JP2673549B2 - Electrical connection method and electrical connection terminal to thin film strip of thermal constant measuring device - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial application] The present invention relates to an apparatus for measuring a thermal constant of a sample,
The present invention relates to an electric connection method and an electric connection terminal for supplying an electric current to a thin film strip arranged on a sample surface and functioning as a heat source and a sensor.

[Prior Art] Various types of thermal constant measurement devices for measuring the thermal conductivity, thermal diffusivity, and specific heat of a sample are known. Among them is the pulse transient hot strip method (J. Appl. Phys., 55 [9] (1984-5-1) (USA) p. 3348-3353). The outline of this method is as follows. A solid insulating material is used as a sample, and a thin metal film strip is formed on the surface of the sample. A pulse current is applied to the thin film strip at a predetermined duty cycle, and a change in the electrical resistance of the thin film strip is measured. The thermal conductivity and the thermal diffusivity of the sample can be obtained by substituting this measurement result into a predetermined mathematical formula. The specific heat of the sample can be obtained by a simple calculation from the thermal conductivity and the thermal diffusivity.

[Problems to be Solved by the Invention] In this pulse transient hot strip method, a thin film terminal integrally formed with a thin film strip,
It is necessary to electrically connect the pulse generator and the voltmeter. If the thin film terminal is simply brought into contact with the connection terminal, the electric resistance of the contact portion may increase, and the resistance value becomes unstable. The thickness of the thin film terminal is 0.1μ
Since it is about m, soldering cannot be used.

The present invention has been made in view of such circumstances, and an object thereof is to provide an electrical connection method and an electrical connection terminal that can ensure electrical connection to the thin film terminal.

[Means for Solving the Problems] In order to achieve the above object, the electrical connection method according to the present invention is such that a thin film terminal integrally formed with a thin film strip is brought into contact with a projection of the electrical connection terminal, and the projection is provided at the center of the projection. Conductive paint is poured into the formed through holes, and the solvent of the conductive paint is evaporated to ensure the conduction between the thin film terminal and the electrical connection terminal.

Here, the conductive paint is a fluid in which conductive fine powder such as metal is mixed in a solvent.

Further, the electrical connection terminal according to the present invention has a protrusion for contacting the thin film terminal formed integrally with the thin film strip, and a through hole formed in the center of the protrusion.

Embodiment Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view showing an embodiment of the electrical connection method of the present invention. The surface of the sample 10 for measuring the thermal constant has a thickness of 0.
A 1 μm gold metal thin film 20 is formed. This metal thin film 20 is composed of two square thin film terminals 21, 22 and a thin film strip 23 between them. Sample 10 is a copper sample stand
Placed over 30.

The electrical connection terminal 40 made of copper is intended to electrically connect the thin film terminal 21 and the conductive wires 54, 55. Although only one electric connection terminal 40 is shown in this figure, in reality, the electric connection terminal is also brought into contact with the other thin film terminal 22. Therefore, a pair of electrical connection terminals are used.

At one end of the electrical connection terminal 40, a protrusion 41 protruding downward is provided.
(See FIG. 2) is formed, and a through hole 42 is formed in the center of the protrusion 41. A curved portion 43 is provided in the central portion of the electric connection terminal 40, and elasticity is imparted. The other end of the electrical connection terminal 40 is provided with a hole 44 for passing the screw 53. The conductors 54, 55 are fixed to the electrical connection terminal 40 by solder 56. Two conductors are connected for the convenience of the configuration of the measuring circuit, and the connection may be only one.

The electrical connection terminal 40 can be fixed to the sample table 30 with a screw 53. That is, the connection terminal 40 is sandwiched between two silicone rubber insulating washers 51 and 52, and
The 53 may be passed through the three holes 51a, 44 and 52a, and the screw holes 31 of the sample table 30 may be screwed. An annular protrusion 52b is formed around the hole 52a of the lower insulating washer 52 and is fitted in the hole 44 of the electrical connection terminal 40. Therefore, the screw 53 does not touch the electrical connection terminal 40.

