JP2623026B2 - Method for producing high-purity glassy carbon material - Google Patents

Method for producing high-purity glassy carbon material

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Publication number
JP2623026B2
JP2623026B2 JP3039111A JP3911191A JP2623026B2 JP 2623026 B2 JP2623026 B2 JP 2623026B2 JP 3039111 A JP3039111 A JP 3039111A JP 3911191 A JP3911191 A JP 3911191A JP 2623026 B2 JP2623026 B2 JP 2623026B2
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JP
Japan
Prior art keywords
purity
glassy carbon
carbon material
raw material
ppm
Prior art date
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JP3039111A
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Japanese (ja)
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JPH04260605A (en
Inventor
久幸 浜島
義雄 鈴木
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Tokai Carbon Co Ltd
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Tokai Carbon Co Ltd
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Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、高純度の材質組織を有
するガラス状カーボン材を製造する方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a glassy carbon material having a high-purity material structure.

【0002】[0002]

【従来の技術】ガラス状カーボン材は、ガラス質の組織
構造を備える異質な炭素材料であるため、その性状を利
用して多様の分野で各種部材に汎用されている。また近
時、均質で緻密な非汚染性の材質組織がシリコンウエハ
ーのプラズマエッチング用電極やイオン注入装置用の部
材として好適であることが解明され既に実用段階に入っ
ているが、これら半導体分野で使用される部材には極め
て高い材質純度が要求される。
2. Description of the Related Art A glassy carbon material is a heterogeneous carbon material having a vitreous structure, and is widely used in various fields in various fields by utilizing its properties. Recently, it has been found that a homogeneous and dense non-contaminated material structure is suitable for a plasma etching electrode of a silicon wafer and a member for an ion implantation apparatus. The members used are required to have extremely high material purity.

【0003】通常、ガラス状カーボン材は、フェノール
樹脂またはフルフリルアルコール樹脂の初期縮合物を原
料とし、これに硬化剤を配合したうえで成形硬化し、つ
いで焼成炭化する方法によって製造されている。この製
造段階では、原料樹脂、硬化剤あるいは焼成炭化時の雰
囲気ガス等から不純物が混入して製品純度を低下させ
る。とくに、硬化剤として好んで使用されるパラトルエ
ンスルホン酸のような硫黄系化合物は原料樹脂中に硫黄
成分を残留させ、製品中にも不純物として残す。
[0003] Usually, a glassy carbon material is produced by a method in which an initial condensate of a phenol resin or a furfuryl alcohol resin is used as a raw material, a curing agent is added to the raw material, and the mixture is molded and cured, and then calcined and carbonized. In this production stage, impurities are mixed in from the raw material resin, the curing agent, the atmospheric gas at the time of calcination and the like, and the product purity is reduced. In particular, a sulfur-based compound such as paratoluenesulfonic acid, which is preferably used as a curing agent, causes a sulfur component to remain in the raw material resin and also remains as an impurity in the product.

【0004】ところが、このようにガラス状カーボンの
組織中に混入した不純物は後処理的に高純度化すること
が極めて困難である。すなわち、一般のカーボン材を高
純度化する有効手段として、2000℃以上の高温度域でハ
ロゲン系のガスにより脱灰処理する方法が知られている
が、ガラス状カーボン材は一般カーボン材とは異なり極
めて緻密な閉鎖組織を呈しているために組織内部への脱
灰ガスの分散が阻害され、不純物の拡散除去が円滑に進
行しない。そのうえ、この種の脱灰処理では硫黄成分の
除去を期待することはほとんど不可能である。
However, it is extremely difficult to purify the impurities mixed into the glassy carbon structure in a post-treatment manner. In other words, as an effective means for purifying general carbon materials, a method of deashing with a halogen-based gas in a high temperature range of 2000 ° C. or higher is known, but glassy carbon materials are different from general carbon materials. On the contrary, since it has a very dense closed tissue, the dispersion of the demineralized gas into the tissue is hindered, and the diffusion and removal of impurities do not proceed smoothly. Moreover, it is almost impossible to expect the removal of sulfur components in this type of demineralization.

