JP2738178B2 - Angle measuring device for tilt axis - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus for measuring the angle of a tilt axis, and more particularly, to a work held on a movable table so that the tilt axis is vertical, and positioning the tilt axis at a measurement position. Two upper and lower measurement points, and the upper and lower positions of a position rotated by 90 ° in a horizontal plane orthogonal to the inclined axis axis.
Angle measurement of the tilt axis, which measures the measurement points at the same time via the four rotating arms and compares the displacement between the measured value and the reference value with the standard value to judge the quality of the tilt axis angle Related to the device.

[0002]

2. Description of the Related Art Conventionally, when measuring the tilt axis of a workpiece fixed with its axis inclined with respect to a substrate, the workpiece is mounted on an iron block called an inspection tool, and the workpiece is placed on a surface plate to be measured. The deflection of the needle point was directly read by a dial pick test on the tilt axis which is the object. In addition, since the object to be measured has an angle (an angle with respect to the axis Z perpendicular to the XY plane and an angle on the XY plane), two measurement points at the upper and lower positions of the root and the tip of the inclined axis, respectively. On the other hand, two upper and lower measurement points rotated by 90 ° about the axis of the tilt axis were measured, and the difference between them was determined to perform the measurement while performing a total of four pick tests.

[0003]

However, since the number of times of measurement is large, it takes time until the measurement result is understood. In addition, since the measurement points are not constant due to manual measurement, the measured values may differ from individual to individual. The operation was inefficient and accurate measurements could not be obtained.

Accordingly, an object of the present invention is to hold a work on a moving table so that the tilt axis is vertical, position the tilt axis at a measurement position, and measure two points above and below the tilt axis and the tilt axis. Simultaneously measure two upper and lower measurement points rotated by 90 ° in the horizontal plane about the axis through four rotating arms, and compare and calculate the displacement between the measured value and the reference value with the standard value. Provided is a tilt axis angle measuring device that improves the measurement efficiency by determining the quality of the tilt axis angle, obtains an appropriate contact pressure, fixes a measurement point, and obtains an accurate measurement value. It is in.

[0005]

In order to achieve the above object, in a tilt axis angle measuring device for measuring a tilt axis of a work fixed by tilting an axis with respect to a substrate, the tilt axis becomes vertical. A movable table for holding the substrate of the workpiece in an inclined state and moving and positioning the substrate to a measurement position; and a pivotally rotatably supported pivotally in a horizontal plane perpendicular to the axis of the inclined axis moved to the measurement position. First and second rotating arms, which are provided with a pressing portion for touching the upper and lower measurement points on the outer periphery of the shaft and provided at the other end with pressing portions respectively pressed and urged by a measuring element of the detector; The upper and lower measurement points on the outer circumference of the tilt axis are pivotally supported so as to be vertically rotatable to touch the upper and lower measurement points at positions rotated by 90 ° in the horizontal plane about the tilt axis axis, and are the same as the rotary arm. The third and fourth pivot arms of the configuration, and the first and second pivot arms And a detector which presses and presses each pressing portion of the third and fourth rotating arms with a tracing stylus to respectively touch each measurement point of the inclined axis and electrically outputs a measurement value obtained at the same time; A control device for determining a displacement amount between a measured value output from the detector and a reference value stored in advance and comparing the displacement amount with a standard value to determine whether the tilt axis angle is good or not. And

When each of the rotating arms moves and positions the work at the measurement position, the rotating arms urge the rotating arms in a direction opposing the pressing force of the measuring element of the detector, and the contact pressure of each of the rotating arms is adjusted. It is preferable that a retracting means for slightly rotating and separating the portion from the outer periphery of the inclined shaft is provided near each of the rotating arms.

