JP2757334B2 - 3D vibrometer - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention is suitable for use in measuring three-dimensional vibration, three-dimensional measurement of ground vibration, two-dimensional observation of horizontal motion in seismic motion, and the like. The present invention relates to a three-dimensional vibrometer capable of accurately evaluating acceleration and the like three-dimensionally.

[0002]

2. Description of the Related Art A conventional vibrometer has a structure in which one mass vibrates in one axial direction via a spring or a damper in principle, and the vibration displacement (or pressure) of the mass in the vibrometer is measured. Measuring. FIG. 7 (a) is an explanatory view of the vibrometer, which comprises a base frame 1 and one mass body 3 attached thereto via an elastic element, for example, a spring 2, and usually a damping element, for example, a damper. 4 is included. The displacement converter 5 provided on the base frame 1 detects a relative displacement amount between the mass body 3 and the base frame 1. In the following description, the measurement axis of the vibrometer is a connection point 2 of the spring 2 on the base frame 1.
a and an axis connecting the connection point 4 a of the damper 4.

[0003] FIG. 7 (b) are those showing an equivalent system of FIG. 7 (a), x ₁ is the displacement of the vibration of the basic frame 1, x ₂ is the displacement of the vibration of the mass body 3, m ₀ is the mass 3 mass, k ₀ is spring 2
Spring constant of, c ₀ is the attenuation coefficient of the damper 4. The equation of motion of this vibration system can be written as the following equation (1). ^{_{m 0 · (d 2 x 2}} / dt 2) + c 0 · (dx 2 / dt) + k 0 · x 2 = c 0 · (dx 1 / dt) + k 0 · x 1 ·· (1) Incidentally, k ₀ , c ₀ are constant during vibration.

However, the seismic motion and other general vibrations are not limited to the vector components along the measurement axis of the vibrometer, but the directions of the vector components other than the measurement axis direction included in the three-dimensional or two-dimensional vibration. The mass body is about to vibrate (see FIG. 8). Such vibrations other than in the measurement axis direction
In order to affect the accuracy of the measurement displacement and to increase the accuracy, as shown in FIG. 9, a method of providing a sliding plate 7 so that the mass body 3 does not vibrate in directions other than the measurement axis direction, A countermeasure for detecting and correcting vibration in directions other than the axis can be considered.

The former measure mechanically restrains displacement of the mass body 3 in directions other than the measurement axis direction, and has a structure in which the mass body itself slides between the pair of sliding plates 7. Vibration in a direction other than the measurement axis causes a displacement of the mass body to generate a dynamic stress between the mass body and the sliding plate 7, and a frictional resistance obtained by multiplying the stress by the friction coefficient of the sliding surface ( Friction angle: φ _m ) occurs. Since this frictional resistance depends on the dynamic stress and fluctuates and acts on the vibration of the mass body 3 in the measurement axis direction, the measurement vibration displacement includes a fluctuating error factor. k ₀ ,
c _0, when the deviation angle of the vibration and theta _m, spring constant k _m to _{change, k m = k 0 · cosθ} m , and the damping coefficient c _m fluctuating becomes c _m = c ₀ · cosθ _m . Moreover, the detection characteristics are deteriorated for vibrations in directions other than the measurement axis, and it is difficult to reproduce accurate vibrations in a three-dimensional evaluation combining such three-axis measurement.

The latter countermeasure has a structure in which the displacement of the mass body other than the axial direction is not restrained. As shown in FIG. A shift angle occurs, and the spring constant and the control coefficient change. But,
The correction to dynamically detect the deviation angle is impractical. Therefore, many uniaxial vibrometers use a structure that ignores the deviation vibration or mechanically restrains displacement other than the measurement axis. And vibration displacement or acceleration including fluctuation errors due to frictional resistance.

[0007] Originally, the vibration to be measured is displaced in any direction in three dimensions, but the actual vibration displacement and acceleration are derived from the measured displacement of the mass body using a one-axis theoretical formula. The theoretical condition of a one-axis vibrometer presupposes that the spring constant and the damping coefficient are constant. When mechanically constraining three-dimensional vibration in one axial direction, the frictional resistance included in the sliding of the mass body needs to have a certain condition such that it can be converted into a coefficient by a theoretical formula. In order to measure vibration displacement with high sensitivity and high accuracy in a vibrometer, a structure capable of eliminating a change in frictional resistance due to vibration components other than the measurement axis is desired.