【0005】[0005]

【発明が解決しようとする課題】本発明者らは、従来技
術で解明されていなかった原料樹脂の特性と炭化後の材
料特性との関係を詳細に検討した結果、限定された性状
特性の範囲にあるフェノール樹脂は硬化剤等の第三成分
を添加しなくても円滑に加熱硬化でき、優れた純度を維
持したまま高品位のガラス状カーボン材に転化する事実
を確認して本発明の開発に至ったものである。
As a result of a detailed study of the relationship between the properties of the raw material resin and the properties of the material after carbonization, which had not been clarified in the prior art, the present inventors have found that the range of the property properties is limited. Phenolic resin can be heat-cured smoothly without adding a third component such as a curing agent, and the fact that it is converted into a high-quality glassy carbon material while maintaining excellent purity was developed to develop the present invention. It has been reached.

【0006】したがって、本発明の目的は、硬化剤を添
加しない特定の熱硬化型フェノール樹脂を原料として、
高純度環境下に焼成炭化することにより均質緻密組織で
優れた材質純度を備えるガラス状カーボン材を効率よく
製造する方法を提供することにある。
Accordingly, an object of the present invention is to use a specific thermosetting phenol resin to which no curing agent is added as a raw material.
It is an object of the present invention to provide a method for efficiently producing a glassy carbon material having a homogeneous dense structure and excellent material purity by firing and carbonizing in a high-purity environment.

【0007】[0007]

【課題を解決するための手段】上記の目的を達成するた
めの本発明による高純度ガラス状カーボン材の製造方法
は、分子量100 以上、粘度1〜100ポイズ、ゲル化時間
5〜60分、灰分含有量5ppm 未満のフェノール樹脂を原
料とし、硬化剤を添加することなく成形し加熱硬化した
のち、高純度の非酸化性ガス雰囲気中で焼成炭化処理す
ることを構成上の特徴とする。
In order to achieve the above object, a method for producing a high-purity glassy carbon material according to the present invention comprises a method for producing a high-purity glassy carbon material having a molecular weight of 100 or more, a viscosity of 1 to 100 poise, a gelation time of 5 to 60 minutes, and an ash content. It is characterized in that a phenol resin having a content of less than 5 ppm is used as a raw material, molded and heated and cured without adding a curing agent, and then calcined and carbonized in a high-purity non-oxidizing gas atmosphere.

【0008】上記構成における性状特性の数値は、分子
量についてはジオキサンによる凝固点降下法、粘度およ
びゲル化時間はJIS K6909-1977「液状フェノール
樹脂試験方法」、灰分含有量はJIS M8812-1976
「灰分定量方法」により各測定されたものである。
The numerical values of the property characteristics in the above constitution are as follows: the molecular weight is the freezing point depression method using dioxane, the viscosity and the gelation time are JIS K6909-1977 “Testing method for liquid phenol resin”, and the ash content is JIS M8812-1976.
Each was measured by the "ash content determination method".

【0009】かかる原料特性のうち、分子量100 以上の
フェノール樹脂を用いるのは組織強度の高いガラス状カ
ーボン材を得るために必要な要件で、100 未満の分子量
では硬化後の架橋構造が弱くなる関係で高強度の炭化物
に転化しなくなる。粘度は、1ポイズを下廻ると炭化後
の組織強度が低下し、100 ポイズを越えると硬化時に縮
合水の揮散が円滑に進行しなくなってポアが多発する。
したがって、1〜100 ポイズの粘度範囲に設定する。
Among the raw material characteristics, the use of a phenol resin having a molecular weight of 100 or more is a necessary condition for obtaining a glassy carbon material having a high tissue strength. If the molecular weight is less than 100, the crosslinked structure after curing becomes weak. And it is not converted to high-strength carbide. If the viscosity is less than 1 poise, the strength of the structure after carbonization is reduced. If the viscosity exceeds 100 poise, volatilization of the condensed water does not proceed smoothly during curing and pores are frequently generated.
Therefore, the viscosity is set in the range of 1 to 100 poise.

【0010】ゲル化時間が5〜60分範囲の性状樹脂を使
用する理由は、5分未満でゲル化する通常の液状熱硬化
型フェノール樹脂では硬化の進行が急速過ぎて未反応物
や縮合水が揮散せずに滞留するため、多量のポア発生を
伴い、他方60分を越すゲル化時間では硬化工程に長時間
が必要になって工業生産面に支障をきたし、また硬化過
程で外部からの汚染現象が起こり易くなるためである。
The reason for using a property resin having a gelling time in the range of 5 to 60 minutes is that, in a usual liquid thermosetting phenol resin which gels in less than 5 minutes, the progress of curing is too rapid and unreacted substances or condensed water Is accumulated without volatilization, and a large amount of pores are generated.On the other hand, if the gelation time exceeds 60 minutes, a long time is required for the curing process, which hinders the industrial production side, and the curing process requires external sources. This is because a pollution phenomenon is likely to occur.

