JP2725997B2 - Manifold valve - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manifold valve.

[0002]

2. Description of the Related Art Generally, many manifold valves for driving an actuator are used in a factory automation apparatus such as a semiconductor manufacturing apparatus. The manifold valve is configured by connecting a plurality of valve blocks, and each valve block is provided with a supply / discharge port, an air supply passage, and an exhaust passage. When the valve blocks are connected, the supply passages and the exhaust passages of the valve blocks communicate with each other, and a common supply passage and an exhaust passage are formed. Compressed air from an external compressor is supplied to the common air supply passage. A pneumatic device such as an air cylinder is connected to the supply / discharge port. The air exhausted from the supply / discharge port is exhausted to the outside via a common exhaust passage.

A spool hole is formed in the valve block, and the spool hole communicates with the supply / discharge port, the supply passage, and the exhaust passage. Further, the spool is movably accommodated in the spool hole, and the supply / discharge port is selectively connected to the air supply passage or the exhaust passage by switching the spool between two switching positions.

However, when high-pressure air is exhausted from a supply / discharge port to an exhaust passage through a communication passage by a certain valve block, the high-pressure air flows through the exhaust passage and communicates with a valve block other than the valve block. And the manifold valve may malfunction.

Therefore, a gasket for a manifold disclosed in Japanese Utility Model Laid-Open No. 3-44280 has been proposed. The manifold gasket has a through hole for allowing air to flow through a gasket body made of an elastic material. The gasket body is integrally formed with a cantilever plate-shaped movable valve body which always closes the through hole and elastically deforms the through hole to communicate with the through hole.

When the manifold gasket having the above-described structure is disposed between the communication passage and the exhaust passage of each of the valve blocks constituting the manifold valve, the air flowing from the communication passage toward the exhaust passage is used for the manifold. The movable valve body of the gasket is elastically deformed. That is, the manifold gasket allows only the air flowing from the communication passage to the exhaust passage to flow, and blocks the air flowing backward from the exhaust passage to the communication passage.

[0007]

However, air may be exhausted to an exhaust passage in a certain valve block, and air may be exhausted to the exhaust passage from another valve block immediately before the end of the exhaust. That is, when the air to be exhausted from a certain valve block becomes low pressure, air having a higher pressure than the air is exhausted from another valve block.

In some valve blocks, low-pressure air is exhausted from a supply / discharge port to an exhaust passage through a communication passage, and in other valve blocks, high-pressure air is exhausted from a supply / discharge port to an exhaust passage through a communication passage. In some cases.

In these cases, since the movable valve element of the manifold gasket in the valve block for exhausting low-pressure air opens, the high-pressure air exhausted from the other valve blocks flowing through the exhaust passage reduces the low-pressure air. The gas flows back into the communication passage of the valve block to be exhausted.

That is, since the movable valve body of the manifold gasket is in the form of a cantilever plate integrally formed with the gasket body made of an elastic material, the valve closing operation of the movable valve body is delayed. Therefore, when the movable valve body is elastically deformed by low-pressure air flowing from the communication passage to the exhaust passage, even if high-pressure air flows through the exhaust passage, the communication passage and the exhaust passage cannot be immediately shut off. There is a problem that high-pressure air flows back into the communication path of the valve block that exhausts low-pressure air.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and a first object of the present invention is to reliably prevent backflow of air from an exhaust passage to a communication passage by a coil spring and a valve body. It is an object of the present invention to provide a manifold valve.

It is a second object of the present invention to provide a manifold valve which can reduce the number of coil springs and valve elements and the number of parts constituting a valve block.

It is a third object of the present invention to provide a manifold valve which can easily assemble a coil spring and a valve body into a valve block.

