JP2645526B2 - Fluid bearing type optical deflector - Google Patents
Fluid bearing type optical deflectorInfo
- Publication number
- JP2645526B2 JP2645526B2 JP2159479A JP15947990A JP2645526B2 JP 2645526 B2 JP2645526 B2 JP 2645526B2 JP 2159479 A JP2159479 A JP 2159479A JP 15947990 A JP15947990 A JP 15947990A JP 2645526 B2 JP2645526 B2 JP 2645526B2
- Authority
- JP
- Japan
- Prior art keywords
- dynamic pressure
- sleeve
- pressure generating
- fixed
- fixed shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Mechanical Optical Scanning Systems (AREA)
Description
【発明の詳細な説明】 (産業上の利用分野) 本発明は、レーザプリンタをはじめとする画像処理装
置の光走査系に用いられる流体軸受型光偏向器の構成に
関するものである。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a configuration of a fluid bearing type optical deflector used for an optical scanning system of an image processing apparatus such as a laser printer.
(従来の技術) 従来、この種の流体軸受型光偏向器は第2図に示すよ
に、固定軸、回転部材、回転部材駆動手段及び動圧発生
機構よりなる。(Prior Art) Conventionally, this type of hydrodynamic bearing type optical deflector comprises a fixed shaft, a rotating member, a rotating member driving means, and a dynamic pressure generating mechanism, as shown in FIG.
カップ状ケース15の中央部に起立形成した円筒状部15
aの内径内に、その外周に対称な一組の第1の動圧発生
溝22を刻設し、且つ上端面に円筒状の第1のスラストマ
グネット26を固着した固定軸7を嵌挿固着する。Cylindrical portion 15 formed upright at the center of cup-shaped case 15
A set of symmetrical first dynamic pressure generating grooves 22 is engraved on the outer circumference of the inner diameter of a, and a fixed shaft 7 having a cylindrical first thrust magnet 26 fixed to the upper end face is inserted and fixed. I do.
前記ケース15の円筒状部15aの外側にはマグネットワ
イヤ14を巻回した積層コア13を突設し、積層コア13に
は、支柱16を介し、ホール素子17とリード線19とを固着
した基板18を固着する。A substrate on which a laminated core 13 around which a magnet wire 14 is wound is protruded outside the cylindrical portion 15a of the case 15, and a Hall element 17 and a lead wire 19 are fixed to the laminated core 13 via a support post 16. Secure 18
前記固定軸7上端面に固着した第1のスラストマグネ
ット26に対向する第2のスラストマグネット27及び上蓋
25を固着した中空円筒状のスリーブ1を、前記固定軸7
に嵌挿する。A second thrust magnet 27 facing the first thrust magnet 26 fixed to the upper end surface of the fixed shaft 7 and an upper lid;
25 is fixed to the fixed shaft 7
Insert into.
前記スリーブ1の外周には、積層コア13外径及びホー
ル素子17に対向したマグネット12を内周面に固着したカ
ップ状可動ロータヨーク(以下単にロータヨークとい
う)11とを固着したリング状ハブ23を固着し、このハブ
23の上面に回転多面鏡9及びミラ押え板8とを順にボル
ト10にて固着する。A ring-shaped hub 23 is fixed to the outer periphery of the sleeve 1. The ring-shaped hub 23 is fixed to a cup-shaped movable rotor yoke (hereinafter simply referred to as a rotor yoke) 11 in which the magnet 12 facing the outer diameter of the laminated core 13 and the Hall element 17 is fixed to the inner peripheral surface. And this hub
The rotating polygon mirror 9 and the mirror holding plate 8 are fixed to the upper surface of the bolt 23 in order with bolts 10.
