JP2732450B2 - Light irradiator - Google Patents
Light irradiatorInfo
- Publication number
- JP2732450B2 JP2732450B2 JP63228835A JP22883588A JP2732450B2 JP 2732450 B2 JP2732450 B2 JP 2732450B2 JP 63228835 A JP63228835 A JP 63228835A JP 22883588 A JP22883588 A JP 22883588A JP 2732450 B2 JP2732450 B2 JP 2732450B2
- Authority
- JP
- Japan
- Prior art keywords
- light
- lamp
- long plate
- shaped
- shutter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Arrangement Of Elements, Cooling, Sealing, Or The Like Of Lighting Devices (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Description
【発明の詳細な説明】 ［産業上の利用分野］ この発明は、例えばフォトレジスト，光硬化型のペイ
ント，インク，バインダ等の被処理物を主として紫外線
を中心とした光によって処理するために用いられる光照
射器に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention is used for processing an object to be processed such as a photoresist, a photo-curable paint, an ink, a binder, etc., mainly by light mainly using ultraviolet rays. And a light irradiator to be used.
［従来の技術］ 高圧水銀灯等のランプから発生する紫外線を中心とし
た光を利用して、光硬化型のペイント，インク，フォト
レジスト，バインダ等の被処理物を光処理する装置にお
いて、光処理に必要な波長の光（主として紫外線）を被
処理物に照射することが最近、ますます重要になってき
ている。[Prior Art] In an apparatus for optically processing an object to be processed such as a photo-curable paint, ink, photoresist, binder, etc., using light centered on ultraviolet light generated from a lamp such as a high-pressure mercury lamp, the light processing is performed. Recently, it has become more and more important to irradiate the object to be treated with light (mainly ultraviolet light) having a wavelength required for the object.
これら光処理を行う装置の中で、光照射のためのスペ
ースは限られたものであるので、光照射器の構造をコン
パクトにする試みが従来からなされている。Since the space for light irradiation is limited in these light processing devices, attempts have been made to make the structure of the light irradiation device compact.
第２図（イ），（ロ），（ハ），（ニ）は従来の光照
射器の主要部の概略構成を示す図で、いずれもシャッタ
機構を工夫して光照射器をコンパクトにしたものであ
る。FIGS. 2 (a), (b), (c) and (d) show the schematic structure of the main part of a conventional light irradiator. In each case, the light irradiator is made compact by devising a shutter mechanism. Things.
第２図において、１は棒状のランプ、２′ａはブライ
ンド式のシャッタ、２′ｂは扉状のシャッタ、２′ｃは
集光鏡兼用のシャッタ、２′ｄは反射鏡回転式のシャッ
タ、３′は集光鏡、４は排気ダクト、５は光照射処理さ
れる被照射物のパスラインである。In FIG. 2, 1 is a rod-shaped lamp, 2'a is a blind shutter, 2'b is a door-shaped shutter, 2'c is a shutter which also serves as a condensing mirror, and 2'd is a shutter which is a rotating mirror. Reference numeral 3 'denotes a condenser mirror, 4 denotes an exhaust duct, and 5 denotes a pass line of an object to be irradiated.
第２図（イ），（ロ），（ハ），（ニ）において、パ
スライン５上の被照射物に対して、ランプ１からの光を
照射したり、遮断したりするために、同図（イ）ではブ
ラインド式のシャッタ２′ａを開閉することにより行
い、同図（ロ）では扉式のシャッタ２′ｂを開閉するこ
とにより行い、同図（ハ）では集光鏡兼用のシャッタ
２′ｃを180゜に回転させることにより行い、同図
（ニ）では平面鏡よりなる回転式のシャッタ２′ｄを矢
印の方向に90゜回転させることにより行うものである。2 (a), 2 (b), 2 (c) and 2 (d), in order to irradiate the object to be irradiated on the pass line 5 with light from the lamp 1 or to block the light. In FIG. 2A, the shutter is performed by opening and closing a blind type shutter 2'a, in FIG. 2B, by opening and closing a door type shutter 2'b, and in FIG. The rotation is performed by rotating the shutter 2'c by 180 °, and in FIG. 4D, the rotation is performed by rotating the rotary shutter 2'd composed of a plane mirror by 90 ° in the direction of the arrow.