[0014]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, according to the present invention, a spool hole is formed in a valve block, a spool is movably housed in the spool hole, and the spool hole is provided. A supply / discharge port, an air supply passage, and a communication passage, respectively, and an exhaust passage connected to the communication passage. The switching movement of the spool selectively connects the supply / discharge port to the air supply passage or the communication passage; In a manifold valve that connects a plurality of valve blocks to communicate an air supply passage and an exhaust passage of each valve block, a plurality of supply / discharge ports and a plurality of
In addition to providing a communication passage, the valve block
A merging passage for merging the passages is formed, and this merging passage is exhausted.
Communicating with the air passage, with arranging a coil spring between the converging passage and the exhaust passage, always blocked the converging passage and an exhaust passage by the pressing force of the coil spring, if
When the air moves from the flow passage to the exhaust passage against the pressing force of the coil spring, it merges.
A valve body for communicating the passage with the exhaust passage was provided.

According to a second aspect of the present invention, a valve block is provided.
A spool hole is formed, and the spool hole is
The spool hole is movably accommodated, and a supply / discharge port,
Connect the air supply passage and the communication passage, respectively, and
An exhaust passage is connected to the passage, and the
Selectively connect the air supply / discharge port to the air supply passage or communication passage.
And connect multiple valve blocks to each valve block.
Manifold valve that connects the air supply passage and exhaust passage
A communication passage and an exhaust passage for each of the valve blocks.
Between the coil spring and
Due to the pressing force of the il spring, always the communication passage and the exhaust passage
Air flowing from the communication passage toward the exhaust passage
Of the coil spring against the pressing force of the coil spring.
A valve body that connects the communication passage and the exhaust passage when
The valve block is connected to a spool having a spool hole.
Blocks and exhaust blocks with exhaust passages
And the opposing surface of the exhaust block and spool block
A communication passage is formed at the opposed surface of the exhaust block.
Between the communication passage and the exhaust passage via a coil spring
Insert the valve body and press the valve seat so that it comes into contact with the valve body.
Entered.

[0016]

[0017]

Therefore, according to the first and second aspects of the present invention, when the spool is switched to connect the supply / discharge port to the communication passage, air flows into the communication passage from the supply / discharge port and exhausts the communication passage. It flows toward the passage. Then, the pressure of the air is applied to the communication path side of the valve element, and the valve element moves against the pressing force of the coil spring. Due to this movement, the communication passage and the exhaust passage communicate with each other, and the air in the communication passage is exhausted to the exhaust passage. At this time, when air at a higher pressure than the air exhausted from the communication passage flows into the exhaust passage, the pressure of the high-pressure air is applied to the exhaust passage side of the valve, and the valve blocks the communication passage and the exhaust passage. Return to position. Since the valve body is always pressed by the coil spring in a direction to shut off the communication passage and the exhaust passage, when the high pressure of air is applied to the exhaust passage side of the valve body, the valve body quickly moves to the communication passage and the exhaust passage. And return to the position where it is cut off.

In particular, according to the first aspect of the present invention, a plurality of communication passages are provided in the valve block, and a joining passage that joins the communication passages is connected to the exhaust passage. Therefore, only one coil spring and one valve element are provided between the merging passage and the exhaust passage in spite of the plurality of communication passages.

According to the second aspect of the present invention, the valve body is inserted between the communication passage and the exhaust passage from the surface of the exhaust block facing the spool block via the coil spring, and
The valve seat is press-fitted. Then, by joining the exhaust block and the spool block, a valve block in which a coil spring, a valve element, and a valve seat are assembled is formed between the communication passage and the exhaust passage.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will now be described with reference to FIGS.
This will be described with reference to FIG. As shown in FIG. 1, a manifold solenoid valve 1 as a manifold valve includes a plurality of valve blocks 2 as solenoid valve bodies, a supply / exhaust block 3 arranged in parallel with the plurality of valve blocks 2, and a supply / exhaust block 3. And a pair of end blocks 4 provided so as to sandwich the valve block 2 from both ends.
These blocks 2, 3, 4 are connected to each other by inserting a key 5 from above in the boundary between the blocks 2, 3, 4. That is, each key 5
By connecting or disconnecting the blocks, the adjacent blocks 2, 3, and 4 can be connected and disconnected. An air supply port 6 for supplying air and an exhaust port 7 for exhausting air are opened on one side of the air supply / exhaust block 3. The air supply port 6 is connected to a compressor (not shown) so that compressed air is supplied from the compressor. Further, the exhaust port 7 is connected to a silencer (not shown) so that the exhaust noise is silenced by the silencer and then exhausted to the outside.

