JP2734189B2 - Optical sensor element and method of manufacturing the same - Google Patents

Optical sensor element and method of manufacturing the same

Info

Publication number
JP2734189B2
JP2734189B2 JP2233639A JP23363990A JP2734189B2 JP 2734189 B2 JP2734189 B2 JP 2734189B2 JP 2233639 A JP2233639 A JP 2233639A JP 23363990 A JP23363990 A JP 23363990A JP 2734189 B2 JP2734189 B2 JP 2734189B2
Authority
JP
Japan
Prior art keywords
optical sensor
sensor element
optical
light
optical module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP2233639A
Other languages
Japanese (ja)
Other versions
JPH04114480A (en
Inventor
卓 梅垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP2233639A priority Critical patent/JP2734189B2/en
Publication of JPH04114480A publication Critical patent/JPH04114480A/en
Application granted granted Critical
Publication of JP2734189B2 publication Critical patent/JP2734189B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/181Encapsulation

Landscapes

  • Light Receiving Elements (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光学センサ素体が透過樹脂で覆われたもの
で、CCDあるいはカメラ用ICなどに用いられる光学セン
サ素子に関する。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical sensor element in which an optical sensor element is covered with a transparent resin, and which is used for a CCD or a camera IC.

〔従来の技術〕[Conventional technology]

CCDやカメラ用ICに用いる光学センサ素体を外気から
遮断するためにパッケージする場合、素体に光が到達す
るようにしなければならない。そのようなパッケージ技
術としては次のものが挙げられる。
When packaging an optical sensor element used for a CCD or a camera IC for shielding the element element from outside air, light must reach the element element. Such packaging technologies include the following.

(1) セラミック容器に光学センサ素体を収容し、上
蓋としての透明ガラス板をセラミック容器に接着する。
(1) The optical sensor body is housed in a ceramic container, and a transparent glass plate as an upper lid is bonded to the ceramic container.

(2) ポリフェニレンサルファイド(PPS)などの熱
可塑性樹脂の成形容器に光学センサ素体を収容し、上蓋
としての透明ガラス板を成形容器に接着する。
(2) The optical sensor body is housed in a thermoplastic resin molding container such as polyphenylene sulfide (PPS), and a transparent glass plate as an upper lid is adhered to the molding container.

(3) 透明樹脂を用い、光学センサ素体を包囲するよ
うにトランスファ成形等で一体成形する。
(3) Using a transparent resin, transfer molding or the like is used to integrally mold the optical sensor body so as to surround it.

このうち、(1)の方式は信頼性が高いがコストが高
く、(2)の方式はPPSなどの樹脂と光学センサ素体を
支持するリードフレームとの接着性が良くないため実用
の段階に達していない。(3)の方式は耐熱性,耐湿性
等の信頼性は(1)の方式よりも劣るが、コストも低
く、生産性が高いため、光学センサのパッケージ技術の
主流となりつつある。具体的には、第2図に示すよう
に、リードフレームのマウント部11に光学センサチップ
1を固定し、リードフレームの外部リード部12と導線13
で接続したのち、ICの封止と同様に透明なエポキシ樹脂
コンパウンド14を用いてトランスファ成形するものであ
る。そして、センサチップ1の所定の位置に光を導くた
めのレンズおよび反射面を備えた透明樹脂成形体の光学
モジュール2を位置合わせして接着剤15で成形樹脂14の
表面に接着する。
Of these, the method (1) has high reliability but high cost, and the method (2) is in a practical stage due to poor adhesion between the resin such as PPS and the lead frame supporting the optical sensor element. Not reached. The method (3) is inferior to the method (1) in reliability such as heat resistance and moisture resistance, but is low in cost and high in productivity, and is becoming the mainstream of optical sensor package technology. Specifically, as shown in FIG. 2, the optical sensor chip 1 is fixed to the mount 11 of the lead frame, and the external lead 12
Then, transfer molding is performed using a transparent epoxy resin compound 14 in the same manner as in the sealing of the IC. Then, the optical module 2 of a transparent resin molded body having a lens for guiding light to a predetermined position of the sensor chip 1 and a reflective surface is aligned and adhered to the surface of the molded resin 14 with the adhesive 15.

