JP2751125B2 - Evaporated film circuit board - Google Patents

Evaporated film circuit board

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Publication number
JP2751125B2
JP2751125B2 JP17506490A JP17506490A JP2751125B2 JP 2751125 B2 JP2751125 B2 JP 2751125B2 JP 17506490 A JP17506490 A JP 17506490A JP 17506490 A JP17506490 A JP 17506490A JP 2751125 B2 JP2751125 B2 JP 2751125B2
Authority
JP
Japan
Prior art keywords
circuit board
parts
vapor
polyimide resin
film circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP17506490A
Other languages
Japanese (ja)
Other versions
JPH0462991A (en
Inventor
輝 奥野山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Chemical Corp
Original Assignee
Toshiba Chemical Corp
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Filing date
Publication date
Application filed by Toshiba Chemical Corp filed Critical Toshiba Chemical Corp
Priority to JP17506490A priority Critical patent/JP2751125B2/en
Publication of JPH0462991A publication Critical patent/JPH0462991A/en
Application granted granted Critical
Publication of JP2751125B2 publication Critical patent/JP2751125B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は、密着性、絶縁特性に優れた蒸着膜回路板に
関する。
DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial application field) The present invention relates to a vapor-deposited film circuit board excellent in adhesion and insulating properties.

(従来の技術) 一般に蒸着法によって蒸着膜回路板を製造する場合
は、アルミニウム板等の基体表面上に耐熱性があり、平
滑性を有する絶縁塗膜を形成し、その表面に蒸着膜回路
を形成する方法が採用されている。このように蒸着膜が
形成される絶縁塗膜は、通常200μm以下と薄いもので
あり、また硬化温度を200℃以上にあげることは好まし
くなく、さらに蒸着膜が数μmと極めて薄いために下地
の絶縁塗膜の平滑性が特に要求される。
(Prior art) In general, when a vapor-deposited film circuit board is manufactured by a vapor deposition method, a heat-resistant and smooth insulating coating film is formed on the surface of a substrate such as an aluminum plate, and the vapor-deposited film circuit is formed on the surface. The method of forming is adopted. The insulating coating film on which the vapor-deposited film is formed is usually as thin as 200 μm or less, and it is not preferable to raise the curing temperature to 200 ° C. or higher. In particular, the smoothness of the insulating coating film is required.

従来この絶縁塗膜の樹脂として、縮合環化型ポリイミ
ド樹脂が使用されてきたが、この樹脂を環化(硬化)さ
せるには300℃以上の温度で長時間を要し、またこのよ
うな高温で硬化させても形成された塗膜は、空気中の水
分を極めて吸着しやすい欠点がある。このポリイミド樹
脂を200℃以下の温度で硬化させた場合には、吸湿性試
験で蒸着膜回路が基体との間で絶縁不良を起こしやす
く、信頼性を低下させる一因となっていた。
Conventionally, condensed cyclized polyimide resin has been used as the resin for this insulating coating film. However, it takes a long time at a temperature of 300 ° C. or more to cyclize (harden) this resin. However, the coating film formed has a disadvantage that water in the air is extremely easily adsorbed. When this polyimide resin is cured at a temperature of 200 ° C. or lower, the insulation failure between the vapor deposition film circuit and the substrate tends to occur in the moisture absorption test, which has been one of the causes of lowering the reliability.

(発明が解決しようとする課題) 本発明は、上記の事情に鑑み、また欠点を解消するた
めになされたもので、絶縁塗膜として密着性、絶縁特
性、平滑性、耐湿性に優れ、かつ光硬化で作業性よく製
造できる蒸着膜回路板を提供しようとするものである。
(Problems to be Solved by the Invention) The present invention has been made in view of the above circumstances, and has been made in order to solve the drawbacks, and has excellent adhesion, insulating properties, smoothness, and moisture resistance as an insulating coating film, and An object of the present invention is to provide a vapor-deposited film circuit board that can be manufactured with good workability by light curing.

[発明の構成] (課題を解決するための手段) 本発明者は、上記の目的を達成しようと鋭意研究を重
ねた結果、後述する新規なポリイミド樹脂を用いること
によって、上記目的が達成されることを見いだし、本発
明を完成したものである。
[Constitution of the Invention] (Means for Solving the Problems) The present inventors have conducted intensive studies to achieve the above object, and as a result, the above object is achieved by using a novel polyimide resin described later. Thus, the present invention has been completed.

