JP2756793B2 - Electrocoating equipment - Google Patents

Electrocoating equipment

Info

Publication number
JP2756793B2
JP2756793B2 JP63223251A JP22325188A JP2756793B2 JP 2756793 B2 JP2756793 B2 JP 2756793B2 JP 63223251 A JP63223251 A JP 63223251A JP 22325188 A JP22325188 A JP 22325188A JP 2756793 B2 JP2756793 B2 JP 2756793B2
Authority
JP
Japan
Prior art keywords
electrodeposition
liquid
foreign matter
coated
basket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP63223251A
Other languages
Japanese (ja)
Other versions
JPH0270097A (en
Inventor
広成 日比
敏彦 鷹野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Original Assignee
Ibiden Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd filed Critical Ibiden Co Ltd
Priority to JP63223251A priority Critical patent/JP2756793B2/en
Publication of JPH0270097A publication Critical patent/JPH0270097A/en
Application granted granted Critical
Publication of JP2756793B2 publication Critical patent/JP2756793B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0079Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the method of application or removal of the mask

Landscapes

  • Application Of Or Painting With Fluid Materials (AREA)
  • Coating Apparatus (AREA)

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は、電着塗装装置、特に電着膜を有効に析出さ
せかつ電着膜の均一性を向上させ、さらには、電着膜の
仕上りを良好にする電着塗装装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION (Industrial application field) The present invention relates to an electrodeposition coating apparatus, in particular, to effectively deposit an electrodeposition film and improve the uniformity of the electrodeposition film. The present invention relates to an electrodeposition coating apparatus for improving the finish.

この電着塗装装置は、特にプリント配線板等のフォト
レジストなどに使用される電着レジスト被膜を形成する
ものである。
This electrodeposition coating apparatus forms an electrodeposition resist film used particularly for a photoresist of a printed wiring board or the like.

(従来の技術) 従来、プリント配線板の製造を目的とした、電着レジ
スト被膜の形成装置にあっては、電着槽内の電着液は均
一に撹拌するために1系統以上の液還流装置を有し、そ
の還流系統中には濾過フィルターが設けられているが、
この濾過フィルターは、電着液中のゴミもしくは電着組
成物の凝集物を除去するためのものであった。
(Prior Art) Conventionally, in an apparatus for forming an electrodeposition resist film for the purpose of manufacturing a printed wiring board, one or more systems of liquid reflux are used to uniformly stir an electrodeposition liquid in an electrodeposition tank. It has a device, and a filtration filter is provided in the reflux system,
This filtration filter was for removing dusts in the electrodeposition liquid or aggregates of the electrodeposition composition.

しかし、このような液循環では液中のゴミもしくは電
着組成物の凝集物などの異物は完全に除去することはで
きない。すなわち、電着槽あるいは補助槽に取り付ける
のみの循環濾過では、槽内に何らかの原因で異物が発生
しても槽の容積が大きく異物が濾過されるのにかなり時
間がかかるかもしくは本槽内を浮遊しているだけであっ
て、一向に濾過されないものであった。特に、前記凝集
物は電着液自体から随時発生する異物としてで着塗装特
有の問題を投かけてきた。電着塗膜にはこれらの異物が
付着し、塗膜の仕上り状態を著しくそこなうものであっ
た。
However, such liquid circulation cannot completely remove foreign substances such as dust in the liquid or aggregates of the electrodeposition composition. In other words, in the case of circulating filtration that is merely attached to the electrodeposition tank or the auxiliary tank, even if foreign matter is generated in the tank for some reason, the volume of the tank is large, and it takes a considerable time for the foreign matter to be filtered, or the inside of the main tank is required It was just floating and not filtered at all. In particular, the agglomerates have been raised as a foreign matter generated as needed from the electrodeposition liquid itself, and have raised a problem specific to coating. These foreign substances adhered to the electrodeposited coating film, which significantly impaired the finished state of the coating film.

