JP2697544B2 - Analysis method for electroless tin, lead or their alloy plating bath - Google Patents

Analysis method for electroless tin, lead or their alloy plating bath

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Publication number
JP2697544B2
JP2697544B2 JP5026081A JP2608193A JP2697544B2 JP 2697544 B2 JP2697544 B2 JP 2697544B2 JP 5026081 A JP5026081 A JP 5026081A JP 2608193 A JP2608193 A JP 2608193A JP 2697544 B2 JP2697544 B2 JP 2697544B2
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JP
Japan
Prior art keywords
plating
lead
plating bath
amount
tin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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JP5026081A
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Japanese (ja)
Other versions
JPH06222007A (en
Inventor
廣記 内田
元伸 久保
雅之 木曽
徹 上玉利
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
C.UYEMURA&CO.,LTD.
Original Assignee
C.UYEMURA&CO.,LTD.
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Priority to JP5026081A priority Critical patent/JP2697544B2/en
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Application granted granted Critical
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、銅又は銅合金に無電解
錫、鉛又はそれらの合金めっきを行うに際し、めっき操
作に伴うめっき液の汲み出しによるめっき浴中の各成分
の減少量を定量する分析方法に関し、更に詳述すると、
めっき浴中の各成分の汲み出しによる減少分を簡易かつ
的確に定量し得、この定量値に応じて各成分を補給する
ことによって一定の成分組成を確実に保持させることが
可能な無電解錫、鉛又はそれら合金めっき浴の分析方法
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention determines the amount of reduction of each component in a plating bath due to pumping of a plating solution during a plating operation when electroless tin, lead or an alloy thereof is plated on copper or a copper alloy. In more detail, the analysis method
Electroless tin which can easily and accurately quantify the decrease due to the pumping out of each component in the plating bath, and which can reliably maintain a constant component composition by replenishing each component according to this quantitative value, The present invention relates to a method for analyzing a plating bath of lead or an alloy thereof.

【0002】[0002]

【従来の技術及び発明が解決しようとする課題】従来よ
り、電子工業部品、回路等の銅又は銅合金部分にはんだ
付け性を付与するため、電気めっき法により錫、鉛又は
錫・鉛合金めっき皮膜を形成することが行われている
が、電子装置の小型化にともなって部品や回路等も微小
化又は複雑化し、電気めっき法ではめっきできない部分
も生じてきている。
2. Description of the Related Art Conventionally, in order to impart solderability to copper or copper alloy parts of electronic industrial parts, circuits, etc., tin, lead or tin-lead alloy plating is carried out by electroplating. Although a film is formed, components and circuits are miniaturized or complicated with the miniaturization of electronic devices, and some parts cannot be plated by electroplating.

【0003】そこで、これら電気めっき法の適用が困難
な部分にもめっき可能な無電解錫、鉛又は錫・鉛合金め
っき法が検討されている。例えば、特開平1−1842
79号公報には、特定の有機スルホン酸、該有機スルホ
ン酸の錫及び鉛塩、次亜燐酸ナトリウム(還元剤)及び
チオ尿素(錯化剤)を主成分とする無電解錫・鉛合金め
っき浴を用いる方法が提案されている。
[0003] Therefore, an electroless tin, lead or tin-lead alloy plating method capable of plating even a portion where application of the electroplating method is difficult has been studied. For example, Japanese Patent Application Laid-Open No. 1-1842
No. 79 discloses an electroless tin-lead alloy plating containing a specific organic sulfonic acid, tin and lead salts of the organic sulfonic acid, sodium hypophosphite (reducing agent) and thiourea (complexing agent) as main components. A method using a bath has been proposed.

【0004】しかし、従来の無電解錫、鉛又は錫・鉛合
金めっき法は、めっき浴の金属補給を行わずに金属濃度
が析出限界以下に低下したらそのまま廃棄する使い捨て
のバッチ方式が多く、このためめっき皮膜を薄く形成す
る場合に採用されているもので、厚いめっき皮膜を得る
目的でめっき浴を連続使用する提案はほとんどなく、従
って連続使用に必要な連続的に一定の析出量を維持でき
るめっき浴の補給管理方法については、実用上有効な提
案が見当らないのが現状である。
[0004] However, the conventional electroless tin, lead or tin-lead alloy plating method is often a disposable batch method in which the metal concentration in the plating bath is reduced to a deposition limit or less without replenishing the metal, and the metal is discarded as it is. Therefore, there is almost no proposal to use a plating bath continuously for the purpose of obtaining a thick plating film, and therefore a constant and constant deposition amount required for continuous use can be maintained. As for the replenishment management method of the plating bath, there is no practically effective proposal at present.

【0005】一方、通常の無電解めっき法においては、
消費された金属分に見合う薬剤をめっき浴に補給するこ
とにより、厚付けを可能にしている。具体的には、使用
めっき液を分析して金属濃度を測定し、その測定結果か
ら不足の金属分を算出し、その計算結果に応じた量の薬
剤を補給することにより液管理が行われている。
On the other hand, in a normal electroless plating method,
Replenishing the plating bath with a chemical corresponding to the consumed metal content enables thickening. More specifically, solution management is performed by analyzing the plating solution used, measuring the metal concentration, calculating the insufficient metal component from the measurement result, and replenishing the amount of the chemical according to the calculation result. I have.

