JP2703766B2 - Lamp cooling device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Technical field   The present invention generally relates to an electrodeless light source device.
More specifically, a microwave-excited electrodeless light source device and
And various related devices suitable for use therein
Things. Conventional technology   Microwave-excited electrodeless light source devices are conventionally known.
In such devices, gas and solid and / or liquid
A lamp or a sphere containing microwave-like additive elements
It is located in a chamber or cavity. The microwave cavity is
Formally, a solid wall and a microwave
And a mesh wall portion that reflects light. Ma
Microwaves are coupled through a coupling slot formed in the solid wall portion.
Into the microwave cavity so that the lamp is
It absorbs the introduced microwaves and emits light. Like this
In a simple microwave light source device, the lamp
No pole is provided. Therefore, this lamp has a conventional
Has a relatively longer life than lamps. Therefore,
Microwave light source devices are compared to conventional lamps with electrodes.
Can provide stable light output for a longer time compared to
Noh.   However, in a microwave light source device, a lamp is used.
Microwaves, usually generated by magnetrons,
To provide high-intensity light output.
There were difficulties in running. This is partly because
Has a fixed rating for commercially available magnetrons.
They are not diverse and have limited power
It is due to being specified. Therefore, high intensity light output
In order to gain power, a magnetron with special performance
Must be written, but it can be extremely costly
There is. Further, the microwave light source device is used for printing and semiconductor.
It is expected to be applied in the manufacturing field. This
In such cases, higher resolution is required, and these
Microwave light source device is applied in the technical field of
Also requires good uniformity over a relatively large area.
You. Therefore, these newly generated requirements must be met.
An improved microwave-excited electrodeless light source device
The necessity of developing existed. Purpose   The present invention has been made in view of the above points, and
Electrode-free solution to overcome the disadvantages of the prior art as described and improve it
It is a main object to provide a light source device. Of the present invention
Another goal is to be stable and high
Microwave driven type capable of supplying high intensity light output
An object of the present invention is to provide an electrodeless light source device. Still another of the present invention
The purpose of this is to achieve high resolution and high image quality.
To provide a microwave driven electrodeless light source device.
You. Another object of the present invention is to cover a large area.
Capable of providing good uniform light output across
An object of the present invention is to provide an electrodeless light source device driven by an microwave. Constitution   According to one aspect of the invention, a machine that extends along a longitudinal axis.
Microwave cavities and micro-cavities located in the cavities
Means for absorbing waves and emitting light
A dynamic electrodeless light source device is provided. The microwave cavity
Is defined by a wall having a solid wall portion and a mesh wall portion.
It is defined. The solid wall portion preferably comprises, for example,
Conductive, such as copper, stainless steel, or aluminum
And the mesh wall portion is made of a material.
Suitably, a conductive material that allows light to pass but reflects microwaves
It consists of a sexual mesh screen. Therefore,
The brush size is determined by considering the wavelength of the microwave used.
It must be determined accordingly. In a preferred embodiment, the
The solid wall portion is cylindrical and one end is open.
And the other end is closed, and likewise the mesh
The wall is also cylindrical, with one end open.
And the other end is closed. Preferably the solid wall portion
Connect their open ends to the mesh wall.
Are connected end-to-end by
Mesh wall portions are axially aligned along the longitudinal axis
You. In this case, connect both open ends either directly or
Can be connected indirectly with additional elements
It is possible.   In a preferred embodiment, the solid wall portion has at least one
Number of coupling slots are formed. Most preferably, the
A coupling slot is formed in a side wall portion of the solid wall portion. High
For light intensity applications, provide two or more coupling slots
And by doing so,
Through a plurality of coupling slots into the microwave cavity.
It is possible to pay. In this case, multiple connection slots
Each of the units is typically a magnet through a separate waveguide.
Operationally coupled to an individual microwave source that is a netron
Have been. Therefore, in this configuration, microwaves are
Feeding several magnetrons into the same microwave cavity
It is possible to However, in this case, the binding
Arrange them so that the slots maintain an orthogonal relationship.
Is desirable. For example, each coupling slot has an individual
Two coupling switches operatively associated with the magnetron
If a lot is provided, the two coupling slots
In a plane perpendicular to the longitudinal axis of the microwave cavity.
Arrange at the corner. Further, the light emitting means is preferably a sphere
And preferably the mesh wall
Located in the area defined by the minute.   According to another aspect of the invention, a microwave driven electrodeless
A roughly dome-shaped mesh screen used for the light source device
Lean is provided. The dome-shaped mesh screen
The lean has a generally cylindrical side wall and a light-transmitting but
Microwaves are composed of mesh members that reflect
And the peripheral portion is fixed to one end of the cylindrical side wall.
A dome-shaped end wall. Preferably, the side walls are also small.
At least partially composed of the mesh screen
And the dome-shaped end wall to the end of the cylindrical side wall
Use mechanical fastening means to secure. In one embodiment
Wherein the mechanical fastening means comprises a metal fastener or a clamp.
have. Preferably, the mesh member is a tongue
And the metal fastener is made of aluminum.
