JP2661643B2 - Pressure sensor - Google Patents

Pressure sensor

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Publication number
JP2661643B2
JP2661643B2 JP16315895A JP16315895A JP2661643B2 JP 2661643 B2 JP2661643 B2 JP 2661643B2 JP 16315895 A JP16315895 A JP 16315895A JP 16315895 A JP16315895 A JP 16315895A JP 2661643 B2 JP2661643 B2 JP 2661643B2
Authority
JP
Japan
Prior art keywords
circuit board
electric circuit
pressure transducer
pressure
connector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP16315895A
Other languages
Japanese (ja)
Other versions
JPH0821779A (en
Inventor
喜久男 舘
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujikoki Corp
Original Assignee
Fujikoki Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujikoki Corp filed Critical Fujikoki Corp
Priority to JP16315895A priority Critical patent/JP2661643B2/en
Publication of JPH0821779A publication Critical patent/JPH0821779A/en
Application granted granted Critical
Publication of JP2661643B2 publication Critical patent/JP2661643B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は容量性圧力変換器を有す
る圧力センサであって、電気回路と電気コネクタの接続
及び電気回路と圧力変換器の接続の組付性に好適な圧力
センサに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a pressure sensor having a capacitive pressure transducer, and more particularly, to a pressure sensor suitable for connection between an electric circuit and an electric connector and connection between an electric circuit and a pressure transducer. It is.

【0002】[0002]

【従来の技術】図7は従来の圧力センサの断面図であっ
て、ハウジング1内に容量性圧力変換器2と、この圧力
変換器2を押える中空の支持部材5と、この支持部材5
に前記圧力変換器2との間に所定の間隔をとって支持さ
れる電気回路基板3を用いた電気回路4と、この電気回
路4に結合する複数のコネクタ端子6を有したカップ形
の電気コネクタ7とを備えている。
2. Description of the Related Art FIG. 7 is a sectional view of a conventional pressure sensor, in which a capacitive pressure transducer 2, a hollow support member 5 for holding the pressure transducer 2, and a support member 5 are provided.
An electric circuit 4 using an electric circuit board 3 supported at a predetermined interval between the pressure transducer 2 and a cup-shaped electric circuit having a plurality of connector terminals 6 coupled to the electric circuit 4. And a connector 7.

【0003】上記電気回路4は両面に電子部品を実装し
た電気回路基板3を有し、この回路基板3と電気コネク
タ7内に突出する複数のコネクタ端子6とを、回路基板
3のコネクタ8に挿入される嵌合脱去が可能な端子突出
部6aを介して電気的に結合している。
The electric circuit 4 has an electric circuit board 3 having electronic components mounted on both sides. The circuit board 3 and a plurality of connector terminals 6 projecting into an electric connector 7 are connected to the connector 8 of the circuit board 3. It is electrically connected via a terminal protrusion 6a which can be inserted and removed.

【0004】また、前記電気回路4(電気回路基板3)
と圧力変換器2は、該圧力変換器2の受圧一面と反対側
面2aに配置され該反対側面から垂直方向に突き出た金
属端子9,10によって電気的に結合されている。
The electric circuit 4 (electric circuit board 3)
The pressure transducer 2 and the pressure transducer 2 are electrically connected by metal terminals 9 and 10 which are disposed on a side 2a opposite to the pressure receiving surface of the pressure transducer 2 and project vertically from the opposite side.

【0005】[0005]

【発明が解決しようとする課題】前記従来技術の圧力セ
ンサは、電気コネクタ7に設けられたコネクタ端子6と
前記電気回路4とを嵌合脱去が可能な端子突出部6aを
介して電気的に結合していたので、電気回路4と電気コ
ネクタ7とを独立した部品として取り扱うことが可能
で、生産する上で組付作業性が簡易化される利点を持っ
ていた。
In the prior art pressure sensor, a connector terminal 6 provided on an electric connector 7 and the electric circuit 4 are electrically connected via a terminal protrusion 6a capable of fitting and removing. Therefore, the electric circuit 4 and the electric connector 7 can be handled as independent components, and there is an advantage that the assembly workability is simplified in production.