特に、プリント配線板の製造にかかるフォトレジスト
として電着法を用いてパターン形成を行う場合において
は、電着物塗膜後感光機能を要求されるための塗膜の仕
上り状態は、かなり良好でなければならない。
In particular, when a pattern is formed by using an electrodeposition method as a photoresist for manufacturing a printed wiring board, the finished state of the coating film required for the photosensitive function after the coating of the electrodeposition material must be fairly good. Must.

すなわち、電着塗膜の仕上りが悪ければ、パターン形
成することができないということが大きな問題であっ
た。
In other words, it was a major problem that the pattern could not be formed if the finish of the electrodeposition coating film was poor.

(発明が解決しようとする課題) 本発明は以上のような実状に鑑みてなされたものであ
り、その解決しようとする課題は、 電着液中の異物は循環濾過だけでは除去しきれず塗膜
表面に付着し、電着塗膜の仕上り状態を著しくそこな
う。
(Problems to be Solved by the Invention) The present invention has been made in view of the above situation, and the problem to be solved is that foreign matters in the electrodeposition liquid cannot be completely removed only by circulating filtration, and the coating film cannot be removed. It adheres to the surface and significantly impairs the finished state of the electrodeposition coating film.

そのため、特にフォトレジストとして電着塗膜を析出
させても信頼性の高い高密度パターンの形成は不可能で
ある。
Therefore, even if an electrodeposition coating film is deposited as a photoresist, it is impossible to form a highly reliable high-density pattern.

そして、本発明の目的とするところは、上述した従来
技術の課題を除去・改善し行程を簡略化することがで
き、作業効率を向上させ製造コストを安価にすることの
できる電着塗装装置を提供することである。
An object of the present invention is to provide an electrodeposition coating apparatus capable of eliminating and improving the above-mentioned problems of the prior art, simplifying the process, improving work efficiency and reducing manufacturing costs. To provide.

(課題を解決するための手段) 本発明は、従来技術の課題を解決し、上記目的を達成
すべくなされたものである。
(Means for Solving the Problems) The present invention has been made to solve the problems of the prior art and achieve the above object.

これらの課題を解決するために本発明が採った手段
は、 1).電着液を収容した電着槽中に搬送具で支持搬送さ
れる被塗物を浸漬し、塗料及び被塗物に通電して被塗物
表面に電着塗装を行う電着塗装装置において、 前記被塗物を覆い、かつ脱着可能な異物防御ネットを
備えたことを特徴とする電着塗装装置。
Means taken by the present invention to solve these problems are 1). In an electrodeposition coating apparatus for immersing an article to be supported and transported by a transport tool in an electrodeposition tank containing an electrodeposition liquid, applying an electric power to the paint and the article to perform electrodeposition coating on the surface of the article, An electrodeposition coating apparatus comprising: a foreign matter protection net which covers the object to be coated and is detachable.

及び、 2).電着液を収容した電着槽中に搬送具で支持搬送さ
れる被塗物を浸漬し、塗料及び被塗物に通電して被塗物
表面に電着塗装を行う電着塗装装置において、 前記被塗物を覆い、かつ電着液の循環濾過装置を有す
る異物防御ネットを備えたことを特徴とする電着塗装装
置。
And 2). In an electrodeposition coating apparatus for immersing an article to be supported and transported by a transport tool in an electrodeposition tank containing an electrodeposition liquid, applying an electric power to the paint and the article to perform electrodeposition coating on the surface of the article, An electrodeposition coating apparatus comprising: a foreign matter protection net covering the object to be coated and having a device for circulating and filtering an electrodeposition liquid.

である。It is.

以上の各発明を、実施例に対応する図面を用いて詳し
く説明する。
Each of the above inventions will be described in detail with reference to the drawings corresponding to the embodiments.

第1図〜第3図に示すように、電着槽(1)は上部が
開放された箱型に形成されている。該電着槽(1)には
感光性樹脂組成物が分散された電着液(3)が貯留され
ているとともに、ネット上の異物防御カゴ(4)が配設
されている。
As shown in FIGS. 1 to 3, the electrodeposition tank (1) is formed in a box shape with an open upper part. The electrodeposition tank (1) stores an electrodeposition liquid (3) in which a photosensitive resin composition is dispersed, and a foreign substance protection basket (4) on a net.