As shown in FIG. 2, the valve block 2 comprises a spool block 10 and an exhaust / pilot block 11 as an exhaust block. An air supply passage 12 is formed in the spool block 10, and an exhaust passage 13, a pilot air supply passage 14, and a pilot exhaust passage 15 are formed in the exhaust / pilot block 11. When a plurality of valve blocks 2 are connected, as shown in FIG.
2, the exhaust passages 13, the pilot air supply passages 14, and the pilot exhaust passages 15 communicate with each other to form a common passage. Also, a plurality of valve blocks 2
When the air supply / exhaust block 3 is connected to the air supply / exhaust block 3, the common air supply passage 12 and the pilot air supply passage 14 are connected to the air supply port 6 of the air supply / exhaust block 3, and the common air exhaust passage 13
The pilot exhaust passage 15 is connected to the exhaust port 7 of the supply / exhaust block 3.

As shown in FIGS. 2 and 3, the spool block 10 includes a main valve switching section 16 and a pipe base section 17. The main valve switching section 16 includes a switching body section 16a.
And a pair of pilot drive units 16b disposed at both ends of the switching main body 16a. A spool hole 18 is formed in the switching body 16a, and a spool 19 is accommodated in the spool hole 18 so as to be movable in the vertical direction in FIG. Piston chambers R are provided at positions corresponding to both ends of the spool 19 of each of the pilot driving portions 16b.
A pair of pistons 20a and 20b are slidably disposed in the piston chambers R1 and R2. Each of the pistons 20a and 20b is
, And presses the spool 19.

The air supply passage 12 formed in the pipe base portion 17 communicates with a spool hole 18 of the main valve switching portion 16. A first supply / discharge port 21 and a second supply / discharge port 22 are formed in the pipe base 17 with the supply passage 12 interposed therebetween, and each supply / discharge port 21, 22 is communicated with the spool hole 18. I have.

The exhaust / pilot block 11 is connected to one side of the spool block 10 on the main valve switching section 16 side. The exhaust / pilot block 11 includes a connection base portion 25 and a pair of pilot valve portions 26a and 26b. Also, a pair of pilot valve portions 26a,
26b is covered by a cover 25a as a main body cover formed so as to be fitted to the connection base portion 25.
The exhaust passage 13, the pilot supply passage 14, and the pilot exhaust passage 15 are formed in the connection base 25. Further, a recess is formed in the connection base portion 25 on the spool block 10 side, and this recess and the spool block 1 are formed.
The merging passage 27 is formed by the 0 side surface. The joining passage 27 communicates with the exhaust passage 13. Further, a first communication path 28 and a second communication path 29 for connecting the merging path 27 and the spool hole 18 are formed in the switching main body 16a.

Therefore, when the spool 19 is switched to the first switching position (the lower side in FIG. 3), the first supply / discharge port 21 communicates with the supply passage 12, and the second supply / discharge port is connected. 22 communicates with the exhaust passage 13 via the second communication passage 29 and the merge passage 27. That is, air is supplied from the air supply passage 12 to the first supply / discharge port 21 side, and air from the second supply / discharge port 22 side is exhausted to the exhaust passage 13.
The spool 19 is in the second switching position (upper side in FIG. 3).
Is switched to the second supply / discharge port 22 and the air supply passage 12, and the first supply / discharge port 21 is connected to the exhaust passage 13 via the first communication passage 28 and the merge passage 27.
Communicate with That is, air is supplied from the air supply passage 12 to the second supply / discharge port 22 side, and air from the first supply / discharge port 21 side is exhausted to the exhaust passage 13.

