JP2656628B2 - Method for manufacturing substrate of optical information recording medium and method for manufacturing roller used in the method - Google Patents

Method for manufacturing substrate of optical information recording medium and method for manufacturing roller used in the method

Info

Publication number
JP2656628B2
JP2656628B2 JP1205628A JP20562889A JP2656628B2 JP 2656628 B2 JP2656628 B2 JP 2656628B2 JP 1205628 A JP1205628 A JP 1205628A JP 20562889 A JP20562889 A JP 20562889A JP 2656628 B2 JP2656628 B2 JP 2656628B2
Authority
JP
Japan
Prior art keywords
manufacturing
substrate
adhesive
recording medium
optical information
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP1205628A
Other languages
Japanese (ja)
Other versions
JPH0369338A (en
Inventor
哲也 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP1205628A priority Critical patent/JP2656628B2/en
Publication of JPH0369338A publication Critical patent/JPH0369338A/en
Application granted granted Critical
Publication of JP2656628B2 publication Critical patent/JP2656628B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、光を用いて記録再生する光情報記録媒体の
基板の製造方法等に関する。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a substrate of an optical information recording medium for recording and reproducing using light.

〔従来の技術〕[Conventional technology]

光情報記録媒体の基板は、通常、案内溝やアドレス信
号などのための微細な凹凸パターンを有している。この
ような基板の製造方法としては、インジェクション成形
法、コンプレッション成形法などが一般に行なわれてい
る。しかし、これらの方法においては生産効率がまだ十
分でない。また、凹凸成型が高温高圧下で行なわれるの
で微細凹凸形状を有する金型が劣化し易く、基板の平面
度、平滑度、反り、気泡の混入などの点でまだ十分でな
い。
The substrate of the optical information recording medium usually has a fine uneven pattern for guide grooves, address signals, and the like. As a method of manufacturing such a substrate, an injection molding method, a compression molding method, and the like are generally performed. However, production efficiency is not yet sufficient in these methods. In addition, since the concavo-convex molding is performed under a high temperature and a high pressure, a mold having a fine concavo-convex shape is apt to be deteriorated, and the flatness, smoothness, warpage, mixing of bubbles, etc. of the substrate are not yet sufficient.

そこで、プラスチック平板に、記録信号に対応する凹
凸形状を有する薄板(以下、スタンパと称する)を密着
させて圧力を加え、この凹凸を転写する方法を提案され
ている。この方法において、あらかじめ気泡の混入の無
い良好な平滑度のプラスチック平板を成形することはそ
れほど困難でない。しかしこの方法では、成形時にスタ
ンパ全体に圧力を加えるので、非常に強い力で圧力付与
しなければならない。また、製造工程の連続化において
もまだ十分でない。
Therefore, a method has been proposed in which a thin plate (hereinafter, referred to as a stamper) having an uneven shape corresponding to a recording signal is closely attached to a plastic flat plate and pressure is applied to transfer the unevenness. In this method, it is not so difficult to previously form a plastic flat plate having good smoothness without air bubbles. However, in this method, since pressure is applied to the entire stamper at the time of molding, pressure must be applied with a very strong force. Further, continuation of the manufacturing process is not yet sufficient.

そこで従来より、押出し成形機とローラを使用して連
続的に基板を製造する方法(以下、押出し成形法と称す
る)が検討されていた。この押出し成形法を良好に行な
うことができれば、工程の連続化が容易となり、使用す
るローラ上の凹凸用金型は、高温高圧下にさらされるこ
とがないので金型劣化が生じ難く、またローラにより押
圧するので比較的弱い力で圧力付与しても十分と予想さ
れる。
Therefore, a method of continuously manufacturing a substrate using an extruder and a roller (hereinafter, referred to as an extrusion method) has been studied. If this extrusion molding method can be performed well, the continuation of the process becomes easy, and the mold for unevenness on the roller to be used is not exposed to high temperature and high pressure, so that the mold is hardly deteriorated, and Therefore, it is expected that it is sufficient to apply pressure with a relatively weak force.

〔発明が解決しようとする課題〕[Problems to be solved by the invention]

しかし上記押出し成形法には、以下のような課題等が
残っていた。
However, the following problems remain in the extrusion molding method.

