error due to temperature is basically the same.

In this embodiment, the ball screw 4 is shown as an example, but this may be a rack and pinion. However, from the viewpoint of the original accuracy due to backlash and the like, the processing accuracy of the ball screw is better.

FIG. 5 shows a servo parameter setting method. At the start of machining, return to origin in step 501,
In 02, the start is prohibited to NC first.

Next, in step 503, a reset signal is sent to the current value counter, and in step 504, a signal for turning on the correction function is sent.

Next, in step 505, the data of the temperature sensor TS is transmitted, and in step 506, the frame elongation at that temperature is calculated, and in step 507, the NC is permitted to start.

In step 506, a servo parameter value corresponding to the temperature θ is set based on the value T (n · f4) converted into 20 ° C. In this example, it is assumed that the correction operation is performed by the servo system 19, but it is also possible to perform correction so as to change the original target value.

<Correction Parameter Change Processing> The servo parameter change is performed by the processing in FIGS. 6 and 7. FIG. 6 shows a change request procedure, and FIG. 7 shows a change procedure when a change request is made.

In FIG. 6, it is determined whether or not punching is being performed by the proximity sensor 15 shown in FIG. 1 in step 601 during machining, and if not during punching, the process proceeds to step 602, where the moving direction is the predetermined measuring direction. Is determined.

If the direction is a predetermined direction, proceed to step 603,
The latch coordinates of the dog hole Pn are sent out, and in step 604, the latch value for the dog hole Pn is loaded into the memory according to which dog hole Pn the latch coordinate is.

Therefore, in step 605, the value loaded in step 604 is compared with the reference value, that is, the value to be detected at the temperature previously detected based on the value converted at 20 ° C. If it is, the process proceeds to step 606 to turn on the bit of the parameter conversion request. In step 607, the frame temperature is received.

The parameter change request is issued mainly when the temperature of the ball screw 4 changes due to a temperature change, that is, a change in environmental temperature or a change in load.

Next, in FIG. 7, when the parameter shift request is turned on in step 701, it is waited in step 702 to return to the origin position, and in step 703, start inhibition is output to the NC.

Next, in step 704, if the material of the work W is the same as before, the changed value of the servo parameter is calculated in step 706, set in step 707, and start is permitted to NC in step 708. The calculation in step 706 is to calculate the servo parameters according to the current situation using the actually measured latch data. Step 705 will be described later. The measured latch data is corrected according to the speed at that time.

<Material handling method> There are two types of material handling methods as follows.

One is the expansion rate of each material, for example, iron… 11.7μm / m ・ ℃ copper… 16.7μm / m ・ ℃ aluminum… 23μm / m ・ ℃ In this method, correction is appropriately made.

In this case, for example, when the NC is returned to the origin, a material change is identified in step 704 of FIG. 7, a calculation for 20 ° C. is performed for each material in step 705, and the calculated value is stored. What should I do?

The other one is shown in FIGS. 8 (a) and 8 (b).
In this method, a cartridge type master scale 20 for each material as shown in FIG.

The bolt 22 attached to the guide 21 is for preventing displacement in a direction orthogonal to the moving direction. The tip of the bolt 22 is formed in a spherical shape, and lightly presses the cartridge scale 20 against the guide 21 so as to be slidable in the movement direction. Note that the support point of the pin 11 is also formed in a spherical shape so that the fixed point coincides with the origin. When the fixed point is shifted from the origin, it is necessary to perform a predetermined shift correction. In the case of a punch press, since processing is performed at the punch center, all references may be made to the punch center.

<Dog Hole Detection Method (Part 1)> This item is designed so that the quality of the detected data can be identified in the detection of the dog hole Pn.

 FIG. 9 shows a specific example of the detection circuit.

In the figure, the detection circuit of the dog hole Pn is a buffer (differential TTL) 23 for inputting the A and B2 phases output from the encoder 9.
And a counter latch control unit 24 for inputting a detection signal of the optical sensor 13. Both circuits 23 and 24 are provided with the counter circuit 1.
6 is entered. The internal clock signal CLK is input to the counter circuit 16.

The counter circuit 16 is connected to a sensor-on buffer 25 and a clock counter 26. The outputs of both circuits 25 and 26 are connected to a data pass / fail control unit 27. The control unit 27 is connected to a data bus 28. The clock counter 26 also has
The internal clock signal CLK is input.

In the above configuration, as shown in FIG. 10, the sensor 13 now moves in one direction, and the signal 29 is transmitted to one dog hole Pn.
Suppose you got The signal 29 is a pulse-like signal that is turned on with a certain threshold and then turned off. The shaft speed command and b is ₀ mm / S. The width of the dog hole Pn is known and is a mm.

 The signal processing method is shown in FIG.

At step 1101, the latch data when the sensor is turned on is temporarily stored in the buffer 25, and at step 1102, the clock counter is stored.
26 is used to obtain the time t from when the sensor is turned on to when it is turned off.

Therefore, in step 1103, the data quality control unit 27
Then, b ₀ t = a is determined, that is, it is determined whether or not the current speed value h is within an allowable value with respect to the planned speed b ₀ , and if it is within the allowable value, the latch data at the time of sensor ON is validated in step 1104. And flows this to the data bus 28. On the other hand, if the speed b is outside the allowable value, the latch data is invalidated in step 1105.