【0006】しかしながら、本発明者らの検討によれ
ば、無電解錫、鉛又は錫・鉛合金めっき浴の場合、金属
成分の錫、鉛は元来簡易分析が困難な元素であり、しか
も無電解めっき液中ではめっきの進行と共に被めっき物
から溶出した銅がめっき浴中に溶解,蓄積していくた
め、錫及び鉛成分を簡易かつ正確に分析することは困難
であり、上述した通常のめっき浴管理方法は無電解錫、
鉛又は錫・鉛合金めっき浴に対しては適用することが困
難であった。
However, according to the study of the present inventors, in the case of electroless tin, lead or a tin-lead alloy plating bath, the metal components tin and lead are elements which are originally difficult to analyze easily, and the In the electrolytic plating solution, the copper eluted from the object to be plated dissolves and accumulates in the plating bath as the plating proceeds, so that it is difficult to easily and accurately analyze tin and lead components. Plating bath management method is electroless tin,
It was difficult to apply to a lead or tin / lead alloy plating bath.

【0007】そこで、本発明者らは、無電解錫、鉛又は
錫・鉛合金めっき浴の錫、鉛消費量を比較的簡易に分析
し得、無電解錫、鉛又は錫・鉛合金めっき浴の浴管理を
効果的に行う方法を開発すべく、種々のテストを繰り返
した結果、めっきの進行にともなってめっき浴中に溶出
してくる銅の量と消費される金属の量との間に比例関係
があることを見出し、めっき浴中の銅イオン濃度を測定
し、該測定値に応じて金属成分の補給を行う方法を先に
提案した(特開平4−276081号公報)。
Therefore, the present inventors can relatively easily analyze the tin and lead consumption of the electroless tin, lead or tin-lead alloy plating bath, and can analyze the electroless tin, lead or tin-lead alloy plating bath. As a result of repeating various tests in order to develop a method for effectively performing bath management, the amount of copper eluted into the plating bath as the plating progresses and the amount of metal consumed is reduced. The inventors have found that there is a proportional relationship, and have previously proposed a method of measuring the copper ion concentration in a plating bath and replenishing metal components in accordance with the measured value (Japanese Patent Application Laid-Open No. 4-276081).

【0008】しかしながら、その後の研究により、めっ
き浴中の銅濃度の分析だけでは、適正な濃度組成に維持
できない場合があることが判明した。即ち、めっき操作
に伴うめっき液の汲み出しによってめっき液が希釈され
ることによる金属成分の減少分が補給されず、まためっ
きの進行により銅がめっき浴中に溶出しても、めっき浴
中の銅濃度が溶出した銅が汲み出される分上がらない場
合が生じ、このため的確な金属補給ができない場合があ
る。
However, subsequent studies have revealed that the analysis of the copper concentration in the plating bath alone may not be able to maintain an appropriate concentration composition. That is, the reduction of the metal component due to the dilution of the plating solution due to the pumping out of the plating solution during the plating operation is not supplied, and even if the copper elutes into the plating bath due to the progress of plating, the copper in the plating bath is In some cases, the concentration of the eluted copper may not be increased enough to be pumped out, so that accurate metal replenishment may not be possible.

【0009】ここで、無電解めっき浴の汲み出し等によ
る各成分の減少を補正するには、各成分を原子吸光分析
法等により各成分の濃度を測定し、該測定結果に応じて
各成分を補給すればよいが、このような濃度測定を連続
めっき中に随時行うことは処理効率上極めて困難であ
り、このためめっき工場現場において、めっき作業を中
断することなく、簡易に汲み出し等による各成分の減少
量を定量することができ、かつ自動分析が可能で、自動
管理装置等と組み合わせることにより随時液補給を行う
ことが可能な無電解錫、鉛又はそれらの合金めっき浴の
分析方法の開発が望まれる。
Here, in order to correct the decrease of each component due to pumping out of the electroless plating bath or the like, the concentration of each component is measured by atomic absorption spectrometry or the like, and each component is measured according to the measurement result. However, it is extremely difficult to perform such concentration measurement at any time during continuous plating due to processing efficiency.Therefore, at the plating factory site, each component can be easily extracted by pumping without interrupting the plating operation. Development of an electroless tin, lead or alloy plating bath analysis method that can quantify the amount of decrease in amount and can perform automatic analysis and can perform liquid replenishment at any time by combining with an automatic management device Is desired.

【0010】本発明は、上記事情に鑑みなされたもの
で、汲み出しによりめっき浴中の成分の減少量を簡易か
つ正確に定量分析することができ、自動分析が可能で、
この定量値に応じて随時各成分を補給することによって
一定の成分組成を確実に保持させることが可能な無電解
錫、鉛又は錫・鉛合金めっき浴の分析方法を提供するこ
とを目的とする。
The present invention has been made in view of the above circumstances, and it is possible to easily and accurately quantitatively analyze the reduction amount of components in a plating bath by pumping, and to perform automatic analysis.
An object of the present invention is to provide a method for analyzing an electroless tin, lead or tin-lead alloy plating bath that can reliably maintain a constant component composition by replenishing each component as needed according to this quantitative value. .