マグネットワイヤ14に通電することにより、ワイヤ14
が励磁されて、マグネット12との共働作用によるトルク
により、ロータヨーク11は所定方向へ回転するので、こ
のヨークに連結したハブ23、ハブ23に固着したスリーブ
1と共に回転多面鏡9が所定方向へ回転し、鏡面に入射
した光を所定方向へ走査するものである。この際スラス
トマグネット26と27との反応作用により、スリーブ1は
浮上しつつ、且つ流体が固定軸7に刻設した一組の動圧
発生溝22に衝突する作用により、スリーブ1を主体とす
る回転装置は固定軸7と非接触状態で円滑迅速な回転を
実施する。前述のように、所定方向へ回転する回転多面
鏡9の鏡面に反射した光は、所定方向への走査が可能と
なる。By energizing the magnet wire 14, the wire 14
Are excited, and the rotor yoke 11 rotates in a predetermined direction by the torque generated by the cooperative action with the magnet 12, so that the rotating polygon mirror 9 is moved in the predetermined direction together with the hub 23 connected to the yoke and the sleeve 1 fixed to the hub 23. It rotates and scans light incident on the mirror surface in a predetermined direction. At this time, the sleeve 1 is mainly floated by the reaction between the thrust magnets 26 and 27 and the fluid collides with a set of dynamic pressure generating grooves 22 formed on the fixed shaft 7 while the sleeve 1 floats. The rotating device performs smooth and quick rotation in a non-contact state with the fixed shaft 7. As described above, light reflected on the mirror surface of the rotating polygon mirror 9 rotating in a predetermined direction can be scanned in a predetermined direction.
(発明の解決しようとする課題) しかし、前記従来の光偏向器の構成では、スリーブ
1、ハブ23、回転多面鏡9、ロータヨーク11より成る回
転部材の軸受機構が固定軸7の外周に配設された第1の
動圧発生溝22の動圧発生部及び第1、第2のスラストマ
グネット26、27の間の磁気反発部に設けられているた
め、第1の動圧発生溝22の動圧発生部により、回転部材
の径方向運転は比較的高剛性に軸支されるものの、第1
と第2のスラストマグネット26及び27間の磁気反発力に
より抑制される回転部材の軸方向及び軸直角に対する揺
動運動の軸支は、前記動圧発生部に比較して剛性が低
く、十分な運動抑制とはならず、従って回転部材を形成
する光走査用の回転多面鏡9の回転方向以外の運動も充
分抑制出来ず、光偏向器の光走査精度向上を阻害する等
の問題点があった。(Problems to be Solved by the Invention) However, in the configuration of the conventional optical deflector, a bearing mechanism of a rotating member including the sleeve 1, the hub 23, the rotating polygon mirror 9, and the rotor yoke 11 is provided on the outer periphery of the fixed shaft 7. Since the first dynamic pressure generating groove 22 is provided in the dynamic pressure generating portion of the first dynamic pressure generating groove 22 and the magnetic repulsion portion between the first and second thrust magnets 26 and 27, the dynamic force of the first dynamic pressure generating groove 22 Although the radial direction operation of the rotating member is supported by the pressure generating section with relatively high rigidity, the first
The axial support of the rotating member, which is suppressed by the magnetic repulsive force between the first and second thrust magnets 26 and 27 and the pivotal motion of the rotating member with respect to the axis perpendicular to the axis, has a lower rigidity than that of the dynamic pressure generating portion, and is sufficient. The movement is not suppressed, and therefore, the movement of the optical scanning rotary polygon mirror 9 forming the rotating member in a direction other than the rotation direction cannot be sufficiently suppressed, and there is a problem that the optical deflector impairs the optical scanning accuracy. Was.
本発明は前述の問題点を解決することを目的とするも
のである。An object of the present invention is to solve the above-mentioned problems.
(課題を解決するための手段) 本発明においては、前記課題を解決するために、以下
の構成を具えた流体軸受型光偏向器を提供する。(Means for Solving the Problems) In the present invention, in order to solve the above problems, a hydrodynamic bearing type optical deflector having the following configuration is provided.