Therefore, in this example, the reliability of the latch data detected by the sensor 13 is improved, and the processing accuracy itself can be improved.

In this example, the detection of the dog hole Pn has been described. However, the mark of the master scale 12 is not limited to this.For example, a mark of a different color may be printed. It can be determined.

<Dog Hole Detection Method (Part 2)> This section shows an example in which latch data is corrected according to speed.

12, in the detection circuit of the present example, a speed calculation unit 30 for detecting a waveform and a latch coordinate extraction unit 31 are connected to the counter circuit 16. The speed calculator 30 is connected to an average delay parameter value calculator 32.
32 and the latch coordinate extracting unit 31 are connected to a measurement result output unit 33.

The average delay parameter value calculation unit 32 has a correspondence table of the error ε caused by the speed and the signal delay as shown in FIG. 13, and the error ε is calculated according to the speed calculated from the waveform value by the speed calculation unit 30. Is calculated. Since the error varies, the average value is used.

The measurement result output unit 33 applies the error ε calculated by the calculation unit 32 to the latch coordinates extracted by the latch coordinate extraction unit 31,
It outputs a measured value close to the true value. The measurement value may be obtained by averaging a plurality of data for the same dog hole.

As shown in FIG. 14, in step 1401, the coordinate value when the sensor is turned on is taken out, the speed value is calculated from the pulse width when the sensor is turned on in step 1402, the error ε is calculated in step 1403, and the corrected measurement is made in step 1404. Output the value.

Therefore, by calculating a degree-equivalent value from a shape such as a scale and subtracting the corresponding delay parameter from the measured data, measurement accuracy and, consequently, processing accuracy can be improved.

In this example, measurement can be performed at an arbitrary shaft speed. If the speed is constant, the accuracy can be further improved. In this example, the speed value is obtained by waveform detection, but the NC command value can be used on condition that the speed is stable.

As described above in detail, according to the present embodiment, by appropriately performing dog hole detection of the master scale 12,
The table 1 controlled by the semi-closed loop can be moved with an accuracy determined by the master scale 12.

At this time, since the master scale 12 is configured to be capable of temperature correction and configured to detect the actual processing position, it is possible to remove not only the distortion of the power transmission mechanism but also the thermal influence of the work and the frame. High precision of 0.01 mm or more, which was difficult in the past, can be easily cleared under all environmental conditions, and ultra-precision processing becomes possible. There is no need to worry about loss of synchronization or breakage as in a fully closed loop.

In the above embodiment, an example of a punch press was described, but other NCs such as a laser processing machine, a combined punch / laser processing machine, and a lathe.
The same applies to machine tools.

Further, in the above embodiment, the example in which the workpiece is moved has been described, but the same applies to a machine tool that moves a tool.

The present invention is not limited to the above embodiments, but can be implemented in other appropriate modes by making appropriate design changes.

[Effect of the Invention] As described above, the present invention measures the transit time of the input end and the output end of the mark on the scale, and latches the movement position data managed by the closed loop at one end. Since the position data latched according to the passing time, that is, the passing speed, is converted into the data for the reference speed, the mark on the scale can be accurately detected in accordance with the processing speed. Therefore, even when the processing machine is in operation,
Real-time detection for various processing speeds.

[Brief description of the drawings]

FIG. 1 is a flowchart showing a method of correcting a measured value of latch data of a scale detecting device according to an embodiment of the present invention, FIG. 2 is an explanatory diagram showing a configuration of a positioning device embodying the present invention, and FIG. FIG. 4 is an explanatory diagram of latch data for each speed, FIG. 4 is an explanatory diagram showing an error situation due to speed, FIG. 5 is a flowchart showing a servo parameter setting method, FIG. 6 is a flowchart showing a parameter change request output method, FIG. FIG. 7 is a flowchart of a parameter changing method, FIG. 8 (a) is a front view showing a cartridge type master scale prepared for each material, FIG. 8 (b) is a right side view thereof, and FIG. FIG. 10 is a block diagram showing an example of a detection circuit, FIG. 10 is an explanatory diagram showing the detection operation, FIG. 11 is a flowchart showing a method for judging the quality of data, and FIG. Block diagram showing another example of
FIG. 13 is an explanatory diagram of table data used by the circuit. 1 Table 3 Nut 4 Ball screw 7 Servo motor 9 Encoder 11 Pin 12 Master scale 13 Optical sensor 16 Counter circuit 17 Transmission / reception calculation Processing unit 18 Servo parameter storage unit 19 Servo system 31 Latch coordinate extraction unit 32 Average delay parameter value calculation unit Pn Dog hole TS TS Temperature sensor

Claims (1)

(57) [Claims] 1. An apparatus for detecting a scale having a plurality of marks arranged along a moving body of a processing machine in accordance with the movement of the moving body, detecting a passing timing of an input end and an output end of the mark, A data latch circuit for detecting a latch speed based on the time difference at a passage timing of the unit, and latching, at one end, the moving position data managed by the closed loop of the moving body at that time; latch data and latch speed And a data correction circuit for correcting the data latched by the data latch circuit to a value corresponding to a reference speed using the data table.