JP2600173Y2 - Surface profile measuring device - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a surface shape measuring device for measuring the surface shape of a detection object by irradiating the object with slit light.

[0002]

2. Description of the Related Art For example, in the development stage of a vehicle, the shape of a manufactured prototype model is measured by a surface shape measuring device.

FIG. 5 shows an example of this type of surface shape measuring apparatus. In FIG. 6, the detection head 1 has a light projecting unit 2 and a light receiving unit 3, irradiates slit light A (indicated by an arrow A) from the light projecting unit 2 to the detection object 4, and detects the detection object. The reflection slit light on the surface 4 is picked up by the light receiving section 3 and the image is output as a video signal. The controller 5 adjusts the amount of light emitted from the light projecting unit 2 of the detection head 1, and A / D converts a video signal from the light receiving unit 3 and outputs it to the host computer 6 as image data. The host computer 6 measures the surface shape of the detection target based on the input image data.

Here, the detection head 1 is positioned such that the optimum detection position, which is the intersection of the light emitting axis of the light projecting section 2 and the light receiving axis of the light receiving section 3, is within the measurement range of the surface of the detection object 4. There is a need. Therefore, the distance between the light projecting unit 2 and the light receiving unit 3 of the detection head 1 and the surface of the detection target 4 is defined by attaching the detection head 1 to the tip of the robot arm or to an inspection jig. I have to.

[0005]

However, when the object to be detected is curved, for example, because the object to be detected is a character line of a vehicle, or when the object to be detected is a part having a complicated shape, the detection is performed. It is difficult to accurately define the distance between the head and the detection target. For this reason, it is necessary to prepare a special jig, and there is a problem that the surface shape of the detection target cannot be easily measured.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a surface shape measuring device capable of simply and reliably measuring the surface shape of a detection target without using a special jig. To provide.

[0007]

SUMMARY OF THE INVENTION The present invention provides a detection head having a light projecting section for projecting slit light on the surface of a detection object and a light receiving section for imaging the reflected slit light on the surface of the detection object. In the surface profile measuring device provided, the detection head is provided with a positioning leg that defines a distance between the surface of the detection target and the light emitting unit and the light receiving unit in a contact state with the detection target , The detection target is
Swings along the surface shape of the target object
A moving swing member is provided.

[0008]

[0009]

In the case of the surface shape measuring device according to the first aspect, when the positioning leg abuts on the surface of the detection target, the positioning leg causes the light projecting portion and the light receiving portion provided on the surface of the detection target and the detection head. Can be defined.

Then, when the slit light is emitted from the light projecting portion to the object to be detected, the slit light is reflected on the surface of the object to be detected, and the light receiving portion picks up the reflected slit light. Therefore, it is possible to reliably measure the surface shape of the detection target based on the imaging position of the slit light in the light receiving unit.

In this case , since the positioning leg is provided with a swinging member that swings along the surface shape of the detection target at a contact portion with the detection target, the positioning leg is not affected by the surface shape of the detection target. And the detection head can be stably positioned.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIGS. FIG. 1 schematically shows a configuration of a detection head of the surface profile measuring device. In FIG. 1, the detection head 11 has a pair of positioning legs 1 at both ends of a bridge portion 12.
It has a substantially U-shape in which 3 and 13 are integrally provided. A light projecting section 14 and a light receiving section 15 are provided on a bridge section 12 of the detection head 11. The light projecting section 14 mainly includes a semiconductor laser 16 and is driven by a laser driving circuit 17 to emit laser light. Laser light emitted from the semiconductor laser 16 is converted into slit light by the collimating lens 18 and the rod lens 19.

The light receiving section 15 is mainly composed of a CCD camera head 21 for picking up a reflected image which enters through a light receiving lens 20, and outputs an image mapped on the light receiving surface as a video signal. In this case, the optimum detection distance between the light projecting unit 14 and the light receiving unit 15 of the detection head 11 is a point where the light projecting axis of the light projecting unit 14 and the light receiving axis of the light receiving unit 15 intersect. It is set at a position of ± 10 mm. Therefore, the length dimension of the positioning leg 13 is 100 between the surface of the detection target 22 and the light emitting unit 14 when the detection head 11 is in contact with the detection target 22.
It is set to be ± 10 mm. Here, a rocking member 23 to which a pad 23a made of rubber or the like is attached is provided on the bottom surface of the positioning leg 13. A handle 24 is attached to the upper surface of the detection head 11.

FIG. 2 shows the overall electrical configuration. In FIG. 2, the laser drive circuit 17 of the detection head 11
Is connected to the controller 25 and the controller 2
A drive current is supplied to the semiconductor laser 16 in response to a command from the controller 5. The semiconductor laser 16 irradiates a laser beam through a collimating lens 18 and a rod lens 19 when a driving current is applied. CCD camera head 21 of light receiving section 15
Captures a reflected image that enters through the light receiving lens 20 and outputs the captured image to the controller 25 as a video signal.