【0006】ところが量産組立工程においては、外部へ
信号の受け渡しをするコネクタ端子6と一体の突出部6
aに曲がりや寸法的なバラツキがあった場合、この端子
突出部6aが前記コネクタ8に旨く嵌合しないことがあ
る等の欠点を有していた。
However, in the mass production assembling process, the projecting portion 6 integrated with the connector terminal 6 for transferring signals to the outside is provided.
In the case where a is bent or has a dimensional variation, the terminal protruding portion 6a has a drawback that it may not be properly fitted to the connector 8.

【0007】本発明は前記従来技術の欠点を解消するた
めに案出されたもので、その目的は圧力センサの構造を
改良することにより、安価に且つ確実に組付けることが
できる圧力センサを提供することにある。
SUMMARY OF THE INVENTION The present invention has been made to solve the above-mentioned drawbacks of the prior art. It is an object of the present invention to provide a pressure sensor which can be assembled inexpensively and reliably by improving the structure of the pressure sensor. Is to do.

【0008】[0008]

【課題を解決するための手段】本発明は圧力導入口を有
するハウジングと、該ハウジング内に配置される容量性
圧力変換器と、前記ハウジング内に前記圧力変換器から
所定の間隔をとって固定される両面に電子部品を実装し
た電気回路基板を用いる電気回路と、この電気回路基板
を支持する中空の支持部材と、この支持部材と前記回路
基板を内包し前記ハウジングに結合されるカップ形の電
気コネクタとを具備する圧力センサにおいて、前記電気
コネクタが本体部を貫通し前記回路基板に電気的に結合
される複数のコネクタ端子と、前記回路基板及び支持部
材を内包するフランジ部分と、このフランジ部分の円周
上に回路基板の変換器端子接続位置まで切欠された凹部
とを備え、この凹部内に前記圧力変換器のクランク形状
に折曲された複数の金属端子を嵌合して上記電気回路と
電気的に結合させたことを特徴とする。
SUMMARY OF THE INVENTION The present invention comprises a housing having a pressure inlet, a capacitive pressure transducer disposed within the housing, and fixed within the housing at a predetermined distance from the pressure transducer. An electric circuit using an electric circuit board having electronic components mounted on both sides thereof, a hollow support member for supporting the electric circuit board, and a cup-shaped housing including the support member and the circuit board and being coupled to the housing. A pressure sensor comprising: an electrical connector; a plurality of connector terminals through which the electrical connector penetrates a main body and is electrically coupled to the circuit board; a flange portion including the circuit board and a support member; A recess cut out to the transducer terminal connection position of the circuit board on the circumference of the portion, and a plurality of cranks of the pressure transducer bent in the recess. Metal terminals fitted, characterized in that is electrically coupled to the electric circuit.

【0009】[0009]

【作用】圧力変換器から出る複数の金属端子は、クラン
ク形状に形成され、電気コネクタのフランジ部分の円周
上に切欠された凹部に嵌合して電気回路基板と結合され
るため、クランク形状に折れ曲がった金属端子が電気コ
ネクタや電気回路基板との組付の際に生ずる寸法的なバ
ラツキを吸収して容易に嵌合されるので、組付に係る嵌
合ミスが回避される。
A plurality of metal terminals coming out of the pressure transducer are formed in a crank shape, and are fitted into concave portions cut out on the circumference of a flange portion of the electric connector to be connected to the electric circuit board, so that the crank terminals are formed. The bent metal terminal absorbs the dimensional variation that occurs at the time of assembling with the electrical connector or the electric circuit board, and is easily fitted, so that a fitting error relating to the assembling is avoided.