また、被塗物(7)はカゴ(4)内に支持されてい
る。
The object to be coated (7) is supported in the basket (4).

このカゴ(4)の内部と外部の電着液(3)とは、カ
ゴ(4)のネットを介してのみ交流できるように配設さ
れている。
The inside of the basket (4) and the external electrodeposition liquid (3) are arranged so that they can be exchanged only through the net of the basket (4).

第1図のカゴ(4)は容易に脱着可能で必要に応じカ
ゴ(4)内の洗浄ができる。
The basket (4) in FIG. 1 can be easily detached and attached, and the inside of the basket (4) can be cleaned as required.

第2図のカゴ(4)は固定されているが、循環濾過装
置が取り付けられている。
The basket (4) in FIG. 2 is fixed, but has a circulating filtration device.

また、図示したように電着液の循環は、電着浴槽
(1)より補助槽(2)へオーバーフローしポンプ
(5)によりフィルタ(6)を通り電着浴槽へ戻るよう
にすることもできる。
Further, as shown in the figure, the circulation of the electrodeposition liquid can be made to overflow from the electrodeposition bath (1) to the auxiliary tank (2) and return to the electrodeposition bath through the filter (6) by the pump (5). .

本発明においては上述したオーバーフロー式の電着浴
槽以外にも利用できることは言うまでもない。
In the present invention, it goes without saying that the present invention can be used for other than the overflow type electrodeposition bath.

(発明の作用) 本発明が以上のような手段を採ることによって以下の
ような作用がある。
(Operation of the Invention) The present invention has the following operation by adopting the above means.

本発明に係る方法にあっては、被塗物は異物または電
着樹脂物など存在しないカゴ(4)内に浸漬し電着する
ため、塗膜に異物又は電着樹脂物が付着することがない
から、仕上り性はかなり良好になる。
In the method according to the present invention, since the object to be coated is immersed in the cage (4) where there is no foreign substance or the electrodeposited resin substance and electrodeposited, the foreign substance or the electrodeposited resin substance may adhere to the coating film. As there is no finish, the finish is quite good.

また、カゴ(4)の中に循環濾過された電着液を噴入
しない場合には、カゴ(4)のネットの作用により液循
環のため電着浴槽内の液流は均一な流れとなり被塗物の
膜厚は均一になるのである。
When the circulated and filtered electrodeposition liquid is not injected into the basket (4), the liquid flows in the electrodeposition bath due to the circulation of the liquid due to the action of the net of the basket (4). The thickness of the coating becomes uniform.

(実施例) 以下、各発明を実施例により詳細に説明する。EXAMPLES Hereinafter, each invention will be described in detail with reference to examples.

実施例1 第1図に示すように電着浴槽(1)は上部が開放され
た箱型に形成され、電着浴槽(1)の側部には補助槽
(2)が形成されている。該電着浴槽(1)には感光性
樹脂組成物が分散された電着液(3)が貯留されている
とともに、異物防御カゴ(4)が配設されている。
Example 1 As shown in FIG. 1, an electrodeposition bath (1) is formed in a box shape with an open top, and an auxiliary bath (2) is formed on the side of the electrodeposition bath (1). The electrodeposition bath (1) stores an electrodeposition liquid (3) in which a photosensitive resin composition is dispersed, and is provided with a foreign matter protection basket (4).

この異物防御カゴ(4)は箱型であって、被塗物
(7)との間隔は10cm程度に設置され、カゴ(4)内部
と外部との液はカゴ(4)のネットを介してのみ交流で
きるように配設されている。このネットはステンレス製
の300メッシュを用いた。また、カゴ(4)は洗浄のた
めの脱着が可能である。
This foreign matter protection basket (4) is box-shaped, and the space between the object (7) and the object (7) is set at about 10 cm. The liquid inside and outside the basket (4) is passed through the net of the basket (4). It is arranged only to be able to exchange. This net used stainless steel 300 mesh. The basket (4) can be detached for cleaning.