［発明が解決しようとする課題］ 上記の従来の光照射器はいずれも装置の小型化という
点で、次の各理由から必ずしも満足すべきものではな
い。例えば第２図（イ），（ロ）の光照射器は、ブライ
ンド式のシャッタまたは扉式のシャッタの部分に余分な
スペースをとられるので空間の節約にはならず、光照射
器と被照射物との処理が長くなってしまう。その上、ブ
ラインド式のシャッタの場合、シャッタが開いた時点で
も光を一部遮断または反射することになるので光損失が
ある。また、第２図（ハ）の光照射器は光照射器と被照
射物との距離が長く、さらに集光鏡兼用シャッタが閉じ
たときのシャッタの冷却機構が複雑になり、冷却不足に
なる恐れがある。さらに第２図（ニ）の光照射器は反射
鏡回転式のシャッタ部分に余分なスペースをとられるの
で、光照射器と被照射物との距離が長くなってしまうと
いう問題があった。[Problems to be Solved by the Invention] The above-mentioned conventional light irradiators are not always satisfactory in terms of miniaturization of the apparatus for the following reasons. For example, in the light irradiators shown in FIGS. 2A and 2B, an extra space is taken in a blind type shutter or a door type shutter, so that space is not saved. Processing with objects becomes longer. In addition, in the case of a blind shutter, even when the shutter is opened, light is partially blocked or reflected, so that there is light loss. Further, in the light irradiator shown in FIG. 2C, the distance between the light irradiator and the object to be irradiated is long, and the cooling mechanism of the shutter when the shutter also functions as a condenser mirror is closed, resulting in insufficient cooling. There is fear. Further, the light irradiator shown in FIG. 2 (d) requires an extra space in the shutter portion of the rotating type of the reflecting mirror, so that there is a problem that the distance between the light irradiator and the object to be irradiated becomes longer.
この発明はかかる課題を解決するためになされたもの
で、余分なスペースを必要としないコンパクトで、かつ
適切な冷却手段を備えた光照射器を提供することを目的
とする。The present invention has been made to solve such a problem, and an object of the present invention is to provide a light irradiator that is compact and does not require an extra space, and that has an appropriate cooling unit.
［課題を解決するための手段］ 上記の目的を達成するために、この発明においては、
樋状のミラーは、頂部にスリットを介して配置される２
枚の長板状ミラーから構成され、かつこれら２枚の長板
状ミラーを、ランプの長手方向を回転軸として回転運動
させることにより光を遮断する構成を備えた長板状ミラ
ーの回転駆動機構を具備し、２枚の長板状ミラーはその
裏面に各長板状ミラーと一体に回転する制風板及び／ま
たは遮光板が付設されている構成を有する光照射器とし
たものである。[Means for Solving the Problems] In order to achieve the above object, in the present invention,
The gutter-shaped mirror is arranged at the top through a slit.
A long plate-shaped mirror rotation drive mechanism comprising a plurality of long plate-shaped mirrors, wherein the two long plate-shaped mirrors are rotated about the longitudinal direction of the lamp as a rotation axis to block light. And the two long plate mirrors are light irradiators having a structure in which a back plate and / or a light blocking plate that rotates integrally with each long plate mirror are attached to the back surface thereof.
［作用］ 上記の構成を有することにより、装置はコンパクトに
なり、必要な冷却を適切に行うことができる。[Operation] By having the above configuration, the device becomes compact and necessary cooling can be appropriately performed.
［実施例］ 第１図（イ），（ロ），（ハ），（ニ）はこの発明に
おける光照射器の一実施例を示す図で、同図（イ）はシ
ャッタが開いたときの光照射器の正面断面図、同図
（ロ）はシャッタが閉じたときの光照射器の正面断面
図、同図（ハ）は同図（イ）の側面図、同図（ニ）はシ
ャッタの駆動機構の動作説明図である。[Embodiment] FIGS. 1 (a), 1 (b), 1 (c) and 1 (d) are views showing an embodiment of a light irradiator according to the present invention, and FIG. 1 (a) shows a state when a shutter is opened. (B) is a front sectional view of the light irradiator when the shutter is closed, (c) is a side view of (a), and (d) is a shutter. FIG. 4 is an explanatory diagram of the operation of the drive mechanism of FIG.