【0010】[0010]

【実施例】以下、本発明を一実施例を図1乃至図5に従
って説明する。本発明の圧力センサ11の平面図を図1
に、外観正面図を図2に示し、該センサの断面図が図3
に示されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. FIG. 1 is a plan view of a pressure sensor 11 of the present invention.
FIG. 2 shows a front view of the external appearance, and FIG.
Is shown in

【0011】ハウジング12内には圧力導入口13を通
じて受圧する平坦な円盤形状をなした容量性圧力変換器
14のダイヤフラム15がガスケット16等で気密にシ
ールされ、この圧力変換器14のダイヤフラム15と反
対側面には電気コネクタ18のフランジ部18bに内包
された電気回路22を有する回路基板23と、この回路
基板23を支持する中空の支持部材17とが前記圧力変
換器14と重なるように配置され、前記ハウジング12
の開口縁部12aをカシメ等することにより固着してい
る。
In the housing 12, a flat disk-shaped diaphragm 15 of a capacitive pressure transducer 14 which receives pressure through a pressure inlet 13 is hermetically sealed with a gasket 16 or the like. On the opposite side, a circuit board 23 having an electric circuit 22 included in the flange portion 18b of the electric connector 18 and a hollow support member 17 supporting the circuit board 23 are arranged so as to overlap the pressure transducer 14. , The housing 12
Are fixed by caulking or the like.

【0012】前記圧力変換器14はアルミナ等のセラミ
ック材料で形成されたダイヤフラム15を有し、このダ
イヤフラム15はガラスシール材等によりセラミック基
部19に対して所定の間隔を設けて対向配置される。こ
のダイヤフラム15とセラミック基部19の対向面に
は、加えられる圧力によって変化する静電容量を有した
コンデンサが金属被覆で形成されている。
The pressure transducer 14 has a diaphragm 15 made of a ceramic material such as alumina, and the diaphragm 15 is opposed to a ceramic base 19 at a predetermined distance by a glass sealing material or the like. A capacitor having a capacitance that changes according to the applied pressure is formed by metal coating on the opposing surface of the diaphragm 15 and the ceramic base 19.

【0013】前記電気コネクタ18は本体部を貫通し前
記回路基板23に電気的に結合される複数のコネクタ端
子24,25,26と、前記回路基板23及び支持部材
17を内包するフランジ部分18bと、このフランジ部
分18bの円周上に回路基板23の変換器端子接続位置
まで切欠された図4に示すような凹部18cとを有す
る。
The electrical connector 18 has a plurality of connector terminals 24, 25, 26 which penetrate the main body and are electrically connected to the circuit board 23, and a flange portion 18b containing the circuit board 23 and the support member 17. On the circumference of the flange portion 18b, there is provided a concave portion 18c as shown in FIG.

【0014】本発明による前記圧力変換器14と電気回
路22との電気的な結合は、半田付により行われる。図
3に示す実施例では、圧力変換器14の出力がセラミッ
ク基部19を通って反対側面19aから金属端子20、
21を介して引き出される。前記金属端子20,21
は、図4及び図5に示すようなクランク形状に折れ曲っ
て圧力変換器14の外周側に突出し、前記フランジ部分
18bの円周上凹部18cに嵌合されて回路基板23と
結合されるように構成されている。また、前記金属端子
20,21と電気回路基板23との結合は、前記切欠部
18cの一側面から光ビームやヒータなどの半田付装置
を用いて半田付で確実に固着される。
The electrical connection between the pressure transducer 14 and the electric circuit 22 according to the present invention is performed by soldering. In the embodiment shown in FIG. 3, the output of the pressure transducer 14 passes through the ceramic base 19 and from the opposite side 19a to the metal terminal 20,
Withdrawn through 21. The metal terminals 20, 21
Is bent into a crank shape as shown in FIGS. 4 and 5 so as to protrude to the outer peripheral side of the pressure transducer 14, and is fitted into the circumferential concave portion 18c of the flange portion 18b to be connected to the circuit board 23. Is configured. The connection between the metal terminals 20, 21 and the electric circuit board 23 is securely fixed by soldering from one side surface of the cutout portion 18c using a soldering device such as a light beam or a heater.

