JP2620853B2 - Electrophotographic copying machine - Google Patents
Electrophotographic copying machineInfo
- Publication number
- JP2620853B2 JP2620853B2 JP61120273A JP12027386A JP2620853B2 JP 2620853 B2 JP2620853 B2 JP 2620853B2 JP 61120273 A JP61120273 A JP 61120273A JP 12027386 A JP12027386 A JP 12027386A JP 2620853 B2 JP2620853 B2 JP 2620853B2
- Authority
- JP
- Japan
- Prior art keywords
- amorphous silicon
- electrophotographic copying
- photoconductor
- photoreceptor
- copying apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は電子写真複写装置、さらに詳しく言えば、支
持体上に非晶質珪素を主体とする光導電層を形成してな
る電子写真用感光体を用いた電子写真複写装置に関す
る。Description: FIELD OF THE INVENTION The present invention relates to an electrophotographic copying apparatus, and more particularly, to an electrophotographic copying apparatus in which a photoconductive layer mainly composed of amorphous silicon is formed on a support. The present invention relates to an electrophotographic copying apparatus using a photoconductor.
従来、複写機あるいはレーザープリンターなどに使用
される電子写真用感光体として、例えばセレン（Se）、
硫化カドミウム（CdS）、酸化亜鉛（ZnO）等の無機系光
導電材料を用いた感光体やポリ−Ｎ−ビニルカルバゾー
ル（PVK）、トリニトロフルオレノン（TNF）等の有機系
光導電材料を用いた感光体が一般的に使用されている。
セレン系感光体は高感度、また長寿命でありセレンの合
金化によつて増感性あるいは耐久性を容易に改善できる
という利点を有する。しかし機械的強度あるいは耐熱性
といつた点に問題を残している。酸化亜鉛を用いた感光
体は一般的に低感度で寿命も短いという欠点を有してい
る。硫化カドミウムを用いた感光体は、通常その最上表
面に比較的厚い透明絶縁層が設けられており、その使用
に際しては、一次帯電→逆極性二次帯電→像露光又は一
次帯電→逆極性二次帯電同時像露光→一様露光のいわゆ
るNP方式と呼ばれる複雑な潜像形成工程を必要とする。
さらに有機光導電性材料を用いた感光体は、一般的に寿
命が短かく、また有機半導体自体の感度が比較的低いと
いう欠点を有している。Conventionally, as a photoconductor for electrophotography used in a copying machine or a laser printer, for example, selenium (Se),
Photoconductors using inorganic photoconductive materials such as cadmium sulfide (CdS) and zinc oxide (ZnO), and organic photoconductive materials such as poly-N-vinylcarbazole (PVK) and trinitrofluorenone (TNF) A photoreceptor is generally used.
The selenium-based photoreceptor has an advantage that it has high sensitivity and long life, and sensitization or durability can be easily improved by alloying selenium. However, there remains a problem with mechanical strength or heat resistance. Photoconductors using zinc oxide generally have the disadvantages of low sensitivity and short lifetime. A photoreceptor using cadmium sulfide is usually provided with a relatively thick transparent insulating layer on the uppermost surface. In use, primary charging → reverse polarity secondary charging → image exposure or primary charging → reverse polarity secondary A complicated latent image forming process called a so-called NP method of simultaneous charge image exposure → uniform exposure is required.
Further, a photoreceptor using an organic photoconductive material generally has a short life and a relatively low sensitivity of the organic semiconductor itself.
以上述べたように従来使用されている電子写真用感光
体はそれぞれ解決されるべき問題点を有しており、いま
だ高耐久性、高耐熱性、高光感度などの特性を十分に兼
ね備えた感光体は得られていないのが実状である。As described above, each of the electrophotographic photoconductors conventionally used has problems to be solved, and a photoconductor that still has sufficient characteristics such as high durability, high heat resistance, and high photosensitivity. The fact is that has not been obtained.