すなわち、ケース15の中央部に起立形成した円筒状部
15aと、この円筒状部15aに基部を嵌挿固定した固定軸7
と、固定軸7の外周に上下対称に刻設した一対の動圧発
生溝22と、この動圧発生溝22による動圧発生部を介して
前記固定軸7に回転自在に支えられるスリーブ1と、こ
のスリーブ1に取付けたハブ23を介してスリーブ1の外
周位置に固着した回転多面鏡9、及び前記ハブ23を介し
て前記スリーブ1に固着した回転部材駆動手段とからな
る流体軸受型光偏向器において、前記回転多面鏡9は、
前記固定軸7に刻設した一対の動圧発生溝22のパターン
の中央位置に対応するスリーブ1の外周位置で該スリー
ブ1に固着されており、かつ、前記スリーブ1の下端部
と前記円筒状部15aの上端部との間に、動圧発生溝によ
るスラスト軸受2と、このスラスト軸受2の直角度のず
れに対してならい変形し得る弾性を有するリング状のワ
ッシャ20を介装した流体軸受型光偏向器である。That is, the cylindrical portion formed upright at the center of the case 15
15a, and a fixed shaft 7 having a base fitted and fixed to the cylindrical portion 15a.
A pair of dynamic pressure generating grooves 22 engraved on the outer periphery of the fixed shaft 7 vertically symmetrically, and the sleeve 1 rotatably supported by the fixed shaft 7 via a dynamic pressure generating portion formed by the dynamic pressure generating grooves 22. A fluid bearing type optical deflection system comprising: a rotating polygon mirror 9 fixed to the outer peripheral position of the sleeve 1 via a hub 23 attached to the sleeve 1; and a rotating member driving means fixed to the sleeve 1 via the hub 23. In the vessel, the rotating polygon mirror 9 is
It is fixed to the sleeve 1 at the outer peripheral position corresponding to the center position of the pattern of the pair of dynamic pressure generating grooves 22 engraved on the fixed shaft 7, and the lower end of the sleeve 1 and the cylindrical A fluid bearing in which a thrust bearing 2 formed by a dynamic pressure generating groove and a ring-shaped washer 20 having elasticity capable of deforming in accordance with a deviation of a right angle of the thrust bearing 2 are interposed between the upper end of the portion 15a. Type optical deflector.
(作 用) 本発明においては、先ずスリーブ1、回転多面鏡9、
バフ23等よりなる回転部材が、その回転部材駆動手段の
発生するトルクによって回転すると、固定軸7に刻設し
た第1の動圧発生溝22の部分及びスラスト軸受21上端面
に刻設した第2の動圧発生溝において、流体の流動によ
る動圧が発生して、流体軸受として機能する。従って回
転多面鏡9は固定軸7の第1の動圧発生溝22による動圧
によって径方向を、またスラスト軸受2上面の第2の動
圧発生溝による動圧によって軸方向及び揺動方向を、そ
れぞれ高剛性で支持され、円滑回転が実施されるので鏡
面へ入射される光ビームを所定方向へ走査できる。(Operation) In the present invention, first, the sleeve 1, the rotating polygon mirror 9,
When the rotating member such as the buff 23 is rotated by the torque generated by the rotating member driving means, a portion of the first dynamic pressure generating groove 22 formed on the fixed shaft 7 and a second groove formed on the upper end surface of the thrust bearing 21 are formed. In the second dynamic pressure generating groove, a dynamic pressure is generated by the flow of the fluid, and functions as a fluid bearing. Therefore, the rotary polygon mirror 9 moves in the radial direction by the dynamic pressure generated by the first dynamic pressure generating groove 22 of the fixed shaft 7 and in the axial direction and the swing direction by the dynamic pressure generated by the second dynamic pressure generating groove on the upper surface of the thrust bearing 2. Are supported with high rigidity, and smooth rotation is performed, so that the light beam incident on the mirror surface can be scanned in a predetermined direction.
第2に、固定軸7の第1の動圧発生溝22による動圧発
生部の軸方向位置が回転多面鏡9のスリーブ1の固着位
置とほぼ一致しており、特に回転多面鏡9の径方向運動
を高剛性をもって抑制するものである。Secondly, the axial position of the dynamic pressure generating portion by the first dynamic pressure generating groove 22 of the fixed shaft 7 substantially coincides with the fixed position of the sleeve 1 of the rotary polygon mirror 9, and particularly the diameter of the rotary polygon mirror 9. Direction movement is suppressed with high rigidity.
第3に、スリーブ1の内外径の同軸度を良好に加工す
ることが容易であるため、スリーブ1の外径に直接嵌合
された回転多面鏡9の径方向への振れも抑制することが
可能である。Third, since it is easy to machine the coaxiality of the inner and outer diameters of the sleeve 1 satisfactorily, it is possible to suppress the radial deflection of the rotary polygon mirror 9 directly fitted to the outer diameter of the sleeve 1. It is possible.
