JP2687306B2 - Substrate transfer device in vacuum system - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transfer device in a vacuum system for transferring a substrate on which a thin film is formed in a vacuum processing device such as a vacuum vapor deposition device, a molecular beam epitaxy device, a sputtering device or an ion implantation device. .

[0002]

2. Description of the Related Art When manufacturing a semiconductor device, for example, steps such as forming a thin film on a semiconductor wafer and implanting ions are performed in vacuum. Conventionally, when manufacturing semiconductor devices by sequentially performing such steps, each vacuum device is connected by a tubular transfer tube, a substrate such as a semiconductor wafer is passed through the transfer tube and sequentially sent to each vacuum device, and those devices are connected. It is common practice to perform the necessary processing steps in. This is because the manufacturing process is simplified and the overall time is shortened by sequentially carrying out each process while transporting the substrate in vacuum without taking it out of the vacuum system for each process. There is an advantage that the inside of the substrate can be prevented from becoming dirty.

In such a vacuum device, a plurality of vacuum devices are installed in the middle of the transfer tube, and the substrate transferred by the transfer tube is introduced into each vacuum device at each position, and after performing a predetermined process. Then, the procedure of taking out again to the transfer tube side and sending to the next vacuum device is taken.

[0004]

In this case, in the conventional in-vacuum transfer apparatus, since the substrate transferred through the transfer tube faces a certain direction, any vacuum apparatus is installed on one side of the transfer tube. Must. Therefore, in order to arrange the vacuum devices so that the spaces occupied by the vacuum chambers or the like do not interfere with each other, it is necessary to widen the intervals between the vacuum devices. As a result, the transport tube becomes long, the entire apparatus becomes large, and the substrate has to be transported over a long distance.

Further, depending on the processing in each vacuum apparatus, there are some steps that need to be performed with the substrate facing upward,
Further, there is also a step in which the substrate needs to be placed sideways. When such processes coexist, it is not possible to sequentially perform each process while transporting the substrate through the transport tube, so once the substrate is taken out of the vacuum system and reattached to another substrate holder, the next process is performed. Need to do. However, in that case, there is a problem that the time between each process becomes long and that it takes a lot of trouble to process the substrate between the processes.

In view of the above problems of the prior art, the present invention makes it possible to change the orientation of the substrate holder transported in the transport tube within the transport tube, thereby increasing the degree of freedom in the layout of the vacuum device. Further, it is an object of the present invention to provide a vacuum-type transfer device capable of sequentially performing the steps by connecting them with a transfer tube even if the steps are to process the substrates in different directions.

[0007]

According to the present invention, in order to achieve the above-mentioned object, a carrier 4 moving along a carrier pipe 1 is used.
The substrate holder 9 is attached to the
The rotation of the substrate holder 9 allows the shaft 8 to be rotated from the outside of the vacuum system.

More specifically, a tubular carrier tube 1 to be in a vacuum state, a guide 3 provided in the carrier tube 1, a carrier 4 slidably mounted along the guide 3, and a carrier 4 In a substrate transfer apparatus in a vacuum system, which is attached to the carrier 4 and includes a substrate holder 9 for mounting a substrate and a moving means for moving the carrier 4 along the guide 3, while supporting the substrate holder 9,
Shafts 8 , 37, 4 rotatably supported by the carrier 4
5 and the rotary operation unit 1 connected to the shafts 8 , 37, 45
1 , 35, 48 and rotary operation rods 26 , 40, 50 for rotating the rotary operation parts 11 , 35, 48 .

For example, a stopper or the like is used to rotate the substrate holder 9 within a range of 90 ° or 180 °. The substrate holders 9 may be attached in a complex manner side by side in the longitudinal direction of the shaft 8, or only one substrate holder 9 may be provided rotatably around the shafts 37, 45 . Furthermore, the axis 8
The elastic force of the spring 23 may be biased so that it is held at the end of the rotation by the stoppers 15 and 17 .