この様な観点から、最近上記の様な欠点を有しない感
光体、すなわち表面硬度、耐摩耗性等の機械的強度に優
れ、高耐熱性、長寿命性、高光感度を兼ね備え、かつ汎
色性に優れた新規の感光体として、非晶質珪素〔別名、
アモルフアス・シリコン（Amorphus Silicon）〕を主体
として用いた非晶質珪素感光体が注目されている。この
感光体に使用される非晶質珪素膜は、例えばプラズマCV
D法（Plasma Chemical Vapor Deposition法）によりシ
ラン（SiH4）ガスのグロー放電分解によつて形成され
る。この場合非晶質珪素膜中には、原料のシランガスの
分解により発生した水素原子が自動的に取り込まれてお
り、この様にして得られた水素含有非晶質珪素膜は、水
素を含有しないものに比べ高い暗抵抗を有し、同時に高
い光導電性を有する。また分光感度域が広く、約380nm
〜700nmまで汎色性を有し、高光感度であり、かつそれ
以上の長波長の赤外域においても良好な光感度を付与す
ることができる。From this point of view, photoconductors that do not have the above-mentioned disadvantages recently, that is, have excellent mechanical strength such as surface hardness and abrasion resistance, have high heat resistance, long life, high photosensitivity, and have panchromaticity As a novel photoconductor excellent in
An amorphous silicon photoreceptor mainly using [Amorphus Silicon] has attracted attention. The amorphous silicon film used for this photoconductor is, for example, plasma CV
It is formed by glow discharge decomposition of silane (SiH 4 ) gas by the D method (Plasma Chemical Vapor Deposition method). In this case, the hydrogen atoms generated by the decomposition of the raw material silane gas are automatically taken into the amorphous silicon film, and the hydrogen-containing amorphous silicon film thus obtained does not contain hydrogen. It has a higher dark resistance than that of the one and at the same time has a higher photoconductivity. Wide spectral sensitivity range, about 380nm
It has panchromaticity up to 700 nm, has high photosensitivity, and can provide good photosensitivity even in an infrared region having a longer wavelength than that.
以上の理由により、非晶質珪素感光体は機械的強度、
耐久性、光感度、汎色性、長波長感度などに優れた理想
的な特性を有する電子写真用感光体であるといえる。For the above reasons, the amorphous silicon photoreceptor has mechanical strength,
It can be said that the electrophotographic photosensitive member has ideal characteristics excellent in durability, light sensitivity, panchromaticity, long wavelength sensitivity and the like.
しかしながら、上記の非晶質珪素は、実用上次の欠点
を有する。すなわち非晶質珪素を主体とする電子写真用
感光体は、現像に必要な十分に高い帯電性、光感度及び
それらの環境安定性、繰り返し安定性においては良好な
特性を示すが、実際に複写画像を得たり、又は複写を繰
り返すと、文字や絵の輪郭が鮮鋭でない、すなわちぼや
けたような画質となる。この様な欠点は先に述べた理想
的な特性を有する電子写真用感光体でありながら、実使
用に耐えないという致命的な問題となる。However, the above-mentioned amorphous silicon has the following disadvantages in practical use. That is, the electrophotographic photoreceptor mainly composed of amorphous silicon exhibits sufficiently high chargeability, photosensitivity, environmental stability and repetition stability required for development, but it is actually copied. When an image is obtained or copied repeatedly, the outline of the character or picture is not sharp, that is, the image quality is blurred. Such a drawback is a fatal problem that the photoreceptor for electrophotography having the ideal characteristics described above cannot withstand actual use.
従つて、本発明の目的は非晶質珪素を主体とした電子
写真用感光体において、機械的強度、耐久性、光感度、
汎色性、長波長感度などの優れた特性を材料変更などに
より損うことなく、又複雑な工程を経ることなく、前述
の問題を解決し、良好な複写画像を安定して得ることが
できる電子写真複写装置を提供することにある。Accordingly, an object of the present invention is to provide an electrophotographic photoreceptor mainly composed of amorphous silicon, with mechanical strength, durability, light sensitivity,
The above-mentioned problems can be solved and a good copied image can be stably obtained without losing excellent properties such as panchromaticity and long-wavelength sensitivity due to a material change or the like and without going through a complicated process. An object of the present invention is to provide an electrophotographic copying apparatus.