また、電着液の循環は、電着浴槽(1)より補助槽
(2)へオーバーフローし、ポンプ(5)によりフィル
タ(6)を通り電着浴槽(1)へ戻るようになってい
る。
The circulation of the electrodeposition liquid overflows from the electrodeposition bath (1) to the auxiliary tank (2), and returns to the electrodeposition bath (1) through the filter (6) by the pump (5).

被塗物(7)をカゴ(4)内に支持し、上述の状態で
定電圧法によって電着した結果、被塗物(7)個々の表
面の仕上りは良好で膜厚は設定値に対して±1μmであ
った。
The object to be coated (7) was supported in the basket (4) and electrodeposited by the constant voltage method in the above-mentioned state. As a result, the finish of each surface of the object to be coated (7) was good and the film thickness was larger than the set value. ± 1 μm.

実施例2 実施例1と違うのは異物防御ネットが固定式であって
さらには循環系統が第1図に加えて第2図のようにカゴ
(4)内部より吸引しカゴ(4)外部へ排出するような
系統になっていることである。それ以外は実施例1と同
様にして電着を行った結果、安定した高速電着が可能と
なり、塗膜の仕上り状態も良好で膜厚も設定値に対して
±1μmであった。
Embodiment 2 The difference from Embodiment 1 is that the foreign object protection net is of a fixed type, and furthermore, the circulating system is sucked from the inside of the car (4) as shown in FIG. It is a system that discharges. Otherwise, the electrodeposition was performed in the same manner as in Example 1. As a result, stable high-speed electrodeposition was enabled, the finished state of the coating film was good, and the film thickness was ± 1 μm with respect to the set value.

実施例3 実施例1,2と違うのは揺動を加えた点でありそれ以外
は実施例1と同様に電着を行った結果、揺動を行っても
電流値及び電圧の変動はほとんどなく、塗膜の仕上り状
態は著しく良好であった。
Embodiment 3 The difference from Embodiments 1 and 2 is that oscillation was added. Other than that, the electrodeposition was performed in the same manner as in Embodiment 1. As a result, even if the oscillation was performed, the current value and the voltage hardly fluctuated. The finished state of the coating film was remarkably good.

実施例4 実施例1,2,3と違うのは被塗物(7)を複数にしたこ
とであり(プリント配線板として5シート)それ以外は
実施例1と同様に電着した結果、被塗物(7)内及び被
塗物(7)間の膜厚ばらつきは±1μmであり仕上りも
かなり良好であった。
Example 4 The difference from Examples 1, 2, and 3 was that a plurality of objects to be coated (7) were used (five sheets as a printed wiring board). The thickness variation in the coating (7) and between the coatings (7) was ± 1 μm, and the finish was quite good.

(発明の効果) 以上詳述した通り、本発明にあっては、上記実施例に
例示した如く 1).電着液を収容した電着槽中に搬送具で支持搬送さ
れる被塗物を浸漬し、塗料及び被塗物に通電して被塗物
表面に電着塗装を行う電着塗装装置において、 前記被塗物を覆い、かつ脱着可能な異物防御ネットを
備えたことを特徴とする電着塗装装置。
(Effects of the Invention) As described in detail above, in the present invention, 1). In an electrodeposition coating apparatus for immersing an object to be supported and conveyed by a carrier in an electrodeposition bath containing an electrodeposition liquid, applying an electric current to the paint and the object to perform electrodeposition coating on the surface of the object, An electrodeposition coating apparatus comprising: a foreign matter protection net which covers the object to be coated and is detachable.

また、 2).電着液を収容した電着槽中に搬送具で支持搬送さ
れる被塗物を浸漬し、塗料及び被塗物に通電して被塗物
表面に電着塗装を行う電着塗装装置において、 前記被塗物を覆い、かつ電着液の循環濾過装置を有す
る異物防御ネットを備えたことを特徴とする電着塗装装
置。
2). In an electrodeposition coating apparatus for immersing an article to be supported and transported by a transport tool in an electrodeposition tank containing an electrodeposition liquid, applying an electric power to the paint and the article to perform electrodeposition coating on the surface of the article, An electrodeposition coating apparatus comprising: a foreign matter protection net covering the object to be coated and having a device for circulating and filtering an electrodeposition liquid.

