JP2635267C - - Google Patents

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Publication number
JP2635267C
JP2635267C JP2635267C JP 2635267 C JP2635267 C JP 2635267C JP 2635267 C JP2635267 C JP 2635267C
Authority
JP
Japan
Prior art keywords
plasma
chamber
silicon
wafer
power
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
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English (en)
Japanese (ja)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Applied Materials Inc
Original Assignee
Applied Materials Inc
Publication date

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