本発明者等は非晶質珪素を主体とした感光体を用いた
装置における画像のぼけ等の欠点は、感光体表面に局部
的に生じた導電性部分に起因し、この導電性部分を完全
に除去できる清掃手段を使用することによつて前記の目
的が達成できることを見出し、本発明を完成した。The inventors of the present invention have found that defects such as image blur in a device using a photoreceptor mainly composed of amorphous silicon are caused by a locally generated conductive portion on the photoreceptor surface. It has been found that the above-mentioned object can be achieved by using a cleaning means which can be removed, and the present invention has been completed.
すなわち、本発明は、非晶質珪素を主体とする光導電
層を有する感光体と、この感光体に残留する現像剤を除
去する清掃手段を具備する電子写真複写装置において、
清掃手段として、表面に膜厚30μｍ以下のａ−Si膜の保
護層を設けた金属ブレードを使用することを特徴とする
電子写真複写装置を提供するものである。That is, the present invention provides an electrophotographic copying apparatus including a photoconductor having a photoconductive layer mainly composed of amorphous silicon, and a cleaning unit for removing a developer remaining on the photoconductor.
An object of the present invention is to provide an electrophotographic copying apparatus characterized in that a metal blade provided with a protective layer of an a-Si film having a thickness of 30 μm or less on its surface is used as a cleaning means.
本発明の装置で使用する金属製部材からなる清掃手段
は、具体的には、金属ブレードあるいは金属ブレードと
金属ブラシの組合わせである。The cleaning means made of a metal member used in the apparatus of the present invention is, specifically, a metal blade or a combination of a metal blade and a metal brush.
金属ブレードおよび金属ブラシの材質は、銅、アルミ
ニウム、亜鉛、黒煙、ニツケル、クロム、銅、黄銅、チ
タン、コバルト等の金属またはこれらの金属粉をプラス
チツク材料中に分散させたものである。金属製ブラシを
用いる場合には、このブラシを30〜100℃に加熱保持す
ることが好ましい。The material of the metal blade and the metal brush is a metal such as copper, aluminum, zinc, black smoke, nickel, chromium, copper, brass, titanium, cobalt, or a powder of these metals dispersed in a plastic material. When using a metal brush, it is preferable to heat and maintain the brush at 30 to 100 ° C.
金属ブレードの場合には、ブレードの表面にａ−Si膜
の保護層を設ける。このときの保護層の厚さは、感光体
の導電性部分のトナーの除去効果が損われないよう、30
μｍ以下、好ましくは20μｍ以下とするのがよい。In the case of a metal blade, a protective layer of an a-Si film is provided on the surface of the blade. At this time, the thickness of the protective layer is set to 30 so that the toner removing effect of the conductive portion of the photoconductor is not impaired.
μm or less, preferably 20 μm or less.
以下、本発明の実施例を従来装置例と比較しながら説
明する。Hereinafter, an embodiment of the present invention will be described in comparison with a conventional apparatus example.
非晶質珪素系感光体の製造 まず、非晶質珪素を主体とする感光体の製造方法のひ
とつについて簡単に説明する。円筒状のAl基板を容量結
合型プラズマCVD（Chemical Vapor Deposition）装置の
反応室内の所定位置に設定し、基板温度を230℃に維持
し、反応室内に100％シラン（SiH4）ガスを毎分100cc、
水素希釈の100ppmジボラン（B2H6）ガスを毎分115ccの
範囲で流入させ、反応槽内を0.5Torrの内圧に維持した
後、13.56MHzのRF電源を投入して、グロー放電を生ぜし
め、RF電源の出力を80Wに維持した。Production of Amorphous Silicon-Based Photoconductor First, one method of manufacturing a photoconductor mainly composed of amorphous silicon will be briefly described. A cylindrical Al substrate is set at a predetermined position in the reaction chamber of a capacitively coupled plasma CVD (Chemical Vapor Deposition) apparatus, the substrate temperature is maintained at 230 ° C., and 100% silane (SiH 4 ) gas is supplied into the reaction chamber per minute. 100cc,
100 ppm diborane (B 2 H 6 ) gas diluted with hydrogen was introduced at a flow rate of 115 cc / min, and the inside of the reactor was maintained at 0.5 Torr. Then, a 13.56 MHz RF power supply was turned on to generate glow discharge. The output of the RF power supply was maintained at 80W.