課題の一つは、高精度の凹凸パターンを形成すること
が困難な点にある。この凹凸パターンの精度は、光情報
記録媒体において非常に重要な点であり、この精度が低
いと光情報記録媒体の機能を著しく損することとなる。
One of the problems is that it is difficult to form a highly accurate uneven pattern. The accuracy of the concavo-convex pattern is very important in an optical information recording medium, and if the accuracy is low, the function of the optical information recording medium is significantly impaired.

課題のもう一つは、製造上のメンテナンスが非常に煩
雑な点にある。例えば、高精度の凹凸パターンを形成す
るには、寸法精度、温度精度等を一定にすべくローラの
回転軸を堅固に固定するのが通常である。したがって、
ローラの表面凹凸部にゴミや傷が付いた場合、ローラを
取り替える時に作業上困難を伴なう。
Another problem is that maintenance in manufacturing is very complicated. For example, in order to form a highly accurate uneven pattern, it is usual to firmly fix the rotating shaft of the roller in order to keep the dimensional accuracy, temperature accuracy and the like constant. Therefore,
If dirt or scratches are formed on the uneven surface of the roller, it may be difficult to replace the roller.

本発明は、このような課題を解決して押出し成形法の
実用化を達成すべくなされたものである。すなわち本発
明の主な目的は、高精度の凹凸パターンを形成でき、製
造上のメンテナンスが簡易であり、かつ生産効率が良
く、金型が劣化し難い、光情報記録媒体の基板の製造方
法を提供することにある。
The present invention has been made to solve such a problem and achieve the practical use of an extrusion molding method. That is, a main object of the present invention is to provide a method for manufacturing a substrate of an optical information recording medium, which can form a highly accurate concave and convex pattern, facilitates maintenance in manufacturing, has good production efficiency, and is unlikely to deteriorate a mold. To provide.

〔課題を解決するための手段〕[Means for solving the problem]

本発明は、押出し成形機により基板材料をシート状に
押出し、記録信号に対応する凹凸形状を有するローラで
該シート状押出し物を押圧することにより、該凹凸形状
を該シート状押出し物に転写する工程を含む光情報記録
媒体の基板の製造方法において、該ローラが、円筒部材
の周壁上に、接着剤を介して、信号記録に対応する凹凸
形状が形成された薄板を、該薄板の上から熱収縮チュー
ブにより固定し、該接着剤を硬化せしめ、該熱収縮チュ
ーブを薄板上から取外す工程を有する方法により製造さ
れたローラであることを特徴とする光情報記録媒体の基
板の製造方法、およびその光情報記録媒体の基板製造用
ローラの製造方法である。
In the present invention, the substrate material is extruded into a sheet by an extruder, and the sheet-shaped extruded material is pressed by a roller having a concavo-convex shape corresponding to a recording signal, thereby transferring the irregularity shape to the sheet-shaped extruded material. In the method for manufacturing a substrate of an optical information recording medium including a step, the roller, on the peripheral wall of the cylindrical member, via an adhesive, a thin plate formed with irregularities corresponding to signal recording, from above the thin plate A method for manufacturing a substrate for an optical information recording medium, comprising a roller manufactured by a method having a step of fixing with a heat-shrinkable tube, curing the adhesive, and removing the heat-shrinkable tube from a thin plate, and This is a method for manufacturing a roller for manufacturing a substrate of the optical information recording medium.

〔実施例〕〔Example〕

以下、図面を参照しつつ、本発明の実施例について説
明する。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.

実施例1 スタンパの作製: まず、第1図に示すように、ガラス等の原盤用基板1
上に均一の厚さのレジスト膜2を形成して原盤3を得
る。次いで、第2図に示すように、この原盤3を回転さ
せながら、所定の情報信号やトラッキング信号によって
変調されたレーザ光4をレジスト膜2に照射する。次い
で、この露光部分または未露光部分を除去(現像処理)
することによって、上記情報信号に対応するグルーブを
形成する。次いでその面に、第3図に示すように、スパ
ッタ法等によりNi等の金属導電膜6を形成する。次い
で、第4図に示すように、金属導電膜6を陰極として、
スタンパ用基材を所定の厚さに電鋳することによって電
鋳膜7を形成する。次いで、第5図に示すように、金属
導電膜6と共に電鋳膜7を離型して、反転凹凸パターン
を有する所望のスタンパ8を得る。
Example 1 Production of Stamper: First, as shown in FIG.
A master film 3 is obtained by forming a resist film 2 having a uniform thickness thereon. Next, as shown in FIG. 2, the resist film 2 is irradiated with a laser beam 4 modulated by a predetermined information signal or tracking signal while rotating the master 3. Next, the exposed or unexposed portions are removed (development processing).
By doing so, a groove corresponding to the information signal is formed. Next, as shown in FIG. 3, a metal conductive film 6 of Ni or the like is formed on the surface by a sputtering method or the like. Next, as shown in FIG. 4, using the metal conductive film 6 as a cathode,
The electroformed film 7 is formed by electroforming the stamper base material to a predetermined thickness. Next, as shown in FIG. 5, the electroformed film 7 is released together with the metal conductive film 6 to obtain a desired stamper 8 having an inverted concavo-convex pattern.