【0011】[0011]

【課題を解決するための手段及び作用】本発明者らは、
上記目的を達成するため鋭意検討を行った結果、水溶性
錫塩及び/又は水溶性鉛塩、これら塩を溶解する酸、及
び錯化剤としてチオアミド類を含有してなる無電解めっ
き浴において、該めっき浴中から分析試料としてめっき
液を分取し、この試料を酸性に調整すると共に、ビスマ
スイオンを添加して発色させ、比色分析することにより
めっき液中に錯化剤として添加されているチオアミド類
の濃度を測定し、このチオアミド類の濃度減少分より他
の各成分の減少量を算出することにより、汲み出しによ
るめっき浴中の各成分の減少量が正確にしかも簡単に定
量できることを見出した。
Means and Action for Solving the Problems The present inventors have
As a result of intensive studies to achieve the above object, a water-soluble tin salt and / or a water-soluble lead salt, an acid dissolving these salts, and an electroless plating bath containing thioamides as a complexing agent, A plating solution was taken out from the plating bath as an analysis sample, and the sample was adjusted to be acidic, bismuth ions were added to develop a color, and colorimetric analysis was performed to add the plating solution as a complexing agent. By measuring the concentration of thioamides in the plating bath and calculating the amount of reduction of each of the other components from the decrease in the concentration of thioamides, it is possible to accurately and easily quantify the amount of reduction of each component in the plating bath by pumping. I found it.

【0012】即ち、めっき液の汲み出しによる各成分の
濃度の減少量は、各成分の濃度に比例すると予想され、
これは汲み出し実験によって確認することができる。よ
って、めっき液中のどれか一成分を定量分析し、その減
少量から他の成分の減少量をその含有率から比例的に算
出することが可能であると考えられる。しかしながら、
めっき浴中の金属イオンは、汲み出しによる濃度減少と
共に、めっき操作により濃度が変動するので、その解析
が困難である。そこで、本発明者らはめっき液中で金属
成分を錯体化するチオ尿素等のチオアミド類を定量分析
して、該チオアミド類の減少分から他の成分の減少量を
算出するべく、めっき液中のチオアミド類を簡易で自動
分析に適した比色法により定量分析する方法について鋭
意検討を行った。
That is, the amount of reduction in the concentration of each component due to pumping out of the plating solution is expected to be proportional to the concentration of each component.
This can be confirmed by pumping experiments. Therefore, it is considered that any one component in the plating solution can be quantitatively analyzed, and the reduction amount of the other component can be proportionally calculated from the content ratio based on the reduction amount. However,
The analysis of the metal ions in the plating bath is difficult because the concentration changes due to the plating operation as the concentration decreases due to pumping. Therefore, the present inventors quantitatively analyze thioamides such as thiourea which complex metal components in the plating solution, and calculate the amount of reduction of other components from the amount of reduction of the thioamides in the plating solution. We investigated the method for quantitative analysis of thioamides by simple colorimetry suitable for automatic analysis.

【0013】その結果、ビスマスイオンをめっき液に添
加して発色させる方法を見出した。即ち、従来よりビス
マスの定量分析にチオ尿素を加えて比色法により測定を
行う方法が知られており、この方法はビスマスイオンと
チオ尿素及びその誘導体とが錯体を形成して黄色に発色
することを利用した分析法であるが、本発明者らはビス
マスイオンをチオアミド類に添加することにより発色さ
せ、チオアミド類を比色分析により定量できるのではな
いかと考えた。しかしながら、錫、鉛又は錫・鉛合金め
っき浴から分取しためっき液に単にビスマスイオンを添
加しても安定な発色は得られず、そこでこの発色を安定
させるべく更に検討を進めた結果、試料に酸を添加して
酸性化し、特にpH2.0以下に調整した後、ビスマス
イオンを添加することにより、安定的な発色が得られ、
比色法により容易かつ正確にチオアミド類の濃度を定量
分析し得ることを見出し、本発明を完成したものであ
る。
As a result, they found a method of adding bismuth ions to a plating solution to form a color. That is, conventionally, a method is known in which thiourea is added to quantitative analysis of bismuth and measurement is performed by a colorimetric method. In this method, bismuth ions and thiourea and a derivative thereof form a complex to develop a yellow color. In this analysis method, the inventors of the present invention thought that coloration could be achieved by adding bismuth ions to thioamides, and the thioamides could be quantified by colorimetry. However, even if bismuth ions are simply added to the plating solution separated from the tin, lead or tin-lead alloy plating bath, stable color formation cannot be obtained. After acidification by adding an acid to the mixture, particularly after adjusting the pH to 2.0 or less, stable color development is obtained by adding bismuth ions.
The inventors have found that the concentration of thioamides can be quantitatively analyzed easily and accurately by a colorimetric method, thereby completing the present invention.