すなわち、本発明は、 (A)(a)次の一般式で示されるイミド基とエポキシ
基を有する化合物と、 (但し、式中Rは を表す) (b)フェニレンジアクリル酸を反応したポリイミド樹
脂、及び (B)増感剤及び光開始剤 を必須成分とする耐熱感光性組成物を光硬化させた絶縁
塗膜表面に、導電性膜を蒸着し回路を形成してなること
を特徴とする蒸着膜回路板。
That is, the present invention provides: (A) (a) a compound having an imide group and an epoxy group represented by the following general formula: (Where R is (B) a polyimide resin reacted with phenylenediacrylic acid, and (B) a heat-resistant photosensitive composition containing a sensitizer and a photoinitiator as essential components. A vapor-deposited film circuit board comprising a circuit formed by vapor-depositing a film.

以下、本発明を詳述する。 Hereinafter, the present invention will be described in detail.

本発明に用いる(A)ポリイミド樹脂は、(a)イミ
ド基とエポキシ基を有する化合物と(b)フェニレンジ
アクリル酸を反応させて得られる。ここで用いるイミド
基とエポキシ基を有する化合物は、次の一般式を有する
化合物である。
The polyimide resin (A) used in the present invention is obtained by reacting (a) a compound having an imide group and an epoxy group with (b) phenylenediacrylic acid. The compound having an imide group and an epoxy group used here is a compound having the following general formula.

(但し、式中Rは を表す) また(b)フェニレンジアクリル酸としては次の構造
式を有するものである。
(Where R is In addition, (b) phenylenediacrylic acid has the following structural formula.

ポリイミド樹脂は、(a)イミド基とエポキシ基を有
する化合物と(b)フェニレンジアクリル酸との略等モ
ルを、有機溶媒中で150〜200℃の温度で3〜12時間、付
加反応させて得られる。このとき、好ましくは第三級ア
ミンのような塩基性の反応触媒を使用することが望まし
い。この反応は、必要であれば溶剤を使用してもよい。
このような溶剤としてはN−メチル−2−ピロリドン、
ジメチルアセトアミド、ジメチルホルムアミド、ジオキ
サン、ジグライム等が挙げられ、これらは単独又は2種
以上混合して使用することができる。
The polyimide resin is subjected to an addition reaction of (a) a compound having an imide group and an epoxy group and (b) phenylenediacrylic acid in an organic solvent at a temperature of 150 to 200 ° C. for 3 to 12 hours. can get. At this time, it is preferable to use a basic reaction catalyst such as a tertiary amine. This reaction may use a solvent if necessary.
Such solvents include N-methyl-2-pyrrolidone,
Examples thereof include dimethylacetamide, dimethylformamide, dioxane, and diglyme, and these can be used alone or in combination of two or more.

本発明に用いる(B)増感剤及び光開始剤としては、
ベンゾイン、ベンゾインエチルエーテル、ベンゾインイ
ソプロピルエーテル、ベンゾインフェニルエーテルなど
のベンゾインアルキルエーテル類、ベンゾインチオエー
テル類、ベンゾフェノン、アセトフェノン、2−エチル
−アントラキノン、塩化デシル、チオキサントン類等が
挙げられ、これらは単独もしくは2種以上混合して使用
することができる。
The (B) sensitizer and photoinitiator used in the present invention include:
Benzoin, benzoin ethyl ether, benzoin isopropyl ether, benzoin phenyl ether, and other benzoin alkyl ethers, benzoin thioethers, benzophenone, acetophenone, 2-ethyl-anthraquinone, decyl chloride, thioxanthone, and the like. These can be used in combination.