第4に、固定軸7とスリーブ1の内径、及びスラスト
軸受2とスリーブ1の下端面との直角度のずれが惹起さ
れても、弾性を有するワッシャ20のならい変形により、
前記スリーブ1の下端面とスラスト軸受2とは平行に対
面維持されるので、良好な動圧発生が行われ、前記回転
多面鏡9等よりなる回転部材の軸方向及び揺動方向の運
動の安定を計るものである。Fourth, even if a deviation in the perpendicularity between the fixed shaft 7 and the inner diameter of the sleeve 1 and between the thrust bearing 2 and the lower end face of the sleeve 1 is caused, the deformation of the washer 20 having elasticity follows the deformation.
Since the lower end surface of the sleeve 1 and the thrust bearing 2 are maintained in parallel to face each other, good dynamic pressure is generated, and the axial and oscillating motions of the rotary member including the rotary polygon mirror 9 and the like are stabilized. Is measured.
(実施例) 以下添付図面を参照して、本発明に係る流体軸受型光
偏向器の一実施例を説明する。(Embodiment) An embodiment of a hydrodynamic bearing type optical deflector according to the present invention will be described below with reference to the accompanying drawings.
本実施例の流体軸受型光偏向器は固定軸、回転部材、
回転部材駆動手段並びに動圧発生機構を具えている。The hydrodynamic bearing type optical deflector of the present embodiment has a fixed shaft, a rotating member,
It has a rotating member driving means and a dynamic pressure generating mechanism.
カップ状のケース15の中央部に起立形成した円筒状部
15aの内径に、外周に対称な一組の第1の動圧発生溝22
を刻設したセラミックス、ステンレス鋼材等より成る固
定軸7を固着し、前記円筒状部15a上端面に、図示して
ないが、後術するスリーブ1に対向するように第2の動
圧発生溝を刻設したセラミック、ステンレス鋼材等より
なるリング状スラスト軸受を設ける。Cylindrical part formed upright at the center of cup-shaped case 15
A set of first dynamic pressure generating grooves 22 symmetrical to the outer circumference
A fixed shaft 7 made of ceramics, stainless steel, or the like, having a groove formed therein is fixed thereto, and a second dynamic pressure generating groove (not shown) is formed on the upper end surface of the cylindrical portion 15a so as to face the sleeve 1 which will be described later. And a ring-shaped thrust bearing made of ceramic, stainless steel, or the like.
更に前記円筒状部15aとスラスト軸受2との間に弾性
を具えたリング状ワッシャ20を介装する。前記ケース15
の円筒状部15aの外径に、マグネットワイヤ14を巻回し
た積層コア13を突設し、積層コア13には支柱16を介しホ
ール素子17とリード線19とを固着した基板18を固着す
る。Further, a ring-shaped washer 20 having elasticity is interposed between the cylindrical portion 15a and the thrust bearing 2. Case 15
At the outer diameter of the cylindrical portion 15a, a laminated core 13 around which a magnet wire 14 is wound is protruded, and a substrate 18 to which a Hall element 17 and a lead wire 19 are fixed is fixed to the laminated core 13 via a support post 16. .
前記固定軸7外周の第1の動圧発生溝22及びスラスト
軸受2の第2の動圧発生溝に対面するように、その上端
面に上蓋21を固着したセラミックス、ステンレス鋼材等
よる成る中空円筒状のスリーブ1を固定軸7に回転自在
に嵌着する。従って従来例のように固定軸7と上蓋25に
設けたマグネット群26,27を欠くので、それだけ軸方向
の寸法をコンパクトに形成できる。A hollow cylinder made of ceramics, stainless steel or the like having an upper lid 21 fixed to the upper end surface thereof so as to face the first dynamic pressure generating groove 22 on the outer periphery of the fixed shaft 7 and the second dynamic pressure generating groove of the thrust bearing 2. The sleeve 1 is rotatably fitted to the fixed shaft 7. Therefore, unlike the conventional example, the magnet groups 26 and 27 provided on the fixed shaft 7 and the upper lid 25 are omitted, so that the axial dimension can be made compact accordingly.