スタンパ8は、厚すぎるとローラへの密着が悪くな
り、薄すぎるとテンションを付与した場合に変形してし
まうので、適当な厚みが必要となる。例えば、Ni電鋳に
より作製したスタンパの場合、その厚みは0.03〜0.50mm
程度が望ましく、0.05〜0.03mm程度が望ましい。
If the stamper 8 is too thick, the adhesion to the roller deteriorates. If the stamper 8 is too thin, it deforms when tension is applied. For example, in the case of a stamper manufactured by Ni electroforming, the thickness is 0.03 to 0.50 mm
About 0.05 to 0.03 mm is desirable.

第6図に示すように、円筒部材9の周壁上に、接着剤
16を介して、上記で作製したスタンパ8を熱収縮チュー
ブ17により固定する。この状態で、接着剤16を硬化せし
め、その後、熱収縮チューブ17を取外し、光情報記録媒
体の基板製造用ローラを得る。なお、円筒部材9の周壁
は鏡面であることが望ましい。
As shown in FIG. 6, an adhesive is provided on the peripheral wall of the cylindrical member 9.
The stamper 8 produced as described above is fixed by a heat shrink tube 17 via 16. In this state, the adhesive 16 is cured, and then the heat-shrinkable tube 17 is removed to obtain a roller for manufacturing a substrate for an optical information recording medium. The peripheral wall of the cylindrical member 9 is desirably a mirror surface.

本実施例においてスタンパ8は、ローラに周設でき、
基板に所望の凹凸を形成できるような薄板であれば良
く、その材料、サイズなどに特に限定はない。ただし、
その材料としては、一般にニッケルが用いられる。ま
た、スタンパ8が厚すぎると、後の円筒部材への周設が
困難となる。一方、薄すぎるとスタンパ8が折れやすく
なる。上記点からスタンパの厚みは、30〜500μm程度
が望ましく、50μm〜300μm程度が好ましい。
In this embodiment, the stamper 8 can be provided around the roller,
Any material may be used as long as it is a thin plate capable of forming desired irregularities on the substrate, and the material, size, and the like are not particularly limited. However,
Nickel is generally used as the material. On the other hand, if the stamper 8 is too thick, it will be difficult to provide a periphery around the cylindrical member later. On the other hand, if it is too thin, the stamper 8 will be easily broken. From the above point, the thickness of the stamper is preferably about 30 to 500 μm, and more preferably about 50 to 300 μm.

本実施例において、例えば基板材料としてポリカーボ
ネートを使用した場合は、凹凸成形時のローラ温度が12
0℃〜150℃程度になるので、その程度の温度においても
悪影響を受けないような耐熱性を有する接着剤を使用す
ることが望ましい。そのような接着剤としては、エポキ
シ樹脂系接着剤、シアノアクリレート系接着剤等があ
る。接着剤14の厚みは、適度に薄い方が、接着力、ム
ラ、平面性、耐久性等の点で望ましい。種々の条件に応
じて最適値は異なるが、接着剤16の厚みは50μm以下が
好ましい。
In the present embodiment, for example, when polycarbonate is used as the substrate material, the roller temperature at the time of forming the unevenness is 12
Since the temperature is about 0 ° C. to 150 ° C., it is desirable to use an adhesive having heat resistance so as not to be adversely affected even at such a temperature. Examples of such an adhesive include an epoxy resin-based adhesive and a cyanoacrylate-based adhesive. It is desirable that the thickness of the adhesive 14 be appropriately thin in terms of adhesive strength, unevenness, flatness, durability, and the like. Although the optimum value varies depending on various conditions, the thickness of the adhesive 16 is preferably 50 μm or less.