[0007]

According to the tilt axis angle measuring device of the present invention,
The work is held on a moving table so that the tilt axis is vertical, and the tilt axis is positioned at the measurement position.
90 degrees in the horizontal plane around the measurement point and the tilt axis
° Simultaneously measure the two upper and lower measurement points via four rotating arms and compare the displacement between the measured value and the reference value with the standard value to determine the quality of the tilt axis angle. By
The measurement efficiency can be improved, an appropriate contact pressure can be obtained, and the measurement points can be fixed, so that accurate measurement values can be obtained.

[0008]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a tilt angle measuring device according to an embodiment of the present invention; FIG. 1 is a plan view of a tilt axis angle measuring device, and FIG.
3 is an arrow view of FIG. 1, FIG. 3 is an arrow view of FIG. 1, and FIG. 4 is an enlarged view showing a relationship between each measurement point of the inclined axis and a touching portion of a rotating arm that touches the same.

In FIGS. 1 and 3, reference numeral 10 denotes a moving table, and the moving table 10 moves a work 14 having an inclined shaft 12 as an object to be measured on a substrate 13 from a carry-in position (not shown). It is guided by three linear slides 17 so as to move to the measurement position 16 and is mounted on the base 15 so as to be able to move forward and backward. An inclined block 18 having an inclined surface whose upper surface is inclined at a predetermined angle is mounted on the movable base 10, and a clamp device 20 for clamping the work 14 is mounted on the upper surface of the inclined block 18.

That is, as shown in FIG. 3, the clamp device 20 is composed of two cylinders, and these pneumatic cylinders hold the side surface of the substrate 13 of the work 14 between a mating contact member (not shown). And a pneumatic cylinder 20b for positioning the inclined shaft 12 at a predetermined position and a pneumatic cylinder 20b for pressing and clamping the upper surface of the substrate 13.

On the upper surface of the substrate 13, an inclined shaft 12 which is an object to be measured inclined at a predetermined angle with respect to this surface is implanted.
This work 14 is a clamp device 2 on an inclined block 18.
The inclination angle of the inclination block 18 is determined so that the inclination axis 12 of the work 14 becomes vertical when clamped by zero.

As shown in FIG. 4, two measurement points 12 at the top and bottom of the base and the tip are provided on the tilt axis 12 of the work.
A total of four measurement points, a and 12b, and two measurement points 12c and 12d, which are rotated by 90 ° on a horizontal plane perpendicular to the axis of inclination about the axis of the tilt axis, are set in advance. You.

At the measurement position 16 shown in FIG.
To measure the measurement points 12a and 12b of the base 2, respectively.
First and second rotating arms 22a, 22b are provided above and below a support shaft 26a erected on the bearing shafts 32a, 32b, 32c, 32, respectively.
d, and third and fourth rotating arms 22a, 22 above and below the supporting shaft 26b for measuring the measuring points 12c, 12d of the inclined shaft 12 on the base 24, respectively.
b is rotatably supported (see FIG. 2).

The first and second rotating arms 22a and 22b disposed on one side are formed in an inverted L-shape, and the other third and third rotating arms 22a and 22b are formed on the other side.
The fourth rotating arms 22b and 22c are formed in an L-shape, and their substantially centers are supported by support shafts 26a and 26b, respectively. One end of each of the first and second rotating arms 22a, 22b is provided with a contact portion 28a, 28b for contacting the upper and lower measurement points 12a, 12b on the outer periphery of the inclined shaft 12, and the other end is provided with each of detectors described later. Are provided with pressing portions 30a and 30b which are pressed and urged by the respective measuring elements. Similarly, one end of each of the third and fourth rotating arms 22c and 22d disposed above and below the other is provided with a contact pressure portion 28c and 28d for contacting the upper and lower measurement points 12c and 12d on the outer periphery of the inclined shaft 12. The other end has a pressing portion 30 which is pressed and urged by a measuring element of each detector described later.
c and 30d (see FIG. 4).