【0011】灰分含有量が5ppm 未満のフェノール樹脂
を使用するのは、高純度のガラス状カーボン材を製造す
るために重要な要件で、灰分含有量が5ppm 以上となる
と炭化過程で不純物として組織中に濃縮されて高い純度
特性を付与することができなくなる。
The use of a phenolic resin having an ash content of less than 5 ppm is an important requirement for producing a high-purity glassy carbon material. When the ash content is 5 ppm or more, it is contained in the tissue as an impurity during the carbonization process. So that high purity characteristics cannot be imparted.

【0012】本発明に用いる熱硬化型のフェノール樹脂
原料は、清浄な容器中で高純度のフェノールとホルマリ
ンをアルカリ触媒の共存下で縮合反応させる方法によっ
て製造される。この際、フェノールとホルマリンは共に
灰分含有量が5ppm 未満のものを使用し、またアルカリ
触媒として焼成炭化時に揮散消失するアンモニア、メチ
ルアミン、ジフェニルアミン等の尿素系塩基物質を適用
するとともに、フェノール/ホルマリン組成比、温度、
触媒量、時間などの反応条件を調整することで上記の性
状特性を備えるフェノール樹脂を合成することができ
る。
The thermosetting phenol resin raw material used in the present invention is produced by a method in which high-purity phenol and formalin are subjected to a condensation reaction in a clean container in the presence of an alkali catalyst. At this time, phenol and formalin both have an ash content of less than 5 ppm, and urea-based basic substances such as ammonia, methylamine, diphenylamine and the like which volatilize and disappear during calcining and carbonization are applied as an alkali catalyst, and phenol / formalin is used. Composition ratio, temperature,
By adjusting the reaction conditions such as the amount of the catalyst and the time, a phenol resin having the above-mentioned properties can be synthesized.

【0013】該フェノール樹脂原料は、硬化剤をなんら
添加することなしに成形し加熱硬化する。この場合の原
料は液状であるため、成形化は注型成形法または多重成
形(重ね塗り)法によりおこなわれる。しかし、モール
ド成形法または押出し成形法を用いてルツボやパイプな
どの形状体に成形するには、前記の液状フェノール樹脂
に灰分含有量が5ppm 未満の粉末状フェノール樹脂を配
合して原料とし、この混練物を成形工程に供することが
効果的なプロセスとなる。なお、この場合に配合する粉
末状フェノール樹脂としては、前記の液状フェノール樹
脂を硬化粉砕したものが好適に用いられる。硬化処理
は、150 〜250 ℃の温度範囲でおこなわれる。
The phenolic resin raw material is molded and heat-cured without adding any curing agent. In this case, since the raw material is in a liquid state, molding is performed by a cast molding method or a multiple molding (overcoating) method. However, in order to form into a shape such as a crucible or a pipe using a molding method or an extrusion molding method, a powdery phenol resin having an ash content of less than 5 ppm is blended with the above-mentioned liquid phenol resin as a raw material. Subjecting the kneaded material to a molding step is an effective process. In this case, as the powdery phenol resin to be blended in this case, one obtained by hardening and pulverizing the above-mentioned liquid phenol resin is suitably used. The curing process is performed in a temperature range of 150 to 250 ° C.

