JP2599086B2 - Method and apparatus for recovering fluorine-based gas - Google Patents

Method and apparatus for recovering fluorine-based gas

Info

Publication number
JP2599086B2
JP2599086B2 JP5070897A JP7089793A JP2599086B2 JP 2599086 B2 JP2599086 B2 JP 2599086B2 JP 5070897 A JP5070897 A JP 5070897A JP 7089793 A JP7089793 A JP 7089793A JP 2599086 B2 JP2599086 B2 JP 2599086B2
Authority
JP
Japan
Prior art keywords
gas
tank
liquefied
recovery
fluorine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP5070897A
Other languages
Japanese (ja)
Other versions
JPH06257899A (en
Inventor
秀治 福田
隆治 赤松
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Iwatani Corp
Original Assignee
Iwatani Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Iwatani Corp filed Critical Iwatani Corp
Priority to JP5070897A priority Critical patent/JP2599086B2/en
Publication of JPH06257899A publication Critical patent/JPH06257899A/en
Application granted granted Critical
Publication of JP2599086B2 publication Critical patent/JP2599086B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25BREFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B2345/00Details for charging or discharging refrigerants; Service stations therefor
    • F25B2345/002Collecting refrigerant from a cycle

Landscapes

  • Separation By Low-Temperature Treatments (AREA)

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【産業上の利用分野】本発明は、消火剤として使用され
るハロンや冷凍機の冷媒として使用されるフロン114
等のフッ素系ガスの回収方法及びその装置に関する。
BACKGROUND OF THE INVENTION The present invention relates to halon used as a fire extinguishing agent and freon 114 used as a refrigerant for a refrigerator.
The present invention relates to a method and an apparatus for recovering a fluorine-based gas such as.

【0002】[0002]

【従来技術】従来、フッ素系ガスはその化学的性質や熱
的性質を利用して、冷凍機の冷媒や消火剤として使用さ
れている。そして、消火器の定期点検時や冷凍機の廃棄
時にはフッ素系ガスは大気に放出していた。
2. Description of the Related Art Conventionally, fluorine-based gas has been used as a refrigerant or a fire extinguisher for refrigerators by utilizing its chemical and thermal properties. When the fire extinguisher was inspected regularly or the refrigerator was discarded, fluorine-based gas was released to the atmosphere.

【0003】[0003]

【発明が解決しようとする課題】ところがフッ素系ガス
を大気に放出すると地球を取り巻くオゾン層破壊の原因
となることから、ある種のフッ素系ガスの大気放出は規
制の対象となり、対象フッ素系ガスの製造も停止される
ことになった。ところが、特定の分野においては、ハロ
ンガスやフッ素系ガスを使用しなけれならないこともあ
ることから、フッ素系ガスの回収技術が求められている
が、現在フッ素系ガスを高純度に回収する方法はない。
本発明は、このような点に着目してなされたもので、フ
ッ素系ガスを高純度にかつ、大量に回収することのでき
る回収方法及び回収装置を提供することを目的とする。
However, since the emission of fluorine-based gas into the atmosphere causes depletion of the ozone layer surrounding the earth, the emission of certain types of fluorine-based gas into the atmosphere is subject to regulation. Has also been discontinued. However, in certain fields, since it may be necessary to use halon gas or fluorine-based gas, there is a need for a fluorine-based gas recovery technology, but there is no method for recovering fluorine-based gas with high purity at present. .
The present invention has been made in view of such a point, and an object of the present invention is to provide a recovery method and a recovery apparatus capable of recovering a large amount of fluorine-based gas with high purity.

【0004】[0004]

【課題を解決するための手段】上述の目的を達成するた
めに、本発明は、消火器等のフッ素系ガス貯蔵容器内に
液体と気体の混合体として貯蔵されている液化フッ素系
ガスを貯蔵容器から回収するにあたり、まず貯蔵容器内
の液体成分をその自圧で回収タンクに送給し、次いで貯
蔵容器から取り出した気体成分を圧縮したのち低温冷媒
で冷却している冷却液化槽に導入して冷却液化し、この
液化ガスを回収タンクに送給して回収するようにし、回
収タンクからの気化ガスを冷却液化槽に導入して再液化
するようにしたことを特徴としている。
In order to achieve the above-mentioned object, the present invention relates to a method for storing a liquefied fluorine-based gas stored as a mixture of a liquid and a gas in a fluorine-based gas storage container such as a fire extinguisher. When recovering from a container, the liquid component in the storage container is first sent to the recovery tank under its own pressure, then the gas component taken out of the storage container is compressed, and then the low-temperature refrigerant
In introducing the cooled liquefied tank is cooled by cooling liquefied, so as to recover and deliver the liquefied gas in the recovery tank, times
Vaporized gas from the collection tank is introduced into the cooling liquefaction tank and reliquefied
It is characterized in that the the to.