As shown in FIG. 1, a pressing portion 30 of each rotating arm is provided.
Detectors (electric micros) 34a, 34b, 34c, and 34d are provided corresponding to the a, 30b, 30c, and 30d, respectively, and each of the pressing portions 30a, 30b, 30c, and 30d serves as a probe of the electric micros. Gauge head 36
a, 36b, 36c, and 36d are biased so that the contact pressure of each contact portion with respect to each measurement point of the inclined shaft 12 becomes appropriate.

Further, actuators 38a, 38b and 38c, 38d as retracting means are disposed in contact with the projections 40 provided at the intermediate corners of the respective rotating arms. , And each rotating arm is connected to the electric micro gauge head 36a, 36.
b, 36c, and 36d, the contact portions of the rotating arms 12a, 12b, 12c, and 12d are slightly separated from the outer periphery of the inclined shaft.
2 is moved to the measurement position 16 and the tilt axis 12
And the touching portions 28a, 28b, 28c, 28d of the respective rotating arms are prevented from interfering with each other. In this case, it is preferable that the small actuator is constituted by a pneumatic cylinder or the like.

The tilt axis angle measuring apparatus thus configured operates as follows. First, when measuring the tilt axis, the master work manufactured by setting the tilt axis to an accurate angle in advance by the inspection tool is moved to the measurement position 16 by the movable base 10 and positioned, and each of the tilt axes set to this master work is set. The four measurement points are respectively assigned to the respective rotating arms 22a, 22b, 2
Each electric micro 34a, 34b,
Measurements are made at 34c and 34d, and the measured data is transmitted to a sequencer as a control device and is used as a reference value.

Next, when measuring the tilt axis of the mass-produced work, as shown in FIG. 1, when the movable table 10 is at the carry-in position, the work 14 having the tilt axis 12 which is an object to be measured is tilted by the clamp device 20. 12 is securely clamped so that the inclination angle is vertical. In this state, the movable table 10 is moved to the measurement position 16 and accurately positioned. Immediately before this, the touching portions 28a, 28b, 28c, 28d of the respective rotating arms are pressed by the actuators 38a, 38b and 38c, 38d. Each of the rotating arms is connected to the electric micro 34a, 34
gauge heads 36a, 36b, 3 of b, 34c, 34d
It is urged in a direction against the pressing force of 6c and 36d and retracted to a position slightly separated from the inclined shaft 12.

Next, when the tilt axis 12 is accurately positioned at the measurement position 16, each of the actuators 38a, 38b, 3
The retracting of each rotating arm by 8c and 38d is released, and each touching portion 28a, 28b, 28c, 28d of each rotating arm pushes the gauge head 36a, 36b, 36c, 36d of the electric micro 34a, 34b, 34c, 34d. The contact pressure is simultaneously measured at four measurement points on the outer periphery of the inclined shaft 12 by the pressure.

The measured value of each measuring point of the tilt axis 12 is obtained by the electric micro by the contact pressure, and the measured value is taken into the sequencer to obtain the displacement between the measured value and the previously stored reference value. By comparing this displacement amount with a standard value stored in the sequencer, the quality of the tilt axis angle can be instantaneously determined. In addition, since each measurement point is fixed, there is no individual difference and an accurate measurement value can always be obtained.

[0021]