【0015】前記回路基板23はポリブチレンテレフタ
レート等の電気絶縁材料で中空円筒状に整形された支持
部材17によって圧力変換器14と所定の間隔を保持し
て位置が定まるようにしてあり、また該回路基板23は
容量性圧力変換器14に加えられる圧力に相当した電気
信号を出力するような電気回路22を備えている。
The circuit board 23 has a hollow cylindrical support member 17 made of an electrically insulating material such as polybutylene terephthalate or the like, and is positioned at a predetermined distance from the pressure transducer 14 so as to be positioned. The circuit board 23 includes an electric circuit 22 that outputs an electric signal corresponding to the pressure applied to the capacitive pressure transducer 14.

【0016】この電気回路22は例えば特開平2−78
912号公報で開示されているため詳細な説明は省略す
るが、集積回路ユニット、抵抗器、コンデンサ等の回路
構成要素を有することを付記しておく。本実施例では、
前記電気回路22は耐熱、耐湿度の特性が良好なセラミ
ック材料の両面スルーホールの電気回路基板23を有し
ている。
The electric circuit 22 is disclosed in, for example, Japanese Patent Laid-Open No. 2-78.
Although the detailed description is omitted because it is disclosed in Japanese Patent Application Laid-Open No. 912, it is noted that it has circuit components such as an integrated circuit unit, a resistor, and a capacitor. In this embodiment,
The electric circuit 22 has an electric circuit board 23 having through holes on both sides made of a ceramic material having good heat resistance and humidity resistance.

【0017】前記電気コネクタ18はガラスで補強され
たポリブチレンテレフタレートのような電気絶縁材で形
成され、支持部材17を内包して重なる関係に配置され
る。この電気コネクタ18はカップ形をなすものであっ
て、外部へ信号の受け渡しをする複数本のコネクタ端子
24,25,26と、このコネクタ端子24〜26を被
うコネクタ嵌合・着脱のためのガイド筒部18aと、こ
のガイド筒部18aと結合されるコネクタの抜け防止の
ための凸部18dと、該凸部18dに係合し前記ガイド
筒部18aの内側に嵌合した内筒27と、前記支持部材
17と電気回路22とを内包し圧力変換器14の反対側
面19aに重なるところまで一体成形で延びるフランジ
部18bとを有する。そして、前記コネクタ18の回路
基板23で区画される内部空室28,29に電気回路2
2の電気部品が実装されるようになっている。
The electric connector 18 is formed of an electrically insulating material such as polybutylene terephthalate reinforced with glass, and is arranged in a superposed relation with the support member 17 included therein. The electric connector 18 has a cup shape, and has a plurality of connector terminals 24, 25, and 26 for transmitting and receiving signals to the outside, and a connector for covering / connecting the connector terminals 24-26. A guide cylinder 18a, a projection 18d for preventing a connector coupled with the guide cylinder 18a from coming off, and an inner cylinder 27 engaged with the projection 18d and fitted inside the guide cylinder 18a. And a flange portion 18b including the support member 17 and the electric circuit 22 and integrally extending to a position overlapping the opposite side surface 19a of the pressure transducer 14. The electric circuit 2 is stored in the internal vacancies 28 and 29 defined by the circuit board 23 of the connector 18.
2 electrical components are mounted.

【0018】前記コネクタ端子24,25,26は、電
気コネクタ18の本体部を貫通して回路基板23の一面
23aまで延出し、前記フランジ部18bの中に安定的
に固着された回路基板23と半田付等により電気的に結
合される。また、前記コネクタ18のフランジ部分18
bの外周には環状溝を設け、この環状溝にOリング30
を図3の如く挿入することにより、ハウジング縁部12
aのカシメ部より水分や有害な塵埃が侵入することを防
ぐことができるようにしている。
The connector terminals 24, 25, and 26 extend through the body of the electrical connector 18 to one surface 23a of the circuit board 23, and are connected to the circuit board 23 stably fixed in the flange portion 18b. They are electrically connected by soldering or the like. Further, the flange portion 18 of the connector 18
b, an annular groove is provided on the outer periphery thereof.
Is inserted as shown in FIG.
In this way, it is possible to prevent moisture and harmful dust from entering from the caulking portion a.