On the other hand, in a conventional seismometer, a transverse wave is evaluated by observing two components that are orthogonal to each other in the horizontal direction by combining two uniaxial vibrometers, and a longitudinal wave is evaluated by one vertical vibrometer. ing. The characteristics of the vibration measured on the ground surface are
It depends on the propagation conditions in the bedrock when it is transmitted radially from the epicenter, and the influence of the ground surface shape and the propagating stratum structure at the installation location of the seismometer, or the three-dimensional positional relationship between the epicenter and the installation location of the seismometer Suffer. For this reason, seismic motion includes components in three-dimensional free directions, and is not necessarily represented by components along two axes in the plane of the seismometer installed on the surface of the earth and an axis perpendicular to the plane. Errors due to the structure that restrains the vibration of the mass body other than the above cannot be denied. Furthermore, when three-dimensional components are measured for each axis to evaluate the ground motion three-dimensionally, a measurement method that complements the difference in detection characteristics and measurement error of each axis is required.

A conventional vibrometer is also used as a control system for detecting the intensity of vibration and urgently stopping various devices. Most of the detection devices used in practical use are designed to output a control signal when the acceleration exceeds a certain value in a specific direction, such as a device where a steel ball falls due to vibration or a device that uses the vibration of an inverted pendulum. Has become. But,
According to recent experiences of seismic motion, severe damage is caused by vibrations in complicated directions such as interference waves generated by superimposed sharp longitudinal waves and transverse waves, and amplified waves reflected by structures. For this reason, in the vibration detection device, it is necessary to perform vector evaluation of vibration in an arbitrary direction, and it is also necessary to quantitatively evaluate spectrum intensity, energy, and the like in consideration of the duration of vibration.

As described above, a vibrometer having a structure in which a component in one axis direction is mechanically extracted from a vibration in an arbitrary direction in a three-dimensional manner and measured, the displacement of the mass body other than the measurement axis direction is directly measured. In order to restrain, the frictional resistance fluctuates, and a vibration displacement including a fluctuation error caused by the fluctuation is measured. In addition, when evaluating the three-dimensional vibration by combining the measurement results of the one-axis vibration constrained in this way, the detection characteristics and measurement errors of each measurement axis are biased, and these are amplified, making accurate evaluation difficult. Become. In order to solve these problems, a structure in which the mass body, spring, and damper do not warp from the measurement axis on the vibration displacement measurement axis, especially when the mass body vibrates mechanically in the measurement axis direction, Is required, or a structure in which one mass vibrates freely three-dimensionally in response to actual vibration is desired.

[0011]

SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to accurately and three-dimensionally determine the direction, amplitude, acceleration, and the like of a vibration vector. Another object of the present invention is to provide a three-dimensional vibrometer that can be evaluated. More specifically, it is an object of the present invention that when a mass body in a vibrometer vibrates mechanically in the measurement axis direction, one mass body can be freely three-dimensionally corresponding to actual vibration. The purpose is to provide a means for vibrating in this way so that said frictional resistance is constant.

[0012]

The vibrometer of the present invention for achieving the above object basically comprises a guide means for guiding a mass body in the measurement axis direction, and the mass body being moved in the measurement axis direction. An elastic element and a damping element to be vibrated are provided on a moving frame slidable in a plane perpendicular to the measurement axis direction with respect to the base frame, and a displacement converter for detecting a displacement of the mass body with respect to the moving frame is provided. It is characterized by having been provided.

More specifically, in the three-dimensional vibrometer of the present invention, the guide means, the elastic element and the damping element of the mass body are mounted on a moving frame which is slidable in a plane perpendicular to the direction of the measurement axis. The base frame is provided with guide means for guiding the mass body in the other two measurement axis directions orthogonal to the measurement axis direction and orthogonal to each other, and an elastic element and a damping element for vibrating in the two measurement axis directions. With respect to a moving frame that is slidable in a plane perpendicular to the direction of the measurement axis, and a displacement converter that detects displacement of the mass body with respect to each moving frame can be provided. .

