JP2682150B2 - Linear motor armature - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention is used for driving a linear movement device that requires high-accuracy positioning, and particularly for drawing and inspecting a semiconductor wafer process that requires a relatively long stroke. The present invention relates to an armature of a linear motor that is effectively used in a device.

[Prior Art] A linear motor used for general precision positioning and conveyance is designed to reduce magnetic attraction force or ripple.
A gap winding type linear motor in which concentrated winding coils or lap winding coils are arranged on the gap surface of the iron core is used.

Further, in a cylindrical armature winding of a brushless motor, a thin insulated wire is formed into a coil having a long coil side, and the coil side is spirally bent at a predetermined inclination angle,
A plate-shaped product wound around the surface of an iron core is disclosed in JP-A-60-216746, JP-A-62-244251 or JP-A-62-285645.

[Problems to be Solved by the Present Invention] However, in the case of the gap winding method, since there is no slot, the magnetic gap becomes large and the magnetic flux density in the gap portion becomes small.

For this reason, the motor constant of the linear motor decreases, and the generated loss increases when the required thrust is generated, and the temperature rise of the motor due to this heat loss causes thermal expansion of the component parts, and the effect reduces the position accuracy. Is causing it.

In addition, when a long stroke is required, if the gap winding method that uses a coil such as concentrated winding or lap winding is used, the number of coils is large and it is troublesome to attach to the armature core, resulting in high manufacturing cost. There is
Further, although the cost of the winding can be reduced by using a spirally wound winding, the problem of thermal expansion due to thrust reduction cannot be solved because the magnetic gap does not become small, and highly accurate positioning is possible. could not.

[Means for Solving the Problem] In order to solve this problem, the present invention provides a slot for accommodating only one coil side in an armature iron core with a predetermined skew angle, and the number of poles times the slot length. Forming coils of each phase having coil sides of 1 are arranged in a spiral shape at the same time and folded back in a spiral shape, and the length of the plate-shaped multi-phase helical winding having each pole coil integrally formed is adjusted to match the section switching length. A plurality of them are provided and the ends are sequentially stacked and continuously arranged on the armature core, the coil side of the lower layer of this polyphase helical winding is housed in the slot, and the coil side of the upper layer is placed on the armature core. A long stroke linear motor is constructed by arranging them flatly and fixing them.

[Operation] Therefore, the manufacture of the coil is simplified, the gap is reduced without changing the loading of the electric machine, the air gap magnetic flux density is increased, and the motor constant is increased. Further, the heat loss can be reduced while maintaining a predetermined thrust, there is no crossover wire of each phase coil, the number of connection points is reduced, and a long stroke armature can be easily manufactured.

[Embodiment] An embodiment shown in this figure will be described.

FIG. 1 is a plan view showing an embodiment of the present invention, in which 1 is a magnetic plate laminated with an armature core, and a slot 2 having a size capable of being skewed at a predetermined angle θ and inserting only one coil side is provided. On the armature core 1, the armature coils 3 (U, V, W) of each phase are formed in a multi-phase helical winding and placed, and the coil side of the lower layer is housed in the slot 2 to form the upper layer. The coil sides of are arranged flat on the upper surface of the armature core 1 and fixed.

The armature core 1 is fixed to the armature support plate 4 as shown in FIG. 2, and is opposed to the field permanent magnet 7 attached to the base 5 via the yoke plate 6. A plurality of the field permanent magnets are provided at predetermined intervals in the axial direction of the coil and are sequentially magnetized with opposite polarities. Reference numeral 8 is a static pressure gas guide for supporting the armature support plate 4 on the base 5.

As shown in FIG. 3, the armature coil 3 has insulated wires 11 whose coil sides 31 and 32 on both sides have a length substantially corresponding to the product of the length L of the slot 2 of the armature core and the required number P of poles. The long forming coil is folded back in a spiral shape in accordance with the width of the armature core 1, and therefore the winding form 9 shown in FIG. 4 is used.

