JP2775189B2 - Sliding member having wear resistance and method of manufacturing the same - Google Patents
Sliding member having wear resistance and method of manufacturing the sameInfo
- Publication number
- JP2775189B2 JP2775189B2 JP6493090A JP6493090A JP2775189B2 JP 2775189 B2 JP2775189 B2 JP 2775189B2 JP 6493090 A JP6493090 A JP 6493090A JP 6493090 A JP6493090 A JP 6493090A JP 2775189 B2 JP2775189 B2 JP 2775189B2
- Authority
- JP
- Japan
- Prior art keywords
- metal substrate
- wear
- sliding member
- ceramic
- wear resistance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- 239000002184 metal Substances 0.000 claims description 32
- 229910052751 metal Inorganic materials 0.000 claims description 32
- 239000000758 substrate Substances 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 14
- 239000000919 ceramic Substances 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 6
- 229920001709 polysilazane Polymers 0.000 claims description 5
- 238000005299 abrasion Methods 0.000 claims description 4
- 238000000206 photolithography Methods 0.000 claims description 4
- 239000012700 ceramic precursor Substances 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 claims description 3
- 238000000576 coating method Methods 0.000 claims description 3
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 2
- 229920003257 polycarbosilane Polymers 0.000 claims description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims 1
- 238000000151 deposition Methods 0.000 claims 1
- 238000010304 firing Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 239000010687 lubricating oil Substances 0.000 description 9
- 229910001018 Cast iron Inorganic materials 0.000 description 8
- 238000005524 ceramic coating Methods 0.000 description 5
- 238000002485 combustion reaction Methods 0.000 description 5
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000007733 ion plating Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004453 electron probe microanalysis Methods 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
- Chemically Coating (AREA)
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明は、内燃機関のシリンダ内面のような摺動部分
に用いて有用な耐摩耗性を有する摺動部材とその製造方
法に関する。Description: TECHNICAL FIELD The present invention relates to a sliding member having wear resistance useful for a sliding portion such as an inner surface of a cylinder of an internal combustion engine and a method of manufacturing the same.
（発明が解決しようとする課題） 内燃機関のシリンダ内表面は、内燃機関の動作中、往
復運動するピストンリングと激しく摺接する。したがっ
て、シリンダ及びピストンリングの摺接面の摩耗を防ぐ
ため、この摺接面に常時潤滑油を供給している。(Problems to be Solved by the Invention) The cylinder inner surface of the internal combustion engine violently comes into sliding contact with the reciprocating piston ring during the operation of the internal combustion engine. Therefore, in order to prevent wear of the sliding surfaces of the cylinder and the piston ring, lubricating oil is constantly supplied to the sliding surfaces.
しかしながら、このような潤滑油の供給だけではシリ
ンダ及びピストンの摩耗を防止することはできない。However, the supply of the lubricating oil alone cannot prevent the wear of the cylinder and the piston.
そこでこのような欠点を解消するとともに、さらに耐
摩耗性を向上させる試みが、例えば特開昭63−60270号
公報に開示されている。Thus, an attempt to solve such a defect and further improve the wear resistance is disclosed in, for example, Japanese Patent Application Laid-Open No. 63-60270.
すなわち、この公報に記載されている公開内容は、鋳
鉄製機械部品の表面の少なくとも一部の耐摩耗性を向上
させるため、CVD法やPVD法でTiC,TiNなどの硬質セラミ
ックスの層を形成せしめることが行われているが、この
場合、基体の鋳鉄自体が軟質であれば硬質セラミックス
層に亀裂や破壊を生じることがある。また、鋳鉄の表面
の黒鉛の部分には硬質セラミックス層が局部的に生じな
いことがある。That is, the disclosure content described in this publication is to form a layer of hard ceramics such as TiC and TiN by CVD method or PVD method in order to improve the wear resistance of at least a part of the surface of the cast iron mechanical part. However, in this case, if the base cast iron itself is soft, the hard ceramic layer may crack or break. Further, the hard ceramic layer may not be locally formed on the graphite portion on the surface of the cast iron.