これらの方式のほかに、光学センサ素体をアクリル樹
脂などからなる容器に収容し、容器とセンサ素体との間
を透明なゲル状樹脂や紫外線硬化樹脂を充填する方式も
ある。
In addition to these methods, there is a method in which the optical sensor element is housed in a container made of acrylic resin or the like, and a space between the container and the sensor element is filled with a transparent gel resin or an ultraviolet curable resin.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

前述の各方式のうち、主流となっている透明樹脂を用
いてトランスファモールドする方式には次の問題点があ
る。
Among the above-mentioned methods, the transfer molding method using a mainstream transparent resin has the following problems.

(1) 透明樹脂として用いられるエポキシ樹脂は、金
型との離型性が悪いため、シリコーン系あるいはふっ素
系の外部離型剤を金型に塗布する必要がある。このた
め、塗布した離型剤の痕跡が成形品表面に凹凸となって
残り、光学的な不具合が生ずる。
(1) An epoxy resin used as a transparent resin has a poor mold releasability from a mold. Therefore, it is necessary to apply a silicone-based or fluorine-based external mold release agent to the mold. For this reason, traces of the applied release agent remain as irregularities on the surface of the molded product, causing optical defects.

(2) トランスファ成形では、熱溶融した樹脂を高圧
で金型内に注入するために、接続導線の変形が生じた
り、光学センサ素体に大きな圧力がかかったりするなど
の不具合が生ずる。
(2) In the transfer molding, since the hot-melted resin is injected into the mold at a high pressure, problems such as deformation of the connection conductor and application of a large pressure to the optical sensor element occur.

(3) 成形樹脂の硬化後の収縮の際に、光学センサ素
体に大きな熱応力が発生するので信頼性が十分でない。
(3) When the molding resin shrinks after curing, a large thermal stress is generated in the optical sensor body, so that the reliability is not sufficient.

(4) 成形サイクルタイムが長く、生産性が充分とは
言えない。
(4) The molding cycle time is long and the productivity is not sufficient.

光学センサ素体を透明容器に収容し、透明樹脂を充填
する方式はこれらの問題点を解決するものであるが、し
かし、他の方式と同様、センサ素体に光を導くために、
例えば第2図に示したように光学モジュールを別に用意
し、精密な位置合わせをして組合わせなければならない
という問題をやはり有している。
The method of housing the optical sensor element in a transparent container and filling the transparent resin solves these problems, but like other methods, in order to guide light to the sensor element,
For example, as shown in FIG. 2, there is still another problem that an optical module must be separately prepared and precisely aligned and combined.

本発明の目的は、上記の問題点を解決し、外面にセン
サ素体への光の入射の支障となる凹凸を有せず、センサ
素体に応力が加わらず、接続導線の変形もなく、かつ光
を導くための光学系を別に設置する必要のない光学セン
サ素子およびその製造方法を提供することにある。
An object of the present invention is to solve the above-described problems, to have no irregularities on the outer surface that hinder the incidence of light on the sensor element, to apply no stress to the sensor element, and not to deform the connection conductor, Another object of the present invention is to provide an optical sensor element that does not require a separate optical system for guiding light, and a method for manufacturing the same.

〔課題を解決するための手段〕[Means for solving the problem]