この様な条件で作製した非晶質珪素系感光体は、表面
硬度が高く、耐摩耗性、耐熱性に優れ、高暗抵抗かつ高
光感度を有し電子写真感光体特性の非常に優れたもので
あつた。Amorphous silicon-based photoreceptors manufactured under these conditions have high surface hardness, excellent abrasion resistance and heat resistance, high dark resistance and high photosensitivity, and extremely excellent electrophotographic photoreceptor characteristics. It was.
なお非晶質珪素系の感光体は、上述の水素化アモルフ
アスシリコンのほか、フツ素化アモルフアスシリコン、
フツ素化アモルフアスシリコンカーバイト、アモルフア
スシリコンナイトライド等が単体で、または電子写真用
感光体としての特性を良好にするため、機能を分離し層
状に組合せて使用される。The amorphous silicon-based photoreceptor is, in addition to the above-mentioned hydrogenated amorphous silicon, fluorine-containing amorphous silicon,
Fluorinated amorphous silicon carbide, amorphous silicon nitride and the like are used alone or in combination with each other in order to improve the characteristics as a photoconductor for electrophotography.
比較例１ 第４図はクリーニング工程としてブレード方式を採用
した従来の電子写真複写装置の概略図である。Comparative Example 1 FIG. 4 is a schematic view of a conventional electrophotographic copying apparatus employing a blade system as a cleaning process.
前述のようにして製造した非晶質珪素を主体とした感
光体ドラム10を帯電コロトロン９により均一に帯電し、
像露光した後、現像機８で潜像を現像し転写コロトロン
７で転写紙に転写定着する。転写後感光体に残留するト
ナーは、ハウジング５内に収納されている板状のウレタ
ンブレード３とマイラーフイルム４とからなるクリーニ
ング装置によりクリーニングされる。The photosensitive drum 10 mainly composed of amorphous silicon manufactured as described above is uniformly charged by the charging corotron 9,
After the image exposure, the latent image is developed by the developing device 8 and is transferred and fixed on the transfer paper by the transfer corotron 7. The toner remaining on the photoreceptor after the transfer is cleaned by a cleaning device including a plate-shaped urethane blade 3 and a mylar film 4 housed in a housing 5.
このような構成の装置で周囲の環境条件が30℃、85％
RHの下で、連続1000枚の複写を行なつたところ、複写画
像がぼやけてきた。1000枚複写後の同環境条件下での解
像度は2.2本/mmであつた。Ambient environmental conditions of 30 ° C, 85%
When copying 1000 sheets continuously under RH, the copied image became blurred. The resolution under the same environmental conditions after copying 1000 sheets was 2.2 lines / mm.
実施例１ 比較例１と同じ構成で、清掃工程において第３図に示
すように板状のウレタンブレードの代りに、感光体と接
触する側の両面と先端に、感光体表面と同じａ−SiN:H
膜をつけたステンレススチール板１を用いた電子写真複
写装置に、比較例と同じ構成の感光体を装着して複写を
行つたところ、良好な画質を安定して繰返し得る事がで
きた。Example 1 The same configuration as that of Comparative Example 1, except that in the cleaning step, instead of a plate-like urethane blade as shown in FIG. : H
When a photoconductor having the same configuration as that of the comparative example was mounted on an electrophotographic copying apparatus using the stainless steel plate 1 provided with the film and copying was performed, good image quality could be stably repeated.
本発明の電子写真複写装置によれば、機械的強度、耐
久性、光感度、汎色性、長波長感度などに優れた理想的
な特性を有するアモルフアスシリコン系感光体におい
て、その特性を失うことなく、その画質上の問題点、す
なわち画質のぼやけの発生を解決し、良好な画質を安定
して繰返し得ることができる。ADVANTAGE OF THE INVENTION According to the electrophotographic copying apparatus of the present invention, the amorphous silicon photoreceptor having ideal characteristics excellent in mechanical strength, durability, light sensitivity, panchromaticity, long wavelength sensitivity, etc. loses its characteristics. Without the problem of the image quality, that is, the occurrence of the blur of the image quality can be solved, and the good image quality can be stably and repeatedly obtained.