本発明における耐熱感光性組成物は、ポリイミド樹
脂、増感剤及び光開始剤を必須成分とするが、本発明の
目的に反しない範囲において、また必要に応じて、熱重
合防止剤、無機充填剤、着色剤等を添加配合することが
できる。この熱重合防止剤としては、p−メトキシフェ
ノール、ハイドロキノン、2,6−ジt−ブチル−4−メ
チルフェノール、メチルエーテルハイドロキノン、ベン
ゾエート、ベンゾキノン、4−ヒドロキシメチル−2,6
−ジt−ブチルフェノール等が挙げられ、これらは単独
又は2種以上混合して用いる。熱重合防止剤の配合割合
は、耐熱感光性組成物100重量部に対して0.05〜2.0重量
部添加配合することができる。無機質充填剤としては、
シリカ、炭酸マグネシウム、炭酸カルシウム、硫酸ナト
リウム、タルク、ベントナイト等が挙げられ、着色剤と
してはフタロシアニングリーン等が挙げられる。
The heat-resistant photosensitive composition of the present invention contains a polyimide resin, a sensitizer and a photoinitiator as essential components, but within a range not contrary to the purpose of the present invention, and if necessary, a thermal polymerization inhibitor and an inorganic filler. Agents, coloring agents and the like can be added and blended. Examples of the thermal polymerization inhibitor include p-methoxyphenol, hydroquinone, 2,6-di-tert-butyl-4-methylphenol, methyl ether hydroquinone, benzoate, benzoquinone, and 4-hydroxymethyl-2,6.
-Di-t-butylphenol and the like, which may be used alone or in combination of two or more. The mixing ratio of the thermal polymerization inhibitor can be 0.05 to 2.0 parts by weight per 100 parts by weight of the heat-resistant photosensitive composition. As the inorganic filler,
Examples include silica, magnesium carbonate, calcium carbonate, sodium sulfate, talc, bentonite, and the like, and examples of the colorant include phthalocyanine green.

本発明の耐熱感光性組成物は有機溶剤可溶性であり、
絶縁保護皮膜形成材料として使用する場合には、5〜40
重量%、好ましくは15〜30重量%の割合で溶解した溶液
として用いる(感光性樹脂液)。
The heat-resistant photosensitive composition of the present invention is soluble in an organic solvent,
When used as an insulating protective film forming material, 5-40
%, Preferably 15 to 30% by weight (photosensitive resin solution).

この有機溶剤としては、N,N−ジメチルスルホオキシ
ド、N,N−ジメチルホルムアミド、N,N−ジエチルホルム
アミド、N,N−ジメチルアセトアミド、N,N−ジエチルア
セトアミド、N−メチル−2−ピロリドン、ジグライ
ム、ヘキサメチレンホスホアミド、γ−ブチルラクト
ン、シクロヘキサノン等が挙げられ、これらは単独又は
2種以上混合して使用することができる。
Examples of the organic solvent include N, N-dimethylsulfoxide, N, N-dimethylformamide, N, N-diethylformamide, N, N-dimethylacetamide, N, N-diethylacetamide, N-methyl-2-pyrrolidone, Examples include diglyme, hexamethylenephosphamide, γ-butyllactone, cyclohexanone, and the like, and these can be used alone or as a mixture of two or more.

次に感光性樹脂液を用いた蒸着膜回路板の製造方法に
ついて説明する。感光性樹脂液を樹脂基板、金属基板、
セラミック基板等の基体表面上に、スクリーン印刷又は
スピンナーを用いて回転塗布し、7〜10μmの塗膜層を
形成し、最終時には通常2回の塗布を行い厚さ14〜30μ
mの平滑で均一な塗膜を形成させる。これを100℃の温
度で30分間加熱乾燥し、その後250Wの高圧水銀灯で光硬
化させる。この絶縁塗膜上に蒸着膜回路を形成させた。
まず、真空蒸着によって絶縁塗膜上に導電性膜を蒸着さ
せた後、写真法により回路のレジストパターンを形成さ
せ、しかる後に導電制膜の不要部分をエッチングして蒸
着膜回路板を製造することができる。こうして製造され
た蒸着膜回路板は、各種のロードセルやサーマルヘッド
に好適なものである。
Next, a method for manufacturing a vapor deposition film circuit board using a photosensitive resin liquid will be described. Photosensitive resin liquid is applied to resin substrate, metal substrate,
On a substrate surface such as a ceramic substrate, spin coating is performed by using screen printing or a spinner to form a coating layer having a thickness of 7 to 10 μm.
m to form a smooth and uniform coating film. This is dried by heating at a temperature of 100 ° C. for 30 minutes, and then light-cured with a 250 W high-pressure mercury lamp. A vapor deposition film circuit was formed on the insulating coating film.
First, a conductive film is deposited on an insulating coating film by vacuum deposition, then a resist pattern of a circuit is formed by a photographic method, and then an unnecessary portion of the conductive film is etched to produce a vapor-deposited film circuit board. Can be. The vapor-deposited film circuit board thus manufactured is suitable for various load cells and thermal heads.