上記の目的を達成するために、本発明の光学センサ素
子によれば、光学センサ素体と、光学センサ素体に光を
導く光学系を形成する光学モジュールと、光学センサ素
体の光入射面と光学モジュールの光出射面との間の一部
を介在し、光学センサ素体の光入射面の端部端子に接続
される導電路と、光学センサ素体の光入射面と光学モジ
ュールの光出射面とを、端部端子および導電路を除く領
域において、光入射面と光出射面との間に他の部材を介
在させることなく充填されて一体に結合する成形樹脂
と、を有する光学センサ素子であって、光学モジュール
がその光学センサ素体と対向する光出射面の周囲に突出
部を有し、その突出部に囲まれた凹部内に成形樹脂が充
填されたこととする。また、本発明の光学センサ素子の
製造方法によれば、光学系を形成する光学モジュールの
光出射面に複数の導電路を固着し、その導電路の端部と
光学センサ素体の光入射面上の入出力端子とを導電的に
接続し、そのあと、光学センサ素体の光入射面と光学モ
ジュールの光出射面との間の入出力端子および導電路を
除く領域に、光入射面と光出射面との間に他の部材を介
在させることなく成形樹脂を充填し、光学センサ素体と
光学モジュールとを該成形樹脂により一体に結合するこ
ととする。ここで、光学センサ素体と対向する光出射面
の周囲に突出部を有する光学モジュールを用い、成形樹
脂をその突出部に囲まれた凹部内に充填することとすれ
ば好適である。
In order to achieve the above object, according to the optical sensor element of the present invention, an optical sensor element, an optical module forming an optical system for guiding light to the optical sensor element, and a light incident surface of the optical sensor element A conductive path connected to an end terminal of the light incident surface of the optical sensor element, with a part interposed between the optical sensor element and the light emitting surface of the optical module; A molding resin that fills the light-exiting surface with the light-exiting surface and the light-exiting surface without interposing any other member between the light-incident surface and the light-exiting surface in a region other than the end terminal and the conductive path; In the element, the optical module has a protruding portion around a light emitting surface facing the optical sensor element body, and a molding resin is filled in a recess surrounded by the protruding portion. Further, according to the method for manufacturing an optical sensor element of the present invention, a plurality of conductive paths are fixed to the light emitting surface of the optical module forming the optical system, and the ends of the conductive paths and the light incident surface of the optical sensor element body. The upper input / output terminal is conductively connected, and then the light input surface and the area other than the input / output terminal and the conductive path between the light input surface of the optical sensor element and the light output surface of the optical module are connected. The molding resin is filled without interposing other members between the light emitting surface and the optical sensor element and the optical module are integrally connected by the molding resin. Here, it is preferable to use an optical module having a protruding portion around the light emitting surface facing the optical sensor element body and to fill the molding resin into a concave portion surrounded by the protruding portion.

〔作用〕[Action]

光学センサ素体へは光学モジュールおよび光学モジュ
ールとセンサ素体との間隙に充填された樹脂を通って光
が入射するため、表面の凹凸の問題はない。また、光学
モジュールの光学センサ素体と対向する光出射面が凹部
の底面とされる場合には、樹脂をその凹部に注入するの
みで成形でき、トランスファ成形の必要はない。そして
光学センサ素体は光の入射面側では光モジュールの光出
射面との間の間隙に充填される樹脂が存在するのみであ
るから、成形樹脂から大きな応力を受けることがない。
Since light enters the optical sensor body through the optical module and the resin filled in the gap between the optical module and the sensor body, there is no problem of surface irregularities. When the light emitting surface of the optical module facing the optical sensor element is the bottom surface of the concave portion, molding can be performed only by injecting resin into the concave portion, and transfer molding is not required. In the optical sensor element body, only the resin that fills the gap between the light incident surface and the light emitting surface of the optical module is present.