【0014】従って、本発明は、水溶性錫塩及び/又は
水溶性鉛塩、これら塩を溶解する酸、及び錯化剤として
チオアミド類を含有してなる無電解めっき浴を用い、被
めっき物に無電解錫、鉛又はそれらの合金めっきを施す
に際し、めっき操作に伴う汲み出しによるめっき浴中の
各成分の減少量を定量するための分析方法であって、上
記めっき浴から少量のめっき液を分取し、これを酸性に
調整した後、ビスマスイオンを添加して発色させ、比色
法によりめっき液中のチオアミド類の濃度を測定してそ
の減少量を求めると共に、このチオアミド類の減少量か
ら他の成分の減少量を求めることを特徴とする無電解
錫、鉛又はそれらの合金めっき浴の分析方法を提供する
ものである。
Accordingly, the present invention provides an electroless plating bath containing a water-soluble tin salt and / or a water-soluble lead salt, an acid dissolving these salts, and a thioamide as a complexing agent. When performing electroless tin, lead or alloy plating thereof, an analysis method for quantifying the amount of reduction of each component in the plating bath by pumping out with the plating operation, wherein a small amount of the plating solution is removed from the plating bath. After the mixture was adjusted to be acidic, bismuth ions were added to form a color, and the concentration of thioamides in the plating solution was measured by a colorimetric method to determine the amount of reduction, and the amount of reduction of this thioamide was determined. The present invention provides a method for analyzing electroless tin, lead or alloy plating baths thereof, wherein the amount of reduction of other components is determined from the following.

【0015】以下、本発明につき更に詳しく説明する。
本発明で用いられるめっき浴は、水溶性錫塩、水溶性鉛
塩又はそれらの混合物からなる金属塩成分と、これらの
金属塩を溶解する酸成分と、錯化剤とを主成分として含
有するものである。
Hereinafter, the present invention will be described in more detail.
The plating bath used in the present invention contains a metal salt component composed of a water-soluble tin salt, a water-soluble lead salt or a mixture thereof, an acid component that dissolves these metal salts, and a complexing agent as main components. Things.

【0016】ここで、水溶性錫塩としては、例えば硫酸
第1錫、アルカンスルホン酸第1錫、、塩化第1錫、ア
ルカノールスルホン酸第1錫、スルホコハク酸第1錫等
が挙げられる。また水溶性鉛塩としては、例えば塩化
鉛、メタンスルホン酸鉛、酢酸鉛、アルカノールスルホ
ン酸鉛、スルホコハク酸鉛等が挙げられ、またこれら金
属塩を溶解する酸成分としては、例えばアルカンスルホ
ン酸、塩酸、アルカノールスルホン酸、過塩素酸、スル
ホコハク酸、ホウフッ酸等が挙げられる。
The water-soluble tin salt includes, for example, stannous sulfate, stannous alkanesulfonate, stannous chloride, stannous alkanolsulfonate, stannous sulfosuccinate and the like. Examples of the water-soluble lead salts include, for example, lead chloride, lead methanesulfonate, lead acetate, lead alkanolsulfonate, and lead sulfosuccinate.Also, examples of the acid component that dissolves these metal salts include alkanesulfonic acid, Examples include hydrochloric acid, alkanolsulfonic acid, perchloric acid, sulfosuccinic acid, and borofluoric acid.

【0017】なお、上記アルカンスルホン酸、アルカノ
ールスルホン酸としては、例えばメタンスルホン酸、エ
タンスルホン酸、プロパンスルホン酸、2−プロパンス
ルホン酸、ブタンスルホン酸、ペンタンスルホン酸、ヘ
キサンスルホン酸、デカンスルホン酸、ドデカンスルホ
ン酸、イセチオン酸(2−ヒドロキシエタン−1−スル
ホン酸)、2−ヒドロキシプロパン−1−スルホン酸、
1−ヒドロキシプロパン−2−スルホン酸、3−ヒドロ
キシプロパン−1−スルホン酸、2−ヒドロキシブタン
−1−スルホン酸、4−ヒドロキシブタン−1−スルホ
ン酸、2−ヒドロキシペンタン−1−スルホン酸、2−
ヒドロキシヘキサン−1−スルホン酸、2−ヒドロキシ
デカン−1−スルホン酸、2−ヒドロキシドデカン−1
−スルホン酸などが挙げられる。
The alkanesulfonic acid and alkanolsulfonic acid include, for example, methanesulfonic acid, ethanesulfonic acid, propanesulfonic acid, 2-propanesulfonic acid, butanesulfonic acid, pentanesulfonic acid, hexanesulfonic acid, and decanesulfonic acid. , Dodecanesulfonic acid, isethionic acid (2-hydroxyethane-1-sulfonic acid), 2-hydroxypropane-1-sulfonic acid,
1-hydroxypropane-2-sulfonic acid, 3-hydroxypropane-1-sulfonic acid, 2-hydroxybutane-1-sulfonic acid, 4-hydroxybutane-1-sulfonic acid, 2-hydroxypentane-1-sulfonic acid, 2-
Hydroxyhexane-1-sulfonic acid, 2-hydroxydecane-1-sulfonic acid, 2-hydroxydodecane-1
-Sulfonic acid and the like.