[0010]

In the vacuum substrate transfer apparatus according to the present invention, the substrate is
Shafts 8 , 37, 45 , which support the holder 9 and are rotatably supported by the carrier 4, and the shafts 8 , 37, 37,
45, the rotary operation part 11 and the rotary operation part 1
Rotating operation rods 26 , 40, 5 for rotating 1 , 35 , 48
0 , the rotary operating rods 26 , 40, 50 rotate the rotary operating units 11 , 35, 48 to rotate the substrate holder 9 around the axes 8 , 35, 48 , and You can change the direction with.

For example, when the substrate holder 9 is rotated within a range of 90 ° using a stopper or the like, the substrate holder 9
The orientation of can be changed from horizontal to vertical or vice versa. Further, if the substrate holder 9 is rotated in the range of 180 °, the direction of the substrate holder 9 can be reversed. Then, a stopper for restricting the rotation of the shaft 8 is provided,
When the elastic force of the spring 23 is applied to the shaft 8 so that the substrate 8 is held at the end of the rotation by the stopper, the substrate holder 9 can be stably held in a predetermined direction.

[0012]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing an embodiment of the present invention; 1 to 3 show a first embodiment of the present invention. In these figures, the transfer tube 1 is a tubular passage that connects a vacuum chamber for performing various steps such as forming a thin film on the surface of a substrate or implanting ions, and the inside thereof has a predetermined vacuum degree. Maintained at. The carrier tube 1 is made of a non-magnetic material such as stainless steel.

A rail-shaped guide 3 is provided in the lower part of the carrier pipe 1 in the longitudinal direction thereof. Further, a rail-shaped guide 2 is provided at the uppermost portion of the outer surface of the carrier tube 1. A carrier 4 is slidably provided along the guide 3 on a guide 3 provided inside the carrier tube 1. The carrier 4 is provided on the guide 3, and the bearings 5, 5 and the frame 6,
A rectangular frame with 7 and 7 is formed. That is, the carrier 4 is provided with a pair of frames 7 and 6 provided in parallel with the guide 3 so as to face each other in the vertical direction, and a pair of bearing portions attached to both ends of the frames 7 and 6 so as to face each other in the longitudinal direction of the guide 3. 5 and 5 are provided.

Wheels 13, 13 are rotatably supported by the lower ends of the bearings 5, 5, and the wheels 13, 13 run on the guide 3. Wheels 12, 12 are rotatably supported on both sides of the lower frame 6, and the wheels 12, 12 are rotatably supported.
Holds both sides of the guide 3. Wheels 1 on both sides
The peripheral surfaces of the tip end portions of 2 and 12 are V-shaped grooves, and both sides of the guide 3 are mountain-shaped peaks corresponding to these V-shaped grooves. Is guided in its longitudinal direction without floating with respect to the guide 3.

Magnets 14 are attached to both ends of the upper surface of the upper frame 7 of the carrier 4, respectively. On the other hand, a magnet driving body 19 is slidably attached to the guide 2 on the upper outer side of the transport tube 1 along the guide 2.
That is, the magnet driving body 19 has a rotatable roller 21, and the roller 21 can move along the guide 2. A magnet 20 is provided below the magnet driving body 19 corresponding to the magnet 14 of the carrier 4, and the two magnets 14 and 20 have magnetic poles of different polarities facing each other. Therefore, when the magnet driving body 19 is moved along the guide 2, the carrier 4 is pulled by the attractive magnetic force of the magnets 14 and 20, and the carrier 4 moves along the guide 3.

A shaft 8 is installed over the bearing portions 5 and 5 of the carrier 4, and both ends of the shaft 8 are rotatably supported by the bearing portions 5 and 5. Holder supports 25 are attached to the shaft 8 at regular intervals. This holder receiver 2
A substrate holder 9 is detachably attached to the tip of the substrate 5 , and a substrate (not shown) is attached to the front surface of the substrate holder 9. The holder receiver 25 and the substrate holder 9 attached to the tip thereof rotate as the shaft 8 rotates.