On the other hand, the pilot air supply passages 30a and 30b and the pilot air exhaust passage from the pilot air supply passage 14 and the pilot exhaust passage 15 formed in the connection base portion 25 are directed toward the pair of pilot valve portions 26a and 26b, respectively. 31a and 31b extend. The pilot air supply passage 30a and the pilot air exhaust passage 31a merge at the pilot valve portion 26a, and a pilot air supply / discharge passage 32a extends from the merge position. The pilot air supply / discharge passage 32a communicates with the piston chamber R1 through the pilot valve portion 26a, the cover 25a, the connection base portion 25, and the pilot drive portion 16b. The pilot air supply passage 30b and the pilot air exhaust passage 31b join at the pilot valve portion 26b.
Is extending. The pilot air supply / discharge passage 32b communicates with the piston chamber R2 through a pilot valve portion 26b, a cover 25a, a connection base portion 25, and a pilot drive portion 16b.

A pilot valve 34a driven by a solenoid 33a is provided inside the pilot valve portion 26a, and the pilot valve 34a is connected to the pilot air supply passage 30.
a and the pilot air exhaust passage 31a. A pilot valve 34b driven by a solenoid 33b is provided inside the pilot valve portion 26b.
0b and the pilot air exhaust passage 31b.

The pilot valves 34a and 34b are controlled to open and close by the excitation and demagnetization of the solenoids 33a and 33b, and pilot air is supplied to and exhausted from the piston chambers R1 and R2 by opening and closing the pilot valves 34a and 34b. . Further, by supplying and discharging pilot air to each of the piston chambers R1 and R2, the spool 19 switches. That is, when pilot air is supplied to the piston chamber R1, the spool 19 is driven by the pilot air pressure.
Is switched to the first switching position, and when pilot air is supplied to the piston chamber R2, the spool 19 is switched to the second switching position by the pilot air pressure.
A control board 35 for controlling the opening and closing of each pilot valve 34a, 34b is attached to an attachment portion 36 extending from the connection base portion 25 to between the pair of pilot valve portions 26a, 26b.

As shown in FIG. 2, the connecting base 25 has a first
And the second manual pilot spools 40 and 41 are inserted. FIG. 3 is a cross-sectional view of the valve block 2 including the first manual pilot spool 40, that is, a cross-sectional view of the valve block 2 of FIG.

A communication hole 42 is formed in the connection base portion 25 and extends vertically and communicates with the pilot air supply passage 14. A first manual pilot spool 40 is inserted into the communication hole 42 via a compression spring 43. Have been. The communication hole 42 divides the pilot air supply / discharge passage 32a passing through the connection base 25 into a first pilot air supply / discharge passage 44a and a second pilot air supply / discharge passage 45a.
2, the pilot air supply / discharge passages 44a and 45a communicate with each other. The first manual pilot spool 40
Are provided with seal members 46 at both ends.

The first manual pilot spool 40 is always arranged at the upper position shown in FIG. 3 by the urging force of the compression spring 43. In this position, the first and second pilot air supply / discharge passages 44a, 45a are communicated with each other, and the pilot supply passage 1
4 and the communication hole 42 are shut off. And cover 2
When the first manual pilot spool 40 is pressed against the compression spring 43 from the operation hole 47 formed in the first pilot air supply / discharge passage 4 by the upper seal member 46.
4a and the second pilot air supply / discharge passage 45a are shut off. Further, the lower seal member 46 moves downward, and the pilot air supply passage 14 and the communication hole 42 communicate with each other. That is, the pilot air in the pilot air supply passage 14 is directly supplied to the piston chamber R1 through the communication hole 42 and the first pilot air supply / discharge passage 44a without passing through the pilot valve 34a.

FIG. 4 shows a second manual pilot spool 41.
2, that is, a cross-sectional view of the valve block 2 of FIG. 2 as viewed from the direction of arrows BB. A communication hole 50 extending in the up-down direction and communicating with the pilot air supply passage 14 is formed in the connection base portion 25.
The second manual pilot spool 41 is inserted into the “0” through a compression spring 51. The communication hole 50 divides the pilot air supply / discharge passage 32b passing through the connection base 25 into a first pilot air supply / discharge passage 44b and a second pilot air supply / discharge passage 45b. The air supply / discharge passages 44b and 45b are communicated. Seal members 52 are provided on both ends of the second manual pilot spool 41, respectively.