【0019】なお、本発明の圧力センサは上記実施例に
限定されるものではなく、例えば図6に示すような圧力
変換器14を適用するものであってもよい。この圧力変
換器14はセラミック基部19の外周壁面19bに軸方
向の切欠部19cを設け、この切欠部19cにクランク
形状に折曲された金属端子20,21をダイヤフラム1
5と反対側面19aに突出するように固着し、この金属
端子20,21の突出部を電気回路基板23と接続させ
るように構成したもので、これにより上記実施例と同様
の効果が得られる。
The pressure sensor according to the present invention is not limited to the above-described embodiment, and may employ a pressure transducer 14 as shown in FIG. 6, for example. The pressure transducer 14 is provided with a notch 19c in the axial direction on the outer peripheral wall 19b of the ceramic base 19, and the metal terminals 20, 21 bent in a crank shape are provided in the notch 19c.
The metal terminals 20 and 21 are fixed so as to protrude from the side surface 19a opposite to the side 5 so that the protruding portions of the metal terminals 20 and 21 are connected to the electric circuit board 23, whereby the same effect as in the above embodiment can be obtained.

【0020】本発明による圧力センサは容量性のもので
あるため、圧力変換器14に対する電気回路22の調整
は、外部電界や浮遊容量の影響を避けるためハウジング
12へ装着後に行う必要がある。このため図1及び図3
に示すように、電気コネクタ18にガイド筒部18aの
内底面18eからこの反対面18fまで貫通する複数の
調整孔31,32を設け、この調整孔31,32を通し
て外部から挿入される回転ドライバー等を用いて、電気
回路22のトリマコンデンサ33を調整し得るように構
成している。
Since the pressure sensor according to the present invention is capacitive, the adjustment of the electric circuit 22 to the pressure transducer 14 needs to be performed after mounting on the housing 12 in order to avoid the influence of an external electric field or stray capacitance. 1 and 3
As shown in FIG. 3, the electric connector 18 is provided with a plurality of adjusting holes 31 and 32 penetrating from the inner bottom surface 18e of the guide tube portion 18a to the opposite surface 18f, and a rotary driver or the like inserted from the outside through the adjusting holes 31 and 32. Is used to adjust the trimmer capacitor 33 of the electric circuit 22.

【0021】前記トリマコンデンサ33の調整が終了し
たら前記調整孔31,32には、外部からの水分侵入を
防ぐため蛇腹状のパッキンと一体成形されたゴム栓34
が各調整孔31,32の開口部を密封するように挿入さ
れる。
When the adjustment of the trimmer capacitor 33 is completed, a rubber stopper 34 integrally formed with a bellows-like packing is inserted into the adjustment holes 31 and 32 to prevent moisture from entering from outside.
Are inserted so as to seal the openings of the adjustment holes 31 and 32.

【0022】[0022]

【発明の効果】本発明の圧力センサは、特許請求の範囲
に記載の構成を要旨とするものであるから、特に大量生
産の組立工程において、従来技術の欠点にみられたよう
な電気回路と圧力変換器の嵌合ミスがなく、自動組立装
置で容易に且つ確実に組立てることができ、品質面での
向上が得られる等の優れた発明上の効果を奏する。
The gist of the pressure sensor of the present invention has the features described in the claims. Therefore, particularly in the assembly process of mass production, the pressure sensor and the electric circuit which are disadvantageous in the prior art are used. There are no fitting errors of the pressure transducer, the assembly can be easily and reliably performed by the automatic assembling apparatus, and excellent effects such as improvement in quality can be obtained.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の一実施例による圧力センサの平面図。FIG. 1 is a plan view of a pressure sensor according to an embodiment of the present invention.

【図2】前記圧力センサの外観正面図。FIG. 2 is an external front view of the pressure sensor.

【図3】図1のA−A´線に沿う縦断面図。FIG. 3 is a longitudinal sectional view taken along line AA ′ of FIG. 1;

【図4】前記圧力センサの要部展開斜視図。FIG. 4 is an exploded perspective view of a main part of the pressure sensor.

【図5】図4に示す圧力変換器を別の角度から見た斜視
図。
FIG. 5 is a perspective view of the pressure transducer shown in FIG. 4 as viewed from another angle.

