JP2603674Y2 - Performance board lock mechanism - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION A puff having a power transmission mechanism for bringing a performance board into contact with a pogo pin in a test head of a semiconductor test apparatus, and a mechanism for maintaining the contact.
It relates to the performance board lock mechanism.

[0002]

2. Description of the Related Art To test a device in a semiconductor test apparatus, a drive pattern is transmitted from a test apparatus body to a performance board via pogo pins on a test head and applied to the device. Also, the output pattern of the device from the performance board via pogo pins,
The test head is returned to the test apparatus main body. The pogo pins used here have a spring inside the cylinder and generally have a spring pressure of about 80 g to 120 g per one. Therefore, the electrical signal can be transmitted normally by contacting the performance board with the traction force greater than the total spring pressure.

[0003] In recent years, devices have been developed in LSI, V
With the development of LSIs, the number of channels of the semiconductor test apparatus has been increasing to 256 channels, 512 channels, and so on. For this reason, for example, in order to make the performance board and the pogo pins contact each other with a 512-channel test head, three pogo pins are used per channel.
Requires more than Kg of force. Therefore, in recent years, a power source such as an air cylinder is used to pull a performance board.

A conventional method will be described with reference to FIG. FIG. 6 shows a part of a cross section of the test head. A number of pogo pins 11 are mounted on the upper part of the test head, and the performance board 12 is placed on the pogo pins. Holes are drilled in the performance board 12 at several places, and the upper ends of the plurality of lock pins 13 are placed so that their faces can be seen. Place the lock ring 14 on the top and rotate it several tens of degrees in the horizontal direction.
And the lock pin 13 are fixed. An air cylinder 15 is provided in the test head, and one end of a connection shaft 16 is fixed to a shaft of the cylinder 15. Stop one point in the middle of the connecting shaft 16 at a fixed point in the test head,
The connecting shaft 16 is rotatable at this fixed point. Further, the other end of the connection shaft 16 is connected to the lock shaft 1.
Stop at the middle end of 7.

When the air cylinder 15 is turned on and off, the vertical movement of the cylinder shaft is transmitted to the connecting shaft 16, and the connecting shaft 16 acts as a lever around the fixed point, thereby moving the lock shaft 17 up and down. Further, depending on how to fix the position of the fixed point of the connection shaft 16, it is possible to generate a traction force of several times the force generated by the air cylinder 15 on the lock shaft 17. Lock shaft 17 moves from point a to point b
Then, the performance board 12 and the pogo pins 11 are brought into contact with each other. Only in this state can electric signals be transmitted.

[0006]

As described above, the number of channels tends to increase. In this case, the conventional method has the following problems. (1) In order to further increase the traction force, an air cylinder 15 that can exert a greater force is required. That is, a large-sized object is required. Alternatively, it is necessary to increase the length of the connecting shaft 16 to generate a larger force on the lock shaft 17. That is, in either case, the size of the test head must be increased. (2) There is a method using an oil cylinder, which can generate a large force. However, if an oil leak occurs, there is a possibility that surrounding rubber, plastic materials, electric components, and the like are eroded. (3) Similarly, if a leak occurs, there is a risk that it will evaporate due to ambient heat and catch fire. In addition, there is a concern that a strange smell is emitted to the surroundings. (4) If the electric signal or the air source operating the air valve is shut off for some reason, the lock is released and the device may be damaged. In consideration of these problems, the present invention can produce a large force while being small and can ensure safety, and even if the electric signal or air source operating the air valve is shut off,
This provides a mechanism in which the lock is not released without permission.

[0007]

A test of a semiconductor test apparatus
Performer used when testing devices with heads
Place the board on a number of pogo pins and use a lock ring
Fixed and towed performance board lock mechanism
And the high-pressure energy of the power source is
An air valve 21 for controlling the supply of the air valve 22;
The internal high pressure piston reciprocates
A first air cylinder 24, and a first air cylinder
The second piston connected to the first piston and the first shaft
A second cylinder 25 having a secondary cylinder
From the final stage where power is transmitted through the power transmission medium.
Final stage cylinder 26 having a ton 27
Tonnes, both ends of which are outside the final cylinder
A protruding final stage shaft 28;
A third piston having a third piston reciprocating vertically.
A cylinder 31 and a third piston in the third air cylinder
A third shaft connected to the shaft, and a third shaft fixed to the third shaft.
Of the lock slider 30 and the final stage shaft 28
The end is a lock pin fixed to the above performance board
13 and the other end is provided with an engagement portion 29 with the lock slider.
And a fitting portion of the final stage shaft and the lock slide.
The final stage shaft is
When the tow board is pulled.
To hold the performance board lock mechanism.
Constitute. Further, the secondary side of the second cylinder 25 and the
The power enclosed between the primary stage cylinder 26 and the primary side.
The transmission medium may be an inert liquid 40. Claim 1
Means for realizing. High-pressure air from an air source capable of generating a pressure of several kg is input to the primary side of the air cylinder. The center of the piston of the air cylinder and the piston of the next cylinder are connected by a shaft and fixed. Thus, when the piston of the air cylinder moves, the piston of the next cylinder also moves in the same direction. A liquid is sealed as a medium in the secondary side of the cylinder. The secondary side of the cylinder is connected to the primary side of another final stage cylinder.

