JP2780235B2 - Clean room system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room air conditioning system.

[0002]

2. Description of the Related Art As shown in FIG. 6, an air conditioning system in a clean room discharges dust and the like from equipment to the outside of a room. In the example of the air conditioning system shown in FIG.
A plurality of outlets 3 each having a built-in EPA filter are provided, and the outlets 3 blow out clean air into a room 7 in which the equipment 5 is installed. Access floor 9 of room 7
A grating-type suction port 11 is attached to an arbitrary position of, and the grating-type suction port 11 communicates with a return duct 13 disposed below the access floor 9. At the end of the return duct 13, the air conditioner 1
5 is opened, and the air outlet of the air conditioner 15 is connected to the above-described air outlet 3 via the air outlet duct 17.

In the air-conditioning system thus configured, when clean air is blown out from the outlet 3, dust generated around the equipment 5 and exhaust heat are diffused into the room 7 by the clean blown airflow. You. The diffused room air is drawn in from the grating type suction port 11 of the access floor 9 and is drawn into the air conditioner 15 via the return duct 13. The room air sucked into the air conditioner 15 is adjusted to a predetermined temperature and humidity, and then is again blown out as clean air from the outlet 3 in which the HEPA filter is built. In this type of air conditioning system, a clean air conditioning system can be realized with a relatively small circulating air flow.

On the other hand, there is a so-called one-way flow system in an air conditioning system in which room air is not stirred. FIG. 7 is an explanatory diagram illustrating a one-way air conditioning system. HEPA on ceiling 1
A filter 21 is provided over the entire surface.
It blows out at about 0.45 m / s. Room 7
The entire access floor has a grating 23, and the grating 23 communicates with a return duct 13 disposed below the access floor. The end of the return duct 13 is communicated with an air passage 25 provided outside the room, and the air passage 25 is connected to the dry coil 27, the suction-side silencer 29, the axial fan 31,
The blowing-side silencers 33 are sequentially provided. An outlet duct 35 is connected to the outlet silencer 33, and the outlet duct 35 is connected to an outlet chamber 37 in which the above-mentioned HEPA filter 21 is mounted.

In the air-conditioning system of the one-way flow type configured as described above, when clean air is blown out from the HEPA filter 21, dust generated around the equipment 5 and exhaust heat are diffused by the blown air flow. Instead, it flows in one direction and is sucked from the grating 23 which is the access floor. The indoor air sucked from the grating 23 is
Guided to the air passage 25 via the return duct 13, the dry coil 27, the suction-side silencer 29, and the axial fan 3
1. After passing through the blowing-side silencer 33, it is guided to the blowing chamber 37 through the blowing duct 35, and
The air becomes clean air from the filter 21 and is blown out again. In the air-conditioning system of the one-way flow system, the dust dust and the exhaust heat flow in one direction without being diffused into the room 7 and are sucked from the grating 23.
High cleanliness can be secured.

[0006]

However, in the above-described air conditioning system, the generated dust and exhaust heat are diffused into the room 7 and are sucked through the grating type suction port 11, so that the diffused dust remains in the room. In addition, the influence on others was increased, and it was difficult to secure high cleanliness.
Further, in the one-way air-conditioning system, since the indoor air is sucked from the grating 23 without diffusing, high cleanliness can be ensured, but the HEPA filter 21 is not used.
Must be provided over the entire surface of the ceiling, the access floor must also have the grating 23 on the entire surface, and the amount of circulating air is also large, so both initial cost and running cost are disadvantageous. there were.

The present invention has been made in view of the above circumstances, and provides a clean room system which can ensure a high degree of cleanliness with a small amount of circulating air and efficiently perform a recovery process.
Accordingly, an object of the present invention is to reduce the cost of equipment and to save energy.

[0008]

A clean room system according to the present invention for achieving the above object is to form an airflow around equipment in a high ceiling clean room forcibly.
In a clean room system having a local treatment zone for discharging dust and exhaust heat of equipment by the airflow outside the room, an air outlet for blowing a forced airflow surrounding the equipment is arranged to face the equipment, and the air outlet is located at the center. The air outlet section and the outer outlet section completely surrounding the central outlet section, and the forced airflow from the central outlet section is blown out as an airflow not exceeding the velocity of the forced air flow from the outer outlet section, and A suction port into which an air flow is sucked is disposed on the access floor in a state of surrounding the device downstream of the suction port, facing the air outlet, and returning air from the suction port to a return duct, A device-side suction port is provided between the suction port and the device and on an access floor close to the device, and air including dust around the device is sucked from the device-side suction port. Look, the air and dust removal treatment by HEPA filter and is formed by integrating the blower dust eliminator, it is characterized in that the return to the return duct.