本実施例においては、まず、熱収縮チューブ17が適度
に収縮し且つ接着剤16が流動性を有する程度の温度で加
熱することが望ましい。その加熱温度は、80℃〜120℃
程度が適当である。このような加熱を行なえば、熱収縮
チューブ17の収縮する力によりスタンパ8が内側に均一
に押され、それに伴ない接着剤16が全体的に均一にな
り、その結果スタンパ8が変形せずに均一に固定され
る。
In the present embodiment, first, it is desirable to heat at a temperature at which the heat-shrinkable tube 17 shrinks appropriately and the adhesive 16 has fluidity. The heating temperature is 80 ℃ ~ 120 ℃
The degree is appropriate. When such heating is performed, the stamper 8 is uniformly pushed inward by the contracting force of the heat-shrinkable tube 17, and the adhesive 16 is thereby uniformly uniform as a result, so that the stamper 8 is not deformed. It is fixed uniformly.

上記のように良好な固定状態にしてから、接着剤16が
硬化する温度で加熱する。先に述べたような120℃〜150
℃程度でも適度な耐熱性を有する接着剤の硬化温度は20
0℃以上である。接着剤が十分に硬化した後、熱収縮チ
ューブ17を取外し、このローラを光情報記録媒体の基板
製造に使用する。
After the fixing state is good as described above, heating is performed at a temperature at which the adhesive 16 hardens. 120 ° C to 150 as described above
Curing temperature of adhesive with moderate heat resistance is about 20 ℃
0 ° C or higher. After the adhesive has sufficiently hardened, the heat-shrinkable tube 17 is removed, and the roller is used for manufacturing a substrate of an optical information recording medium.

熱収縮チューブ17としては、スタンパに傷が付かない
ような柔らかいものが望ましく、ポリテトラフルオロエ
チレン(PTFE)等を用いることが望ましい。ただし、熱
収縮チューブ17は上記熱収縮作用を適度に奏するもので
あれば良く、PTFEに限定されるものではない。例えば、
PTFE以外には、4−6フッ化樹脂,4フッ化エチレン−パ
ーフルオロアルキルビニルエーテル共重合樹脂などが使
用可能である。
The heat-shrinkable tube 17 is desirably soft so as not to damage the stamper, and desirably uses polytetrafluoroethylene (PTFE) or the like. However, the heat-shrinkable tube 17 is not limited to PTFE as long as it has the appropriate heat-shrinking action. For example,
Other than PTFE, 4-6 fluorinated resin, tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer resin and the like can be used.

本実施例のように熱収縮チューブで作製したローラ
は、スタンパの間の接着剤16の厚みも均一になる。した
がって、高精度の凹凸を有したローラであり、それ故に
高精度の凹凸を基板に形成できるので、光情報記録媒体
の基板の製造に非常に適したローラである。
In the roller made of a heat-shrinkable tube as in this embodiment, the thickness of the adhesive 16 between the stampers is also uniform. Therefore, the roller is a roller having high-precision irregularities and, therefore, can form high-accuracy irregularities on a substrate, and thus is a roller very suitable for manufacturing a substrate of an optical information recording medium.

〔発明の効果〕〔The invention's effect〕

以上説明したように、本発明の光情報記録媒体の基板
の製造方法は、連続化が容易で生産効率が良く、金型が
劣化し難い押出し成形法であり、且つ高精度の凹凸パタ
ーンを形成でき、製造上のメンテナンスが簡易な製造方
法である。
As described above, the method for manufacturing a substrate of an optical information recording medium according to the present invention is an extrusion molding method in which continuity is easy, production efficiency is good, and a mold is hardly deteriorated, and a highly accurate uneven pattern is formed. This is a manufacturing method that can be performed and maintenance is easy.

また、本発明の光情報記録媒体の基板の製造方法に使
用するローラは、押出し成形法の実用化を達成し得る非
常に好適なローラである。
Further, the roller used in the method for manufacturing a substrate of an optical information recording medium of the present invention is a very suitable roller capable of achieving practical use of the extrusion molding method.

また、本発明の光情報記録媒体の基板製造用ローラの
製造方法は、押出し成形法に使用するローラの凹凸を非
常に高精度且つ良好に形成できる方法である。
Further, the method of manufacturing a roller for manufacturing a substrate of an optical information recording medium according to the present invention is a method capable of forming the unevenness of the roller used in the extrusion molding method with very high precision and goodness.