The second manual pilot spool 41 is always arranged at the upper position shown in FIG. 4 by the urging force of the compression spring 51. In this position, the first and second pilot air supply / discharge passages 44b and 45b communicate with each other, and the pilot supply passage 1
4 and the first pilot air supply / discharge passage 44b are shut off. Then, the second manual pilot spool 41 is moved from the operation hole 53 formed in the cover 25a to the compression spring 51.
, The lower seal member 52 moves downward. By the movement of the lower seal member 52, the first pilot air supply / discharge passage 44b and the second pilot air supply / discharge passage 45b are shut off, and the pilot supply passage 14 and the first pilot air supply / discharge passage 44b are separated. The communication is performed through the communication hole 50. That is, the pilot air supply passage 1
4 communicates with the communication hole 50 and the first pilot air supply / discharge passage 4 without passing through the pilot valve 34b.
4b, it is supplied directly to the piston chamber R2.

On the other hand, as shown in FIG.
The connection passage 2 is provided between the exhaust passage 13 of FIG.
7a are formed. A poppet valve 55 is provided in the connection passage 27a. A spring receiver 56 is formed on the exhaust passage 13 side of the connection passage 27a.
A coil spring 57 is housed in a state in which it contacts the spring receiver 56. The other end of the coil spring 57 is provided with a valve body 58 made of a rigid material such as resin or metal. That is, the valve body 58 does not deform due to the pressure of air or the like. A valve seat 59 is press-fitted from the opposite side of the valve body 58 from the coil spring 57,
The valve seat 59 is fixed to the connection passage 27a. The valve body 58 is always pressed against the valve seat 59 by the pressing force of the coil spring 57.

That is, the valve body 58 always shuts off the exhaust passage 13 and the merge passage 27. When an air pressure of a predetermined value or more is applied to the merging passage 27 side of the valve body 58, the valve body 58 moves against the pressing force of the coil spring 57. Due to this movement, the exhaust passage 13 and the joining passage 27 communicate with each other, and air flows in the joining passage 2.
7 to the exhaust passage 13.

Next, the operation of the manifold solenoid valve 1 configured as described above will be described. In order to assemble the coil spring 57 and the valve element 58 into the valve block 2, the connecting passage is formed from the concave side of the merging passage 27 of the exhaust / pilot block 11 with the spool block 10 and the exhaust / pilot block 11 separated. The valve element 58 is inserted into the coil 27a via the coil spring 57. And
The end of the coil spring 57 opposite to the valve body 58 is brought into contact with the spring receiver 56. Furthermore, the connection passage 2
If the valve seat 58 is press-fitted into the valve body 7a so as to contact the valve body 58 and the exhaust / pilot block 11 and the spool block 10 are connected, the coil spring 57 and the valve body 58 are assembled to the valve block 2.

Next, as shown in FIG.
When a is excited to open the pilot valve 34a, the pilot air in the pilot air supply passage 14 is supplied to the piston chamber R1 through the pilot air supply passage 30a and the pilot air supply / discharge passage 32a. And the piston chamber R
The spool 19 is switched to the first switching position by the air pressure of the pilot air supplied to the first air supply port 1, the air supply passage 12 communicates with the first air supply / discharge port 21, and the first air supply port 2
From 1 air is supplied to pneumatic devices such as air cylinders.

When the spool 19 is switched to the first switching position, the second supply / discharge port 22 and the second communication passage 29 communicate with each other.
The air flows through the merging passage 27 through the communication passage 29 of FIG.
When the air pressure of this air is applied to the valve element 58 of the poppet valve 55 provided between the junction path 27 and the exhaust path 13, the valve element 58 moves against the pressing force of the coil spring 57. By the movement of the valve body 58, the joining passage 27 and the exhaust passage 13 communicate with each other, and the air in the joining passage 27 is
Exhausted.

On the other hand, when the solenoid 33b is excited to open the pilot valve 34b, the pilot air in the pilot air supply passage 14 is supplied to the piston chamber R2 through the pilot air supply passage 30b and the pilot air supply / discharge passage 32b. You. The spool 19 is switched to the second switching position by the air pressure of the pilot air supplied to the piston chamber R2, and the air supply passage 12 and the second air supply / discharge port 22 communicate with each other. Is supplied to a pneumatic device such as an air cylinder.