As is apparent from the above-described embodiment, according to the tilt axis angle measuring apparatus of the present invention, the workpiece substrate is held in an inclined state so that the tilt axis becomes vertical, and is moved to the measurement position. A moving table for positioning, a touching portion for rotatably supported in a horizontal plane perpendicular to the axis of the tilted shaft moved to the measurement position, and having at one end a touching portion for touching a vertical measuring point on the outer circumference of the tilting shaft; First and second rotating arms provided at the ends with pressing portions which are respectively pressed and urged by a measuring element of a detector, and a tilt axis axis with respect to the vertical measurement point on the outer circumference of the tilt axis. A third and a fourth pivot arm having the same configuration as the pivot arm and rotatably supported up and down so as to respectively touch upper and lower measurement points at positions rotated by 90 ° in the horizontal plane; , The pressing portions of the second, third and fourth rotating arms are pressed and urged by the measuring element. A detector which touches each measurement point on the oblique axis and electrically outputs a measurement value obtained at the same time, and a displacement amount between the measurement value output from the detector and a previously stored reference value is determined. A control device that determines the quality of the tilt axis angle by comparing and calculating the amount and the standard value improves measurement efficiency, obtains an appropriate contact pressure, and fixes each measurement point. As a result, accurate measurement values can be obtained without individual differences, and the detector can be connected to the control unit via an electrical signal line to enable comparison calculations with various measurement values and expandability to the other surface Has an excellent effect such as an increase in The preferred embodiment of the present invention has been described above. However, the present invention is not limited to the above-described embodiment, and it is needless to say that various design changes can be made without departing from the spirit of the present invention.

[Brief description of the drawings]

FIG. 1 is a plan view of an angle measuring device showing an embodiment of a tilt axis angle measuring device according to the present invention, showing a tilt axis measuring state.

FIG. 2 is a partial cross-sectional view of third and fourth rotating arms in the tilt axis angle measuring device according to the present invention, as viewed in the direction of arrow A in FIG. 1;

FIG. 3 is a view showing a tilt axis angle measuring device according to the present invention;
FIG.

FIG. 4 is an enlarged view showing a relationship between each measurement point of the tilt axis in the tilt axis angle measuring device according to the present invention and a touching portion of a rotating arm that touches the tilt point, and FIG. FIG. 4B is a plan view and FIG. 4B is a side view.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 Moving table 12 Inclination axis 12a, 12b, 12c, 12d Measurement point 14 Work 15 Base 16 Measurement position 17 Linear slide 18 Inclined block 20 Clamp device 22a First turning arm 22b Second turning arm 22c Third turn Moving arm 22d Fourth rotating arm 26a, 26b Support shaft 28a, 28b, 28c, 28d Contact portion 30a, 30b, 30c, 30d Pressing portion 32a, 32b, 32c, 32d Bearing 34a, 34b, 34c, 34d Detector (Electric micro) 36a, 36b, 36c, 36c Probe (gauge head) 38a, 38b, 38c, 38d Pressing means (actuator)

Claims (2)

(57) [Claims] 1. A tilt axis angle measuring device for measuring a tilt axis of a workpiece fixed with its axis tilted with respect to a substrate, wherein the workpiece substrate is held in an inclined state so that the tilt axis is perpendicular to the workpiece. A movable table for moving and positioning at the measurement position, and a contact pressure for rotatably supported in a horizontal plane perpendicular to the axis of the inclined shaft moved to the measurement position and for touching the upper and lower measurement points on the outer periphery of the inclined shaft at one end. First and second rotating arms provided at the other end with pressing portions that are pressed and urged by the measuring element of the detector at the other end, and inclined with respect to the vertical measuring point on the outer periphery of the inclined shaft. Third and fourth rotating arms having the same configuration as the rotating arm and rotatably supported up and down to touch the upper and lower measurement points at positions rotated by 90 ° in the horizontal plane about the axis. And each of the pressing portions of the first, second and third and fourth rotating arms is A detector that presses and biases each measurement point of the tilt axis to electrically output the measurement value obtained at the same time, and a measurement value output from this detector and a reference value stored in advance. A tilt axis angle measuring device, comprising: a control device for determining a displacement amount and comparing and calculating the displacement amount with a standard value to determine whether the tilt axis angle is good or bad. 2. The rotating arm urges the rotating arm in a direction against a pressing force of a measuring element of the detector when moving and positioning the workpiece at a measurement position. 2. The angle measuring device for a tilt shaft according to claim 1, further comprising a retracting means for slightly rotating and separating the contact pressure portion from the outer periphery of the tilt shaft in the vicinity of each of the turning arms.