In the three-dimensional vibrometer, the guide means for the mass body and the elastic element for vibrating the mass body are provided on a moving frame slidable with respect to the base frame, and the base frame is provided with a liquid. It may be formed by a dense hexahedral container, and a braking fluid as a damping element is sealed inside the hexahedral container. Furthermore, the three-dimensional vibrometer is provided with a guide means for a mass body and an elastic element for vibrating the mass body on a moving frame slidable with respect to a base frame, in order to measure acceleration of vibration, The moving frame may be provided with a piezoelectric transducer for detecting the acceleration of the mass body in the measurement axis direction by the applied pressure. As a guide means for guiding the mass body in the measurement axis direction, it is effective to provide a rod for guiding the sliding of the mass body by inserting or abutting a part of the mass body on the moving frame.

According to the vibrometer of the present invention having the above-described structure, the mass body slides in the measurement axis direction due to the one-axis vibration component of the three-dimensional vibration, and the other vibration component deviates from this axis. Absorbed by sliding along the axis. Therefore, when measuring the vibration of each measurement axis, no dynamic stress is generated in the direction perpendicular to the measurement axis, and the three-dimensional vibration is converted into three-axis sliding under the condition of constant frictional resistance. You. In other words, the mass body responds to the vibration of each axis while maintaining a constant spring constant and damping coefficient for any three-dimensional vibration,
This satisfies the condition of the theoretical expression representing the relationship between the vibration in one axis direction and the measured displacement. In addition, a vibrometer having one mass body installed at one place can detect vibration displacement and acceleration in three axes and evaluate a three-dimensional maximum vibration vector. The error factors related to the difference in the installation conditions when the combination is combined can be eliminated, and a highly sensitive and efficient three-dimensional vibrometer can be obtained.

[0016]

BEST MODE FOR CARRYING OUT THE INVENTION A vibrometer of the present invention is provided in a base frame for fixing to a measurement object which vibrates freely in three dimensions.
A moving frame provided with a guide means for guiding the sliding of the mass body in three axial directions orthogonal to each other and a pair of sliding plates for holding the moving means, a plane orthogonal to the direction of each measurement axis by the sliding plates. Is constructed so as to be slidably accommodated along the axis, and to provide an elastic element and a damping element for vibrating the mass body in the measurement axis direction, and a converter for detecting displacement and acceleration of the mass body with respect to the moving frame on the moving frame. Is done.

In the above-mentioned three-dimensional vibrometer, the base frame is provided with sliding surfaces on the inner surface thereof, on which the sliding plates of the moving frame slide, which are orthogonal to each other. Is required to be a liquid-tight hexahedral container, but generally it is not necessarily required to be a sealed container. As the guide means for guiding the mass body in the measurement axis direction, a rod that guides sliding of the mass body by inserting or contacting a part of the mass body can be used. Further, as the elastic element, those having various spring actions can be used. Further, as the above-mentioned damping element, not only an independent damper can be used, but also an element functioning as a damper can be used instead. The measurement of the three-dimensional vibration depends on the choice of the transducer, the direction of the vibration vector, the amplitude,
Measurement of acceleration can be performed three-dimensionally.

In a control system based on the detection of vibration, it is necessary to evaluate a complicated vibration phenomenon three-dimensionally. The above three-dimensional vibrometer eliminates displacement restraint and displacement vibration in the measurement of vibration displacement (or pressure) of one mass body that vibrates freely in three dimensions. High detection characteristics can be maintained. For this reason, the measurement by the three-dimensional vibrometer is effective for accurate evaluation of the maximum vibration displacement (or acceleration) and its direction, and can be used as a control system by combining with the measurement system. In such control, quantitative evaluation of energy considering not only the maximum amplitude (or acceleration) but also its duration is effective, and accurate three-dimensional vibration evaluation and quantitative analysis using a three-dimensional vibrometer can be performed. In combination, a highly sensitive and efficient vibration detection and control system can be realized.

[0019]

1 to 3 show a first embodiment of a vibrometer according to the present invention which is a three-dimensional vibrometer capable of measuring displacement of three-dimensional vibration. FIG. 1 shows the configuration of the main part, which is slidable in a plane perpendicular to the measurement axis direction in a hexahedral container-shaped base frame 11 fixed to a measurement object that vibrates three-dimensionally and freely. The moving frame 12 is provided. This moving frame 12
A pair of sliding plates 1 sliding on opposing inner surfaces of the base frame 11
3 and a plurality of rods 14 connecting both sliding plates. These rods 14 are oscillating masses 15
And a guide means for guiding the sliding in the measurement axis direction, and is inserted or abutted on a part of the mass body 15 so as to guide the sliding. Further, a spring 16 as an elastic element for vibrating the mass body 15 in the measurement axis direction and a damper 17 as a damping element are provided on the moving frame 12, and the vibration displacement of the mass body 15 relative to the moving frame is further provided. Is provided between the slide plate 13 and the mass body 15.