When the spool 19 is switched to the second switching position, the first supply / discharge port 21 and the first communication path 28 communicate with each other.
Air flows through the communication passage 28 through the communication passage 28.
Then, the valve body 58 is moved by the air pressure in the merging passage 27 in the same manner as described above, and the air in the merging passage 27 is removed from the exhaust passage 13.
Exhausted. Thus, each solenoid 33a, 33b
Is selectively supplied to supply air to, for example, one chamber and the other chamber of an air cylinder to drive the air cylinder.

When power is not supplied to each of the solenoids 33a and 33b, the spool 19 is tested experimentally.
In order to check whether the operation of etc. is performed correctly,
The first manual pilot spool 40 and the second manual pilot spool 41 are operated.

That is, the first base formed on the connection base 25
When the manual pilot spool 40 is manually pushed down, the upper seal member 46 moves between the first pilot air supply / discharge passage 44a and the second pilot air supply / discharge passage 45a in the connection base portion 25. The upper seal member 46 is connected to the first pilot air supply / discharge passage 44.
a and the second pilot air supply / discharge passage 45a.
In addition, when the first manual pilot spool 40 is pushed down, the lower seal member 46 moves downward, and the pilot air supply passage 14 and the communication hole 42 communicate with each other. Then, the air in the pilot air supply passage 14 is directly supplied to the piston chamber R1 through the communication hole 42 and the first pilot air supply / discharge passage 44a. In this case, the spool 19 is switched to the first switching position regardless of the opening and closing of the pilot valve 34a.

Further, as shown in FIG.
When the second manual pilot spool 41 formed in the above is manually pushed down, the lower seal member 52 moves downward. The first pilot air supply / discharge passage 44b in the connection base portion 25 is formed by the lower seal member 52.
And the second pilot air supply / discharge passage 45b are shut off. Further, when the second manual pilot spool 41 is pushed down, the pilot air supply passage 14 communicates with the communication hole 50. Then, the air in the pilot air supply passage 14 is directly supplied to the piston chamber R2 via the communication hole 50 and the first pilot air supply / discharge passage 44b. In this case, the spool 19 is switched to the second switching position regardless of the opening and closing of the pilot valve 34b.

Further, the exhaust passage 13 is provided from each valve block 2.
The air that has been exhausted flows through a common passage formed by connecting the exhaust passages 13 of the respective valve blocks 2 when the respective valve blocks 2 are connected, and then passes through the exhaust port 7 of the supply / exhaust block 3. It is exhausted outside.

Next, when air flows into the joining passage 27 of the connection base portion 25 in a certain valve block 2, the pressure of the air causes the valve body 58 to move against the coil spring 57. Then, the movement of the valve body 58 causes the joining passage 27 and the exhaust passage 13 to communicate with each other, so that air is released from the exhaust passage
3 and immediately before the end of the exhaust, the air exhausted to the exhaust passage 13 has a low pressure. At this time, when air is exhausted from the other valve blocks 2 to the exhaust passage 13, air having a higher pressure than the air exhausted from the valve block 2 immediately before the end of the exhaust flows through the common exhaust passage 13. And
When the pressure of the air is applied to the valve element 58 of the valve block 2 immediately before the end of the exhaust, the valve element 58 moves quickly in a direction to shut off the joining passage 27 and the exhaust passage 13. That is, the valve element 5
Since the coil spring 8 is always positively pressed by the coil spring 57 in a direction to shut off the merging passage 27 and the exhaust passage 13, the valve closing operation is performed quickly and the backflow of air to the merging passage 27 is prevented.