[0008] The piston of the last stage cylinder has a cross-shaped structure with a shaft fixed at the center thereof, and a lock pin is attached to a part of the shaft protruding above the outside of the last stage cylinder. The tip of the shaft protruding from the lower part of the last cylinder has an inverted T-shaped structure. A lock slider reciprocating in the horizontal direction is provided on the outside of the bottom surface of the cylinder by an on / off operation of another air cylinder. A hole is formed in the lock slider so as to be engaged with the inverted T-shaped portion of the shaft in the middle.

Means for realizing claim 2. An inert liquid is filled as a primary medium between the cylinder secondary side and the final stage cylinder.

[0010]

The function of claim 1 will be described. Entering a high-pressure air in the pressure F ₁ on the primary side of the air cylinder. As a result, the piston moves to generate a force F ₂ several times on the secondary side. This force is transmitted via the shaft to the primary side of the next cylinder. The piston of the cylinder moves while holding down the liquid on the secondary side, the secondary side to generate the pressure F ₃ several times. Liquid transmits this pressure F _3, the primary side of the final stage cylinder. Piston in the final stage cylinder is pushed down under pressure F ₄ of (F ₃ · piston area).

With this force, the lock pin on the shaft mounted on the piston presses the performance board downward. As a result, the pogo pins and the pads on the performance board are sufficiently in contact with each other to form a transmission path for an electric signal. At the same time, the inverted T-shaped portion at the lower part of the shaft sufficiently sinks into the rectangular parallelepiped hole of the lock slider. In this state, another air cylinder is turned on, and the lock slider is pushed out in the horizontal direction. As a result, the inverted T-shaped portion at the lower portion of the shaft and the T-shaped portion of the lock slider mesh with each other, and a series of operations is completed.

The operation of claim 2 will be described. The inert liquid sealed in the cylinder secondary side and the last-stage cylinder primary side functions as a force transmission medium.

[0013]

FIG. 1 shows an embodiment. This figure shows a state in which the performance board 12 is mounted on the pogo pins, the lock ring 14 is covered, and the performance board 12 is fixed to the lock pins 13. No high-pressure air is input to the primary side of the air cylinder 24. The air cylinder 24 and the cylinder 25 are mounted inside the test head.
Further, the pistons of the air cylinder 24 and the cylinder 25 are
It is connected and fixed to the center by one shaft. From the secondary side of the cylinder 25, a plurality of tubes 33 (not shown) project out, and a plurality of final stage cylinders 26 are provided.
So that power can be transmitted to the vehicle.

The piston 27 of the final stage cylinder 26 has a cross-shaped structure in which a shaft 28 is fixed at the center thereof, and both upper and lower ends of the shaft 28 protrude outside the cylinder 26.
The lock pin 13 is attached to the upper end of the shaft 28. The lower end of the shaft 28 has an inverted T-shaped structure 29. Although both ends of the lock slider 30 are screwed to the cylinder 26 on the bottom surface of the last-stage cylinder 26, the lock slider 30 can be moved freely. Further, the lock slider 30 is fixed to a shaft of the air cylinder 31, and reciprocates in a horizontal direction by an on / off operation.

FIG. 2 shows how the performance board is pulled and locked. In the state shown in FIG. 1, a control signal 23 is sent to the air valve 21, and high-pressure air having an air pressure F ₁ is input to the primary side of the air cylinder 24.
Thus several times the force F ₂ is generated on the secondary side. This force is transmitted to the primary side of the cylinder 25. Cylinder 25-2
A liquid 40 instead of oil is sealed in the tube 33 connecting the secondary side and the primary side of the final-stage cylinder 26 and the tube. The piston of the cylinder 25 is pushed by the force of F _2, the secondary side is further generate several times the pressure F _3. This pressure F ₃ appears as a force F 4 = F 3 · S for pushing down the piston 27 of the final stage cylinder 26. Here, S represents the cross-sectional area of the piston 27.