【0018】上記錯化剤としては、チオアミド類が用い
られ、具体的にはチオ尿素又はチオフォルムアミド,チ
オアセトアミド等のチオ尿素誘導体を例示することがで
き、これらの中ではチオ尿素が一般的に使用される。更
に、めっき浴には次亜リン酸、次亜リン酸塩等の還元剤
を添加することができる。
As the complexing agent, thioamides are used, and specific examples thereof include thiourea and thiourea derivatives such as thioformamide and thioacetamide. Among these, thiourea is generally used. Used for Further, a reducing agent such as hypophosphorous acid or hypophosphite can be added to the plating bath.

【0019】本発明の錫、鉛又はそれらの合金めっき浴
の分析方法は、上記めっき浴中に表面の少なくとも一部
が銅又は銅合金にて形成されている被めっき物を浸漬
し、これにより銅又は銅合金上に錫、鉛又は錫・鉛合金
めっき皮膜を形成するに際し、めっき操作に伴う汲み出
しにより減少しためっき浴中の各成分を補給するべく、
各成分の減少量を定量分析するもので、めっき浴中に錯
化剤として配合されたチオアミド類の濃度を比色法によ
って測定し、その減少分に比例して各成分を求めるもの
である。この場合、本発明においては、めっき浴中から
分析試料としてめっき液を分取し、この試料を酸性に、
好ましくはpH2以下に調整した後、ビスマスイオンを
添加して発色させ、比色法により定量するものである。
The method for analyzing a plating bath of tin, lead or their alloys according to the present invention is characterized in that an object to be plated having at least a part of its surface formed of copper or a copper alloy is immersed in the plating bath. In forming tin, lead or tin-lead alloy plating film on copper or copper alloy, in order to replenish each component in the plating bath reduced by pumping out with plating operation,
The quantitative analysis of the decrease in each component is performed by measuring the concentration of thioamides incorporated as a complexing agent in a plating bath by a colorimetric method, and obtaining each component in proportion to the decrease. In this case, in the present invention, a plating solution is taken out from the plating bath as an analysis sample, and the sample is made acidic,
Preferably, after adjusting the pH to 2 or less, bismuth ions are added to develop a color, and the color is determined by a colorimetric method.

【0020】ここで、試料を酸性に調整するための酸と
しては、硫酸、過塩素酸、ピロリン酸等の無機酸、メタ
ンスルホン酸、エタンスルホン酸等の有機スルホン酸が
挙げられ、これら酸の添加濃度は10〜900g/Lと
することができる。また、この定量分析法は、ビスマス
イオンとチオアミド類とで錯体を形成し、この錯体の発
色を利用したものであり、従って分析の際に分析用の錯
化剤を添加することにより、より正確な比色分析を行う
ことができる。この場合、分析用の錯化剤としては、シ
ュウ酸,酒石酸,クエン酸等のカルボン酸、EDTA,
CyDTA,EDTA−OH,NTA,IDA等のアミ
ノカルボン酸、HEDP(ヒドロキシエタンジホスホン
酸),NTPO(ニトリロトリスメチレンスルホン酸)
等の有機ホスホン酸及びこれらの塩などが挙げられ、こ
れらを単独で又は複数種を組み合わせて使用することが
できる。これら分析用錯化剤の添加濃度は、特に制限さ
れないが、通常5〜200g/Lの範囲とされる。
The acid for adjusting the sample to be acidic includes inorganic acids such as sulfuric acid, perchloric acid and pyrophosphoric acid, and organic sulfonic acids such as methanesulfonic acid and ethanesulfonic acid. The addition concentration can be 10 to 900 g / L. In addition, this quantitative analysis method utilizes a coloration of the complex by forming a complex between the bismuth ion and the thioamides. Therefore, by adding a complexing agent for analysis at the time of analysis, it is more accurate. Colorimetric analysis. In this case, as a complexing agent for analysis, carboxylic acids such as oxalic acid, tartaric acid and citric acid, EDTA,
Aminocarboxylic acids such as CyDTA, EDTA-OH, NTA, IDA, HEDP (hydroxyethanediphosphonic acid), NTPO (nitrilotrismethylenesulfonic acid)
And the like, and salts thereof, and the like, and these can be used alone or in combination of plural kinds. The concentration of the complexing agent for analysis is not particularly limited, but is usually in the range of 5 to 200 g / L.

【0021】上記ビスマスイオンは、上記酸の塩、硝酸
塩、塩化塩あるいはそれらの塩基性塩又は酸化物として
試料に添加することができ、添加濃度は、特に限定され
ないが、金属で0.001〜20g/L程度とすること
が適当である。なお、比色分析法としては、波長480
nm付近での吸光度を測定する方法が簡単かつ正確にチ
オアミド類濃度を定量でき、かつ自動分析に適している
点から推奨される。
The bismuth ion can be added to the sample as the above-mentioned acid salt, nitrate, chloride or a basic salt or oxide thereof. The concentration of the bismuth ion is not particularly limited. Suitably, it is about 20 g / L. The colorimetric analysis method uses a wavelength of 480.
The method of measuring the absorbance around nm is recommended because it can easily and accurately quantify the concentration of thioamides and is suitable for automatic analysis.