Next, a method of using this electric connection terminal 40 will be described. The sample 10 on which the thin film 20 is formed is placed on the sample table 30, and the electrical connection terminal 40 is fixed to the sample table 30 with the screw 53. At this time, the protrusion 41 is pressed against the thin film terminal 21. In this state, as shown in FIG.
It is poured into the through hole 42 of 41. Here, the silver paint is a fluid in which fine silver powder is mixed in a solvent. The one used in this example uses butyl acetate as the solvent. When the solvent evaporates, the silver powder ensures the conduction between the thin film terminal 20 and the protrusion 21.

Similarly, the other electric connection terminal is fixed to another screw hole 32 of the sample table 30, and this electric connection terminal and the other thin film terminal 22 are connected.

When the setting of the sample is completed as described above, a predetermined pulse current is passed through the thin film strip 23 through the pair of electrical connection terminals, and the voltage change between the thin film terminals 21 and 22 at this time is measured. By substituting this measured voltage into a predetermined mathematical formula, the thermal constant of the sample 10 can be obtained.

Next, the metal thin film 20 will be described in detail. As shown in FIG. 3, the metal thin film 20 is formed by covering the sample 10 with the mask 60 and utilizing a thin film deposition method such as vapor deposition or sputtering. As the material of the metal thin film 20, in addition to the above-mentioned gold, silver, platinum, nickel, stainless steel,
Aluminum, tantalum, etc. can be used.

A space corresponding to the shape of the metal thin film is formed in the mask 60. That is, the thin film terminal forming holes 61 and 62 and the thin film strip forming groove 63 are formed. The thin film terminal forming holes 61, 62 are squares having a side length A of 5 mm, and the distance L between them is 0.5 mm. This L corresponds to the length of the thin film strip. The width W of the groove 63 is 25 μm. Therefore, the dimensions of the thin film strip 23 in FIG.
m, width 25 μm, thickness 0.1 μm.

FIG. 4 shows another example of the mask. This mask 160
Four thin film terminal forming holes 161, 162, 163, 164 and three thin film strip forming grooves 165, 166, 167 are formed. The widths W of the three grooves are different, the width of the first groove 165 is 15 μm, the width of the second groove 166 is 25 μm, and the width of the third groove 167 is 50 μm.
m. The dimensions A and L are the same as in FIG.
Using this mask, thin film strips of three different widths can be simultaneously formed on the sample surface. When measuring the thermal constant of the sample, one of the thin film strips is used, and the electrical connection terminals are connected to the thin film terminals on both sides thereof. The effect of the width of the thin film strip can be considered by measuring the thermal constant of the sample using each of the three types of thin film strips.

In FIG. 4, the widths of the grooves are 5 μm, 10 μm, 15
A mask having a thickness of μm was actually manufactured, and a metal thin film was formed using the mask.

EFFECTS OF THE INVENTION As described above, according to the present invention, the projection is brought into contact with the thin film terminal, and the conductive paint is poured into the through hole formed in the center of the projection. The electrical connection with the connection terminal can be ensured.

[Brief description of the drawings]

 FIG. 1 is a perspective view showing an embodiment of the method of the present invention, FIG. 2 is a sectional view of an electrical connection terminal, FIG. 3 is a perspective view of a thin film forming mask, and FIG. 4 is another example of a thin film forming mask. FIG. 10 …… Sample 20 …… Metal thin film 21, 22 …… Thin film terminal 23 …… Thin film strip 40 …… Electrical connection terminal 41 …… Projection 42 …… Through hole 70 …… Silver paint

Claims (2)

(57) [Claims] 1. A method for measuring a thermal constant of a sample by applying a predetermined current to a thin film strip arranged on the surface of a sample and measuring a change in electric resistance of the thin film strip, which is formed integrally with the thin film strip. The projection of the electrical connection terminal is brought into contact with the thin film terminal, the conductive paint is poured into the through hole formed in the center of the projection, and the thin film terminal and the electrical connection terminal are formed by evaporating the solvent of the conductive paint. Electrical connection method that ensures the continuity of. 2. An apparatus for measuring a thermal constant of a sample by applying a predetermined current to the thin film strip arranged on the surface of the sample and measuring a change in electric resistance of the thin film strip, which is formed integrally with the thin film strip. An electronic connection terminal, comprising: a protrusion for contacting the thin film terminal; and a through hole formed in the center of the protrusion.