前記スリーブ1の外周に、積層コア13外径及びホール
素子17に対向したマグネット12及びマグネット12を内側
に固着したカップ状ロータヨーク11とを固着したリング
状ハブ23を固着し、このハブの上面に回転多面鏡9及び
ミラー押え板8とを順次にボルト10にて固着する。A ring-shaped hub 23 is fixed to the outer periphery of the sleeve 1 with a magnet 12 facing the outer diameter of the laminated core 13 and the Hall element 17 and a cup-shaped rotor yoke 11 having the magnet 12 fixed inside. The rotary polygon mirror 9 and the mirror holding plate 8 are sequentially fixed with bolts 10.
以上のような構成となっているので、スリーブ1、上
蓋21、ボルト10、ミラ押え板8、回転多面鏡9、ハブ2
3、ロータヨーク11よりなる回転部材が、そのロータヨ
ーク11、マグネット12、積層コア12、マグネットワイヤ
14より成る回転部材駆動手段のマグネットワイヤ14に通
電することにより発生するトルクによって回転すると、
固定軸7の第1の動圧発生溝22の部分及びスラスト軸受
2上端面の第2の動圧発生溝の部分において、空気の流
動による動圧が発生して、流体軸受として機能する。従
って回転多面鏡9は固定軸7の第1の動圧発生溝22によ
る動圧によって径方向を、またスラスト軸受2上端面の
図示しない第2の動圧発生溝による動圧によって、軸方
向及び揺動方向を、それぞれ高剛性に支持されつつ、非
接触状態で高精度に回転して、鏡面へ入射される光ビー
ムを走査する。With the above configuration, the sleeve 1, the upper cover 21, the bolt 10, the mirror holding plate 8, the rotating polygon mirror 9, the hub 2
3, the rotating member consisting of the rotor yoke 11, the rotor yoke 11, the magnet 12, the laminated core 12, the magnet wire
When rotated by the torque generated by energizing the magnet wire 14 of the rotating member driving means consisting of 14,
In the first dynamic pressure generating groove 22 of the fixed shaft 7 and in the second dynamic pressure generating groove on the upper end surface of the thrust bearing 2, a dynamic pressure is generated by the flow of air to function as a fluid bearing. Therefore, the rotary polygon mirror 9 is moved in the radial direction by the dynamic pressure generated by the first dynamic pressure generating groove 22 of the fixed shaft 7 and in the axial direction by the dynamic pressure generated by the second dynamic pressure generating groove (not shown) on the upper end surface of the thrust bearing 2. The swinging direction is rotated with high precision in a non-contact state while being supported with high rigidity, and scans the light beam incident on the mirror surface.
更に第1図において、固定軸7外周に配設した対称な
一組の第1の動圧発生溝22のパターンに対し、回転多面
鏡9が軸方向位置において、前記第1の動圧発生溝22の
パターン中央部に対面位置するように、ミラ押え板8及
びボルト10によりハブ23に嵌合固着されている。従っ
て、この構成では、固定軸7の第1の動圧発生溝22によ
る動圧発生部の軸方向位置が回転多面鏡9固着位置とほ
ぼ一致しており、特に回転多面鏡9の径方向運動を高剛
性をもって抑制する。Further, in FIG. 1, with respect to a pattern of a symmetric set of first dynamic pressure generating grooves 22 provided on the outer periphery of the fixed shaft 7, the rotary polygonal mirror 9 is positioned in the axial direction and the first dynamic pressure generating grooves are arranged. The mirror holding plate 8 and the bolt 10 are fitted and fixed to the hub 23 so as to face the central portion of the pattern 22. Therefore, in this configuration, the axial position of the dynamic pressure generating portion by the first dynamic pressure generating groove 22 of the fixed shaft 7 substantially coincides with the fixed position of the rotating polygon mirror 9, and particularly, the radial movement of the rotating polygon mirror 9. With high rigidity.