【0022】このように、めっき浴中のチオアミド類濃
度を測定し、その減少分とその他各成分の含有割合から
比例的に他の成分の減少量を求める。これにより、めっ
き浴中の全成分の汲み出しによる減少量を得ることがで
き、この分析操作をめっき操作中に随時行って、その結
果に応じて不足分を補うように各成分をめっき浴に補充
することにより、汲み出しによるめっき浴の組成変化を
補正して常に設定した成分組成で安定的にめっきを行う
ことが可能となる。なお、このとき各成分の減少量に応
じて各成分をそれぞれ単独で補充してもよいが、適正な
組成に調製した補充液を分析により得られたチオアミド
類の減少量を補充するようにめっき液に加えることによ
り、全成分を一度にかつ正確に補充することができる
上、他の成分の減少量をいちいち算出する必要もなく、
簡便に正確な浴管理を行うことができる。
As described above, the concentration of thioamides in the plating bath is measured, and the reduced amount of other components is determined in proportion to the reduced amount and the content ratio of other components. As a result, it is possible to obtain a reduced amount due to the pumping out of all components in the plating bath.This analysis operation is performed at any time during the plating operation, and each component is replenished to the plating bath so as to compensate for the shortage according to the result. By doing so, it becomes possible to correct the composition change of the plating bath due to pumping out and to stably perform plating with the always set component composition. At this time, each component may be independently replenished according to the reduced amount of each component, but a replenisher prepared to an appropriate composition is plated so as to replenish the reduced amount of thioamides obtained by analysis. By adding to the solution, all components can be replenished at once and accurately, and it is not necessary to calculate the reduction amount of other components one by one,
It is possible to easily and accurately perform bath management.

【0023】本発明の分析方法によれば、めっき浴から
少量のめっき液を分取し、酸及びビスマスイオンを添加
して比色法により定量分析するだけの簡易な操作により
正確に各成分の汲み出しによる減少量を定量することが
できるので、めっき作業中に随時分析を行って厳格な浴
管理を行うことができ、しかも自動分析に適した比色法
を用いており、かつ上述のように所定組成の補充液を補
充することにより容易に浴組成の補正を行うことができ
るので、めっき液の補充装置と組み合わせることによ
り、容易にめっき浴の自動管理を行うことができる。
According to the analysis method of the present invention, a small amount of a plating solution is separated from a plating bath, an acid and a bismuth ion are added thereto, and each component is accurately analyzed by a simple operation of simply performing a quantitative analysis by a colorimetric method. Since the amount reduced by pumping can be quantified, strict bath control can be performed by performing analysis at any time during the plating operation, and a colorimetric method suitable for automatic analysis is used, and as described above Since the bath composition can be easily corrected by replenishing a replenisher having a predetermined composition, automatic management of the plating bath can be easily performed by combining with a plating solution replenisher.

【0024】ここで、本発明方法で分析できるのは、汲
み出しによる各成分の減少量であり、被めっき物に析出
することによる錫や鉛分の減少量は分析できない。従っ
て、これらの成分については別個に析出による減少量を
分析し、その分を補給することが好ましく、この場合錫
や鉛分の減少量はめっきの進行により被めっき物から溶
出してくる銅濃度を定量することにより容易に分析する
ことができる。
Here, what can be analyzed by the method of the present invention is the amount of reduction of each component due to pumping out, and the amount of reduction of tin and lead due to deposition on the object to be plated cannot be analyzed. Therefore, it is preferable to separately analyze the amount of reduction of these components due to precipitation, and to replenish the amount. In this case, the amount of reduction of tin and lead is determined by the concentration of copper eluted from the plating object as plating proceeds. Can be easily analyzed by quantifying.

【0025】また、このように銅濃度の上昇に応じて金
属成分の補給を行う際、錯化剤のチオアミド類を銅濃度
の上昇に応じて増量補給することが好ましい。このよう
なチオアミド類の増量補給を行わないと、銅イオンの増
加によりこの銅イオンを錯化するのにめっき液中の錯化
剤が消費され、析出速度で低下する等のめっき性能の劣
化を招来する場合がある。
When the metal component is replenished in accordance with the increase in the copper concentration, it is preferable to increase and replenish the thioamides as the complexing agent in accordance with the increase in the copper concentration. Unless such thioamides are replenished in an increased amount, the complexing agent in the plating solution is consumed to complex the copper ions due to the increase of the copper ions, and the deterioration of the plating performance such as a decrease in the deposition rate occurs. May be invited.

【0026】[0026]

【実施例】以下、実施例を示して本発明を具体的に説明
するが、本発明は下記実施例に制限されるものではな
い。 [実施例]チオ尿素の配合量を変化させた下記組成の無
電解錫・鉛合金めっき浴を4種類建浴し、これらめっき
浴中のチオ尿素濃度を下記方法により分析した。結果を
表1に示す。
EXAMPLES The present invention will be specifically described below with reference to examples, but the present invention is not limited to the following examples. [Examples] Four types of electroless tin-lead alloy plating baths having the following composition with varied amounts of thiourea were prepared, and the thiourea concentrations in these plating baths were analyzed by the following method. Table 1 shows the results.