[0009]

Since the airflow blown out from the center is blown out from the outside, the entire device is surrounded by a forced airflow having a low speed at the center and a high speed at the outer periphery. As a result, the exhaust heat of the device is cut off from the indoor air by the airflow flowing downward surrounding the device, and is not directly diffused into the room but is directly sucked into the suction port and efficiently collected and processed. In particular, since air containing dust from the device-side suction port provided near the device is removed by the filter and the integrated blower, the air returned to the return duct can have a higher degree of cleanliness.

[0010]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the local high-clean system according to the present invention will be described below in detail with reference to the drawings. FIG. 1 is an explanatory diagram showing a local high-cleaning system according to the present invention. An outlet 32 is attached to the ceiling, and a HEPA filter 34 is built in the outlet 32. On the other hand, the device 5 is mounted on a gantry 81 on a base 80 provided below the access floor 39. And this device 5
Is arranged such that the outlet 32 is located directly above the device 5. That is, the air outlet 32 is arranged so as to face the device 5. A punching hole 36 is formed in the lower surface, which is the outlet surface of the outlet 32, so that the punching hole 3 is formed.
From 6, clean air (hereinafter simply referred to as airflow) is forcibly blown out toward the device 5. In addition, outlet 3
A grill 38 surrounding the punching hole 36 around the lower surface of 2
Is provided. Punching holes 3 by this grill 38
Airflows having different wind velocities are blown out from 6 so as to surround the airflow. That is, by setting the center of the outlet 32 as a low-speed outlet section and the outer periphery as a high-speed outlet section, the airflow is forced to flow down from the punching hole 36 at a wind speed of about 0.85 m / s. On the other hand, the grill 38 is forcibly made to flow down at a faster wind speed of about 2.5 m / s.

A grating suction port 41, which is a suction port, is disposed around the device 5 on the access floor 39 at a position substantially opposite to the air outlet 32, and the grating suction port 41 is a return provided below the access floor 39. Duct 43
Is in communication with Therefore, the airflow that wraps the device 5 and flows toward the access floor 39 is sucked into the grating suction port 41. In other words, an air flow (so-called,
An air curtain is formed. This air flow is discharged to the return duct 43.

A blower 47 is provided at an end of the return duct 43.
And a filter 51 and a cooling coil 53 are provided in the duct 49. A muffler 55 is attached to a suction port on the duct 49 side of the blower 47, and a supply chamber 57 is attached to a blowout side of the blower 47. A main duct 59 provided in the ceiling is connected to the supply chamber 57, and the main duct 59 is connected to the outlet 32 described above. FIG. 2 is a view for explaining a placement state of the device 5 in the access floor 39 and an arrangement state of the dust remover 45, and FIG. 3 is a plan view showing the same state. As shown in the figure,
A gantry 81 shown in FIG. 4 is arranged on a base 80 inside the access floor 39. Then, the device 5 is installed on the gantry 81. The gantry 81 has a so-called hollow table shape having four leg stands, and a dust remover 45 is provided in the hollow. As the dust remover 45, a blower 45a, H
The EPA filter 45b and the muffler 45c are integrally unitized. On the other hand, on the access floor 39,
A device-side suction port 60 is provided between the grating suction port 41 and the device 5 and at a position close to the device 5. FIG. 5 is a plan view illustrating each suction port provided on the access floor 39. That is, the grating suction port 41 is provided around the device 5, and the device-side suction port 60 is provided near the device 5. The device-side suction port 60 is for collecting and removing dust generated from the device 5 itself without diffusing, and the aperture ratio is about twice that of the grating suction port 41. The air sucked from the device-side suction port 60 is dust-removed by the dust remover 45 via the duct 45d, and is discharged to the return duct 43 via the air outlet 45e (see FIG. 2). Then, as described above, the air is blown back into the room 7 from the air outlet 32 through the main duct 59 in the ceiling as clean air via the duct 49 communicating with the return duct 43.