又同じく第1図において、円筒状スリーブ1の外周に
直接回転多面鏡9を嵌合し固着したので、この構成では
スリーブ1の内外径の同軸度の加工を容易とするもので
あるから、スリーブ1の外径に直接嵌合された回転多面
鏡9の径方向の組立精度上の振れも 同様に抑制することが可能である。Also, in FIG. 1, the rotary polygon mirror 9 is fitted and fixed directly on the outer periphery of the cylindrical sleeve 1, and this configuration facilitates machining of the coaxiality of the inner and outer diameters of the sleeve 1. In the same manner, it is possible to suppress the fluctuation in the radial assembly accuracy of the rotary polygon mirror 9 directly fitted to the outer diameter of the first mirror.
更にカップ状ケース15の円筒状部15aの上端面とスラ
スト軸受2との間に介装したリング状ワッシャ20を、例
えばシリコンゴム等の弾性部材や又はゲル状粘弾性を有
する部材等で構成することができる。この構成によりス
リーブ1の内径と固定軸7及びスリーブ1の下端面とス
ラスト軸受2との直角度のずれが発生しても、弾性部材
により構成されたワッシャ20のならい変形により、前記
スリーブ1の下端面とスラスト軸受2とは平行に対面可
能に保持され、良好な動圧発生機能が行われ、前記回転
多面鏡9等より成る回転部材の軸方向及び揺動方向運動
の安定保持に役立つ。Further, the ring-shaped washer 20 interposed between the upper end surface of the cylindrical portion 15a of the cup-shaped case 15 and the thrust bearing 2 is made of, for example, an elastic member such as silicon rubber or a member having gel-like viscoelasticity. be able to. With this configuration, even if a deviation between the inner diameter of the sleeve 1 and the perpendicularity between the fixed shaft 7 and the lower end surface of the sleeve 1 and the thrust bearing 2 occurs, the sleeve 1 is deformed in accordance with the deformation of the washer 20 formed of the elastic member. The lower end face and the thrust bearing 2 are held so as to be able to face each other in parallel, a good dynamic pressure generating function is performed, and this helps to stably maintain the movement of the rotating member including the rotating polygon mirror 9 and the like in the axial and swing directions.
(発明の効果) 本発明においては、回転多面鏡は、径方向、軸方向、
揺動方向を共に流体動圧作用によって高剛性をもって軸
支出来るので、回転多面鏡の光走査における走査速度ム
ラ及び直角方向のブレを低減すること、及び従来例のも
のに比較して、軸方向寸法をよりコンパクトに形成する
ことが可能となる。(Effects of the Invention) In the present invention, the rotating polygon mirror has a radial direction, an axial direction,
Since both swinging directions can be supported with high rigidity by the action of fluid dynamic pressure, unevenness in scanning speed and blur in the perpendicular direction in optical scanning of the rotating polygon mirror can be reduced, and the axial direction can be reduced compared to the conventional example. Dimensions can be made more compact.
更に、軸方向の動圧発生が安定的であるので、スラス
ト軸受とスリーブとの偏接触に起因する異常摩耗を防止
し、長寿命のスラスト動圧軸受機構を得ることができる
等の効果がある。Furthermore, since the generation of dynamic pressure in the axial direction is stable, abnormal wear due to uneven contact between the thrust bearing and the sleeve is prevented, and there is an effect that a long-life thrust dynamic pressure bearing mechanism can be obtained. .
第1図は本発明に係る流体軸受型光偏向器の実施例の断
面図。 第2図は従来の流体軸受型光偏向器の断面図。 1……スリーブ、2……スラスト軸受、7……固定軸、
8……ミラ押え板、9……回転多面鏡、11……ロータヨ
ーク(回転部材駆動手段)、12……マグネット、13……
積層コア、14……マグネットワイヤ、15……ケース、15
a……円筒状部、20……リング状ワッシャ、21……上
蓋、22……動圧発生溝、23……ハブFIG. 1 is a sectional view of an embodiment of a hydrodynamic bearing type optical deflector according to the present invention. FIG. 2 is a sectional view of a conventional hydrodynamic bearing type optical deflector. 1 ... sleeve, 2 ... thrust bearing, 7 ... fixed shaft,
8 ... mirror holding plate, 9 ... rotating polygon mirror, 11 ... rotor yoke (rotating member driving means), 12 ... magnet, 13 ...