1 each in a direction different from the axis 8 by 180 °
Arms 16 and 18 for each book are projected. Further, the lower frame 6 has the arm 1 with the rotation of the shaft 8.
Stoppers 15 and 6 are provided at the positions where the tips of 6 and 18 pass.
17 is attached, and the ends of the arms 16 and 18 come into contact with the stoppers 15 and 17, so that the rotation of the shaft 8 is stopped. Here, the stoppers 15 and 17 are located at a position where the substrate holder 9 faces the front side in FIG. 1, that is, the right side in FIGS. 2 and 3, and the opposite side of the substrate holder 9, that is, the rear side in FIG. 2 and the position facing the left side in FIG.
It is placed at a position where it hits the tip of the and stops.
Meanwhile, the shaft 8 can rotate in the direction indicated by the arrow in FIGS. 2 and 3 or in the opposite direction. That is, the shaft 8 can rotate by 180 ° within a range where the arms 16 and 18 and the stoppers 15 and 17 contact each other.

Plate-shaped rotary arm members 10 are attached to both ends of a shaft 8 projecting outside of the bearings 5 and 5, and a projection-shaped rotary operation portion 11 is provided at the end of the rotary arm member 10 so as to project therefrom. ing. Further, as shown in FIG. 2, a spring receiving projection 22 is provided so as to project laterally from the center of the bearings 5 and 5, and a spring 23 is engaged between the tip of the spring receiving projection 22 and the rotation operating portion 11. Dressed up. The elastic force of the spring 23 is urged in the direction of pulling the rotation operation portion 11 toward the tip end side of the spring receiving projection 22, and the elastic force causes the tip end of the arm 16 to be stopped by the stopper 15 so that the substrate holder 9 in FIG. The shaft 8 is stopped in the posture facing the front side, that is, the right side in FIGS. 2 and 3.

In FIG. 2, reference numeral 24 is an operating rod introducing portion connected to the conveying pipe 1, and this operating rod introducing portion 24 is
It is provided at a position in the transfer tube 1 where it is necessary to change the direction of the substrate holder 9. Inside the operating rod introducing portion 24, there is a rotary operating rod 26 that can be operated from outside the vacuum system,
The direction of the substrate holder 9 is reversed by rotating the rotating operation unit 11 with the rotating operation rod 26 and rotating the shaft 8. That is, from the position shown in FIG. 2 and FIG. 3, the rotation operation part 11 is hung on the tip of the rotation operation rod 26 to rotate, and the shaft 8 is rotated in the arrow direction against the elasticity of the spring 23. At this time, the elastic force of the spring 23 acts against the rotation of the shaft 8 until the rotation angle exceeds 90 °, but the rotation angle is 90 °.
Beyond 0, the elastic force of the spring 23 acts to rotate the shaft 8 further. Then, the tip of the arm 18 hits the stopper 17 and is stopped when the shaft 8 rotates by 180 °, and the substrate holder 9 faces in the opposite direction to that of FIGS. 1 to 3, that is, in the rear side of FIG. At 3 turn left. Then, in this state, the elasticity of the spring 23 causes the arm 18 to move.
It is held by pressing the tip of the stopper against the stopper 17. In this way, the substrate holder 9 can be turned over 180 ° in the transfer tube 1, and such operations and operations are the same when the shaft 8 is rotated in the reverse direction.

Next, a second embodiment of the present invention shown in FIGS. 4 to 6 will be described. Also in this embodiment, the rail-shaped guide 3 is provided in the lower portion of the carrier pipe 1 over the longitudinal direction.
Is provided. Further, a rail-shaped guide 2 is provided at the uppermost portion of the outer surface of the carrier tube 1. A carrier 4 is slidably provided along the guide 3 on a guide 3 provided inside the carrier tube 1.