第１図において、１はランプ、24a,24bは回転軸6a,6b
を中心に回転してシャッタの働きをすると共に楕円集光
鏡として機能する一対の長板状ミラー、2a,2bはこの長
板状ミラーを保持するための型材、3a,3b,4a,4bは遮光
板、5a,5bは制風兼遮光板で、遮光板と共に型材2a,2bに
付設されて同時に回転する。７は光照射器の内箱、11は
内箱７内に形成される風洞、８はこの内箱７に風洞を形
成するために設けられる仕切り板、9a,9bは内箱７の側
壁内面に設けられた側壁遮光片、10は内箱７の側壁に設
けられ外部から冷却用の風を入れるための風孔、12は外
箱、13は光照射するための下部の開口部、14は外箱12の
側壁に設けられ外部からの冷却用の風を入るための風孔
である。15は外箱12のランプ長手方向側面に取り付けら
れる排気用のダクト、16はダクトフランジ、17,18,19,2
0はそれぞれプーリ、21はこれらプーリ17〜20を駆動さ
せるチェーン、22はロータリ・アクチュエータ、23はプ
ーリ17とロータリ・アクチュエータ22を連結するための
カップリングである。In FIG. 1, 1 is a lamp, and 24a and 24b are rotating shafts 6a and 6b.
A pair of long plate-shaped mirrors that rotate around and act as a shutter and also function as an elliptical converging mirror, 2a and 2b are mold members for holding this long plate-shaped mirror, and 3a, 3b, 4a and 4b are The light-shielding plates 5a and 5b are both wind-control and light-shielding plates, which are attached to the mold members 2a and 2b together with the light-shielding plates and rotate simultaneously. 7 is an inner box of the light irradiator, 11 is a wind tunnel formed in the inner box 7, 8 is a partition plate provided for forming a wind tunnel in the inner box 7, 9a and 9b are on inner surfaces of side walls of the inner box 7. The provided side wall light shielding pieces, 10 are provided on the side wall of the inner box 7 and are provided with air holes for introducing cooling air from the outside, 12 is the outer box, 13 is a lower opening for irradiating light, and 14 is the outside. These are air holes provided on the side wall of the box 12 for receiving cooling air from the outside. 15 is an exhaust duct attached to the side of the outer case 12 in the longitudinal direction of the lamp, 16 is a duct flange, 17, 18, 19, 2
0 is a pulley, 21 is a chain for driving these pulleys 17 to 20, 22 is a rotary actuator, and 23 is a coupling for connecting the pulley 17 and the rotary actuator 22.
また、長板状ミラー24a,24bは、アルミ製の型材2a,2b
に挿入嵌合されて付設されている。尚、図中矢印は、冷
却風の向きを、一点鎖線H1,H2は代表光線をそれぞれ示
す。The long plate-like mirrors 24a, 24b are made of aluminum mold members 2a, 2b.
And is inserted and fitted to the connector. The arrows in the figure indicate the direction of the cooling air, and the dashed lines H 1 and H 2 indicate the representative rays.
第１図（イ）の長板状ミラーが開いた状態の光照射器
において、ロータリ・アクチュエータ22の駆動により、
プーリ17が回転し、それと同時にプーリ17に巻かれたチ
ェーン21の働きによって、プーリ19,18,20が回転し、２
つのプーリ19,20とそれぞれ同軸の回転軸6a,6bが回転し
てアルミ製の型材2a,2bは所定の角度で回転し、遮光板3
a,3bが冷却風が通るための隙間を残して重なり、ランプ
１からの光は遮断される。この状態を示すのが第１図
（ロ）である。また、長板状ミラー24a,24bや仕切り板
８に反射して上方へ向かう光線H1,H2は遮光板4a,4b,制
風兼遮光板5a,5b及び内箱７の側壁内面に設けられた側
壁遮光片9a,9bに遮断される。In the light irradiator in the state where the long plate-like mirror is opened in FIG.
The pulley 17 rotates, and at the same time, the pulleys 19, 18, and 20 rotate by the action of the chain 21 wound around the pulley 17, and
The rotating shafts 6a and 6b, which are coaxial with the two pulleys 19 and 20, respectively, rotate, and the aluminum mold members 2a and 2b rotate at a predetermined angle, and
Light beams from the lamp 1 are cut off by overlapping the gaps a and 3b except for a gap through which the cooling air passes. FIG. 1 (b) shows this state. Light beams H 1 and H 2 reflected upward from the long plate-shaped mirrors 24 a and 24 b and the partition plate 8 are provided on the light shielding plates 4 a and 4 b, the wind / light shielding plates 5 a and 5 b, and the inner surface of the side wall of the inner box 7. The side wall light shielding pieces 9a and 9b are cut off.