Laminated core, 14 ... magnet wire, 15 ... case, 15
a ... Cylindrical part, 20 ... Ring washer, 21 ... Top cover, 22 ... Dynamic pressure generating groove, 23 ... Hub
───────────────────────────────────────────────────── フロントページの続き (72)発明者 星 辰也 埼玉県入間市新久下新田110―1 コパ ル電子株式会社入間事業所内 (72)発明者 加治 裕之 埼玉県入間市新久下新田110―1 コパ ル電子株式会社入間事業所内 合議体 審判長 石井 勝徳 審判官 綿貫 章 審判官 小谷 一郎 (56)参考文献 特開 昭63−176814(JP,A) 特開 昭63−271311(JP,A) 特開 平1−247821(JP,A) ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Tatsuya Hoshi 110-1 Shinkushita Nitta, Iruma City, Saitama Prefecture Inside the Iruma Office of Kopal Electronics Co., Ltd. (72) Inventor Hiroyuki Kaji Shinkumo Nitta, Iruma City, Saitama Prefecture 110-1 Referee Katsutoshi Ishii Referee Akira Watanuki Referee Ichiro Kotani Referee JP-A-63-176814 (JP, A) JP-A 63-271313 (JP, JP) A) JP-A-1-247821 (JP, A)
Claims (1)
と、この円筒状部に基部を嵌挿固定した固定軸と、この
固定軸の外周に上下対称に刻設した一対の動圧発生溝
と、この動圧発生溝による動圧発生部を介して前記固定
軸に回転自在に支えられるスリーブと、このスリーブに
取付けたハブを介してスリーブの外周位置に固着した回
転多面鏡、及び前記ハブを介して前記スリーブに固着し
た回転部材駆動手段とからなる流体軸受型光偏向器にお
いて、前記回転多面鏡は、前記固定軸に刻設した一対の
動圧発生溝のパターンの中央位置に対応するスリーブの
外周位置で該スリーブに固着されており、かつ、前記ス
リーブの下端部と前記円筒状部の上端部との間に、動圧
発生溝によるスラスト軸受と、このスラスト軸受の直角
度のずれに対してならい変形し得る弾性を有するリング
状のワッシャを介装したことを特徴とする流体軸受型光
偏向器。1. A cylindrical portion formed upright at a center portion of a case, a fixed shaft having a base fitted and fixed to the cylindrical portion, and a pair of dynamic pressure generators engraved on the outer periphery of the fixed shaft in a vertically symmetric manner. A groove, a sleeve rotatably supported on the fixed shaft via a dynamic pressure generating portion formed by the dynamic pressure generating groove, a rotary polygon mirror fixed to an outer peripheral position of the sleeve via a hub attached to the sleeve, and In a fluid bearing type optical deflector comprising a rotating member driving means fixed to the sleeve via a hub, the rotating polygon mirror corresponds to a central position of a pattern of a pair of dynamic pressure generating grooves engraved on the fixed shaft. A thrust bearing formed by a dynamic pressure generating groove, between a lower end of the sleeve and an upper end of the cylindrical portion, and a right angle of the thrust bearing. If it's against the gap Fluid bearing optical deflector, characterized in that interposed a ring-shaped washer having elasticity may deform.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2159479A JP2645526B2 (en) | 1990-06-18 | 1990-06-18 | Fluid bearing type optical deflector |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2159479A JP2645526B2 (en) | 1990-06-18 | 1990-06-18 | Fluid bearing type optical deflector |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0451009A JPH0451009A (en) | 1992-02-19 |
JP2645526B2 true JP2645526B2 (en) | 1997-08-25 |
Family
ID=15694674
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2159479A Expired - Fee Related JP2645526B2 (en) | 1990-06-18 | 1990-06-18 | Fluid bearing type optical deflector |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2645526B2 (en) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63176814A (en) * | 1987-01-13 | 1988-07-21 | Matsushita Electric Ind Co Ltd | Supporting device for rotary body |
-
1990
- 1990-06-18 JP JP2159479A patent/JP2645526B2/en not_active Expired - Fee Related
Also Published As
Publication number | Publication date |
---|---|
JPH0451009A (en) | 1992-02-19 |
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