Wheels 13, 13 are rotatably supported by both ends of a frame 31 of the carrier 4, and the wheels 13, 13 are rotatably supported.
Runs on the guide 3. Wheels 12, 12 are rotatably supported on both sides of the frame 31, and the wheels sandwich both sides of the guide 3. This point is basically the same as the above-mentioned embodiment. A column 32 is erected on the frame 31 of the carrier 4, a magnet support member 33 is provided on the upper end of the column 32 in parallel with the frame 31, and the magnet 14 is mounted on the magnet support member 33.

On the other hand, a magnet driving member 19 is slidably attached to the guide 2 on the upper outer side of the conveying pipe 1 by a roller 21 along the guide 2. A magnet 20 is provided below the magnet driver 19 so as to correspond to the magnet 14 of the carrier 4 and have opposite magnetic poles.
Is provided. Therefore, when the magnet driving body 19 is moved along the guide 2, the attractive magnetic force of the magnets 14 and 20 pulls the carrier 4, and the carrier 4 is guided by the guide 3.
Move along.

As shown in FIG. 5, a bearing 39 is provided at one end of the carrier 4 and a holder base 34 is provided.
A shaft 37 fixed in a penetrating state to a bracket 38 protruding downward from one end of the bearing is rotatably supported by the bearing 39. As a result, the holder base 34 is attached to the shaft 3
7 is rotatably supported on one end of the carrier 4 about the center of which the holder base 34 is rotatable.
Is a range of 90 ° from the posture parallel to the frame 31 of the carrier 4 to the posture vertical.

At the end of the shaft 37 projecting from the bearing 39, a side-U-shaped rotary operation portion 35 having a groove at the center is provided. An operating rod introducing portion 41 is provided at a position where the substrate holder 9 of the transfer tube 1 needs to be rotated, and inside the operating rod introducing portion 41, a rotary operating rod 40 that can be rotated from the outside is arranged. . This rotation operating rod 40
The holder base 34 has a flat tip portion that can be inserted into the central groove of the rotation operation portion 34, and the tip end portion is inserted into the groove of the rotation operation portion 35 and rotated.
Is rotated.

A dovetail-shaped guide 37 is provided on the holder base 34, and the holder 37 is mounted on the guide 37.
5 is fitted. Reference numeral 36 is a screw joint for connecting the transfer rod, which is used for attaching and detaching the holder receiver 25 to the holder base 34 by the guide 37. The substrate holder 9 is detachably attached to the holder receiver 25 as in the above-described embodiment.

Due to the rotation of the holder base 34 by the rotating operating rod 40, the substrate holder 9 is moved from the position shown by the solid line in FIG. 4, that is, the position shown in FIG. 5 to the position shown by the chain double-dashed line in FIG. It is rotated to the position shown in FIG.
Furthermore, it is rotated in the opposite way. As a result, the substrate holder 9 can change its direction from a position parallel to the frame 31 of the carrier 4 to a vertical position or vice versa.

Next, the third embodiment shown in FIG. 7 will be described. Also in this embodiment, the carrier 4 slides on the guide 3 provided inside the carrier tube 1 along the guide 3. It is provided freely. The magnet 14 is provided on the upper frame 46 of the carrier 4.
The magnet 20 of the magnet driver 19 that moves along the guide 2
Correspondingly, when this magnet driving body 19 is moved along the guide 2, the carrier 4 is pulled by the attractive magnetic force of the magnets 14 and 20, and the carrier 4 is also moved along the guide 3. Same as the example.

The upper and lower frames 46 and 47 of the carrier 4 serve as bearings, and the shaft 35 is rotatably supported perpendicularly to the frames 46 and 47. This axis 45
Holder holder 25 is attached to this holder holder 25
The substrate holder 9 is detachably attached to the.

The lower end portion of the shaft 45 serves as a rotation operation portion 48,
It projects from the lower frame 47. On the other hand, the carrier tube 1
An operating rod introducing portion 51 is provided below the position where the substrate holder 9 needs to be rotated, and inside the operating rod introducing portion 51, a rotating operating rod 50 that can be rotated from the outside is arranged. The rotary operation rod 50 is the rotary operation unit 4 described above.
8 has a U-shaped tip portion having a groove into which 8 can be inserted, and the rotation operating portion 48 is fitted into the groove of the tip portion,
By rotating, the shaft 45 is rotated and the orientation of the substrate holder 9 is changed.