FIG. 1 shows only a configuration for measuring vibration in one axial direction among three measurement axis directions orthogonal to each other of the mass body 15 for clarity of illustration, but a pair of sliding members is used. The moving frame 12 with the plates 13 and the plurality of rods 14 attached between them, as can be seen from FIGS.
One mass body 15 is combined in three axial directions orthogonal to each other.

That is, a plurality of rods 1 in three X, Y, and Z directions orthogonal to each other
4x, 14y, and 14z are slidably inserted or abutted respectively, and both ends of the rods are slidable in a plane orthogonal to each measurement axis direction with respect to the inner surface of the base frame. 13y, 13z. Further, these rods 14x, 14y, 14z and sliding plates 13x, 1
The moving frames 12x, 12y, 12z composed of 3y, 13z are
An elastic element and a damping element for vibrating the mass body 15 in the respective measurement axis directions are provided similarly to the case of FIG. 1. Displacement transducer 18 for detecting relative vibration displacement of mass body 15
Can be provided in each moving frame. However, when performing vibration measurement only in a specific measurement axis direction, the displacement converter may be provided only in the moving frame whose measurement axis is oriented in that direction.

In the three-dimensional vibrometer of the first embodiment, generally, three-dimensionally free vibrations are reproduced by one vibrating body 15 by a combination of sliding in three orthogonal directions. More specifically, for example, FIG.
When a force that simultaneously vibrates the mass body 15 vibrating in one axis direction in a direction perpendicular to the axis is applied, the mass body 15 vibrates along the rod in that direction.
The on-axis mass body 15, spring 16, damper 1 shown in FIG.
7. The moving frame 12 is provided with the sliding plate 13 while maintaining its vibration axis.
Thereby, the inner surface of the base frame 11 is slid. The dynamic stress generated by the vibration in the direction deviating from the vibration axis acting on the vibrating body 15 is generated between the sliding plate 13 of the moving frame 12 and the inner surface of the base frame 11 as described above. Does not act on the mass 15, so that the mass 15 slides along the rod 14 under constant frictional resistance conditions. Therefore, it is possible to avoid an error factor that the spring constant and the damping coefficient are dynamically changed while being deviated from the vibration axis.

The relative vibration displacement between the sliding plates 13x, 13y, 13z and the mass body 15 is determined by the displacement transducer 18 provided on the moving frame, in which the vibration axis shifts or fluctuates. Detected unaffected. In addition, since one mass body slides under a certain friction condition, the detection condition that satisfies the practical uniaxial theoretical formula can be obtained. The amplitude can be derived from the vibration displacement. In addition, since one vibration mass can reproduce the original vibration and detect the vibration displacement in three-dimensional directions when vibrating three-dimensionally, high detection characteristics can be obtained in a wide range of directions in three dimensions. It is possible to realize efficient and highly accurate vibration measurement. The vibration displacement can be measured by a displacement transducer in an arbitrary measurement axis direction.
It can also be used as a two-dimensional seismometer that measures the shear wave of the seismic motion by measuring the axial vibration displacement.

In the vibrometers for measuring the three-dimensional vibration in the above-described embodiment and the embodiments described below, when the amplitude and acceleration in one axis direction are obtained from the measurement of the vibration displacement and the pressing force of the mass body, the mass is measured. The mass of the body is the mass including the other two-axis springs, dampers, sliding plates, displacement transducers and piezoelectric transducers. Further, the constant coefficient of friction in sliding the mass body along the rod can be physically replaced by damping by a damper, and is considerably smaller than the damping coefficient of the damper, so that the coefficient of friction can be ignored in the calculation. Such a sliding structure can be configured.

FIG. 4 shows a two-axis cross section of the three-dimensional vibration meter of the second embodiment using a braking fluid as a damping element. The base frame 21 in this embodiment forms a liquid-tight hexahedral container, and inside the hexahedral container, a pair of sliding plates 23 sliding on opposing inner surfaces in three axial directions orthogonal to each other, The two sliding plates 23 are connected to each other to provide a plurality of parallel rods 24 for guiding the sliding of the mass body 25, and the pair of sliding plates 23 and the plurality of rods 24 form the base frame 2.
Moving frame 22 that slides on the inner surface of 1 in a plane perpendicular to the measurement axis
Is composed.