(作用) 本発明は、イミド基とエポキシ基を有する化合物と、
光重合性不飽和基を有するフェニレンジアクリル酸とを
付加反応させた特定のポリイミド樹脂を用いることによ
って目的を達することがてきる。すなわち、300℃以上
の温度で長時間の加熱で環化(硬化)されることが必要
なものではなく、すでに環化しているイミド基と、エポ
キシ基に対して光重合性の不飽和基とを有するポリイミ
ド樹脂を使用しているため、100℃前後の短時間の加熱
と光照射によって容易に平滑性に優れた絶縁塗膜を得る
ことができる。また100℃の加熱と光によって完全に硬
化しているため基板と蒸着膜回路との間の密着性がよ
く、絶縁特性も向上させることができたものである。
(Action) The present invention provides a compound having an imide group and an epoxy group,
The object can be achieved by using a specific polyimide resin obtained by an addition reaction with phenylenediacrylic acid having a photopolymerizable unsaturated group. That is, it is not necessary that the cyclization (curing) be performed by heating at a temperature of 300 ° C. or more for a long time, and the imide group already cyclized and the unsaturated group photopolymerizable with respect to the epoxy group are used. Since a polyimide resin having the following properties is used, an insulating coating film having excellent smoothness can be easily obtained by short-time heating at about 100 ° C. and light irradiation. Further, since the film is completely cured by heating at 100 ° C. and light, the adhesion between the substrate and the vapor-deposited film circuit is good, and the insulation characteristics can be improved.

(実施例) 次に本発明を実施例によって具体的に説明する。以下
の実施例および比較例において「部」とは「重量部」を
意味する。
(Examples) Next, the present invention will be described specifically with reference to examples. In the following Examples and Comparative Examples, “parts” means “parts by weight”.

実施例 1 三口フラスコに乾燥窒素を通じてフラスコ内を置換し
た後、ベンゾフェノンテトラカルボン酸無水物から誘導
されたイミド基とエポキシ基を有する化合物27.50部と
フェニレンジアクリル酸6.97部とに、トリエチルアミン
0.03部を加える。フラスコ内の温度を150℃に加熱後、2
0℃/1時間の昇温速度で250℃まで上げ、反応による発熱
を抑えながらそのまま200℃で4時間撹拌反応させた。
反応終了後、フラスコ内にジグライムを加えて冷却し、
これをメタノールと水との混合溶液に投入してポリイミ
ド樹脂を析出させた。析出物を乾燥して茶色のポリイミ
ド樹脂粉末34.0gを得た。このポリイミド樹脂粉末20部
をジグライム80部に溶解し、光開始剤のベンゾインイソ
プロピルエーテル2部を添加配合して、耐熱感光性組成
物のワニス(A)を製造した。
Example 1 After replacing the inside of a flask with dry nitrogen in a three-necked flask, 27.50 parts of a compound having an imide group and an epoxy group derived from benzophenonetetracarboxylic anhydride and 6.97 parts of phenylenediacrylic acid were added to triethylamine.
Add 0.03 parts. After heating the temperature in the flask to 150 ° C,
The temperature was raised to 250 ° C. at a temperature increase rate of 0 ° C./one hour, and the reaction was stirred at 200 ° C. for 4 hours while suppressing the heat generation due to the reaction.
After the reaction is completed, add diglyme to the flask and cool down.
This was poured into a mixed solution of methanol and water to precipitate a polyimide resin. The precipitate was dried to obtain 34.0 g of a brown polyimide resin powder. 20 parts of this polyimide resin powder was dissolved in 80 parts of diglyme, and 2 parts of benzoin isopropyl ether as a photoinitiator was added and blended to prepare a varnish (A) of a heat-resistant photosensitive composition.