As described above in detail, in the present embodiment, the valve body 58 for blocking the communication between the merging passage 27 and the exhaust passage 13 is made of a highly rigid material, and the valve body 58 is always merged by the coil spring 57. The passage 27 and the exhaust passage 13 are positively pressed in a direction to shut off. Therefore, even when high-pressure air flows through the common exhaust passage 13 when the valve body 58 is opened to exhaust low-pressure air to the exhaust passage, the valve body 58 quickly communicates with the merging passage 27 unlike the conventional case. The passage 13 is shut off. Therefore, it is possible to reliably prevent the high-pressure air from flowing back into the merging passage 27.

The first and second communication passages 28 and 29 are communicated with the merging passage 27, and the merging passage 27 and the exhaust passage 1 are connected.
A poppet valve 55 is provided in the connection passage 27a that communicates with No.3. Therefore, only one poppet valve 55 needs to be provided in spite of the two communication paths, and the number of components constituting the valve block 2 can be reduced.

Further, the valve block 2 is composed of a spool block 10 and an exhaust / pilot block 11,
The coil spring 57, the valve body 58 and the valve seat 59 are exhausted.
The pilot block 11 is sequentially assembled into a passage that opens. Therefore, the coil spring 57
Also, the work of assembling the valve body 58 to the valve block 2 can be easily performed.

Further, in the present embodiment, the blocks 2, 3, and 4 are connected to each other by inserting the key 5 from above into the boundary between the plurality of valve blocks 2, the supply / exhaust block 3 and the end block 4, respectively. Therefore, since the head of the key 5 is visible above the manifold solenoid valve 1, it is easy to check whether the key 5 is inserted at the boundary between the blocks 2, 3, and 4.

Further, in this embodiment, the pilot air supply / discharge passages 32a, 32b are connected to the pilot valve portions 26a, 26b,
It was formed so as to pass through the cover 25a, the connection base 25, and the pilot drive 16b. Therefore, the pilot valve portions 26a and 26b, the cover 25a, the connection base portion 2
The pilot air supply / discharge passages 32a and 32b are formed in the pilot drive section 16 and the pilot drive section 16b, and the pilot air supply / discharge passages 32a and 32b are formed by connecting the respective sections 26a, 26b, 25a, 25 and 16b. You. Therefore, the pilot air supply / discharge passages 32a and 32b are easily formed in the valve block 2.

The present invention is not limited to the above embodiment, but may be embodied with the following modifications, for example. (1) In this embodiment, the valve block 2 of the pilot-type solenoid valve has been exemplified. However, the valve block 2 may be an electromagnetic valve that directly switches the spool 19 by the electromagnetic force of a solenoid. In this case as well, the backflow of air can be prevented as in the embodiment.

(2) In this embodiment, the first and second communication passages 28 and 29 are communicated with the merging passage 27, and the poppet valve 55 is provided in the connecting passage 27a connecting the merging passage 27 and the exhaust passage 13. However, the present invention is not limited to this. That is,
The first and second communication passages 28 and 29 may be directly connected to the exhaust passage 13, and a poppet valve 55 may be provided at a connection portion between each of the communication passages 28 and 29 and the exhaust passage 13. In this case as well, the backflow of air can be prevented as in the embodiment.

(3) The spool block 10 and the exhaust / pilot block 11 may be formed integrally. In this case, the coil spring 57 and the valve body 58 are connected to the exhaust passage 13.
What is necessary is just to insert in the connection passage 27a from the side.

[0054]

[0055]

[0056]

As described in detail above, claims 1 and 2
According to the second aspect of the invention, even when the valve element is in a position for communicating the communication path and the exhaust path, if the high-pressure air is applied to the exhaust path side of the valve element, the valve element quickly moves between the communication path and the exhaust path. Return to the position to shut off. Therefore, it is possible to reliably prevent the air flowing through the exhaust passage from flowing back into the communication passage.

In particular, in the first aspect of the present invention, the plurality of communication passages are joined by the joining passage, and the coil spring and the valve body are disposed between the joining passage and the exhaust passage. Therefore, only one coil spring and one valve element need to be provided in spite of a plurality of communication paths, and the number of coil springs and valve elements can be reduced. As a result, the number of parts constituting the valve block can be reduced.