The mass body 25 is slidably held by the rods 24 of the respective moving frames 22 via a pair of springs 26 of the same characteristic, which are elastic elements, to form the base frame 21 forming the hexahedral container. A damping fluid 27 is sealed therein as a damping element. Further, a displacement converter 28 for detecting the displacement of the mass body 25 is provided between the mass body 25 and one slide plate 23 of each moving frame 22. These displacement transducers 28
Is to derive the detected signal to the outside through a signal line or wirelessly. The arrangement of the mass body 25, the pair of sliding plates 23 of each moving frame and the plurality of rods 24 in this embodiment is substantially the same as that shown in FIGS.

FIG. 5 shows a third embodiment in which the vibrometer of the present invention is configured as an acceleration vibrometer for three-dimensional vibration. Since this embodiment is used as an accelerometer,
Each moving frame 32 similar to FIGS. 2 and 3, that is, the base frame 3
A moving frame 32 constituted by a plurality of rods 34 constituting a guide means of a mass body 35 by connecting a pair of sliding plates 33 sliding in planes orthogonal to each other in the first body 1
Further, a piezoelectric transducer (piezoelectric element) 38 for detecting the acceleration of the mass body 35 in the measurement axis direction by the pressing force is provided. A spring 36 as an elastic element for vibrating the mass body 35 in the measurement axis direction is provided on the moving frame 32. However, when this piezoelectric transducer 38 is used, it is generally not necessary to provide a damping element. In the acceleration vibrometer of the third embodiment, the mechanical strain in the direction other than the measurement axis direction is not applied to the piezoelectric transducer 38 due to the vibration, and the compression occurs in the measurement axis direction, and the applied pressure is reduced. The corresponding voltage is generated,
It is applied to the measurement circuit through a signal line.

FIG. 6 shows a three-dimensional vibration meter (including an accelerometer) according to the present invention fixed as a rock vibrometer for a borehole in a borehole BH drilled in the rock and detecting the vibration of the ground. Is used as an example. In this rock mass vibrometer, the three-dimensional vibrometers 40 of the various embodiments described above are used by being incorporated in a probe main body 42 in a fixed guide 41 having a cylindrical outer shape. The rock vibrometer is provided with a pair of fixing devices 44 for fixedly installing the fixed guide 41 in the borehole BH at both ends of a probe main body 42 fixed at substantially the center in the length direction of the fixed guide 41. Things. These fixing devices 44 are provided with a fixing pin 46 urged in a projecting direction by a spring 47 in a guide cylinder 45, a piston 49 connected to the base end thereof is inserted into the cylinder 48, and a pressure source (not shown) is inserted. The pressure fluid introduced through the pressure line 50 can be supplied and discharged into the cylinders 48 of the two fixing devices 44. The three-dimensional vibrometer is connected to a signal line 51 for connecting to a measuring instrument on the ground.

The rock vibrometer described above uses the borehole BH
The piston 49 is driven by the pressurized fluid supplied to the pair of cylinders 48 through the pressure line 50 to resist the urging force of the spring 47. Then, the fixing pin 46 is immersed in the fixing guide 41. As a result, the fixed guide 41 can be moved to a predetermined position in the borehole BH. At the stage when the fixed guide 41 has been moved to the predetermined position, the pressure fluid supplied to the cylinder 48 through the pressure line 50 is discharged, and the spring 47 is discharged. The urging force causes the fixing pin 46 to protrude from the fixing guide 41 and press the inner wall surface of the bore hole BH. Thereby, the ground vibrometer is fixed at a predetermined position in the borehole BH by the fixing guide 41 and the two fixing devices 44. In this case, it is necessary to evaluate the natural frequency of the fixing device 44, the spring constant associated with the fixing method, the damping coefficient, and the like.

As is clear from the above description, the vibrometer of the present invention can be implemented or used in the following modes. (1) A vibration measuring system is configured by combining analysis means for three-dimensionally evaluating the direction, amplitude, and acceleration of the maximum vibration vector from the vibration displacement and vibration pressure in three axial directions of one mass body. (2) Combine the three-dimensional vibrometer with analysis means such as vibration energy and spectrum intensity to configure a vibration measurement control system that detects a vibration magnitude such as an earthquake and outputs a control signal. (3) The above-mentioned three-dimensional vibrometer is incorporated in a cylindrical probe with a fixing device to constitute a rock mass vibrometer which can be installed in a borehole of the rock mass.