In the controller 25, a laser output control circuit 26 outputs a drive command to the detection head 11 based on a command from the CPU 27. Further, the video amplifier 28 amplifies the video signal from the detection head 11 and outputs it to the A / D conversion circuit 29. A / D conversion circuit 2
9 converts the video signal into a digital value and outputs it to the CPU 27. The CPU 27 operates based on a program stored in the ROM 30. The CPU 27 temporarily stores the digital value from the A / D conversion circuit 29 in the RAM 31 as image data, and also transmits the image data stored in the RAM 31 at a predetermined timing to the interface circuit 32. Through the host computer 33.

The host computer 33 controls the operation of the controller 25 by giving a command through the interface circuit 32. When image data is input from the controller 25, the surface shape of the detection target 22 is measured based on the image data. The host computer 33 directly inputs a video signal from the detection head 11 and projects an image on a monitor.

Next, the operation of the above configuration will be described. In order to measure the measurement range in the hatched area of the detection target 22 shown in FIG. 3, the slit light (indicated by an arrow A) is held in the desired measurement range by holding the handle 24 of the detection head 11 as shown in FIG. The positioning leg 13 of the detection head 11 is brought into contact with the detection target 22 so as to be irradiated. At this time, the light projecting unit 14 and the light receiving unit 15 provided on the detection head 11 are positioned at the optimum detection distance by the positioning legs 13.

When the slit light from the light projecting section 14 of the detection head 11 is irradiated on the detection target 22, the CCD
The camera head 21 captures an image of the slit light reflected on the surface of the detection target 22 and outputs a video signal. Here, the slit light applied to the detection target 22 is
Along the surface shape of That is, if the surface of the detection target 22 is flat, the reflection shape of the slit light is linear, and if the surface of the detection target 22 is uneven, the reflection shape of the slit light is uneven. Therefore, the host computer 33
The surface shape of the detection target 22 can be measured based on image data output from the controller 25 in response to a video signal from the CCD camera head 21.

According to the above configuration, the detection head 11
And a light projecting unit 14 and a light receiving unit 1 provided on the detection head 11 by the positioning legs 13.
Since the distance between 5 and the surface of the detection target 22 is defined, the surface shape of the detection target 22 can be reliably detected by the detection head 11. Therefore, unlike the conventional example in which the surface shape of the detection target is measured by the detection head having no positioning function, the surface shape of the detection target 22 can be easily and reliably measured without using a special jig. It is Ru can.

[0020]

Further, when contact positioning leg 13 of the detection head 11 to detect the object 22, since the swing member 34 pad 23 is set along the surface shape of the object to be detected 22, the detection target detection head 11 The light projecting unit 14 and the light receiving unit 15 are reliably positioned with respect to the
The distance to the surface can be reliably defined. Therefore, even if the shape of the detection target is complicated, the surface shape can be reliably measured.

The detecting head 11 has three positioning legs 13.
More than one may be provided. In this case, the detection head 11 can be positioned more reliably.

[0023]

As is clear from the above description, the surface shape measuring apparatus of the present invention has the following effects.

[0024] detection head, Rutotomoni provided positioning leg which defines the distance between the surface and the projecting portion and the light receiving portion of the detection object in contact state of the detection object, the positioning leg,
Along the surface of the object to be detected
The swing member that swings is provided.
The detection head is stable regardless of the unevenness of the surface of the elephant.
And the surface shape of the detection target can be measured simply and reliably.

[0025]

[Brief description of the drawings]

FIG. 1 is a schematic view of a detection head according to an embodiment of the present invention, which is cut longitudinally;

FIG. 2 is a block diagram showing the overall electrical configuration.

FIG. 3 is a perspective view showing an object to be detected.

FIG. 4 is a perspective view of a detection head shown in a measurement state.

FIG. 5 is an overall perspective view showing a conventional example.

[Explanation of symbols]

11 is a detection head, 13 is a positioning leg, 14 is a light emitting unit,
Reference numeral 15 denotes a light receiving unit, 22 denotes an object to be detected, and 23 denotes a swing member.

Continuation of front page (56) References JP-A-5-26633 (JP, A) JP-A-2-32206 (JP, A) JP-A-63-109351 (JP, A) JP-A-57-66303 (JP, A) , A) Hikaru 4-138208 (JP, U) (58) Field surveyed (Int. Cl. ⁶ , DB name) G01B 11/00-11/30 102

Claims (1)

(57) [Scope of request for utility model registration] 1. A surface shape measuring apparatus comprising: a light projecting unit for projecting slit light on a surface of a detection target; and a detection head having a light receiving unit for imaging reflected slit light on the surface of the detection target. the detection head includes a positioning leg which defines the distance between the surface and the light projecting unit and the light receiving portion of the detection object in contact state to the detection object, is provided on the positioning leg, detected At the contact point with the object
A swing member that swings along the surface shape of the detection target;
Profilometer, wherein a is provided.