第１図は本発明の電子写真複写装置例の概要図、第２図
は同じく他の装置例の概要図、第３図は他の実施例で使
用する清掃手段例の拡大図、第４図は従来の電子写真複
写装置例の概要図である。 図中符号： １……ａ−Si被覆ステンレススチールブレード;2……金
属ブラシ;2a……加熱ヒータ;3……ウレタン製ブレード;
3a……金属製ブレード;4……マイラーフイルム;5……ハ
ウジング;6……剥離用コロトロン;7……転写用コロトロ
ン;8……現像機;9……帯電用コロトロン;10……感光体;
11……除電ランプ。FIG. 1 is a schematic view of an example of an electrophotographic copying apparatus of the present invention, FIG. 2 is a schematic view of another example of the same apparatus, FIG. FIG. 1 is a schematic diagram of an example of a conventional electrophotographic copying apparatus. Symbols in the drawing: 1 ... a-Si coated stainless steel blade; 2 ... metal brush; 2a ... heater; 3 ... urethane blade;
3a Metal blade; 4 Mylar film; 5 Housing; 6 Corotron for peeling; 7 Corotron for transfer; 8 Developing machine; 9 Corotron for charging; 10 Photoconductor ;
11 ... Antistatic lamp.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小島 文夫 南足柄市竹松1600番地 富士ゼロツクス 株式会社竹松事業所内 (72)発明者 大野 茂雄 南足柄市竹松1600番地 富士ゼロツクス 株式会社竹松事業所内 (72)発明者 由井 俊毅 南足柄市竹松1600番地 富士ゼロツクス 株式会社竹松事業所内 (72)発明者 福原 政昭 南足柄市竹松1600番地 富士ゼロツクス 株式会社竹松事業所内 (56)参考文献 特開 昭59−219770（ＪＰ，Ａ) 特開 昭58−196567（ＪＰ，Ａ) ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Fumio Kojima 1600 Takematsu, Minamiashigara Fuji Fujitsux Inside Takematsu Office (72) Inventor Shigeo Ono 1600 Takematsu, Minamiashigara City Fuji Xerox Inside Takematsu Office (72) Inventor Toshiki Yui 1600 Takematsu, Minami Ashigara-shi Fuji Xerox Co., Ltd. Takematsu Office (72) Inventor Masaaki Fukuhara 1600 Takematsu, Minami Ashigara-shi Fuji Xerox Co., Ltd. Takematsu Office (56) References JP-A-59-219770 (JP, A) 1983-196567 (JP, A)
Claims (2)
感光体と、この感光体に残留する現像剤を除去する清掃
手段を具備する電子写真複写装置において、清掃手段と
して、表面に膜厚30μｍ以下のａ−Si膜の保護層を設け
た金属ブレードを使用することを特徴とする電子写真複
写装置。1. An electrophotographic copying apparatus comprising: a photoconductor having a photoconductive layer mainly composed of amorphous silicon; and a cleaning unit for removing a developer remaining on the photoconductor. An electrophotographic copying apparatus using a metal blade provided with a protective layer of an a-Si film having a thickness of 30 μm or less.
る請求項１の電子写真複写装置。2. An electrophotographic copying apparatus according to claim 1, wherein said a-Si protective layer has a thickness of 20 μm or less.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61120273A JP2620853B2 (en) | 1986-05-27 | 1986-05-27 | Electrophotographic copying machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61120273A JP2620853B2 (en) | 1986-05-27 | 1986-05-27 | Electrophotographic copying machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62278586A JPS62278586A (en) | 1987-12-03 |
| JP2620853B2 true JP2620853B2 (en) | 1997-06-18 |
Family
ID=14782145
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61120273A Expired - Fee Related JP2620853B2 (en) | 1986-05-27 | 1986-05-27 | Electrophotographic copying machine |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2620853B2 (en) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58196567A (en) * | 1982-05-13 | 1983-11-16 | Canon Inc | Cleaning device |
| JPS59219770A (en) * | 1983-05-27 | 1984-12-11 | Canon Inc | Cleaning device |
-
1986
- 1986-05-27 JP JP61120273A patent/JP2620853B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62278586A (en) | 1987-12-03 |
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