Metal or a combination of metals such as copper or
You. In a preferred embodiment, the cylindrical side wall has a flat feature.
Abutment by bending and bending the mesh member
Two reflective sides, for example, metal fasteners or clamps
Fixedly clamped by mechanical fixing means such as
And formed by   Such a dome-shaped mesh screen is
Defining at least a portion of the wave cavity, and which increases
It is possible to supply light output with uniformity
The spherical or substantially spherical lamp with the dome-shaped mesh
This is particularly effective when positioned inside the clean.
Further, a metal fastening portion is provided between the cylindrical side wall and the dome-shaped end wall.
Or use mechanical fixing means such as clamps
Thus, the dome-shaped mesh screen is extremely easy and
It can be manufactured at a low cost. This means
When using tungsten for the mesh member
Is tungsten hard and relatively difficult to process
This is especially true. Furthermore, the side walls are curved and
Very easy to form by using metal fasteners
It is possible to A mechanism equipped with such metal fasteners
Ash screens also have a high degree of structural integrity
It is effective because it has a reinforcing structure.   According to yet another aspect of the invention, a microwave driven
Lamp cooling system particularly suitable for use in electrode light source devices
System is provided. This lamp cooling device is
Located inside a sinus and absorbs microwaves to emit light
Nozzles arranged around the lamp that emits light
Have In a preferred embodiment, the plurality of nodes
The chirps are each different points on the outer surface of the lamp.
Are arranged to emit a gas flow directed at
The lamp is therefore substantially uniform over its entire surface.
Is cooled. In one embodiment, the lamp has its shape.
Shape is spherical and is driven to rotate around a predetermined rotation axis.
It is. In this case, the plurality of nozzles are preferably
A plurality of nozzles disposed around the axis of rotation,
At different heights along the axis of rotation
The gas flow is then ejected and the entire surface of the lamp
To cover.   The nozzle is preferably externally within the microwave cavity.
And preferably, substantially microwaves
Consists of substances that do not absorb. For example,
Can be made of quartz or ceramics
is there. Preferably, each of the nozzles has a metal at its proximal end.
A ferrule or fitting is provided.
Ferrules are installed in the walls that define the microwave cavity.
Fitted into the mounting hole. Such a configuration,
If the nozzle is damaged or malfunctioning,
Can be easily exchanged for
You.   According to yet another aspect of the invention, a microwave driven
Lamp rotating device particularly suitable for use in an electrode light source device
Is provided. This lamp rotating device absorbs microwaves
A lamp that emits light by
Holding means for holding in the sinus, and a predetermined rotation of the holding means
It is rotatably supported around an axis, and
A support hand that is rotatably supported at two spaced apart support points
And a step. In one embodiment, the holding means
Has a long stem that extends linearly,
The longitudinal axis of the lamp is the axis of rotation around which the lamp is rotated.
It is defined. The lamp is secured to the free end of the stem.
Have been. The support means preferably comprises a stem
Positioned apart from each other to support at two points at the ends
It has a pair of bearings placed. Such a two-point support
In a holding configuration, the lamp is located inside the microwave cavity.
Be maintained in a fixed position, and thus maintain a constant light output.
Is very effective.   In one embodiment, the lamp is a spherical lamp.
Also, the sprocket is positioned between the pair of bearings and attached to the stem.
Fix the unit. Fix the endless chain on the stem
Attached to the sprocket and the drive shaft of the motor
Between the other sprockets. Such a structure
In the formation, the lamp is prevented from swinging, and
Lamp as may be required in some applications
When driving the lamp at a relatively high speed,
Can be maintained in the intended position inside the microwave cavity
It works.   According to yet another aspect of the invention, a high resolution electrodeless light source
An apparatus is provided. According to this aspect, the lamp or sphere
Microwave sky defined by mesh screen
Located in the area of the sinus, thus illuminating the light in a wider direction
It is possible to fire. The emitted light is directed to the image plane
Irradiate in a predetermined direction from the lamp so as to move forward.
Reflecting means is provided to reflect the reflected light. Obedience
Therefore, the reflecting means collimates as much as possible toward the image plane.
The main purpose is to obtain a lit light. Good fruit
In an embodiment, some selection on the image plane is made directly from the light source.
The light beam incident on the selected point and reflected by the reflecting means
Is defined between another light beam incident on the selected point after
The resulting local divergence angle is kept as small as possible. Disassembly
It is this local divergence angle that determines the degree of performance
This idea is particularly important and the local divergence angle is small.
The smaller, the higher the resolution.   In one embodiment, the reflecting means comprises a hole at the top.
Umbrella-shaped reflector. Preferably, the counter
The projectile has a multi-sided configuration, a bundle with multiple facets
It is. In other words, the umbrella-shaped reflector is preferably each
Multiple truncations, each with a different slope angle
It consists of a conical surface. In the preferred embodiment
Means that the inclination angle is from the inner surface (inner facet) to the outer surface
(Outer facet) gradually and monotonically
I have. Such a faceted configuration can significantly reduce design and manufacturing.