この欠点を無くするため、予め鋳鉄の必要部分をレー
ザ、電子ビーム、プラズマアーク等で再溶融した後、該
溶融面を急冷凝固させてチル層を形成せしめた後、イオ
ンプレーティング法、プラズマCVD法等でTiC,TiN等の硬
質セラミックス層を形成させる、というものである。In order to eliminate this drawback, necessary parts of the cast iron are re-melted in advance by laser, electron beam, plasma arc, etc., and then the molten surface is rapidly cooled and solidified to form a chill layer. That is, a hard ceramic layer such as TiC or TiN is formed by a method or the like.
上述のような耐摩耗性部材を、高温下で摺接する内燃
機関ピストンやシリンダに用いた場合、現在使用してい
る潤滑油供給装置を使用して、潤滑油の供給を十分に行
ったとしても、潤滑油の供給が均一に行われず、耐摩耗
性部材が直接接触すると、そのうちの一方又は双方の摩
耗損失は大きなものであるとともに、摩耗係数も高くな
るものである。When the wear-resistant member as described above is used for an internal combustion engine piston or cylinder that slides at a high temperature, even if lubricating oil is sufficiently supplied using a lubricating oil supply device currently used. If the lubricating oil is not supplied uniformly and the wear-resistant member comes into direct contact, the wear loss of one or both of them is large, and the wear coefficient is also increased.
本発明は上述の様な従来の欠点を解消しようとするも
のであり、その目的は、潤滑油の供給機構を変更するこ
となく、高温下でも摺接面に対し円滑な潤滑油の供給が
行え、しかも摩耗が極めて少ない摺動部材を提供しかつ
その製造方法を提供することにある。SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned conventional disadvantages, and an object of the present invention is to provide a smooth lubricating oil supply to a sliding surface even at a high temperature without changing a lubricating oil supply mechanism. Another object of the present invention is to provide a sliding member having extremely little wear and to provide a manufacturing method thereof.
（課題を解決するための手段） 上述の発明の目的を達成するために、本発明は、金属
基体表面に耐摩耗性の被膜を被着せしめた耐摩耗性を有
する摺動部材において、該金属基体の表面に複数個のデ
ィンプルを形成するとともに、該ディンプルの内表面を
含めた該金属基体の表面にほぼ均一の厚さをもちかつ耐
摩耗性を有するセラミックス被膜を被着せしめたことを
特徴とする耐摩耗性を有する摺動部材を提供する。(Means for Solving the Problems) In order to achieve the above-mentioned object, the present invention relates to a wear-resistant sliding member obtained by applying a wear-resistant coating on the surface of a metal substrate. A plurality of dimples are formed on the surface of the substrate, and a ceramic film having a substantially uniform thickness and abrasion resistance is applied to the surface of the metal substrate including the inner surface of the dimple. To provide a sliding member having wear resistance.
更に、本発明は、金属基体の表面のフォトリゾグラフ
ィー法による複数個のディンプルをエッチング形成する
ステップと、該ステップ終了後、該ディンプルの内表面
を含めた該金属基体の表面にほぼ均一の厚さをもちかつ
耐摩耗性を有するセラミックス被膜を被着せしめるステ
ップを有することを特徴とする耐摩耗性を有する摺動部
材の製造方法をも提供する。Further, the present invention includes a step of etching and forming a plurality of dimples on the surface of the metal substrate by a photolithography method, and after the step, a substantially uniform thickness on the surface of the metal substrate including the inner surface of the dimple. The present invention also provides a method for manufacturing a wear-resistant sliding member, which comprises a step of applying a ceramic film having wear resistance.
（作用） 鋳鉄等の金属基体の表面は、例えばフォトリゾグラフ
ィー技術を使用して小さなディンプルを無数に形成し、
然る後、該ディンプルの内表面を含めた金属基体表面全
体に、例えばイオンプレーティング法により金属基体の
表面全体に耐摩耗性を有するセラミックス被膜を均一の
厚さで被着せしめるか、あるいは金属基体の表面にセラ
ミック前駆体溶液を塗布の後、焼成して該金属基体の表
面全体に耐摩耗性を有するセラミックス被膜を均一の厚
さで被着せしめる。(Function) On the surface of a metal substrate such as cast iron, countless small dimples are formed using, for example, a photolithography technique.
Thereafter, a wear-resistant ceramic coating having a uniform thickness is applied to the entire surface of the metal substrate including the inner surfaces of the dimples, for example, by ion plating, or After the ceramic precursor solution is applied to the surface of the substrate, it is fired to apply a wear-resistant ceramic coating over the entire surface of the metal substrate in a uniform thickness.