冷却機構について述べると、外箱12の風孔14及び内箱
７の風孔10を通して流入した風は、第１図（イ）のシャ
ッタ（長板状ミラー24a,24b）開の状態ではアルミ製の
型材2a,2bの裏面を冷却しながら、主にこの型材2a,2bと
制風兼遮光板5a,5bとの間を通って、ランプ１側にまわ
り込み、長板状ミラー24a,24bの反射面やランプ１を冷
却した後、スリットとしての吸込み口8aから風洞11に吸
引され、不図示のブロワによってダクト15から排気され
る。また開口部13から流入した風は長板状ミラー24a,24
bの反射面及びランプ１を冷却しながら吸い込み口8aか
ら風孔14,10を通って流入した風と共に，風洞11を経て
ダクト15から排気される。次に第１図の（ロ）のシャッ
タ（長板状ミラー24a,24b）閉の状態では開口部13から
流入した風の一部は遮光板3a,3bの隙間から流入して長
板状ミラー24a,24bの反射面及びランプ１を冷却する
が、残りの大部分は型材2a,2bの裏面を冷却しながら、
この型材2a,2bと制風兼遮光板5a,5bの間を通って、外箱
12の風孔14及び内箱７の風孔10から流入した風と合流し
て長板状ミラー24a,24bの反射面及びランプ１を冷却し
た後、吸込み口8aから風洞11を経てブロワによってダク
ト15から排気される。Referring to the cooling mechanism, the air flowing through the air holes 14 of the outer case 12 and the air holes 10 of the inner case 7 is made of aluminum when the shutters (long plate-like mirrors 24a and 24b) of FIG. While cooling the back surfaces of the mold members 2a and 2b, the light mainly passes between the mold members 2a and 2b and the wind-control and light-shielding plates 5a and 5b and wraps around the lamp 1 to form the long plate-shaped mirrors 24a and 24b. After cooling the reflecting surface and the lamp 1, the air is sucked into the wind tunnel 11 from the inlet 8a as a slit, and is exhausted from the duct 15 by a blower (not shown). The wind flowing from the opening 13 is reflected by the long plate-like mirrors 24a and 24a.
The air is exhausted from the duct 15 through the wind tunnel 11 together with the wind flowing through the air holes 14 and 10 from the suction port 8a while cooling the reflecting surface b and the lamp 1. Next, when the shutters (long plate-like mirrors 24a, 24b) of FIG. 1B are closed, a part of the wind that has flowed in from the opening 13 flows through the gap between the light shielding plates 3a, 3b, and the long plate-like mirror. While cooling the reflecting surfaces of the lamps 24a and 24b and the lamp 1, most of the rest cools the back surfaces of the moldings 2a and 2b,
Pass between the shape members 2a and 2b and the wind control and light shielding plates 5a and 5b, and
After being combined with the air flowing from the air holes 14 of the inner box 7 and the air holes 10 of the inner box 7 to cool the reflecting surfaces of the long plate-shaped mirrors 24a and 24b and the lamp 1, the air is ducted by the blower through the wind tunnel 11 from the inlet 8a. Exhausted from 15.
また、この実施例においては、長板状ミラー24a,24b
を型材2a,2bに挿入嵌め合わせ付設しているので、長時
間の使用による汚染等に対しては取りはずして他の長板
状ミラー24a,24bと交換することができ、メンテナンス
は極めて簡単である。In this embodiment, the long plate mirrors 24a, 24b
Is inserted and fitted to the shape members 2a, 2b, so that it can be removed for long-term use, etc., and replaced with other long plate-like mirrors 24a, 24b, and maintenance is extremely simple .
さらに、この実施例の光照射器は外箱12,内箱７の二
重構造にして２つの箱の間に間隔を設けて風を流してい
るので、外箱は内箱に比して低温に保たれており、直接
手で触れても問題はなく、また、２つの箱に設けられた
風孔10と14の位置をずらしてあるので、風孔14からのラ
ンプ１の光の漏れは防止される。Further, since the light irradiator of this embodiment has a double structure of the outer box 12 and the inner box 7 to allow air to flow with an interval between the two boxes, the outer box has a lower temperature than the inner box. There is no problem even if touched directly by hand, and since the positions of the air holes 10 and 14 provided in the two boxes are shifted, the light leakage of the lamp 1 from the air holes 14 Is prevented.
［発明の効果］ 以上説明したとおり、この発明の光照射器は非常にコ
ンパクトに構成されている上に、きめ細かな冷却を行う
ことができる。[Effects of the Invention] As described above, the light irradiator of the present invention is extremely compact and can perform fine cooling.