【0027】無電解錫・鉛合金めっき浴組成 メタンスルホン酸 50g/L メタンスルホン酸錫 20g/L メタンスルホン酸鉛 13g/L チオ尿素 表1参照 次亜リン酸ナトリウム 80g/L クエン酸 15g/L 塩化ラウリルピリジウム 5g/L EDTA 3g/L pH 2.0 浴温 80℃ めっき速度 5μm/15min 析出皮膜中のSn(wt%) 75 Electroless tin-lead alloy plating bath composition Methanesulfonic acid 50 g / L Tin methanesulfonate 20 g / L Lead methanesulfonate 13 g / L Thiourea See Table 1 Sodium hypophosphite 80 g / L Citric acid 15 g / L Laurylpyridium chloride 5 g / L EDTA 3 g / L pH 2.0 Bath temperature 80 ° C. Plating rate 5 μm / 15 min Sn (wt%) in the deposited film 75

【0028】分析方法 めっき液1mLをめっき浴から分取し、これに酸化ビス
マスを4g/L、EDTA・4Hを10g/L、及びメ
タンスルホン酸を500g/L含有する溶液40mLを
添加してからイオン交換水で50mLにする(pH1以
下)。これを5分間放置した後、吸光度を波長480n
mで吸光光度計(日立製作所製U−3210)を用いて
測定し、チオ尿素濃度を測定した。
Analysis Method 1 mL of a plating solution was taken from a plating bath, and 40 mL of a solution containing 4 g / L of bismuth oxide, 10 g / L of EDTA.4H, and 500 g / L of methanesulfonic acid was added to the solution. Adjust to 50 mL with ion-exchanged water (pH 1 or less). After allowing this to stand for 5 minutes, the absorbance was measured at a wavelength of 480 n.
The thiourea concentration was measured using a spectrophotometer (U-3210, manufactured by Hitachi, Ltd.) in m.

【0029】[0029]

【表1】 [Table 1]

【0030】表1の結果からこの方法により、めっき浴
中のチオ尿素濃度を正確に測定し得ることが確認され
た。
From the results shown in Table 1, it was confirmed that the thiourea concentration in the plating bath can be accurately measured by this method.

【0031】[応用例]チオ尿素の配合量を100g/
Lとした上記実施例と同様の無電解錫・鉛合金めっき浴
を用いて銅パターンを形成したプリント配線板にめっき
を行い、ランニングテストを行った。このとき、随時め
っき液を分析し、チオ尿素量が2g/L減少する毎に下
記補給液(1),(2),(3)を下記に示す量で補給
すると共に、銅量が0.2g/L増加する毎に下記補給
液(1),(2),(3)を下記に示す量で補給し、め
っき浴中の各成分を補正しながらめっきを行った。な
お、チオ尿素の定量は上記実施例と同様の方法で行い、
銅量の定量は蛍光X線分析装置を用いて行った。
[Application Example] The compounding amount of thiourea is 100 g /
Using the same electroless tin-lead alloy plating bath as in Example 1 above, the printed wiring board on which the copper pattern was formed was subjected to a running test. At this time, the plating solution is analyzed as needed, and each time the amount of thiourea is reduced by 2 g / L, the following replenishers (1), (2), and (3) are replenished in the amounts shown below, and the amount of copper is reduced to 0. Each time 2 g / L was increased, the following replenishers (1), (2), and (3) were replenished in the amounts shown below, and plating was performed while correcting each component in the plating bath. The quantification of thiourea was performed in the same manner as in the above example,
The quantity of copper was determined using a fluorescent X-ray analyzer.

【0032】補給液(1) メタンスルホン酸錫 40g/L チオ尿素 200g/L補給液(2) メタンスルホン酸鉛 50g/L補給液(3) メタンスルホン酸 100g/L 次亜リン酸ナトリウム 215g/L クエン酸 40g/L 塩化ラウリルピリジニウム 13g/L EDTA 50g/L補給量 銅量による補給 チオ尿素による補給 補給液(1) 10ml/L 10ml/L 補給液(2) 2ml/L 5.2ml/L 補給液(3) − 10ml/L Replenisher (1) Tin methanesulfonate 40 g / L Thiourea 200 g / L Replenisher (2) Lead methanesulfonate 50 g / L Replenisher (3) Methanesulfonic acid 100 g / L Sodium hypophosphite 215 g / L L Citric acid 40 g / L Laurylpyridinium chloride 13 g / L EDTA 50 g / L Replenishment amount Copper amount Replenishment with thiourea Replenisher (1) 10 ml / L 10 ml / L Replenisher (2) 2 ml / L 5.2 ml / L Replenisher (3)-10ml / L