It is particularly effective because it is easy to use. However, with variations
Then, if necessary, the reflector is continuously undivided.
It is also possible to adopt a configuration having a typical surface.   Further, an additional screen is provided on the edge of the umbrella-shaped reflector.
It is also possible to provide. Such an additional screen
Through the inner mesh screen for any reason
To prevent microwaves from leaking out
Contribute to stopping. Such an additional screen
Consists of any conductive material such as aluminum
And it can be applied to a predetermined pattern.
It is possible to manufacture by performing the etching. Exchange
In other words, this additional screen participates in the light emission function
It is not intended to be formed from any substance
Is possible, while the inner mesh screen is
Participate in Noh and, therefore, preferably consist of tungsten
I do. Note that the inner mesh screen can be any desired material.
It is also possible to constitute from. Furthermore, the entire front configuration
It is desirable to provide a protective glass plate to cover
No. Such a glass plate is made from Pyrex glass
Can form and debris when the lamp explodes
From colliding with the operator. Gala like this
The plate preferably reflects off its inside or both surfaces
Coat with a protective film. Example   Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings.
Embodiments will be described in detail using embodiments.   Referring to FIG. 1, a configuration according to one embodiment of the present invention is shown.
The resulting microwave-driven electrodeless light source device 1 is schematically shown.
ing. Note that the electrodeless light source shown
The device itself constitutes a novel invention and the device shown
The various parts and components used in the
The invention constitutes the invention. As shown in FIG.
The electrode light source device 1 is shown extending vertically in FIG.
A long microwave chamber or cavity 8
You. The microwave cavity 8 generally includes a solid wall portion 8a and a housing.
The wall portion 8b is defined by the brush wall portion 8b. In the example shown
The solid wall portion 8a includes a cylindrical side wall 10 and the cylindrical side wall 10a.
A circular end wall 11 sealed in a sealing manner to the top end of
A cooling gas block 12 fixed in a sealed manner to the bottom end of the side wall 10
And The side and short walls 10 and 11 and the cooling gas
Each of the blocks 12 is preferably formed from a conductive material.
And preferably aluminum for ease of processing
Use Nium. The cylindrical side wall 10 has a length L and a diameter D.
Have the frequency of the microwave used for operation.
Determined in relation to the number. Generally, D / L ratio used
Has a functional relationship with the frequency of the microwave
Therefore, for the same frequency, the length of the cylindrical side wall 10
As the length L increases, the diameter D of the cylindrical side wall 10 decreases.
It is possible and vice versa. What to watch out for
However, in the illustrated example, the side wall 10 has a cylindrical shape.
Therefore, its cross-sectional shape is circular. However, desired
The side walls 10 can be, for example, square or rectangular
Can be formed to have a desired cross-sectional shape.
You.   In the embodiment shown in FIG.
The combined slots 10a, 10a are formed, and these combined slots are formed.
The lot is in communication with waveguides 141 and 14r, respectively.
These waveguides have at their ends the respective magnetron 151 and
And 15r. Therefore, each of the waveguides 141 and 14r
In each case by magnetrons 151 and 15r
Microphone from which a black wave is generated and so generated
The microwaves are transmitted through the respective coupling slots 10a and 10a.
It is introduced into the wave cavity 8. In the example shown, two
Guntrons 151 and 15r use the same microwave
Since it is supplied into the cavity 8, it is placed inside the microwave cavity 8.
It is possible to obtain an amplified microwave
This contributes to obtaining high intensity light output. However
It should be noted that higher intensity light output can be obtained.
In order to achieve this, three or more magnetrons are
Coupled to the same microwave cavity 8 via coupling slots
It is also possible to provide. Or, alternatively, sufficient
Can generate microwaves with high energy
When using a single functioning magnetron,
In some cases, using a single magnetron is sufficient
You. However, the magnetrons available on the market
Because the type is limited, to increase the power
Multi-magnetron configuration as shown in FIG.
Is desirable.   In the particular configuration shown in FIG.
Lots 10a and 10a are arranged in a specific angular relationship. Immediately
That is, in the preferred embodiment, the coupling slots 10a and 10a
Are mutually perpendicular in a plane perpendicular to the longitudinal axis of the cylindrical side wall 10.
They are arranged in an orthogonal relationship. This is illustrated in FIG.
This will be described in further detail with reference to FIG. As shown in FIG.
A pair of coupling slots 10a and 10a formed in the cylindrical side wall 10.
Are the angles θ₀Are arranged to define
And in the preferred embodiment, this angle θ₀Is 90 ゜
Is set in the vicinity. In such a configuration,
Identical microwave through paired coupling slots 10a and 10a
The two microwaves introduced into the cavity 8 are mutually decoupled.
Pulled apart, so they interfere with each other
Is prevented. Therefore, two magnetrons
In the microwave cavity 8 by using 151 and 15r
The increased power is obtained. In the configuration shown in FIG.