摺動時、金属基体表面に形成された無数のディンプル
は、潤滑油溜めとなる。During sliding, the innumerable dimples formed on the surface of the metal base serve as a lubricant reservoir.
（実施例） 次に、本発明の実施例を、図面を参照しながら、詳細
に説明する。Example Next, an example of the present invention will be described in detail with reference to the drawings.
第１図に示すように、鋳鉄板からなる金属基体１の表
面に感光性樹脂溶液をスピンコート等の方法で均一の厚
さで塗布した後、これを乾燥せしめて感光膜２を形成
し、該感光膜２の上にフォトマスク３を密着せしめる。As shown in FIG. 1, a photosensitive resin solution is applied to the surface of a metal substrate 1 made of a cast iron plate in a uniform thickness by a method such as spin coating, and then dried to form a photosensitive film 2. A photomask 3 is brought into close contact with the photosensitive film 2.
フォトマスク３には、第３図に示す様に、小さな円形
の穴４が無数に形成されている。これらの穴４は直径が
約50μｍ程度であり、それらの間隔は約100μｍ程度で
ある。そして、これらの穴４は正確に格子点上に設けら
れている。As shown in FIG. 3, the photomask 3 has numerous small circular holes 4 formed therein. These holes 4 have a diameter of about 50 μm, and the interval between them is about 100 μm. These holes 4 are provided exactly on the lattice points.
この様な感光膜２の上にフォトマスク３を被着された
金属基体１の上から紫外線を照射して、感光膜２を選択
的に感光せしめた後、フォトマスク３を感光膜２上から
剥離し、ネガティーブ現像を行って、前記穴４に相当す
る部分の感光膜に穴を設けて、第３図に示すように、金
属基体１上に、選択エッチング膜５を形成する。After irradiating ultraviolet rays from above the metal substrate 1 on which the photomask 3 is applied on the photosensitive film 2 to selectively expose the photosensitive film 2, the photomask 3 is placed on the photosensitive film 2 from above. By peeling and performing negative development, a hole is provided in a portion of the photosensitive film corresponding to the hole 4, and a selective etching film 5 is formed on the metal substrate 1 as shown in FIG.
次に、金属基体１を腐食させるエッチング液を用いて
選択エッチングを行い、金属基体１の表面に深さ50μｍ
の半球状のディンプル６を形成した後、選択エッチング
膜５を剥離する。Next, selective etching is performed using an etchant that corrodes the metal base 1, and a depth of 50 μm is formed on the surface of the metal base 1.
After the formation of the hemispherical dimples 6, the selective etching film 5 is peeled off.
最後に、イオンプレーティング法により、ディンプル
６の内表面を含めた該金属基体１の表面全体に耐摩耗性
を有するセラミックス（TiC）被膜７を５μｍの厚さで
被着せしめて、耐摩耗性を有する摺動部材を形成する。Finally, a wear-resistant ceramic (TiC) film 7 having a thickness of 5 μm is applied to the entire surface of the metal substrate 1 including the inner surface of the dimple 6 by ion plating. Is formed.
このように形成された耐摩耗性を有する摺動部材の表
面に、潤滑油として化学合成油を供給しながら、Si3N4
製で、直径φ８の試験片（ピン）の先端を面圧0.07MPa
一定のもと、相対速度5m/sのスピードで摺接せしめた。While supplying a synthetic oil as a lubricant to the surface of the sliding member having abrasion resistance thus formed, the Si 3 N 4
The tip of the test piece (pin) of φ8 diameter is 0.07MPa
Under constant conditions, sliding contact was performed at a relative speed of 5 m / s.
第６図はこのような試験の結果を示す図であり、横軸
に試験実施時の温度を示し、縦軸には摩擦係数（μ）と
摩耗率（μg/m）を示す。FIG. 6 is a diagram showing the results of such a test, in which the horizontal axis shows the temperature at the time of the test, and the vertical axis shows the friction coefficient (μ) and the wear rate (μg / m).
また、上記試験の結果は実施例１として示している。 The results of the above test are shown in Example 1.