〔実施例〕〔Example〕

本発明の一実施例を第2図と共通の部分に同一の符号
を付した第1図を引用して説明する。第1図において、
レンズ機能と反射機能を備えた、例えばアクリル樹脂な
どの透明樹脂成形体である光学モジュール2はその光出
射面21が突出部3で囲まれている。そして、その突出部
側に2本の条状の導電路4が形成されている。この導電
路4は、例えばAlの蒸着とパターニングによって、ある
いは帯状銅箔の固着によって形成する。そして、光学モ
ジュール2の光出射面21に対向して光学センサチップ1
が配置され、その光学センサチップ1の両端に設けられ
た入出力端子と導電路4の端部とは導電性接着剤5で電
気的に接続されている。突出部3に囲まれた凹部に透明
樹脂6が充填されており、光学センサチップ1の光入射
面と反対側を覆うと共に、センサチップ1と光学モジュ
ール2の光出射面21との間に入りこんでいる。これによ
り光学センサチップ1は封止されると共に、光学モジュ
ール2と一体化される。透明樹脂6は凹部への注入によ
り容易に成形でき、生産性の点から光硬化樹脂が用いら
れる。
One embodiment of the present invention will be described with reference to FIG. 1 in which the same parts as those in FIG. In FIG.
An optical module 2 having a lens function and a reflecting function, which is a transparent resin molded body made of, for example, an acrylic resin, has a light emitting surface 21 surrounded by a projection 3. Then, two strip-shaped conductive paths 4 are formed on the protruding portion side. The conductive path 4 is formed, for example, by vapor deposition and patterning of Al, or by fixing a strip-shaped copper foil. The optical sensor chip 1 faces the light exit surface 21 of the optical module 2.
The input / output terminals provided at both ends of the optical sensor chip 1 and the ends of the conductive paths 4 are electrically connected by a conductive adhesive 5. A transparent resin 6 is filled in a concave portion surrounded by the protruding portion 3 and covers the side opposite to the light incident surface of the optical sensor chip 1 and enters between the sensor chip 1 and the light emitting surface 21 of the optical module 2. In. Thereby, the optical sensor chip 1 is sealed and integrated with the optical module 2. The transparent resin 6 can be easily molded by injecting it into the concave portion, and a photocurable resin is used from the viewpoint of productivity.

光学モジュール2は、従来のカメラ等に用いられる三
角測距方式の距離測定装置で、第3図に示すように光学
センサチップ1に光7を導くためにチップとの位置関係
を調整して別個に設置されるレンズ81やプリズム82,83
等の機能を有するものである。このような光学モジュー
ル2と光学センサチップ1を一体に成形するためにチッ
プ1の入出力端子と光学モジュール表面の導電路4を接
着する際には、光学モジュール2とセンサチップ1との
位置関係を精密に調整する必要がある。このためには、
接着剤5にも光硬化型の接着剤を使用した方がよい。し
かし、導電路4とセンサチップ1の入出力端子の電気的
な接続に導電性接着剤を用いないで、加圧力と透明樹脂
6の固定する力により、接触のみで導電的に接続するこ
ともできる。
The optical module 2 is a distance measuring device of a triangular distance measuring method used for a conventional camera or the like. As shown in FIG. 81 and prisms 82 and 83
And the like. When bonding the input / output terminals of the chip 1 and the conductive paths 4 on the surface of the optical module in order to form the optical module 2 and the optical sensor chip 1 integrally, the positional relationship between the optical module 2 and the sensor chip 1 Needs to be precisely adjusted. To do this,
It is better to use a light-curing adhesive as the adhesive 5. However, the conductive path 4 and the input / output terminals of the sensor chip 1 may not be electrically connected to each other by a conductive adhesive, but may be conductively connected only by contact by the pressing force and the fixing force of the transparent resin 6. it can.

〔発明の効果〕〔The invention's effect〕

以上述べたように、請求項2の発明によれば、光学セ
ンサ素体を光学モジュールに対向させて成形樹脂により
一体に結合することにより、光学モジュールから直接光
が入射するため素子表面の凹凸の問題が無くなった。ま
た、請求項1もしくは3の発明によれば、光学モジュー
ルにセンサ素体を囲む凹部を形成することにより、トラ
ンスファ成形の必要なしに樹脂成形することが可能とな
り、センサ素体に応力が加わらず、接続導線を用いない
ので、接続導線の変形の問題もない。そして、光学モジ
ュールと一体であるため光学系を別に設置する必要がな
く、使用時の調整箇所も少なくなって実用的な光学セン
サ素子を得ることができた。
As described above, according to the second aspect of the present invention, the optical sensor element is opposed to the optical module and integrally joined by molding resin, so that light is directly incident from the optical module. The problem is gone. According to the first or third aspect of the present invention, by forming a concave portion surrounding the sensor element body in the optical module, resin molding can be performed without the need for transfer molding, and stress is not applied to the sensor element body. Since no connecting wires are used, there is no problem of deformation of the connecting wires. And since it is integral with the optical module, there is no need to separately install an optical system, and the number of adjustment points during use is reduced, and a practical optical sensor element can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

第1図は本発明の一実施例の光学センサ素子の断面図、
第2図は従来の光学センサ素子の断面図、第3図は従来
の光学センサ素子使用時の光学系を示す断面図である。 1:光学センサチップ、2:光学モジュール、3:光学モジュ
ール突出部、4:導電路、5:導電性接着剤、6:透明樹脂。
FIG. 1 is a sectional view of an optical sensor element according to an embodiment of the present invention,
FIG. 2 is a sectional view of a conventional optical sensor element, and FIG. 3 is a sectional view showing an optical system when using the conventional optical sensor element. 1: optical sensor chip, 2: optical module, 3: optical module protrusion, 4: conductive path, 5: conductive adhesive, 6: transparent resin.