In other words, the left waveguide 141 has three parts, namely, a horizontal waveguide.
Path section 141-1, intermediate waveguide section 141-2, inclined waveguide
Road portion 141-3. Similarly, the right waveguide 14r
Also has three sections, a horizontal waveguide section 14r-1 and an intermediate waveguide.
Having a waveguide portion 14r-2 and an inclined waveguide portion 14r-3.
I have. Also, a tuning star for changing the effective length of the waveguide
161 or 16r is provided in the intermediate portion 141-2 or 14r-2.
Have been. Between the horizontal and inclined portions 141-1 and 141-3
Angle θ₁And horizontal and inclined portions 14r
Angle between -1 and 14r-3₂Is defined. Good
Suitably, the left and right waveguides 141 and 14r are symmetric in configuration
And therefore in that case the angle θ₁And angle θ₂What is
Set equal. In the embodiment of FIG.
₀Is set to 90 °, these angles θ₁And θ₂
Are 45 ゜ each.   Returning to FIG. 1, a pair of coupling slots 10a
And 10a are relatively close to the top of the microwave cavity 8
Is located. This arrangement is within the microwave cavity 8.
To get a more uniform microwave
Is preferred. This means that the long microwave cavity 8
Microphone at one end in a direction perpendicular to its longitudinal axis
From the fact that microwaves are introduced into the microwave cavity 8
It is thought that it is possible. However, if desired,
Forming one or more coupling slots in the end wall 11 as
It is also possible, in which case microwaves are long
Inside the microwave cavity 8 parallel to the longitudinal axis of the microwave cavity 8
Will be introduced.   As shown in FIG. 1, the mesh screen portion 8b is
And a screen-shaped mesh screen 13. Later
For clarity, the electrodeless light source device shown in FIG.
In some cases, a double mesh screen system is configured, and
The dome-shaped mesh screen 13 is a double mesh
It constitutes the inner mesh screen of the screen system
You. In the illustrated embodiment, the dome-shaped mesh
The screen 13 defines the bottom of the long microwave cavity 8.
Or configuration. The dome-shaped mesh shown
Clean 13 allows light to pass but reflects microwaves
It is formed by a mesh member. Therefore, it will be updated later.
As described in detail below, through a pair of coupling slots 10a and 10a
The microwave introduced into the microwave cavity 8 is meshed
Passing through the screen 13 is prevented. But
However, the light emitted by the lamp or sphere 18b is
Through the screen 13
Permissible. Importantly, the mesh screen
13 is roughly cylindrical, one end of which is open
The other end has a dome shape. Therefore, the mesh
The screen 13 has a cylindrical side wall 13a and the cylindrical side wall 1a.
A dome-shaped end wall 13b provided at one end of 3a;
have. Such a configuration produces a uniform light output.
Is effective to obtain a stable operation for
Revealed.   Next, referring to FIGS. 3a to 3e, a dome shape is formed.
The configuration of the mesh screen 13 will be described in detail. Me
The shrink screen 13 has a cylindrical side wall 13a and a dome shape.
End walls 13b, each of which is transparent to light.
It consists of a mesh member that reflects microwaves
ing. Preferably, the mesh member is a woven tongue
Wire. In the illustrated embodiment
The dome-shaped end wall 13b is, for example, preferably an
Metal fastener consisting of ductile metal such as luminium and copper
Or fixed to the lower end of cylindrical side wall 13a by clamp 13e
Have been. As shown in FIG. 3c, the dome-shaped end wall
The peripheral portion 13b ′ of 13b is bent, and this bent peripheral portion 13b ′ is bent.
b 'should be in surface contact with the lower end of the cylindrical side wall 13a.
Is possible, and the metal circular fastener or clamp 13e is
These portions of the side and end walls 13a and 13b which are in surface contact
Tighten or clamp. Such a circular metal fastener
Providing the 13e thereby allows the dome-shaped mesh
It gives the screen 13 increased rigidity and strength,
Suitable for the mesh screen 13
Even if any undesired external force is applied, mesh screen
Is prevented from deforming and maintains its original shape.
It is possible to Such a shape maintaining ability is
Mesh screen used for the electrode driven light source device
This is especially important for Because it is stable
This is because it is possible to secure the operation that has been performed. so
Otherwise, the light output may fluctuate undesirably. 3f
The figure shows a modification of the configuration shown in FIG. 3c. This change
In the embodiment, the dome ring 13b ″ is formed separately.
And is fixedly integrated with the periphery of the dome 13b.
You. This configuration gives the dome 13b its desired shape and
Effective in providing improved structural integrity.   The side wall 13a curves and flattens the flat piece of the mesh member.
The opposite side is secured by a side metal fastener or clamp 13d.
Formed into a cylindrical configuration by clamping
You. That is, as shown in FIG. 3d, the opposite side is a bent portion.
