JP2782668B2 - Exposure equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exposure apparatus for printing a fluorescent screen of a color cathode ray tube, and more particularly to an illuminance measuring mechanism.

[0002]

2. Description of the Related Art For example, in order to form a phosphor surface in an arrangement called a hole shape or a stripe shape on the inner surface of a face panel of a conventional color cathode ray tube, a photosensitive agent or a photosensitive agent is mixed on the inner surface of the face panel. Is applied, and exposure is performed using ultraviolet rays through a shadow mask. Prior to performing the exposure work, in order to make the illuminance distribution uniform at the phosphor surface forming portion on the inner surface of the face panel,
As disclosed in Japanese Utility Model Application Publication No. 60-113530, an illuminance measuring mechanism is used to measure the illuminance distribution on the inner surface of the face panel, and an optimal dimming filter is selected and mounted. Had been adjusted. As shown in FIG. 4, the exposure apparatus includes a light source section including an ultra-high pressure mercury lamp 1 provided inside the apparatus housing, a lamp house 2 for holding and cooling the same, and an ultraviolet light emitted from the light source section. Correction lens 3 for approximating the beam trajectory, dimming filter 4 for correcting the illuminance distribution on the inner surface of the face panel due to ultraviolet rays, and illuminance measurement panel 5 are positioned and mounted at predetermined positions. And a table 7 on which pins 6 are provided. In the illuminance distribution measurement, first, a transparent clear panel 5 made of the same glass as the face panel is mounted on the table 7, and the tip 9 of the illuminometer sensor 8 is positioned at the center 11, the corner of the outer surface of the clear panel 5 shown in FIG. The illuminance meter 10 measures the illuminance, obtains the illuminance distribution, and makes contact with nine parts of the central part 13 of the part 12 and the long and short sides to obtain the illuminance distribution.
Was selected and installed.

[0003]

In the conventional illuminance measurement, since the illuminance is measured on the outer surface of the clear panel 5, the attenuation of ultraviolet rays in the glass when the light passes through the clear panel 5 is reduced by 20%.
% To 30%, and the curvature of the outer surface of the clear panel 5 may not be constant in order to measure the size of the clear panel 5 having a different size. Therefore, the tip 9 of the illuminometer sensor 8 is adjusted to the curvature of the phosphor forming surface. There is a problem that the illuminance cannot be measured accurately because the contact is difficult. Further, since the measurer measures the tip 9 of the illuminometer sensor 8 by abutting against the outer surface of the curved clear panel 5, positioning cannot be performed accurately.
There was also a problem that the measurement position could not be fixed. In addition, since the exposure time is as long as 20 seconds to 30 seconds, an error due to a temporal variation in the luminous intensity of the ultra-high pressure mercury lamp 1 occurs in a short measurement. An object of the present invention is to provide an exposure apparatus that can improve the measurement accuracy of the illuminance measurement, obtain an accurate illuminance distribution, select an optimal dimming filter 4, or adjust the position of the dimming filter. .

[0004]

According to the present invention, there is provided an exposure apparatus including means for arranging a tip portion of an illuminance sensor so as to directly measure illuminance of a predetermined measurement site. Further, the illumination sensor is characterized in that an illumination measurement panel having a through hole is provided as a tip arrangement means of the illumination sensor. further,
A through-hole formed in the illuminance measurement panel is provided with a guide member corresponding to the shape of the tip of the illuminance sensor, and a calculator is provided for integrating the output of the illuminometer for a predetermined time corresponding to the exposure time to obtain an average illuminance. It is characterized by the following.

[0005]

According to the exposure apparatus of the present invention, the tip of the illuminance sensor is fitted into the through hole provided in the illuminance measurement panel,
Since the illuminance without attenuation at the predetermined inner position of the panel at the measurement position can be directly measured at the tip of the illuminance sensor, a measurement value without error can be obtained. In addition, by providing a guide member corresponding to the shape of the tip of the illuminometer, the accuracy of positioning can be improved, and variations in measurement by the measurement operator can be reduced. Further, since the average illuminance can be measured by integrating the output of the illuminometer for a predetermined time corresponding to the exposure time, it is possible to prevent the occurrence of an error due to the influence of the temporal variation of the luminous intensity of the mercury lamp emission.