【図面の簡単な説明】[Brief description of the drawings]

第1図〜第5図は電鋳法によるスタンパ作製工程を示す
図、第6図は、実施例1のローラの製造における一過程
を示す模式的断面図である。 1……原盤用基体、2……レジスト膜、3……原盤 4……レーザー光、6……金属導電膜、7……電鋳膜 8……スタンパ、9……円筒部材、16……接着剤 17……熱収縮チューブ
1 to 5 are views showing a stamper manufacturing process by an electroforming method, and FIG. 6 is a schematic cross-sectional view showing one process in manufacturing the roller of the first embodiment. DESCRIPTION OF SYMBOLS 1 ... Base material for master 2 ... Resist film 3 ... Master 4 ... Laser light 6 ... Metal conductive film 7 ... Electroformed film 8 ... Stamper 9 ... Cylindrical member 16 ... Adhesive 17 …… Heat shrink tube

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】押出し成形機により基板材料をシート状に
押出し、記録信号に対応する凹凸形状を有するローラで
該シート状押出し物を押圧することにより、該凹凸形状
を該シート状押出し物に転写する工程を含む光情報記録
媒体の基板の製造方法において、該ローラが、円筒部材
の周壁上に、接着剤を介して、信号記録に対応する凹凸
形状が形成された薄板を、該薄板の上から熱収縮チュー
ブにより固定し、該接着剤を硬化せしめ、該熱収縮チュ
ーブを薄板上から取外す工程を有する方法により製造さ
れたローラであることを特徴とする光情報記録媒体の基
板の製造方法。
An extruder extrudes a substrate material into a sheet and presses the sheet extrudate with a roller having a concavo-convex shape corresponding to a recording signal, thereby transferring the concavo-convex shape to the sheet-like extrudate. In the method for manufacturing a substrate of an optical information recording medium, the method comprises the steps of: forming a thin plate on which an uneven shape corresponding to signal recording is formed on a peripheral wall of a cylindrical member through an adhesive on the thin plate; A method of manufacturing a substrate for an optical information recording medium, comprising: a roller having a process of fixing the adhesive with a heat-shrinkable tube, curing the adhesive, and removing the heat-shrinkable tube from a thin plate.
【請求項2】円筒部材の周壁上に、接着剤を介して、信
号記録に対応する凹凸形状が形成された薄板を、該薄板
の上から熱収縮チューブにより固定し、該接着剤を硬化
せしめ、該熱収縮チューブを薄板上から取外す工程を有
する、光情報記録媒体の基板製造用ローラの製造方法。
2. A thin plate having irregularities corresponding to signal recording formed on the peripheral wall of a cylindrical member via an adhesive is fixed from above the thin plate with a heat-shrinkable tube, and the adhesive is cured. A method of manufacturing a substrate manufacturing roller for an optical information recording medium, comprising a step of removing the heat-shrinkable tube from a thin plate.
JP1205628A 1989-08-10 1989-08-10 Method for manufacturing substrate of optical information recording medium and method for manufacturing roller used in the method Expired - Fee Related JP2656628B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1205628A JP2656628B2 (en) 1989-08-10 1989-08-10 Method for manufacturing substrate of optical information recording medium and method for manufacturing roller used in the method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1205628A JP2656628B2 (en) 1989-08-10 1989-08-10 Method for manufacturing substrate of optical information recording medium and method for manufacturing roller used in the method

Publications (2)

Publication Number Publication Date
JPH0369338A JPH0369338A (en) 1991-03-25
JP2656628B2 true JP2656628B2 (en) 1997-09-24

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JP (1) JP2656628B2 (en)

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KR20020076714A (en) * 2001-03-30 2002-10-11 이종근 insulated metal flexible duct hose
KR100462159B1 (en) * 2001-05-28 2004-12-17 안덕노 hollow panel and it's manufacturing apparatus
TWI322927B (en) * 2006-05-24 2010-04-01 Ind Tech Res Inst Roller module for microstructure thin film imprint
KR100774594B1 (en) * 2006-07-19 2007-11-09 (주)나노솔루션 Manufacturing apparatus for film used micro or nano size pattern

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JPS5686721A (en) * 1979-12-17 1981-07-14 Toppan Printing Co Ltd Preparation of information recording disk
JP2696814B2 (en) * 1986-02-18 1998-01-14 凸版印刷株式会社 Method of manufacturing hologram forming sheet

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