13a 'and 13a' are bent to define
The bent portions of the two are contacted to make surface contact, and the side metal fastening
A tool or a clamp 13d is provided so that these bent portions 13a 'and
And 13a 'are mechanically held together. This side metal clamp
The clothing 13d is also assembled on the assembled mesh screen 13.
Contributes to providing artificial rigidity and integrity. Illustrated
In one embodiment, only one side metal fastener 13d is provided.
But more than one such side if desired
It is also possible to provide a metal fastener 13d. Two or more
When the side metal fastener 13d is provided,
The side metal fastener 13d of the cylindrical side wall 13a around the longitudinal axis
It is desirable to arrange them symmetrically. More things to note
However, such side metal fasteners 13d are undesirably
Make the desired number of times without blocking the passage of light
Is possible.   Further, a connecting metal fastener or a clamp 13c is provided.
As shown in FIG. 3e, this connecting metal fastener 13c
Also has a circular or ring shape, and has a cylindrical side wall 13a.
Is clamped to the top end portion of Be careful
However, the connecting metal fastener 13c extends radially outward.
Has a flange that fits
Mounting hole 13f is formed. Therefore, this connecting metal
Fastener 13c increased against mesh screen 13
Provides structural integrity as well as connection to related components
The means to make it do. As shown in FIG.
The connection metal fastener 13c is located at the top end of the mesh screen 13.
The ring is fixed to the part and has a circular shape.
Fits tightly inside the shaped cooling gas block 12
Have been. The block 12 is effectively in the longitudinal direction.
An extension of the cylindrical side wall 10 is defined. Connection metal fastening
Duplicate to the position corresponding to the mounting hole 13f formed in the clothing 13c.
Ring-shaped screw with several mounting holes
Bracket 34 on the flange of the connecting metal fastener 13c
Located and then mesh screen 13
To the cooling gas block 12 by the bracket 34 and screws
It is fixed. Note that the features described above
Welding, soldering in addition to or as an alternative to mechanical fastening means
Other fixing means such as mounting and sintering can be used
It is. Where fasteners are made of stainless steel
In some cases, the strength can be increased by performing spot welding.
Noh.   In the embodiment shown in FIG.
The lamp assembly 18 is provided inside the lamp. The
The lamp assembly 18 is generally along the longitudinal axis of the microwave cavity 8.
An elongated stem 18a extending at a free end of the stem 18a.
It has a luminescent bulb or lamp 18b that is fixed.
You. The lamp 18b includes gas and gas, as is known to those skilled in the art.
Containing solid and / or liquid additive elements,
Absorbs the microwave introduced into the microwave cavity 8
And emit light. In the illustrated embodiment, the lamp
18b is a spherical lamp. However, if desired, deformation
Use non-spherical lamps such as spherical lamps and circular lamps.
Both are possible. Note that the configuration shown
In operation, the lamp 18b is moved by the mesh screen 13.
Is located inside the area defined by the Lamp 18
b to collect and increase the light emitted from b
Lamp 18b with a mesh screen 1
It is desirable to be located as close as possible to end wall 13b of 3
New In this connection, a dome-shaped end wall 13b is used.
It is desirable to do. Because the lamp
18b at a position further away from the closed end of microwave cavity 8
Not only can it be positioned, but also on the lamp 18b
On the other hand, it is possible to uniformly apply a microwave.
The dome-shaped end wall 13b is spherical or substantially spherical in shape.
When used in combination with a lamp 18b, which is generally spherical,
It is effective for Because such a connection is uniform
This is because it contributes to obtaining light output.   The stem 18 for holding the lamp 18b in place is
It can be composed of the desired material, but it is
It is made of a material that does not absorb microwaves.
For example, the stem 18a is made of synthetic resin or glass.
It is possible. Stem 18a intended lamp 18b
Stiff enough to be able to hold in position
Should be. In one example, stem 18a is medium
It is possible to have an empty configuration.   In the embodiment shown in FIG.
Is rotatably supported and is driven and rotated during operation.
You. This aspect of the invention is described in more detail below. No.
As shown in FIG. 1, a through hole 11a is formed at the center of the end wall 11.
And a bottom bearing 20 is provided in the end wall 11.
You. A plurality of columns 21 (only 21a and 21b are shown in FIG. 1)
Extends upward and is implanted in the end wall 11.
The upper plate 22 is fixed to the top of the column 21.
The upper bearing 23 is located at the center of the upper plate 22 and the bottom bearing 20.
Further, the microwave cavity 8 is provided so as to be axially aligned with the longitudinal axis.
Have been killed. On the other hand, the metal ferrule 18c is
Fitted on the base end and metal ferrule 18c
Are spaced apart from each other along the longitudinal axis of the stem 18a.
Extending through a pair of bearings 20 and 23
Supported by these. As a result, lamp assembly
The body 18 is at two points, bearings 20 and 23, the stem 18
It is rotatably supported around the longitudinal axis of a. Like this
The two-point support structure rotatably supports the lamp assembly 18.
It is extremely useful for Because it is a lamp
Assembly 18 has been driven and rotated in microwave cavity 8
In some cases, the lamp 18b may be maintained in a predetermined position.