【0033】このように浴管理を行いながら、プリント
配線板に対するめっき処理を連続的に繰返した。このと
き、上記補給液(1),(2),(3)の補給によりめ
っき浴の成分補正を行った直後にめっき浴中のSn及び
Pb濃度を逐次蛍光X線分析装置を用いて測定し、その
振れ幅(ずれ)を観測した。結果を表2に示す。なお、
使用したプリント配線板は、パターン率1.0%、浴負
荷量0.5m2ボード/100Lであり、このプリント
配線板の銅パターン上に膜厚5μmの錫・鉛合金めっき
皮膜を形成した。また、上記チオ尿素の定量及び銅量の
定量は、45ラック毎に行った。
As described above, the plating process for the printed wiring board was continuously repeated while performing the bath management. At this time, immediately after the components of the plating bath were corrected by the replenishment of the replenishers (1), (2) and (3), the concentrations of Sn and Pb in the plating bath were successively measured using a fluorescent X-ray analyzer. , The fluctuation width (deviation) was observed. Table 2 shows the results. In addition,
The printed wiring board used had a pattern ratio of 1.0% and a bath load of 0.5 m 2 board / 100 L. A tin / lead alloy plating film having a thickness of 5 μm was formed on the copper pattern of the printed wiring board. Further, the quantification of the thiourea and the quantification of the copper amount were performed every 45 racks.

【0034】[0034]

【表2】 [Table 2]

【0035】表2の結果から明らかなように、本発明の
分析方法によれば、汲み出しによる各成分の減少量を簡
易かつ正確に定量分析することができ、この分析結果に
応じて液補給を行うと共に、銅濃度分析による液補給す
ることにより、めっき浴の組成を長期に亘って良好に管
理することができ、一定のめっき性能を維持しつつ安定
的に連続めっきを行い得ることが確認された。
As is evident from the results in Table 2, according to the analysis method of the present invention, the amount of each component reduced by pumping can be quantitatively analyzed easily and accurately. It is confirmed that the composition of the plating bath can be well controlled over a long period of time and the plating can be stably performed while maintaining a constant plating performance by replenishing the solution by copper concentration analysis. Was.

【0036】[0036]

【発明の効果】以上説明したように、本発明の無電解
錫、鉛又は錫・鉛合金めっき浴の分析方法によれば、汲
み出しによる各成分の減少量を簡単かつ正確に定量分析
することができ、この分析結果に応じて液補給を行うこ
とにより、無電解錫、鉛又は錫・鉛合金めっき浴の浴組
成を容易かつ確実に管理することができる。
As described above, according to the method for analyzing an electroless tin, lead or tin-lead alloy plating bath of the present invention, the amount of each component reduced by pumping can be quantitatively analyzed simply and accurately. It is possible to easily and surely control the bath composition of the electroless tin, lead or tin-lead alloy plating bath by replenishing the solution according to the analysis result.

フロントページの続き (72)発明者 上玉利 徹 大阪府枚方市出口1丁目5番1号 上村 工業株式会社 中央研究所内 (56)参考文献 特開 平4−276082(JP,A) 特開 平3−207898(JP,A) 特開 平3−64482(JP,A)Continuation of the front page (72) Inventor Toru Kamitama 1-5-1, Hirakata Exit, Hirakata-shi, Osaka Uemura Industry Co., Ltd. Central Research Laboratory (56) References JP-A-4-276082 (JP, A) JP-A-3 -207898 (JP, A) JP-A-3-64482 (JP, A)

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 水溶性錫塩及び/又は水溶性鉛塩、これ
ら塩を溶解する酸、及び錯化剤としてチオアミド類を含
有してなる無電解めっき浴を用い、被めっき物に無電解
錫、鉛又はそれらの合金めっきを施すに際し、めっき操
作に伴う汲み出しによるめっき浴中の各成分の減少量を
定量するための分析方法であって、上記めっき浴から少
量のめっき液を分取し、これを酸性に調整した後、ビス
マスイオンを添加して発色させ、比色法によりめっき液
中のチオアミド類の濃度を測定してその減少量を求める
と共に、このチオアミド類の減少量から他の成分の減少
量を求めることを特徴とする無電解錫、鉛又はそれらの
合金めっき浴の分析方法。
1. An electroless plating bath containing a water-soluble tin salt and / or a water-soluble lead salt, an acid for dissolving these salts, and a thioamide as a complexing agent. When performing plating of lead or an alloy thereof, it is an analysis method for quantifying the amount of reduction of each component in the plating bath due to pumping out of the plating operation, in which a small amount of plating solution is separated from the plating bath, After adjusting the acidity, the color is developed by adding bismuth ions, the concentration of thioamides in the plating solution is measured by a colorimetric method to determine the amount of reduction, and other components are determined from the amount of reduction of the thioamides. A method for analyzing a plating bath for electroless tin, lead or their alloys, characterized by determining the amount of reduction of the plating bath.
JP5026081A 1993-01-21 1993-01-21 Analysis method for electroless tin, lead or their alloy plating bath Expired - Fee Related JP2697544B2 (en)

Priority Applications (1)

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JP2697544B2 true JP2697544B2 (en) 1998-01-14

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CN103185718A (en) * 2011-12-31 2013-07-03 北京有色金属与稀土应用研究所 Method for detecting tin content in tin-lead solder by utilizing lead acetate chelatometric back-titration method
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