【図6】前記圧力変換器の変形例を示す外観斜視図。FIG. 6 is an external perspective view showing a modified example of the pressure transducer.

【図7】従来の圧力センサを示す縦断面図。FIG. 7 is a longitudinal sectional view showing a conventional pressure sensor.

【符号の説明】[Explanation of symbols]

12…ハウジング、13…圧力導入口、14…容量性圧
力変換器、15…ダイヤフラム、18…電気コネクタ、
18c…凹部、20,21…金属端子、22…電気回
路、23…電気回路基板、24,25,26…コネクタ
端子。
12 housing, 13 pressure inlet, 14 capacitive pressure transducer, 15 diaphragm, 18 electrical connector,
18c: recess, 20, 21: metal terminal, 22: electric circuit, 23: electric circuit board, 24, 25, 26: connector terminal.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 圧力導入口を有するハウジングと、該ハ
ウジング内に配置される容量性圧力変換器と、前記ハウ
ジング内に前記圧力変換器から所定の間隔をとって固定
される両面に電子部品を実装した電気回路基板を用いる
電気回路と、この電気回路基板を支持する中空の支持部
材と、この支持部材と前記回路基板を内包し前記ハウジ
ングに結合されるカップ形の電気コネクタとを具備する
圧力センサにおいて、前記電気コネクタが本体部を貫通
し前記回路基板に電気的に結合される複数のコネクタ端
子と、前記回路基板及び支持部材を内包するフランジ部
分と、このフランジ部分の円周上に回路基板の変換器端
子接続位置まで切欠された凹部とを備え、この凹部内に
前記圧力変換器のクランク形状に折曲された複数の金属
端子を嵌合して上記電気回路と電気的に結合させたこと
を特徴とする圧力センサ。
1. A housing having a pressure inlet, a capacitive pressure transducer disposed in the housing, and electronic components mounted on both surfaces fixed in the housing at a predetermined distance from the pressure transducer. A pressure circuit comprising: an electric circuit using the mounted electric circuit board; a hollow support member that supports the electric circuit board; and a cup-shaped electric connector that includes the support member and the circuit board and is coupled to the housing. In the sensor, a plurality of connector terminals through which the electrical connector penetrates the main body and is electrically coupled to the circuit board; a flange portion including the circuit board and the support member; and a circuit on a circumference of the flange portion. A recess cut out to the transducer terminal connection position of the substrate, and a plurality of metal terminals bent into a crank shape of the pressure transducer are fitted into the recess, and A pressure sensor characterized by being electrically coupled to an electric circuit.
【請求項2】 前記圧力変換器が外周壁面の軸方向に向
かう切欠部を有し、この切欠部にクランク形状に折曲さ
れた金属端子をダイヤフラムと反対側面に突出するよう
に固着し、この金属端子の突出部を前記回路基板と接続
させるように構成されていることを特徴とする請求項1
記載の圧力センサ。
2. The pressure transducer has a notch in an axial direction of an outer peripheral wall surface, and a metal terminal bent in a crank shape is fixed to the notch so as to protrude to a side opposite to the diaphragm. 2. The structure according to claim 1, wherein the protrusion of the metal terminal is connected to the circuit board.
A pressure sensor as described.
JP16315895A 1995-06-29 1995-06-29 Pressure sensor Expired - Lifetime JP2661643B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16315895A JP2661643B2 (en) 1995-06-29 1995-06-29 Pressure sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16315895A JP2661643B2 (en) 1995-06-29 1995-06-29 Pressure sensor

Publications (2)

Publication Number Publication Date
JPH0821779A JPH0821779A (en) 1996-01-23
JP2661643B2 true JP2661643B2 (en) 1997-10-08

Family

ID=15768340

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16315895A Expired - Lifetime JP2661643B2 (en) 1995-06-29 1995-06-29 Pressure sensor

Country Status (1)

Country Link
JP (1) JP2661643B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4014653B2 (en) * 1997-12-09 2007-11-28 北陸電気工業株式会社 Capacitance type pressure sensor unit

Also Published As

Publication number Publication date
JPH0821779A (en) 1996-01-23

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