It is because it contributes to. This is extremely important
You. Because, when the lamp 18b is driven and rotated, the position
Fluctuates, the intensity of the light output fluctuates.   As shown in FIG. 1, the metal ferrule of the lamp assembly 18
The sprocket 24 is fixed on the screw 18c. End wall 1
1 has a support plate 11b as an extension thereof, and
Motor 25 is fixed to the support plate 11b. S
Proket 26 is secured on the drive shaft of motor 25
And the endless chain 27 and the drive sprocket 26
It extends between the driven sprocket 24 and the driven sprocket 24. Follow
The motor 25 is driven and rotated, thereby
Drive assembly 18 in microwave cavity 8
It is possible to In this case, the rotational force is
Stem 18a located between the bearings 20 and 23
Since it is applied to the metal ferrule 18c, the lamp 18b
Is prevented from rocking when it is driven and rotated
ing.   Next, the lamp incorporated in the apparatus shown in FIG.
Cooling system that provides cooling gas flow to 18b
explain. In the electrodeless light source device 1 shown in FIG.
Is equipped with a cooling system for cooling the lamp 18b.
It is located around the lamp 18b, i.e., of the lamp assembly 18.
A plurality arranged around the longitudinal axis (in the illustrated embodiment,
(Four nozzle assemblies). Fig. 1
Two sets of nozzles arranged opposite to each other
Only the solids 30, 30 are shown. In the illustrated embodiment
And four at equal angular intervals around the longitudinal axis of the lamp assembly 18
It should be noted that the nozzle assembly 30 of
is there. It should be noted that the present embodiment is limited only to such a specific arrangement.
It should not be. Each nozzle assembly 30 is shown in FIG.
And it has a general S-shape
A nozzle 31 and a metal ferrule fixed to the base end of the nozzle 31
Rule 32 is provided. The nozzle 31 is preferably transparent.
Light, that is, allowing light to pass through it, and
Materials that do not absorb microwaves, such as quartz
It is configured. The nozzle 31 may be, for example, a ceramic
It can be made of opaque material such as Mick.
You. The metal ferrule 32 has a plug portion 32a and a threaded portion.
A portion 32b is provided. As will be revealed later
Note that only the length of the nozzle 31 differs.
There are four different types of nozzle assemblies 30
I have. That is, four different types differing only in the length of the nozzle 31
Different types of nozzle assemblies 30 are provided.   As shown in FIG. 1, a ring-shaped cooling gas blower
A lock 12 is fixed to the lower end of the cylindrical side wall 11,
In this case, a lower extension of the cylindrical side wall 11 is defined. Block
In the embodiment shown in FIG.
Are provided with four mounting holes. In addition,
The screw assembly 30 is inserted into the corresponding mounting hole of the block 12.
Metal ferrule or fitting 32
It can be mounted at a predetermined position. Metal ferrule
The spacer 38 is fitted on the
Screw on the threaded portion 32b of the metal ferrule 32, and follow
Therefore, the nozzle assembly 30 is fixed at a predetermined position.
You. Next, the connector 35a of the cooling gas hose 35 is
The ferrule 32 is screwed to the threaded portion 32b. So, for example
A cooling gas such as air is supplied through a hose 35 to a cooling gas source.
(Not shown) can be supplied to the nozzle assembly 30
is there. Nozzle assembly 30 was so mounted in place
In the state, the tip of the nozzle 31 from which the cooling gas is discharged is
18b is located against the selected longitude position. Also long
4 nozzle assemblies 30 with nozzles 31 of different sizes
Since they are mounted in place around the pump 18b, these
The tip of nozzle 31 of four different nozzle assemblies 30 is run
18b are oriented to each selected latitude position. This
In this configuration, the four nozzle assemblies 30
The gas flow released is directed to different parts of lamp 18b.
Oriented, thus uniformly cooling the entire surface of lamp 18b
It is possible. Note that lamp 18
more than 4 to increase uniformity in cooling of b
Or fewer nozzle assemblies 30
Is also possible. Such uniform cooling of the lamp 18b is not possible.
Damage caused by the uniform heat distribution and destroying the lamp 18b
To prevent high local stresses
And useful.   In the embodiment shown, lamp 18b is turned on during operation.
Each part of the lamp 18b is uniformly cooled
It is possible to do. This is illustrated in FIGS. 5a to 5c.
A better understanding can be obtained with reference to the figures. Immediately
That is, as shown in FIG. 5a, the four nozzle assemblies 30a to 30a
0d is arranged around the rotation axis of the lamp 18b. 4
The tip of each nozzle assembly is along the rotation axis of the lamp 18b.
Are located at different heights. For example, as shown in FIG.
As described above, the two nozzles disposed on the opposite sides of the rotation axis
The nozzle assemblies 30a and 30b are discharged from the nozzle assembly 30a.
The flow of cooling gas to be directed is directed to the top A of the lamp 18b.