[0030]

As described above, according to the present invention, since the direction of the substrate holder transported in the transport tube can be changed within the transport tube, it is necessary to dispose the vacuum device only on one side of the transport tube. Thus, the vacuum devices on both sides of the transfer tube can be arranged arbitrarily. As a result, the degree of freedom in the layout of the vacuum device is increased, and the device can be downsized as a whole. Furthermore, since it is a process in which the substrate should be processed in different directions, and it is possible to connect them with a transfer pipe and perform them in succession in sequence, each process can be performed continuously and productivity is improved. Can build a factory.

[Brief description of the drawings]

FIG. 1 is a side view in which a part of a substrate transfer apparatus in a vacuum system according to a first embodiment of the present invention is vertically sectioned.

FIG. 2 is a vertical cross-sectional front view of a part of the substrate transfer apparatus in a vacuum system according to the first embodiment.

FIG. 3 is a vertical cross-sectional front view of an intermediate portion of the vacuum system substrate transfer apparatus according to the first embodiment.

FIG. 4 is a side view in which a portion of a substrate transfer apparatus in a vacuum system according to a second embodiment of the present invention is vertically sectioned.

FIG. 5 is a vertical cross-sectional front view of a part of the vacuum system substrate transfer apparatus according to the second embodiment.

FIG. 6 is a front view of a main part of a vertical cross-section of a part of a state where a substrate holder of a substrate transfer apparatus in a vacuum system according to the second embodiment is rotated.

FIG. 7 is a vertical cross-sectional front view of a part of a vacuum system substrate transfer apparatus according to a third embodiment of the present invention.

[Explanation of symbols]

 1 Transport Pipe 2 Guide 3 Guide 4 Carrier 9 Substrate Holder 8 Axis 11 Rotation Operation Part 15 Stopper 16 Stopper 23 Spring 25 Rotation Operation Rod

Claims (4)

(57) [Claims] 1. A tubular carrier tube having a vacuum inside.
(1)And this carrier pipe(1)Guide provided inside
(3)And this guide(3)Can be freely slid along
Attached career(4)And this career(4)To
Substrate holder that is attached and attaches the substrate(9)
And the carrier(4)The guide(4)Moved along
In a substrate transfer device in a vacuum system equipped with a moving means for moving
Board holder(9)Support the
rear(4)Rotatably supported on the shaft(8), (3
7), (45)And this axis(8), (37), (45)
ToConnected rotary operation unit(11), (35), (48)
And this rotation operation part(11), (35), (48)Times
Rotating rod for rolling(26), (40), (50)And
An apparatus for transferring a substrate in a vacuum system, comprising: Wherein Oite to claim 1, wherein the shaft (8) has two stoppers for restricting the rotation in the range of 180 ° (15), and characterized in that is provided with (17) Vacuum system substrate transfer device. 3. A claim 2, both stopper to said shaft (8) (15), resilient biasing (17) the spring in the end direction of the rotation of the coaxial (8) which is regulated by (23) A substrate transfer apparatus in a vacuum system characterized by being provided. 4. A tubular carrier tube having a vacuum inside.
(1) and a guide provided in the carrier pipe (1)
(3) and slide it along this guide (3).
Attached carrier (4) and this carrier (4)
Substrate holder for mounting and mounting substrates (9)
And transfer the carrier (4) along the guide (4).
In a substrate transfer device in a vacuum system equipped with a moving means for moving
And a shaft rotatably supported by the carrier (4).
(37) and supporting the substrate holder (9),
Holder that rotates within 90 ° around the spindle (37)
A rotary operation connected to the base (34) and the shaft (37).
Rotate the work part (35) and the rotation operation part (35)
A substrate transfer device in a vacuum system, comprising: a rotating operation rod (40) .