【0014】硬化成形体は、ついで非酸化性ガス雰囲気
に保持された加熱炉に移し800 ℃以上の温度域で焼成炭
化する。加熱炉に吹き込む非酸化性ガスとしては、少な
くとも不純物含有量が10ppm 未満の水素、アルゴン、窒
素などが使用される。焼成炭化後の材料は、必要に応じ
前記と同様の非酸化性ガス雰囲気下で2000℃以上の温度
により黒鉛化処理が施される。これら焼成炭化または/
および黒鉛化は常圧状態でおこなってもよいが、減圧下
で実施すると不純物の揮散が促進されるので、より良好
な純化結果がもたらされる。また、外部からの汚染に基
づく不純物を除去するために、後処理としてハロゲン系
ガスによる脱灰処理を施すこともできる。このような工
程を経て高純度、高品質のガラス状カーボン材が製造さ
れる。
The cured molded body is then transferred to a heating furnace maintained in a non-oxidizing gas atmosphere and calcined and carbonized in a temperature range of 800 ° C. or more. As the non-oxidizing gas blown into the heating furnace, hydrogen, argon, nitrogen or the like having at least an impurity content of less than 10 ppm is used. The material after calcining and carbonization is graphitized at a temperature of 2000 ° C. or higher in a non-oxidizing gas atmosphere as described above, if necessary. These calcined carbonized or /
The graphitization may be carried out at normal pressure, but when carried out under reduced pressure, the evaporation of impurities is promoted, so that a better purification result is brought. In addition, in order to remove impurities based on external contamination, a demineralization treatment using a halogen-based gas can be performed as a post-treatment. Through these steps, a high-purity, high-quality glassy carbon material is produced.

【0015】[0015]

【作用】本発明によれば、高純度で均質緻密のガラス質
炭化組織に転化する性状特性の熱硬化型フェノール樹脂
液または該樹脂液に粉末状の高純度フェノール樹脂を配
合したものを原料として選択使用し、不純物混入源とな
る硬化剤を添加せず、かつ汚染性のない加熱環境で焼成
炭化処理がおこなわれる。この原料選択と非汚染性の工
程によって、常に高純度で高強度特性を備えるガラス状
カーボン材を製造することが可能となる。
According to the present invention, a thermosetting phenol resin liquid having the property of converting into a high-purity, homogeneous and dense vitreous carbonized structure or a mixture of the resin liquid and a powdery high-purity phenol resin is used as a raw material. The carbonization treatment is performed selectively, without adding a curing agent as a source of impurity contamination, and in a heating environment free from contamination. By this raw material selection and non-contamination process, it becomes possible to always produce a glassy carbon material having high purity and high strength characteristics.

【0016】[0016]

【実施例】以下、本発明の実施例を比較例と対比して説
明する。
Hereinafter, examples of the present invention will be described in comparison with comparative examples.

【0017】実施例1〜5、比較例1〜5 不純物含有量1ppm 以下のフェノール、ホルマリンおよ
びアンモニアを三つ口フラスコに入れ、条件を変えて縮
合反応と濃縮化を進行させ表1に示す性状特性のフェノ
ール樹脂初期縮合物(液状樹脂)を調製した。
Examples 1 to 5 and Comparative Examples 1 to 5 Phenol, formalin and ammonia having an impurity content of 1 ppm or less were put into a three-necked flask, and the condensation reaction and the enrichment were advanced under the changed conditions to obtain the properties shown in Table 1. A phenol resin precondensate (liquid resin) having characteristics was prepared.

【0018】 [0018]

【0019】表1の各フェノール樹脂液を原料とし、石
英製のバット(縦横100mm 、高さ50mm) に流し込んで真
空デシケータに入れ、10torrで1時間真空引きして樹脂
液内に残留する気泡を除去した。ついで、塵埃を完全に
除去した雰囲気の電気乾燥器に移し、180 ℃で1時間加
熱硬化をおこなって縦横90mm、厚さ1.4mm の薄板成形体
を得た。この薄板成形体を、不純物5ppm 未満の高純度
黒鉛板〔東海カーボン(株)製、G347SS〕で挟み付け、
同じく高純度黒鉛ヒーター〔東海カーボン(株)製、G1
51ASS 〕を設置したパッキングレスの加熱炉〔東海高熱
工業(株)製、TP150 〕にセットし、炉内雰囲気を不純
物10ppm 未満の高純度アルゴンガスで保持しながら10℃
/hrの昇温速度で2000℃まで加熱して焼成炭化処理をお
こない縦横70mm、厚さ1mmの薄板ガラス状カーボン材を
製造した。このようにして、製造した各ガラス状カーボ
ン材の不純物含有量と各種特性を測定し、結果を表2に
示した。
Each phenolic resin liquid shown in Table 1 is used as a raw material, poured into a quartz vat (100 mm long, 50 mm high), placed in a vacuum desiccator, and evacuated at 10 torr for 1 hour to remove air bubbles remaining in the resin liquid. Removed. Then, it was transferred to an electric drier in an atmosphere from which dust was completely removed, and heat-cured at 180 ° C. for 1 hour to obtain a thin plate having a length and width of 90 mm and a thickness of 1.4 mm. This thin plate compact was sandwiched between high-purity graphite plates (G347SS, manufactured by Tokai Carbon Co., Ltd.) with impurities of less than 5 ppm,
Also high-purity graphite heater [G1 manufactured by Tokai Carbon Co., Ltd.
51ASS] in a packingless heating furnace [TP150, manufactured by Tokai High Heat Industry Co., Ltd.], and keeping the atmosphere in the furnace at 10 ° C while maintaining the atmosphere with high-purity argon gas containing less than 10 ppm of impurities.
By heating to 2000 ° C. at a heating rate of / hr to perform a carbonization treatment, a thin glassy carbon material having a length and width of 70 mm and a thickness of 1 mm was produced. The impurity content and various characteristics of each glassy carbon material thus manufactured were measured, and the results are shown in Table 2.