In the clean room system configured as described above, when the blower 47 is driven, air is blown through the supply chamber 57 and the main duct 59, and the airflow is forcibly blown out from the outlet 32 toward the device 5. Is done. The airflow blown out from the outlet 32 forms an airflow having a low speed inside and a high speed on the outer circumference, that is, forms an air curtain, wraps the device 5 and is sucked into the grating suction port 41. When the device 5 is wrapped in the air curtain, dust and exhaust heat around the device 5 are cut off from the indoor air by the air curtain, and are sucked directly into the grating suction port 41 without being diffused into the room 7. In other words, a unidirectional flow environment is locally formed only around the device 5. The room air sucked into the grating suction port 41 passes through the return duct 43, the filter 51, and the cooling coil 53, is sucked into the blower 47, and is blown out again from the outlet 32 as clean air.
On the other hand, the air containing dust generated from the device 5 itself is sucked into the device-side suction port 60, and is then blown to the return duct 43 by the blower 45a after being removed by the dust remover 45 provided at the lower portion of the gantry 81. . That is, the air containing dust around the device 5 is strongly sucked from the device-side suction port 60, and the dust passes through the duct 45d and the muffler 45c.
It will be collected by the A filter 45b. In this manner, the air containing dust from the device-side suction port 60 is discharged from the HE.
It is cleaned by the dust removal processing by the PA filter 45b and is discharged to the return duct 43. In other words, the dust in the room 7 is sucked from the suction port 41 and the dust generated from the device 5 itself through the device-side suction port 60 and subjected to each dust removal process to become clean air, which is again the ceiling outlet 31.
It is released from.

[0014]

As described above in detail, in the clean room system according to the present invention, the air outlet for blowing the airflow surrounding the equipment is formed in the central low-speed airflow area and the surrounding high-speed airflow area. In addition, the air outlet is disposed on the ceiling so as to face the device, and the suction port through which the air flow is sucked is disposed on the floor below the device, and the surroundings of the device are shielded from indoor air by a so-called air curtain. As a result, dust can be directly sucked into the suction port without diffusing into the room, and dust generated from the equipment itself is strongly sucked from the suction port provided near the equipment and removed, so that it can be diffused. It is collected efficiently without doing. As a result,
High cleanliness can be secured with a small amount of circulating air, and equipment costs and running costs can be significantly reduced.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a clean room system according to the present invention.

FIG. 2 is a side view showing each arrangement state in an access floor.

FIG. 3 is a plan view of the same.

FIG. 4 is an explanatory diagram of a gantry.

FIG. 5 is a diagram illustrating a suction port provided on an access floor.

FIG. 6 is an explanatory diagram showing a turbulent air conditioning system.

FIG. 7 is an explanatory diagram illustrating a one-way air conditioning system.

[Explanation of symbols]

 5 Equipment 32 Air outlet 39 Floor (Access floor) 41 Suction port (Grating suction port) 45 Dust remover 60 Equipment side suction port 81 Stand

────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Tsutomu Watada 150 Odaikura Osaikura, Nishigo-mura, Nishishirakawa-gun, Fukushima Prefecture Inside the Shirakawa Plant, Shin-Etsu Semiconductor Co., Ltd. 19-1-116 (72) Inventor Yoshio Ozaki 2-9-1-14 Teraoka, Izumi-ku, Sendai-shi, Miyagi (72) Inventor Akira Mochizuki Kashima Construction Co., Ltd. (72, 1-2-7 Moto-Akasaka, Minato-ku, Tokyo) Inventor Yoshio Nagaya 1-7-7 Moto-Akasaka, Minato-ku, Tokyo Kashima Construction Co., Ltd. (72) Inventor Yasuo Ogawa 1-2-7 Moto-Akasaka, Minato-ku, Tokyo Kashima Construction Co., Ltd. (72) Invention Nobuyoshi Muta Kashima Construction Co., Ltd., 1-2-7 Moto-Akasaka, Minato-ku, Tokyo (72) Inventor Isamu Kashima Construction Co., Ltd. Tohoku, 1-27 Fukamachi, Aoba-ku, Sendai, Miyagi Prefecture In-store (56) References JP-A-3-113221 (JP, A) JP-A-2-52032 (JP, U) JP-A-63-130176 (JP-A-2-13032) Specification attached to the application form Microfilm photographing the contents of documents and drawings (JP, U) (58) Field surveyed (Int. Cl. ⁶ , DB name) F24F 7/06

Claims (1)

(57) [Claims] 1. A clean room system having a local processing zone for forcibly forming an air flow around equipment in a high ceiling clean room and discharging dust and exhaust heat of the equipment to the outside by the air flow. The air outlet from which the air flow is blown out is arranged to face the device, and the air outlet comprises a central air outlet section and an outer air outlet section completely surrounding the central air outlet section, and the forced air flow from the central air outlet section is The access floor is blown out as an airflow that does not exceed the velocity of the forced airflow from the outer blowing section, and the suction port where the forced airflow is sucked is opposed to the air outlet, and the access floor is surrounded by the downstream device. The air from the suction port is returned to the return duct, and the device is located on the access floor between the suction port and the device and close to the device. Disposed suction port sucks air containing dust around the device from the instrument side inlet,
A clean room system, wherein the air is subjected to dust removal processing by a dust remover in which a HEPA filter and a blower are integrated, and returned to a return duct.