And discharged from the other nozzle assembly 30b.
So that the flow of the reject gas is directed to the bottom B of the lamp 18b
And their tips are located. Further, as shown in FIG.
As shown in FIG.
The two nozzle assemblies 30c and 30d are separated from the nozzle assembly 30c.
The flow of the discharged cooling gas is lower middle of the lamp 18b.
Directed to section C and discharged from nozzle assembly 30d
The flow of the cooling gas is transferred to the upper intermediate portion D of the lamp 18b.
Their tips are positioned so that they are pointed. That
As a result, the lamp 18b is kept rotating during operation.
The flow of the cooling gas is evenly distributed over the entire surface of the lamp 18b.
Applied, so that the lamp 18b is cooled and its entire surface
Is maintained at a constant temperature over a period of time. It is important to note
But multiple cooling units at different latitudes of lamp 18b
Since the gas flow is applied, it is applied to each latitude part.
Change the amount of cooling gas to be
Can be maintained at a constant temperature on all surfaces
Noh. For such multiple cooling jets
The variable flow rate allows the lamp 18b to
Useful when heated.   Next, the wider, built-in embodiment shown in FIG.
Yet another aspect of the invention for obtaining uniform illumination in an area
I will explain about the side. As shown in the embodiment of FIG.
The microwave-driven electrodeless light source device 1 has an umbrella-shaped
It has a projectile 40. Frame or housing of device 1
A central hole is formed in the base plate 37 that
Through which the mesh portion of the microwave cavity 8
The minute 8b extends downward. The reflector 40 is
A hole at the top.
Have been. Therefore, the mesh portion 8b of the microwave cavity 8
Also extends through this hole in the reflector 40. cooling
Between the gas block 12 for use and the base plate 37
33 are provided, and the block 12 and the base plate 37
The gap between them is sealed. Further, the closing member 33 and the base
Between base plate 37 and base plate 37 and reflector 40
An RF gasket 36 is provided extending between the rear surface
ing. By providing the RF gasket 36, the microphone
This effectively prevents the waves from leaking to the outside.   As shown in FIG. 1, an umbrella-shaped reflector 40 is
It has a facet, that is, a split surface configuration. That is, reflection
The vessel 40 comprises a plurality of vessels each defined by a frustoconical peripheral surface.
(Six in the illustrated embodiment) reflectors 40a-4
It has 0f. Thus, in the illustrated embodiment,
The reflective surface of each of the reflector segments 40a to 40f is
The surface is a flat surface. In addition, reflector segment 40a
The angle of inclination of each of the to 40f is from the inner segment 40a to the outer
It gradually increases monotonically toward segment 40f.
Importantly, this multi-faceted reflector
40 provides high-resolution light irradiation over a large area on the image plane.
It is configured to give. Regarding this aspect of the invention
The details will be described below with reference to FIG.   In the configuration shown in FIG. 7, three simplifications are used for simplification.
Only reflector segments 40a-40c are shown. Fig. 7
As shown in the figure, the rotation axis of the lamp 18b is
Therefore, the irradiation direction or the central axis of the irradiated light is defined.
I have. The light emitted from the lamp 18b is reflected by the reflector segment.
Selected point on image plane 50 reflected by one of the
Incident on 50b or 50c or directly
Pointed to point 50b or 50c. On the selected point 50b or 50c
Angle θ formed between these two light beams incident on
(That is, in the illustrated example, θ₇Or θ₆) Is the local divergence angle
Defined as degrees. Near the center around the central axis
This local dispersion angle θ (that is, in the illustrated example,
θ₅) Reflects from opposite point of same reflector segment
Defined by the two light fluxes. Determine the degree of resolution
This local divergence angle plays an important role in determining
The smaller the local divergence angle, the higher the resolution. Book
The reflector 40, which has been divided into planes, maximizes the light intensity,
It is possible to minimize the local divergence angle as much as possible
I have. In addition, the entire area of interest on the image plane 50 is
That the local divergence angle is kept substantially constant.
And is important. Local divergence angle passes to area of interest
If they remain substantially constant,
Substantially constant resolution over an area
Becomes In other words, pass to the area of interest on the image plane 50.
If the local divergence angle is substantially uniform, θ
₅≒ θ₆≒ θ₇Is satisfied.   Therefore, the reflector 40 extends over a large area on the image plane 50.
To provide uniform, high light intensity and high resolution light irradiation
It is possible. Therefore, as a result from the device 1,
The resulting light irradiation is substantially collimated and
Parallel to the irradiation direction. Note that the anti
Projectile 40 is large in size (ie has a large diameter
So the light reflected from the reflector 40 is wider on the image plane 50
Exactly substantially at right angles across the area. Further attention
What should be done is that the local divergence angle is as small as possible
Maintained and substantially uniform over a large area on the image plane 50.
It is kept constant. Note that the reflector 40
Have a continuous reflective surface, if desired, without splitting
Is also possible. However, the surface division configuration is designed and manufactured.