【0020】 [0020]

【0021】表1の結果から、実施例1〜5で製造され
た各ガラス状カーボン材はいずれも灰分および硫黄分含
有量が10ppm 未満と少なく、嵩密度および強度特性も高
水準のであった。これに対し、原料樹脂のゲル化時間が
5分を下廻る比較例1ではポアが多く発生して嵩密度お
よび曲げ強度が低下し、またゲル化時間が60分を越える
比較例2では不純物含有量が増大している。比較例3の
原料樹脂は分子量が100 未満であるため強度、硬度が低
下する。粘度が1〜100 ポイズの範囲を外れる原料樹脂
の比較例4、5は、共に曲げ強度が低くなることが認め
られる。
From the results shown in Table 1, each of the glassy carbon materials produced in Examples 1 to 5 had a low ash content and a low sulfur content of less than 10 ppm, and also had a high level of bulk density and strength characteristics. On the other hand, in Comparative Example 1 in which the gelling time of the raw material resin is less than 5 minutes, many pores are generated and the bulk density and the bending strength are reduced, and in Comparative Example 2 in which the gelling time exceeds 60 minutes, impurities are contained. The amount is increasing. Since the raw material resin of Comparative Example 3 has a molecular weight of less than 100, strength and hardness are reduced. In Comparative Examples 4 and 5 of the raw resin whose viscosity is out of the range of 1 to 100 poise, it is recognized that the bending strength is low.

【0022】実施例6 実施例2のフェノール樹脂原料として同様のプロセスで
成形・硬化した薄板成形体を通常のコークスパッキング
を充填した焼成炉に詰め、2000℃まで焼成炭化した。得
られたガラス状カーボン材は、灰分21ppm 、硫黄分含有
量50ppm 、嵩密度1.50g/cc、固有電気抵抗50×10-4Ωc
m、曲げ強度1310kgf/cm2 、硬度101 の特性を示し、純
度が極端に悪い結果であった。
Example 6 A thin plate formed and cured by the same process as the phenolic resin raw material of Example 2 was placed in a firing furnace filled with ordinary coke packing, and fired and carbonized to 2000 ° C. The obtained glassy carbon material has an ash content of 21 ppm, a sulfur content of 50 ppm, a bulk density of 1.50 g / cc, and a specific electric resistance of 50 × 10 −4 Ωc.
m, bending strength 1310 kgf / cm 2 , hardness 101, and extremely poor purity.