According to the second aspect of the present invention, since the valve block is composed of the spool block and the exhaust block, the coil spring and the valve element can be easily assembled between the communication passage and the exhaust passage. Therefore, the work of assembling the coil spring and the valve body to the valve block can be easily performed.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a manifold valve of the present embodiment.

FIG. 2 is a perspective view showing a valve block.

FIG. 3 is a cross-sectional view of the valve block of FIG. 2 as viewed from the direction of arrows AA.

FIG. 4 is a sectional view of the valve block of FIG. 2 as seen from the direction of arrows BB.

[Explanation of symbols]

1: a manifold solenoid valve as a manifold valve,
DESCRIPTION OF SYMBOLS 10 ... Spool block, 11 ... Exhaust / pilot block as exhaust block, 12 ... Supply passage, 13 ... Exhaust passage, 18 ... Spool hole, 19 ... Spool, 21 ... First supply / discharge port, 22 ... Second supply Discharge port, 27 ... merging passage, 28 ... first communication passage, 29 ... second communication passage, 57
... coil spring, 58 ... valve element.

Claims (2)

(57) [Claims] 1. A spool hole (1) is provided in a valve block (2).
8), a spool (19) is movably housed in the spool hole (18), and the spool hole (1) is formed.
8) are connected to the supply / discharge ports (21, 22), the air supply passage (12), and the communication passages (27, 28, 29), respectively, and the exhaust passage (1) is connected to the communication passages (27, 28, 29).
3), the supply / discharge ports (21, 22) are selectively connected to the air supply passage (12) or the communication passages (27, 28, 29) by the switching movement of the spool (19), and a plurality of valves are provided. Block (2) is connected to each valve block (2)
In the manifold valve which connects the air supply passage (12) and the exhaust passage (13 ), a plurality of supply and exhaust ports (21, 21 ) are connected to the valve block (2).
22) and a plurality of communication paths (28, 29)
In addition, the communication passages (28, 2) are provided in the valve block (2).
9) to form a merging passage (27) for merging
The passage (27) communicates with the exhaust passage (13) to form a merging passage.
A coil spring (57) is arranged between the (27) and the exhaust passage (13), and the junction passage (27) and the exhaust passage (13) are always shut off by the pressing force of the coil spring (57). When they move against the pressing force of the coil spring (57) due to the pressure of the air flowing from the merging passage (27) toward the exhaust passage (13), they merge.
A manifold valve provided with a valve element (58) for communicating the passage (27) with the exhaust passage (13). 2. A spool hole (1) is provided in a valve block (2).
8) and a sprue is formed in the spool hole (18).
The spool hole (1) is movably accommodated in the spool hole (1).
8) supply and exhaust ports (21, 22), air supply passage (12) and
And the communication passages (27, 28, 29)
In addition, the exhaust passage (1) is connected to the communication passage (27, 28, 29).
3) is connected, and the spool (19) is moved by switching.
Supply / discharge ports (21, 22) are connected to air supply passage (12) or communicating
Roads (27, 28, 29).
Lube block (2) connected to each valve block (2)
The air supply passage (12) and the exhaust passage (13) communicate with each other.
In the manifold valve, the communication passages (27, 28, 2) of the respective valve blocks (2) are provided.
9) and a coil spring (5 ) between the exhaust passage (13 ).
7) and its coil spring (5)
The communication path (27, 28, 29) is always provided by the pressing force of 7).
And the exhaust passage (13) are shut off, and the communication passages (27, 28,
29) Pressure of air flowing from exhaust passage (13) to exhaust passage (13)
The force is transferred by the force against the pressing force of the coil spring (57).
When operated, the communication passages (27, 28, 29) and the exhaust passage
(13) and a valve body (58) for communicating with the valve body.
Block (2) is formed with a spool hole (18).
A spool block (10) and an exhaust passage (13) are formed
Exhaust block (11).
(11) and the spool block (10) facing
Forming communication passages (27, 28, 29),
Communication path (27, 28, 2)
9) and the exhaust passage (13).
7), the valve element (58) is inserted, and the valve element (5) is further inserted.
8) A manifold with press-fitted valve seat (59) to abut
Bulb.