実施例 2 三口フラスコに乾燥窒素を通じてフラスコ内を置換し
た後、ピロメリット酸無水物から誘導したイミド基とエ
ポキシ基を有する化合物23.93部とフェニレンジアクリ
ル酸6.97部とに、トリエチルアミン0.03部を加えた。フ
ラスコを150℃の温度に加熱した後、20℃/1時間の昇温
速度で200℃まで上げ、反応による発熱を抑えながらそ
のまま4時間撹拌反応させた。次いで反応終了後、ジグ
ライムを加えて冷却し、これをメタノールと水との混合
溶液に投入してポリイミド樹脂を析出させた。析出物を
乾燥して茶色のポリイミド樹脂粉末29.83gを得た。この
ポリイミド樹脂粉末20部をジグライム80部に溶解し、光
開始剤のベンゾインイソプロピルエーテル2部を添加配
合して、耐熱感光性組成物のワニス(B)を製造した。
Example 2 After replacing the inside of the three-necked flask with dry nitrogen through nitrogen, 0.03 part of triethylamine was added to 23.93 parts of a compound having an imide group and an epoxy group derived from pyromellitic anhydride and 6.97 parts of phenylenediacrylic acid. . After heating the flask to a temperature of 150 ° C., the temperature was raised to 200 ° C. at a heating rate of 20 ° C./one hour, and the reaction was allowed to stir for 4 hours while suppressing heat generation due to the reaction. Next, after the reaction was completed, diglyme was added and the mixture was cooled, and the mixture was poured into a mixed solution of methanol and water to precipitate a polyimide resin. The precipitate was dried to obtain 29.83 g of a brown polyimide resin powder. 20 parts of this polyimide resin powder was dissolved in 80 parts of diglyme, and 2 parts of benzoin isopropyl ether as a photoinitiator was added and blended to produce a varnish (B) of a heat-resistant photosensitive composition.

実施例 3 三口フラスコに乾燥窒素を通じてフラスコ内を置換し
た後、4,4′−オキシジフタル酸無水物から誘導したイ
ミド基とエポキシ基を有する化合物26.88部とフェニレ
ンジアクリル酸6.97部とに、トリエチルアミン0.03部を
加えた。フラスコを150℃の温度に加熱した後、20℃/1
時間の昇温速度で200℃まで上げ、反応による発熱を抑
えながらそのまま200℃で4時間撹拌反応させた。次い
で反応終了後、ジグライムを加えて冷却し、これをメタ
ノールと水との混合溶液に投入してポリイミド樹脂を析
出させた。析出物を乾燥し、茶色のポリイミド樹脂粉末
33.0gを得た。このポリイミド樹脂粉末20部をジグライ
ム80部に溶解し、光開始剤のベンゾインイソプロピルエ
ーテル2部を添加配合して、耐熱感光性組成物のワニス
(C)を製造した。
Example 3 After replacing the inside of a three-necked flask with dry nitrogen through a flask, 26.88 parts of a compound having an imide group and an epoxy group derived from 4,4'-oxydiphthalic anhydride and 6.97 parts of phenylenediacrylic acid were added to 0.03 parts of triethylamine. Parts were added. After heating the flask to a temperature of 150 ° C, 20 ° C / 1
The temperature was raised to 200 ° C. at a rate of temperature increase over time, and the reaction was allowed to proceed with stirring at 200 ° C. for 4 hours while suppressing heat generation due to the reaction. Next, after the reaction was completed, diglyme was added and the mixture was cooled, and the mixture was poured into a mixed solution of methanol and water to precipitate a polyimide resin. The precipitate is dried and brown polyimide resin powder
33.0 g was obtained. 20 parts of this polyimide resin powder was dissolved in 80 parts of diglyme, and 2 parts of benzoin isopropyl ether as a photoinitiator was added and blended to prepare a varnish (C) of a heat-resistant photosensitive composition.

比較例 4,4′−ジアミノジフェニルエーテルとピロメリット
酸二無水物とを、N,N−ジメチルアセトアミド中で当量
反応させて樹脂分17重量%のポリアミド酸ワニス(D)
を製造した。
Comparative Example 4,4'-diaminodiphenyl ether and pyromellitic dianhydride were reacted in an equivalent amount in N, N-dimethylacetamide to obtain a polyamic acid varnish (D) having a resin content of 17% by weight.
Was manufactured.