【0023】実施例7 分子量150 、粘度150 ポイズ、ゲル化時間40分、灰分含
有量5ppm 未満の液状フェノール樹脂と前記液状樹脂を
硬化させて平均粒径9μm に粉砕した粉末状フェノール
樹脂を重量比1:1に配合し、清浄化したメノウ乳鉢を
用いて十分に混練した。この混練物を高純度黒鉛製のモ
ールドに充填し、加熱温度150 ℃、圧力5kg/cm2の条件
で外径50mm、内径40mm、高さ50mmのルツボ形状に成形し
た。ついでルツボ成形体を実施例1と同一のパッキング
レス加熱炉に入れ、同一条件で焼成炭化処理を施した。
得られたルツボ形状のガラス状カーボン材は、灰分3pp
m 、硫黄分5ppm 、嵩密度1.51g/cc、固有電気抵抗51×
10-4Ωcm、曲げ強度1310kgf/cm2 、硬度100 の特性を示
し、高純度で強度の高い緻密組織を備えていることが認
められた。
Example 7 A liquid phenolic resin having a molecular weight of 150, a viscosity of 150 poise, a gelling time of 40 minutes and an ash content of less than 5 ppm, and a powdery phenolic resin obtained by curing the liquid resin and pulverizing it to an average particle size of 9 μm were used. 1: 1 and thoroughly kneaded using a cleaned agate mortar. The kneaded material was filled in a mold made of high-purity graphite and formed into a crucible having an outer diameter of 50 mm, an inner diameter of 40 mm and a height of 50 mm under the conditions of a heating temperature of 150 ° C. and a pressure of 5 kg / cm 2 . Next, the crucible compact was placed in the same packingless heating furnace as in Example 1 and subjected to a calcination treatment under the same conditions.
The obtained crucible-shaped glassy carbon material has an ash content of 3 pp.
m, sulfur content 5ppm, bulk density 1.51g / cc, specific electric resistance 51x
It exhibited characteristics of 10 −4 Ωcm, bending strength of 1310 kgf / cm 2 , and hardness of 100, and was confirmed to have a dense structure with high purity and high strength.

【0024】[0024]

【発明の効果】以上のとおり、本発明に従えば特定の性
状特性を備えるフェノール樹脂を原料とし、硬化剤を共
用することなしに非汚染性の熱処理工程で成形・硬化・
焼成炭化を施すことにより、灰分および硫黄分含有量が
10ppm 未満の高純度で、かつ強度特性に優れる均質緻密
組織を備えるガラス状カーボン材を効率よく製造するこ
とが可能となる。したがって、高純度性と高材質特性が
要求される半導体分野向け部材の製造技術として極めて
有用である。
As described above, according to the present invention, a phenol resin having specific properties is used as a raw material, and a non-staining heat treatment step is performed without using a curing agent.
By performing calcination, the ash and sulfur content are reduced.
It is possible to efficiently produce a glassy carbon material having a high-purity of less than 10 ppm and a homogeneous dense structure having excellent strength properties. Therefore, it is extremely useful as a manufacturing technique of a member for a semiconductor field requiring high purity and high material properties.

Claims (2)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 分子量100 以上、粘度1〜100 ポイズ、
ゲル化時間5〜60分、灰分含有量5ppm 未満のフェノー
ル樹脂を原料とし、硬化剤を添加することなく成形し加
熱硬化したのち、高純度の非酸化性ガス雰囲気中で焼成
炭化処理することを特徴とする高純度ガラス状カーボン
材の製造方法。
(1) a molecular weight of 100 or more, a viscosity of 1 to 100 poise,
A phenolic resin with a gelation time of 5 to 60 minutes and an ash content of less than 5 ppm is used as a raw material, and is molded and heated and cured without adding a curing agent, and then calcined in a high-purity non-oxidizing gas atmosphere. Characteristic method for producing high-purity glassy carbon material.
【請求項2】 請求項1のフェノール樹脂に、灰分含有
量が5ppm 未満の粉末状フェノール樹脂を配合して原料
とする請求項1記載の高純度ガラス状カーボン材の製造
方法。
2. The method for producing a high-purity glassy carbon material according to claim 1, wherein the phenol resin according to claim 1 is mixed with a powdery phenol resin having an ash content of less than 5 ppm as a raw material.
JP3039111A 1991-02-08 1991-02-08 Method for producing high-purity glassy carbon material Expired - Fee Related JP2623026B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3039111A JP2623026B2 (en) 1991-02-08 1991-02-08 Method for producing high-purity glassy carbon material

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3039111A JP2623026B2 (en) 1991-02-08 1991-02-08 Method for producing high-purity glassy carbon material

Publications (2)

Publication Number Publication Date
JPH04260605A JPH04260605A (en) 1992-09-16
JP2623026B2 true JP2623026B2 (en) 1997-06-25

Family

ID=12543973

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3039111A Expired - Fee Related JP2623026B2 (en) 1991-02-08 1991-02-08 Method for producing high-purity glassy carbon material

Country Status (1)

Country Link
JP (1) JP2623026B2 (en)

Also Published As

Publication number Publication date
JPH04260605A (en) 1992-09-16

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