Is greatly facilitated, which is preferable. This means
This is especially true when reflector 40 is made from metal.
Therefore, if the reflector 40 is configured to be divided into surfaces,
Is because the machining is significantly facilitated.   In the electrodeless light source device 1 shown in FIG.
An outer screen 42 is also attached to the outer flange 40.
Have been. This outer screen 42 participates in the light emission function
It does not emit from the microwave cavity 8
To prevent microwaves that may be emitted
It stops. Mesh portion 8b of microwave cavity 8
Is defined by the mesh member,
Microwaves may be emitted from the wave cavity 8.
Even in such a case, the outer screen 42 is such a microphone
It functions to prevent waves from leaking out. One example
In FIG. 6, the external screen 42 is shown in FIG.
Formed as a screen formed by etching
It is possible to In this case, the outer screen 42
Is, for example, a honeycomb shown in FIG. 6 from aluminum or the like.
Shape by etching into patterns such as patterns
Is possible. Such a dual screen configuration
Is effective in preventing microwaves from leaking into the atmosphere.
It is fruitful.   Further, as shown in FIG. 1, the front end of the device 1 is protected.
Glass plate 44 is provided. This protective glass
The splats 44 are used to remove dust and dust
This prevents adhesion to the screen 13 and
Debris nears when explosion explodes for some reason
It functions to prevent collision with many operators.
The glass plate 44 is made of Pyrex glass or
Any other glass material that allows the transmission of light
It can be formed from Synthesis obtained from device 1
Light irradiation has high light intensity and is relatively collimated
So that light is reflected by the surface of the glass plate 44
Which increases the local divergence angle and reduces the resolution.
It tends to lower. To cope with this condition, glass
Reflection on the inner surface of plate 44, preferably on both sides
The prevention film 44a is formed. According to this configuration, the combined light
Irradiation passes through glass plate 44 without reflection
And therefore the local divergence angle can be kept to a minimum
Becomes Effect   As described above, according to the present invention, stable over a long period of time
Microwave driven type that can supply
An electrode light source device is provided. Also provides high intensity light output
To provide high power microwave cavities
You. Furthermore, the light output is uniform over a large area of interest
And high resolution, which is a conventional electrodeless light source device
It was not possible with either of them.   The above is a detailed description of specific embodiments of the present invention.
However, the present invention should not be limited to only these specific examples.
Instead, without departing from the technical scope of the present invention
Of course, various modifications are possible.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram showing the overall configuration of a microwave-driven electrodeless light source device 1 configured based on one embodiment of the present invention, and FIG. FIG. 3 is a schematic diagram illustrating a two magnetron system in which two separate magnetrons are coupled to the same microwave cavity constructed according to an embodiment;
3a to 3e are schematic views showing a dome-shaped mesh screen configured according to one embodiment of the present invention,
FIG. 3f is a schematic view showing a modification of FIG. 3c, FIG. 4 is a schematic view showing a nozzle assembly constructed based on one embodiment of the present invention, and FIGS. FIG. 6 is a schematic view showing an arrangement of four nozzle assemblies in a cooling system configured according to an embodiment of the present invention; FIG. 6 is an etched outer screen configured according to an embodiment of the present invention; FIG. 7 is a schematic diagram useful for explaining the principle of a reflector configured according to an embodiment of the present invention. (Explanation of symbols) 1: Microwave driven electrodeless light source device 8: Microwave cavity 8a: Solid wall portion 8b: Mesh wall portion 10: Cylindrical side wall 11: End wall 12: Cooling gas block 13: Dome-shaped mesh Screen 14: Waveguide 15: Magnetron 18: Lamp assembly 18a: Stem 18b: Lamp (sphere) 20,23: Bearing 30: Nozzle assembly 40: Reflector 42: Outer screen 44: Glass plate

Claims (1)

(57) [Claims] A lamp rotatably positioned about a predetermined axis of rotation in the microwave cavity and absorbing microwaves to emit light; and a lamp extending into the microwave cavity and disposed around the lamp. A plurality of nozzles, each flow of the cooling gas emitted from the plurality of nozzles is directed to each corresponding latitude position along the rotation axis of the lamp. Lamp cooling, characterized in that, when the lamp is rotated, the cooling flow is applied to the entire surface of the lamp, whereby the lamp is cooled substantially uniformly over the entire surface. apparatus. 2. 2. The lamp cooling device according to claim 1, wherein said lamp has a substantially spherical shape. 3. 3. The lamp cooling device according to claim 2, wherein the plurality of nozzles are disposed around the rotation axis at substantially equal angular intervals. 4. Any one of claims 1 to 3
9. The lamp cooling system according to claim 1, wherein each of the plurality of nozzles extends from the outside into the microwave cavity, and is made of a material that does not substantially absorb microwaves. apparatus. 5. 5. The lamp cooling device according to claim 4, wherein each of the plurality of nozzles is at least partially made of quartz. 6. 5. The lamp cooling device according to claim 4, wherein each of said plurality of nozzles is at least partially made of ceramic.