なお、第６図中、実線は摩擦係数の変化を示し、破線
は摩耗量の変化を示すものである。この比較例サンプル
は、金属基体として鋳鉄を用い、この表面にディンプル
を設けず、TiCの被膜で覆っただけのものである。In FIG. 6, a solid line indicates a change in the coefficient of friction, and a broken line indicates a change in the amount of wear. In this comparative example, cast iron was used as a metal substrate, and no dimple was provided on the surface thereof, and the surface was simply covered with a TiC coating.
なお、上記実施例は、イオンプレーティング法により
TiCを被着したが、同様な方法にてTiN,SiC,Si3N4のうち
の何れかの被膜を金属基体表面に形成することができ
る。In the above embodiment, the ion plating method was used.
Although TiC was adhered, any one of TiN, SiC, and Si 3 N 4 can be formed on the surface of the metal substrate by the same method.
次に、他の実施例を説明する。 Next, another embodiment will be described.
前記の実施例と同様な手段を用いて表面にディンプル
を形成した鋳鉄からなる金属基体を、トルエンで希釈し
たポリシラザン溶液中に浸漬して後、これを取り出して
金属基体表面にポリシラザンを被着せしめ、アンモニア
雰囲気中でポリシラザンを熱分解せしめた後、窒素
（N2）雰囲気中で焼成を行って、窒化珪素（Si3N4）の
被膜を表面に形成した。A metal substrate made of cast iron having dimples formed on the surface using the same means as in the above embodiment was immersed in a polysilazane solution diluted with toluene, then taken out, and polysilazane was applied to the metal substrate surface. After polysilazane was thermally decomposed in an ammonia atmosphere, baking was performed in a nitrogen (N 2 ) atmosphere to form a silicon nitride (Si 3 N 4 ) film on the surface.
このようにして得た試験片の摺動特性を第６図の実施
例２として示す。The sliding characteristics of the test piece thus obtained are shown as Example 2 in FIG.
なお、摺動試験条件等は前記実施例と同一である。試
験終了後、該試験片の表面について電子線を照射し、発
生する特性Ｘ線から含有元素を分析するEPMA装置により
炭素の分析を行ったところ、試験片表面に形成したディ
ンプルの中に炭素が凝集していることが判明した。The sliding test conditions and the like are the same as those in the above embodiment. After the test was completed, the surface of the test piece was irradiated with an electron beam, and carbon was analyzed by an EPMA apparatus for analyzing contained elements from the generated characteristic X-rays. Carbon was found in dimples formed on the test piece surface. It was found to be agglomerated.
これにより、摺動時に潤滑油がディンプルの中にトラ
ップされ、これが潤滑作用を助長したと考えられる。Thus, it is considered that the lubricating oil was trapped in the dimple during sliding, which promoted the lubricating action.
なお、上記実施例において、ポリシラザン溶液の代わ
りにポリカルボシラン溶液を用いることもできる。In the above embodiment, a polycarbosilane solution may be used instead of the polysilazane solution.
（発明の効果） 以上詳細に説明したように、本発明は、金属基体の表
面に複数個のディンプルを形成するとともに、該ディン
プルの内表面を含めた該金属基体の表面にほぼ均一の厚
さを持ち、かつ耐摩耗性を有するセラミックス被膜を被
着せしめたので、これを金属部材の摺接面に使用したと
き、たとえ潤滑油給油装置が従来のものであっても、耐
摩耗性が向上する。(Effects of the Invention) As described in detail above, the present invention forms a plurality of dimples on the surface of a metal substrate and has a substantially uniform thickness on the surface of the metal substrate including the inner surface of the dimple. Abrasion resistant ceramic coating is applied, and when it is used on the sliding surface of metal members, the wear resistance is improved even if the lubricating oil supply device is conventional. I do.
しかも本発明は、摺接面の温度が上昇しても耐摩耗特
性が常温時と余り変わらないため、たとえば内燃機関の
設計の自由度が向上する等の効果がある。In addition, the present invention has the effect of improving the degree of freedom in designing the internal combustion engine, for example, because the wear resistance characteristics are not so different from those at normal temperature even when the temperature of the sliding contact surface rises.