実施例1〜3および比較例で製造したワニス(A)〜
(D)を、厚さ2mmのアルミニウム板上に2000r.p.m.で
回転塗布し、100℃で30分間加熱させた後、さらにもう
1回2000r.p.m.で回転塗布し、100℃で1時間加熱乾燥
させた後、(A)〜(C)は250Wの高圧水銀灯で光硬化
させ、(D)は270℃で4時間加熱硬化させて、厚さ21
μmの絶縁塗膜を有する基板をつくった。次いでそれぞ
れの絶縁塗膜表面上に、真空蒸着法によってニッケル、
クロム、チタン、銅の層を重ね、その表面に写真法によ
って回路のレジストパターンを形成した。その後、不要
部分のエッチングを行って蒸着膜回路板を製造した。こ
れらの回路板について密着性、絶縁抵抗、誘導率、誘電
正接、硬化性の諸試験を行ったので、その結果を第1表
に示した。実施例の結果はいずれも優れており、本発明
の効果を確認することができた。
Varnishes (A) manufactured in Examples 1 to 3 and Comparative Example
(D) is spin-coated at 2000 rpm on a 2 mm-thick aluminum plate, heated at 100 ° C. for 30 minutes, then spin-coated again at 2000 rpm, and dried by heating at 100 ° C. for 1 hour. After that, (A) to (C) were light-cured with a 250 W high-pressure mercury lamp, and (D) was heat-cured at 270 ° C. for 4 hours to obtain a film having a thickness of 21 mm.
A substrate having a μm insulating coating was prepared. Next, on each insulating coating surface, nickel,
Layers of chromium, titanium, and copper were overlaid, and a circuit resist pattern was formed on the surface by photolithography. Thereafter, unnecessary portions were etched to produce a vapor-deposited film circuit board. Various tests were conducted on these circuit boards for adhesion, insulation resistance, dielectric constant, dielectric loss tangent, and curability. The results are shown in Table 1. The results of the examples were all excellent, and the effects of the present invention could be confirmed.

[発明の効果] 以上の説明および第1表の結果から明らかなように、
本発明の蒸着膜回路板は、絶縁塗膜として密着性、絶縁
特性、平滑性、耐湿性に優れ、かつ光硬化で作業性よく
低温短時間で製造できるものであるから、各種ロードセ
ルやサーマルヘッド等に使用すれば、信頼性の高い製品
を得ることができる。
[Effects of the Invention] As is clear from the above description and the results in Table 1,
The vapor-deposited film circuit board of the present invention has excellent adhesion, insulation properties, smoothness, and moisture resistance as an insulating coating film, and can be manufactured by photocuring with good workability at a low temperature in a short time. For example, a highly reliable product can be obtained.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】(A)(a)次の一般式で示されるイミド
基とエポキシ基を有する化合物と、 (但し、式中Rは を表す) (b)フェニレンジアクリル酸を反応したポリイミド樹
脂、及び (B)増感剤及び光開始剤 を必須成分とする耐熱感光性組成物を光硬化させた絶縁
塗膜表面に、導電性膜を蒸着し回路を形成してなること
を特徴とする蒸着膜回路板。
(A) (a) a compound having an imide group and an epoxy group represented by the following general formula: (Where R is (B) a polyimide resin reacted with phenylenediacrylic acid, and (B) a heat-resistant photosensitive composition containing a sensitizer and a photoinitiator as essential components. A vapor-deposited film circuit board comprising a circuit formed by vapor-depositing a film.
JP17506490A 1990-07-02 1990-07-02 Evaporated film circuit board Expired - Fee Related JP2751125B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17506490A JP2751125B2 (en) 1990-07-02 1990-07-02 Evaporated film circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17506490A JP2751125B2 (en) 1990-07-02 1990-07-02 Evaporated film circuit board

Publications (2)

Publication Number Publication Date
JPH0462991A JPH0462991A (en) 1992-02-27
JP2751125B2 true JP2751125B2 (en) 1998-05-18

Family

ID=15989602

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17506490A Expired - Fee Related JP2751125B2 (en) 1990-07-02 1990-07-02 Evaporated film circuit board

Country Status (1)

Country Link
JP (1) JP2751125B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5655284B2 (en) * 2008-09-11 2015-01-21 三菱化学株式会社 Soluble imide skeleton resin, soluble imide skeleton resin solution composition, curable resin composition, and cured product thereof

Also Published As

Publication number Publication date
JPH0462991A (en) 1992-02-27

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