第１図（イ），（ロ），（ハ），（ニ）はこの発明にお
ける光照射器の一実施例を示す図で、同図（イ）はシャ
ッタが開いたときの光照射器の正面断面図、同図（ロ）
はシャッタが閉じたときの光照射器の正面断面図、同図
（ハ）は同図（イ）の側面図、同図（ニ）はシャッタ駆
動機構の動作説明図、第２図（イ），（ロ），（ハ），
（ニ）は従来の光照射器の主要部の概略構成を示す図で
ある。 図中． 1:ランプ 2a,2b:アルミ製の型材 3a,3b,4a,4b:遮光板 5a,5b:制風兼遮光板 6a,6b:回転軸 7:内箱 8a:吸込み口 9a,9b:側壁遮光片 10,14:風孔 12:外箱 13:開口部 17,18,19,20:プーリ 21:チェーン 22:ロータリ・アクチュエータ 24a,24b:長板状ミラー1 (a), (b), (c), and (d) show an embodiment of the light irradiator according to the present invention. FIG. 1 (a) shows the light irradiator when the shutter is opened. Front sectional view, same figure (b)
2 is a front sectional view of the light irradiator when the shutter is closed, FIG. 2C is a side view of FIG. 2A, FIG. 2D is an operation explanatory view of the shutter drive mechanism, FIG. , (B), (c),
(D) is a diagram showing a schematic configuration of a main part of a conventional light irradiator. In the figure. 1: Lamp 2a, 2b: Aluminum profile 3a, 3b, 4a, 4b: Light shield plate 5a, 5b: Wind control and light shield plate 6a, 6b: Rotating shaft 7: Inner box 8a: Suction port 9a, 9b: Side wall light shielding Pieces 10, 14: Air vent 12: Outer box 13: Opening 17, 18, 19, 20: Pulley 21: Chain 22: Rotary actuator 24a, 24b: Long plate mirror
Claims (1)
のミラーと、これらランプ，ミラーを収めた灯体とより
なる光照射器において、前記樋状のミラーは、頂部にス
リットを介して配置される２枚の長板状ミラーから構成
され、かつこれら２枚の長板状ミラーを、ランプの長手
方向を回転軸として回転運動させることにより光を遮断
する構成を備えた長板状ミラーの回転駆動機構を具備
し、２枚の長板状ミラーはその裏面に各長板状ミラーと
一体に回転する制風板及び／または遮光板が付設されて
いることを特徴とする光照射器。1. A light irradiator comprising a rod-shaped lamp, a gutter-shaped mirror covering the lamp, and a lamp body containing the lamp and the mirror, wherein the gutter-shaped mirror is provided with a slit at the top. A long plate-shaped mirror composed of two long plate-shaped mirrors arranged and having a configuration in which light is blocked by rotating these two long plate-shaped mirrors about the longitudinal direction of the lamp as a rotation axis. A light irradiator characterized in that the two long plate-shaped mirrors are provided with a baffle plate and / or a light shielding plate that rotates integrally with each long plate-shaped mirror on the back surface thereof. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63228835A JP2732450B2 (en) | 1988-09-14 | 1988-09-14 | Light irradiator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63228835A JP2732450B2 (en) | 1988-09-14 | 1988-09-14 | Light irradiator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0279306A JPH0279306A (en) | 1990-03-19 |
| JP2732450B2 true JP2732450B2 (en) | 1998-03-30 |
Family
ID=16882605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63228835A Expired - Lifetime JP2732450B2 (en) | 1988-09-14 | 1988-09-14 | Light irradiator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2732450B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120102085A (en) * | 2009-12-17 | 2012-09-17 | 램 리써치 코포레이션 | Uv lamp assembly of degas chamber having rotary shutters |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001266637A (en) * | 2000-03-22 | 2001-09-28 | Nikon Corp | Light source device |
| KR100982490B1 (en) * | 2010-02-19 | 2010-09-15 | 부경엔지니어링주식회사 | Lighting appratus with cooling devices, and the direction of illumination |
| JP2013215647A (en) * | 2012-04-05 | 2013-10-24 | Gs Yuasa Corp | Ultraviolet irradiation device |
| JP6179296B2 (en) * | 2013-09-12 | 2017-08-16 | 岩崎電気株式会社 | UV irradiation equipment |
-
1988
- 1988-09-14 JP JP63228835A patent/JP2732450B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20120102085A (en) * | 2009-12-17 | 2012-09-17 | 램 리써치 코포레이션 | Uv lamp assembly of degas chamber having rotary shutters |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0279306A (en) | 1990-03-19 |
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