When the piston 27 is pushed down, a shaft 28 attached to the piston 27 is
Also moves downward together with the simultaneous F ₄ becomes force. In order for the plurality of shafts 28 to operate simultaneously, the performance board 12 is pulled down on the entire board on average,
It contacts many pogo pins 11. When the spring pressure of the pogo pin 11 comes into contact with a force sufficiently larger than the total force F ₅ ,
The spring of the pogo pin 11 contracts, and due to the reaction force thereof, the pogo pin 11 makes sufficient contact with the pad on the performance board 12 to provide a path for passing an electric signal without any problem.

On the other hand, an inverted cross-shaped portion 29 below the shaft 28
Goes down. When the air cylinder 31 is fully lowered as shown in FIG. 4, the air cylinder 31 is turned on, the lock slider 30 is pushed out in the horizontal direction, and the lock slider 30 is pushed.
And the inverted T-shaped portion 29 of the shaft 28 engages and locks. A series of operations is completed as described above.

FIG. 3 shows a state in which the electric signal 23 for turning on and off the air valve 21 or the high-pressure air 22 is cut off for some reason. At this time, each piston of the air cylinder 24 and the cylinder 25 returns to the same initial position as in FIG. Therefore, the last stage cylinder 26
The piston 27 and the shaft 28 fixed thereto also try to return to the initial position. However, inverted T-shaped portion 29 and the biting each other and are part of the T-shaped portion 32 of the lock slider 30, to a large frictional force that the total spring pressure F ₅ a is several tens Kg of pogo pins 11 acts, the lock slider 30 is Under this force, the cylinder 26 is pressed against the lower surface and remains engaged. Multiple lock sliders 3
0 keeps maintaining this state from all sides, and keeps keeping the locked state.

In the second embodiment, the inert liquid is contained in the tube 33 connecting the secondary side of the cylinder 25 and the primary side of the last stage cylinder 26 and the two cylinders in FIGS. 40 is enclosed and used.

[0019]

The present invention is configured as described above, and has the following effects. (1) Since required power can be generated by combining an air cylinder and a cylinder using a fluid as a medium, the size and weight of the test head can be reduced, and the size of the test head does not need to be increased. (2) Even if the traction control signal is interrupted, the lock is not released, so that damage to devices and peripheral circuits can be prevented. (3) Since an inert liquid is used, even if a liquid leak occurs, the surrounding parts are not corroded. At the same time, fires can be prevented and safety can be improved.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view illustrating a state before an operation according to a first exemplary embodiment.

FIG. 2 is a cross-sectional view illustrating a state after an operation according to the first exemplary embodiment.

FIG. 3 is a cross-sectional view showing a locked state even when a control signal is interrupted.

FIG. 4 is a cross-sectional view showing a lock fitting portion.

FIG. 5 is a perspective view showing a structure of a lock slider.

FIG. 6 is a sectional view showing a conventional technique.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 11 Pogo pin 12 Performance board 13 Lock pin 14 Lock ring 15 Air cylinder 16 Connecting shaft 17 Lock shaft 18 a point 19 b point 21 Air valve 22 High pressure air 23 Control signal 24 Air cylinder 25 Cylinder 26 Last stage cylinder 27Last stagePiston 28Last stageShaft 29 Fitting part 30 Lock slider 31ThirdAir cylinder 32T-shaped part  33 tubes 40Power transmission medium

Claims (2)

(57) [Scope of request for utility model registration] 1. A test head for a semiconductor test apparatus, comprising:
Performance boards to use when testing
Place on a number of pogo pins, secure with lock ring and pull
Performance board lock mechanismAtThe power source is controlled by an external control signal. High pressure airSupply
ControlAir valve and, The first high pressure air from the air valve
The first ton reciprocates Air cylinder and, The first piston and the first shaft in the first air cylinder
A second with a second piston connected CylinderWhen, Power transmission from the secondary side of the second cylinder MediumThroughMovement
PowerIs transmitted to the final stagepistonHavingLast stage cylinder
When, To the final stage piston FixedAt both ends of the final stageSiri
DaofOutsideProtrudingOutDone, last stageshaftWhen, A third piston that reciprocates vertically with the final stage shaft
The third Air cylinderWhen, A third system connected to a third piston in the third air cylinder
With the raft, Fixed to the third shaft Lock sliderWhen, The last stage One end of the shaftThe above performance board
WhenFixedDoLock pinThe other end is the lock slide
It has a mating part with The last stage shaftAnd the fitting partLock sliderBite with
CombinationAnd by, The last stage shaft is performance
Board pulledKeeps its position whenYo
Sea urchinPerformance board
Lock mechanism. (2)The secondWith the secondary side of the cylinderTheLast stage
Primary sideThe power transmission enclosed betweenMediumIs  Inert liquidIs,  The performance board according to claim 1, wherein
-Lock mechanism.