[0006]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described with reference to the drawings.
Note that the same parts as those in the conventional example are denoted by the same reference numerals, and description thereof will be omitted. As shown in the perspective view of FIG. 1, the illuminance measurement panel 14 used in the exposure apparatus of the present invention is formed so as to have the same curved surface as the face panel of the color image receiving tube. Nine through-holes 15 into which the tip 9 can be fitted are formed at the center, the corners, and the center of the long and short sides so as to coincide with the optical axis from the light source. FIG.
As shown in the configuration diagram of the exposure apparatus, prior to the execution of the exposure operation, the illuminance measurement panel 14 is stored in the table 7 of the exposure apparatus.
And the tip 9 of the illuminance sensor 8 is attached to the illuminance measurement panel 1.
(4) The illuminance measurement panel 14 is fitted into the through-holes 15 formed at nine locations at the center, the corner, and the center of the long and short sides of the outer surface, and the illuminance distribution on the inner surface of the illuminance measurement panel 14 is measured so that the illuminance distribution becomes uniform. The light control filter 4 is selected and mounted, or the position of the light control filter is adjusted. that time,
The output of the illuminometer 10 is processed by a computer 16 having a function of integrating and calculating for the time corresponding to the exposure time, and the average illuminance is output. As described above, by measuring the illuminance distribution using the exposure apparatus of the present invention, it is possible to accurately measure the illuminance of the phosphor surface forming portion on the inner surface of the face panel of the color cathode ray tube, so that the optimal adjustment is possible. An optical filter can be selected or the position of the light control filter can be adjusted. Further, as shown in an enlarged cross-sectional view of a main part of the illuminance measurement panel in FIG. By fitting the tip 9 of the illuminance sensor 8 into contact with the tip 9 of the illuminance sensor 8, the tip 9 of the illuminance sensor 8 can be accurately positioned on the phosphor-formed surface, so that the dispersion of the measurement operation can be reduced.

[0007]

As described above, according to the present invention, when the dimming filter of the exposure apparatus used in the process of forming the fluorescent screen of the color cathode ray tube is mounted, the illuminance can be measured accurately under the same conditions as during exposure. It is possible to select an optimal light control filter or adjust the position of the light control filter.

[Brief description of the drawings]

FIG. 1 is a perspective view showing one embodiment of an illuminance measurement panel of the present invention.

FIG. 2 is a configuration diagram showing an exposure apparatus according to another embodiment of the present invention.

FIG. 3 is an enlarged sectional view of a main part showing a second embodiment of the illuminance measuring panel of the present invention.

FIG. 4 is a configuration diagram of a conventional exposure apparatus.

FIG. 5 is a perspective view of a conventional clear panel.

[Description of Signs] 1 Ultra-high pressure mercury lamp 2 Lamp house 3 Correction lens 4 Dimming filter 6 Pin 7 Table 8 Illuminance sensor 9 Tip 10 Illuminometer 14 Illuminance measuring panel 15 Through hole 16 Computer 17 Guide member

Claims (2)

(57) [Claims] 1. A exposure apparatus having an illumination sensing mechanism consisting of a color cathode ray tube light source used for phosphor screen formed, dimming mechanism and the illumination sensor and luminometer directly measurably illuminance of a predetermined measurement site of a plurality of locations Beyond a single illuminance sensor
Illuminance measurement with multiple through-holes that can be inserted into the end sequentially
An exposure apparatus comprising: means for arranging a constant panel . 2. A plurality of through holes formed in the illuminance measurement panel.
In the through hole, a gas that can be attached according to the shape of the tip of the illuminance sensor
2. The exposure apparatus according to claim 1, further comprising an id member .