Claims (3)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】光学センサ素体と、 光学センサ素体に光を導く光学系を形成する光学モジュ
ールと、 光学センサ素体の光入射面と光学モジュールの光出射面
との間の一部に介在し、光学センサ素体の光入射面の端
部端子に接続される導電路と、 光学センサ素体の光入射面と光学モジュールの光出射面
とを、端部端子および導電路を除く領域において、光入
射面と光出射面との間に他の部材を介在させることなく
充填されて一体に結合する成形樹脂と、 を有する光学センサ素子であって、 光学モジュールがその光学センサ素体と対向する光出射
面の周囲に突出部を有し、 その突出部に囲まれた凹部内に成形樹脂が充填された ことを特徴とする光学センサ素子。
An optical sensor element, an optical module forming an optical system for guiding light to the optical sensor element, and a part between a light incident surface of the optical sensor element and a light emitting surface of the optical module. A conductive path interposed and connected to an end terminal of the light incident surface of the optical sensor element body; and a region excluding the end terminal and the conductive path between the light incident surface of the optical sensor element element and the light emitting surface of the optical module. And a molding resin that is filled and integrally joined without interposing any other member between the light incident surface and the light exit surface, wherein the optical module comprises: An optical sensor element having a protruding portion around the opposing light emitting surface, wherein a molding resin is filled in a recess surrounded by the protruding portion.
【請求項2】光学系を形成する光学モジュールの光出射
面に複数の導電路を固着し、 その導電路の端部と光学センサ素体の光入射面上の入出
力端子とを導電的に接続し、 そのあと、光学センサ素体の光入射面と光学モジュール
の光出射面との間の入出力端子および導電路を除く領域
に、光入射面と光出射面との間に他の部材を介在させる
ことなく成形樹脂を充填し、 光学センサ素体と光学モジュールとを該成形樹脂により
一体に結合する ことを特徴とする光学センサ素子の製造方法。
2. A plurality of conductive paths are fixed to a light emitting surface of an optical module forming an optical system, and an end of the conductive path and an input / output terminal on a light incident surface of the optical sensor element are conductively connected. After that, another member is provided between the light incident surface and the light emitting surface in a region excluding the input / output terminals and the conductive path between the light incident surface of the optical sensor body and the light emitting surface of the optical module. A method for manufacturing an optical sensor element, comprising: filling a molding resin without interposing a resin; and coupling the optical sensor body and the optical module integrally with the molding resin.
【請求項3】請求項2記載の光学センサ素子の製造方法
において、 光学センサ素体と対向する光出射面の周囲に突出部を有
する光学モジュールを用い、 成形樹脂をその突出部に囲まれた凹部内に充填する ことを特徴とする光学センサ素子の製造方法。
3. The method for manufacturing an optical sensor element according to claim 2, wherein an optical module having a projecting portion around a light exit surface facing the optical sensor element body is used, and the molding resin is surrounded by the projecting portion. A method for manufacturing an optical sensor element, characterized by filling a recess.
JP2233639A 1990-09-04 1990-09-04 Optical sensor element and method of manufacturing the same Expired - Lifetime JP2734189B2 (en)

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Application Number Priority Date Filing Date Title
JP2233639A JP2734189B2 (en) 1990-09-04 1990-09-04 Optical sensor element and method of manufacturing the same

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JPH04114480A JPH04114480A (en) 1992-04-15
JP2734189B2 true JP2734189B2 (en) 1998-03-30

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Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61207085A (en) * 1985-03-11 1986-09-13 Toshiba Corp Optical semiconductor device

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