The winding form 9 includes a side plate 91 having a plurality of grooves 21 parallel to each other and inclined at the same angle as the slot 2 of the armature core 1, and a side plate having a winding guide 22 symmetrically inclined to the slot.
92 and the groove 21 or winding guide sandwiched between the side plates 91 and 92
An intermediate plate 93 having a thickness larger than the depth of 22 is provided, and the winding form 9 is provided with the armature coils 3 of each phase U, W, and V, and one coil side 31 of each one is provided with a groove 21a, 21b.・ 21c
, The other coil side 32 is inserted into the grooves 21d, 21e, 21f, folded back to the side plate 92 at the winding side edge, guided to the other side edge along the winding guide 22 of the side plate 92, and folded back to the side plate 91. The coil side 31 of the U-phase coil is inserted into the groove 21g, and the other coil sides are also sequentially inserted into the next groove 21. By repeating this, a coil with a predetermined number of poles is formed, the intermediate plate 93 is pulled out, and the side plates 91 and 92 are
A gap is created between the side plates, and the side plates are removed from the coil sides by the gap and pulled out to form a polyphase helical winding.

The multi-phase helical winding thus formed is placed on the armature core 1, the lower coil side of the iron core is inserted into the slot 2, and the upper coil side is pressed against the armature core surface to flatten the resin. Fix by impregnation.

Further, as shown in FIG. 5, the armature core 1 is lengthened,
A plurality of (two in the figure) multi-phase helical windings 3A and 3B formed as described above are provided, the coil ends 33 are overlapped with each other and successively connected, and the lower coil side is inserted into the slot to form the upper coil. A long stroke armature is constructed by placing the sides on the iron core surface. Reference numeral 12 denotes a controller for each multiphase helical winding, which is provided at the coil end 33 and is connected to the section switching device 13 so that one or both of them can be controlled by the section switching device 13. Since the lengths of the multiphase helical windings 3A and 3B match the section switching length, the windings can be easily connected.

[Effects of the Present Invention] As described above, according to the present invention, each phase of the coil in the linear motor is collectively configured as a multi-phase helical winding that is folded back in a spiral shape according to the skew angle, and is provided in the slot of the armature core. Since only the coil side of the lower layer is inserted, the number of manufacturing steps of the coil is reduced, the gap is reduced and the magnetic flux density is increased, so the current value for generating the required thrust can be reduced and the generated loss is reduced. There is an effect that the error due to the thermal expansion of the constituent parts can be suppressed by suppressing the temperature rise, a long-stroke armature can be easily configured, and a linear motor capable of highly accurate positioning can be obtained.

Furthermore, since the section switching device 13 is connected to the controller 12 provided at the coil end 33, there is an effect that the connection of the multiphase helical winding is facilitated.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of the present invention, FIG. 2 is a sectional view of a linear motor, FIG. 3 is a one-phase forming coil, and FIG. 4 is a part showing a winding form of a multiphase helical winding. FIG. 5 is a perspective view showing the structure of a long stroke. 1 is an armature core, 2 is a slot, 3 is an armature coil, 31
・ 32 is a coil side, 9 is a winding type, 61 and 62 are side plates, 93 is an intermediate plate, 3A and 3B are multiphase helical windings, 12 is a controller, and 13 is a section switching device.

Claims (1)

(57) [Claims] 1. A linear motor comprising an armature core having an armature coil fixed thereto, and a field permanent magnet provided facing the armature core via a gap so as not to come into contact with the coil. The child iron core is provided with a required number of slots for accommodating one coil side at a predetermined skew angle, and each phase coil having a coil side having a length corresponding to the number of poles of the slot length is connected to each other. In the aligned state, the coils of each phase are folded back at a skew angle according to the slot length at the same time, and the number of pole coils corresponding to the number of poles are integrally formed, and the length is matched with the section switching length to form a flat plate. A plurality of multi-phase helical windings, the coil ends of the coils are overlapped with each other, and are sequentially and continuously arranged on the armature core, and the coil side of the lower layer of the multi-phase helical winding is arranged on the armature core. Stored in the slot An electric motor of a linear motor, in which the coil side of the upper layer is flatly arranged and fixed on the armature core, and a controller is connected to the coil end and a section switching device is connected to the controller. Child.