しかも金属基体の表面にディンプルを形成する場合、
フォトリゾグラフィー法を用いているため、作業が極め
て簡単であるほか、ディンプルの周囲には、いわゆるバ
リなどの小突起が形成されず、そのためセラミックス被
膜を金属基体の表面に均一に被着することが出来る。Moreover, when dimples are formed on the surface of the metal base,
Since the photolithography method is used, the work is extremely simple, and small projections such as so-called burrs are not formed around the dimples. Therefore, it is necessary to uniformly apply the ceramic coating on the surface of the metal substrate. Can be done.
第１図乃至第５図は本発明の作業手順を説明する図、第
６図は試験結果を示す特性図である。 １……金属基体、２……感光膜、３……フォトマスク、
４……穴、５……選択エッチング膜、６……ディンプ
ル、７……セラミックス被膜。1 to 5 are diagrams for explaining the operation procedure of the present invention, and FIG. 6 is a characteristic diagram showing test results. 1 ... metal substrate, 2 ... photosensitive film, 3 ... photomask,
4 ... hole, 5 ... selective etching film, 6 ... dimple, 7 ... ceramic coating.
Claims (5)
めた耐摩耗性を有する摺動部材において、該金属基体の
表面に複数個のディンプルを形成するとともに、該ディ
ンプルの内表面を含めた該金属基体の表面にはほぼ均一
の厚さをもちかつ耐摩耗性を有するセラミックス被膜を
被着せしめたことを特徴とする耐摩耗性を有する摺動部
材。An abrasion-resistant sliding member having a surface of a metal substrate coated with a wear-resistant coating, wherein a plurality of dimples are formed on a surface of the metal substrate, and an inner surface of the dimple is formed. A wear-resistant sliding member characterized in that a ceramic film having a substantially uniform thickness and a wear resistance is applied to the surface of the metal substrate including the metal base.
窒化チタン（TiN），炭化珪素（SiC）及び窒化珪素（Si
3N4）の内のいずれか１つであることを特徴とする請求
項（１）記載の耐摩耗性を有する摺動部材。2. The method according to claim 1, wherein the ceramic is titanium carbide (TiC),
Titanium nitride (TiN), silicon carbide (SiC) and silicon nitride (Si
3. The wear-resistant sliding member according to claim 1, wherein the sliding member is any one of 3 N 4 ).
による複数個のディンプルをエッチング形成するステッ
プと、該ステップ終了後、該ディンプルの内表面を含め
た該金属基体の表面にはほぼ均一の厚さをもちかつ耐摩
耗性を有するセラミックス被膜を被着せしめるステップ
を有することを特徴とする耐摩耗性を有する摺動部材の
製造方法。3. A step of etching and forming a plurality of dimples on the surface of the metal substrate by photolithography, and after the step is completed, the surface of the metal substrate including the inner surface of the dimple has a substantially uniform thickness. A method for manufacturing a wear-resistant sliding member, comprising a step of applying a ceramic film having a wear resistance.
金属基体をセラミック前駆体溶液中に浸漬した後、加熱
あるいは焼成するプロセスであることを特徴とする請求
項（３）記載の耐摩耗性を有する摺動部材の製造方法。4. The step of depositing the ceramic comprises:
The method for producing a wear-resistant sliding member according to claim 3, wherein the method is a process of immersing the metal substrate in a ceramic precursor solution and then heating or firing the metal substrate.
リカルボシランの内の何れかであることを特徴とする請
求項（４）記載の耐摩耗性を有する摺動部材の製造方
法。5. The method according to claim 4, wherein the ceramic precursor is one of polysilazane and polycarbosilane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6493090A JP2775189B2 (en) | 1990-03-15 | 1990-03-15 | Sliding member having wear resistance and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6493090A JP2775189B2 (en) | 1990-03-15 | 1990-03-15 | Sliding member having wear resistance and method of manufacturing the same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03265575A JPH03265575A (en) | 1991-11-26 |
| JP2775189B2 true JP2775189B2 (en) | 1998-07-16 |
Family
ID=13272247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6493090A Expired - Lifetime JP2775189B2 (en) | 1990-03-15 | 1990-03-15 | Sliding member having wear resistance and method of manufacturing the same |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2775189B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6330702B2 (en) * | 2015-03-19 | 2018-05-30 | 富士電機株式会社 | Sliding member, manufacturing method thereof, and rotary compressor |
-
1990
- 1990-03-15 JP JP6493090A patent/JP2775189B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03265575A (en) | 1991-11-26 |
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