に特徴があり、これにより行程を簡略化でき作業効率も
向上し、製造コストが安価で品質上何ら問題のない電着
塗膜を提供することができるものである。
Accordingly, the process can be simplified, the working efficiency can be improved, and an electrodeposition coating film having a low production cost and having no problem in quality can be provided.

すなわち、各発明に係る電着塗装装置は被塗物を異物
または電着樹脂物など存在しえないようなカゴ(4)内
に浸漬し電着するため、塗膜に異物又は電着樹脂物が付
着することがないから、仕上り性はかなり良好になるも
のである。
That is, since the electrodeposition coating apparatus according to each invention immerses the object to be coated in a cage (4) in which foreign matter or an electrodeposited resin material cannot exist, electrodeposition is performed. No finish adheres, so that the finish is quite good.

さらには、ネットの使用により液流が緩和され被塗物
全面に対し局部的に液流が強くなることがないためより
いっそう塗膜の均一性を向上させることもできる。
Further, the use of the net reduces the liquid flow and does not locally increase the liquid flow over the entire surface of the object to be coated, so that the uniformity of the coating film can be further improved.

【図面の簡単な説明】[Brief description of the drawings]

第1図及び第2図は本発明の電着塗装装置の概略構成を
示す断面図、第3図は本発明に係る異物防御ネットの1
例を示す斜視図である。 符号の説明 1……電着浴槽、2……補助槽(オーバーフロー槽)、
3……電着液、4……異物防御ネット(カゴ)、5……
循環ポンプ、6……フィルター、7……被塗物。
1 and 2 are cross-sectional views showing a schematic structure of an electrodeposition coating apparatus according to the present invention, and FIG. 3 is a view showing a foreign matter protection net 1 according to the present invention.
It is a perspective view showing an example. DESCRIPTION OF SYMBOLS 1 ... Electrodeposition bath, 2 ... Auxiliary bath (overflow bath),
3 ... electrodeposition liquid, 4 ... foreign matter protection net (cage), 5 ...
Circulation pump, 6 ... Filter, 7 ... Substrate.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】電着液を収容した電着槽中に被塗物を浸漬
し、塗料及び被塗物に通電して被塗物表面に電着塗装を
行う電着塗装装置において、 前記被塗物を覆う異物防御ネットを備え、さらに当該異
物防御ネットの外に循環濾過した前記電着液を噴入する
ことにより、前記異物防御ネットの内部と外部の電着液
とが当該異物防御ネットを介してのみ交流できるように
したことを特徴とする電着塗装装置。
1. An electrodeposition coating apparatus for immersing an object to be coated in an electrodeposition bath containing an electrodeposition liquid and applying an electric current to the paint and the object to perform electrodeposition coating on the surface of the object to be coated. A foreign matter protection net that covers the coating material, and furthermore, the inside of the foreign matter protection net and the outside electrodeposition liquid are injected into the foreign matter protection net by injecting the circulated and filtered electrodeposition liquid outside the foreign matter protection net. An electrodeposition coating apparatus characterized in that it can be exchanged only through a device.
JP63223251A 1988-09-06 1988-09-06 Electrocoating equipment Expired - Lifetime JP2756793B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63223251A JP2756793B2 (en) 1988-09-06 1988-09-06 Electrocoating equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63223251A JP2756793B2 (en) 1988-09-06 1988-09-06 Electrocoating equipment

Publications (2)

Publication Number Publication Date
JPH0270097A JPH0270097A (en) 1990-03-08
JP2756793B2 true JP2756793B2 (en) 1998-05-25

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ID=16795167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63223251A Expired - Lifetime JP2756793B2 (en) 1988-09-06 1988-09-06 Electrocoating equipment

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Country Link
JP (1) JP2756793B2 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6079922A (en) * 1983-10-11 1985-05-07 Seiko Instr & Electronics Ltd Manufacture of plastic parts
LU85513A1 (en) * 1984-08-17 1986-03-11 Sidmar Nv HOT WIND VALVE
JPS61198275U (en) * 1985-05-28 1986-12-11
JPS63106771U (en) * 1986-12-27 1988-07-09

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JPH0270097A (en) 1990-03-08

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