[0031]

As described above, according to the three-dimensional vibrometer of the present invention, when a vibration is measured in one axial direction, the vibration component deviating from the measurement axis direction is caused by sliding of the moving frame with respect to the base frame. It is absorbed by the movement and the vibration displacement of the mass body in the other two axial directions, so that no dynamic stress is generated in the direction perpendicular to the measurement axis, and the three-dimensional vibration is generated in the three axial directions under the condition of constant frictional resistance. The mass body responds to the vibration of each axis while maintaining a constant spring constant and damping coefficient, and the direction, amplitude, acceleration, and the like of the vibration vector can be accurately evaluated three-dimensionally.

[Brief description of the drawings]

FIG. 1 is a front view of a main part of a first embodiment of a three-dimensional vibration meter according to the present invention.

FIG. 2 is a side sectional view showing a main part of the moving frame according to the first embodiment.

FIG. 3 is a perspective view showing a configuration of a moving frame according to the first embodiment.

FIG. 4 is a vertical sectional front view of a second embodiment of the three-dimensional vibration meter of the present invention.

FIG. 5 is a vertical sectional front view of a third embodiment of the three-dimensional vibration meter of the present invention.

FIG. 6 is a cross-sectional view showing a state in which the three-dimensional vibration meter of the present invention is used as an apparatus for measuring ground vibration.

FIG. 7A is a diagram illustrating the principle of a conventional vibrometer,
(B) is an explanatory diagram of the equivalent system.

FIG. 8 is an explanatory diagram of a vibration axis shift due to free vibration in a vibrometer.

FIG. 9 is a diagram illustrating a change in frictional resistance due to a displacement constraint of a mass body.

[Explanation of symbols]

 11, 21, 31 Base frame 12, 22, 32 Moving frame 13, 23, 33 Sliding plate 14, 24, 34 Rod 15, 25, 35 Mass 16, 26, 36 Spring 17 Damper 18, 28 Displacement converter 27 Brake fluid 38 Piezoelectric transducer

Claims (5)

(57) [Claims] 1. A guide means for guiding a mass body in a measurement axis direction, and an elastic element and a damping element for vibrating the mass body in the measurement axis direction are provided on a plane orthogonal to the measurement axis direction with respect to a base frame. A three-dimensional vibrometer provided on a movable frame which is slidable with the above, and a displacement converter for detecting a displacement of the mass body with respect to the movable frame. 2. A guide means for guiding a mass body in a measurement axis direction, and an elastic element and a damping element for vibrating the mass body in the measurement axis direction are provided on a plane orthogonal to the measurement axis direction with respect to a base frame. And a guide means for guiding the mass body in the other two measurement axis directions perpendicular to the measurement axis direction and orthogonal to each other, and in the two measurement axis directions. An elastic element and a damping element to be vibrated are provided on a moving frame which is slidable in a plane perpendicular to the direction of their measurement axes with respect to the base frame, and a displacement for detecting a displacement of the mass body with respect to each moving frame. A three-dimensional vibrometer provided with a converter. 3. A guide means for guiding a mass body in a measurement axis direction, and an elastic element for vibrating the mass body in the measurement axis direction is slid in a plane perpendicular to the measurement axis direction with respect to a base frame. In addition to being provided on a free moving frame, the base frame is formed of a liquid-tight hexahedron container, and a braking fluid as a damping element is sealed inside the hexahedral container, and the displacement of the mass body with respect to the moving frame is detected. A three-dimensional vibrometer, comprising: 4. A guide means for guiding a mass body in a measurement axis direction, and an elastic element for vibrating the mass body in the measurement axis direction is slid in a plane perpendicular to the measurement axis direction with respect to a base frame. A three-dimensional vibrometer provided on a movable frame, wherein a piezoelectric converter for detecting acceleration of the mass body in a measurement axis direction by a pressing force is provided on the movable frame. 5. A guide means for guiding the mass body in the direction of the measurement axis, wherein a rod for guiding the sliding of the mass body by inserting or abutting a part of the mass body on the moving frame is provided. The three-dimensional vibrometer according to any one of claims 1 to 4.