【0005】[0005]

【作用】本発明では、フッ素系ガス貯蔵容器内に液体と
気体の混合体として貯蔵されている液化フッ素系ガスの
液体成分をその自圧で回収タンクに送給し、次いで貯蔵
容器から取り出した気体成分を圧縮したのち低温冷媒で
冷却している冷却液化槽に導入して冷却液化し、この液
化ガスを回収タンクに送給して回収するようにし、回収
タンクからの気化ガスを冷却液化槽に導入して再液化す
るようにしていることから、フッ素系ガス貯蔵容器内と
冷却液化槽内では、常に温度差に基づく圧力差が生じて
いることになり、フッ素系ガス貯蔵容器に貯蔵されてい
るフッ素系ガスは冷却液化槽で冷却液化され、液体の状
態で確実に回収することができる。
According to the present invention, the liquid component of the liquefied fluorine-based gas stored as a mixture of liquid and gas in the fluorine-based gas storage container is sent to the recovery tank under its own pressure, and then taken out of the storage container. After compressing gaseous components, use low-temperature refrigerant
Cooled liquefied is introduced into the cooling liquefaction vessel are cooled, so as to recover and deliver the liquefied gas in the recovery tank, the recovery
The vaporized gas from the tank is introduced into the cooling liquefaction tank and reliquefied.
So that the inside of the fluorine gas storage container
In the cooling liquefaction tank, a pressure difference always occurs based on the temperature difference.
Is stored in a fluorine gas storage container.
The fluorinated gas is cooled and liquefied in a cooling liquefaction tank and can be reliably recovered in a liquid state.

【0006】[0006]

【実施例】図面は本発明方法を使用してハロン消火器か
らハロンガスを回収をする装置の概略構成図を示す。図
中符号(1)は回収対象となる液化ハロンガス貯蔵してい
るをハロン消火器、(2)は液化ハロンガスの回収タン
ク、(3)は圧縮機、(4)は冷却液化槽である。
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic diagram showing an apparatus for recovering halon gas from a halon fire extinguisher using the method of the present invention. In the figure, reference numeral (1) denotes a halon fire extinguisher storing liquefied halon gas to be collected, (2) a liquefied halon gas recovery tank, (3) a compressor, and (4) a cooling liquefaction tank.

【0007】ハロン消火器(1)に接続する回収路(5)は
液体成分回収路(6)と気体成分回収路(7)を並列に配置
して構成してあり、この気体成分回収路(7)に圧縮機
(3)と冷却液化槽(4)が直列に配置してある。また気体
成分回収路(7)の圧縮機(3)と冷却液化槽(4)の間に液
体成分回収路(6)から分岐導出した短絡路(8)が接続し
てある。
A recovery path (5) connected to the halon fire extinguisher (1) comprises a liquid component recovery path (6) and a gas component recovery path (7) arranged in parallel. 7) Compressor
(3) and a cooling liquefaction tank (4) are arranged in series. A short circuit (8) branching out from the liquid component recovery path (6) is connected between the compressor (3) and the cooling liquefaction tank (4) in the gas component recovery path (7).

【0008】圧縮機(3)は多段圧縮機で構成してあり、
この圧縮機(3)への流入側には減圧弁(9)と流路開閉弁
(10)が介装してあり、圧縮機(3)の吸入側に所定圧力以
上(例えば、5Kg/cm2以上)の高圧ガスが流入しないよう
に構成してある。
[0008] The compressor (3) comprises a multi-stage compressor,
On the inflow side to the compressor (3), a pressure reducing valve (9) and a passage opening / closing valve
(10) is interposed so that high-pressure gas of a predetermined pressure or more (for example, 5 kg / cm 2 or more) does not flow into the suction side of the compressor (3).

【0009】冷却液化槽(4)は冷媒貯蔵槽(11)の内部に
容器(12)(13)を上下に連続する状態で配置し、この両容
器(12)(13)を結ぶ連結路(14)に流路開閉弁(15)が配置し
てある。そして、この流路開閉弁(15)よりも上側容器(1
2)側の連結路(14)に前述の気体成分回収路(7)が接続し
てある。また、冷媒貯蔵槽(11)内には、冷媒としてメタ
クレン液が貯溜してあり、このメタクレン液は冷却装置
で213〜233Kに冷却されている。
The cooling and liquefaction tank (4) has containers (12) and (13) arranged inside the refrigerant storage tank (11) in a vertically continuous state, and a connecting path (C) connecting the containers (12) and (13). A flow path on-off valve (15) is arranged at 14). The upper container (1
The aforementioned gas component recovery path (7) is connected to the connection path (14) on the 2) side. In the refrigerant storage tank (11), a methacrylic liquid is stored as a refrigerant, and the methacrylic liquid is cooled to 213 to 233K by a cooling device.

【0010】そして、冷媒貯蔵槽(11)内で上下容器(12)
(13)に沿って液面計(16)が配置してある。この液面計(1
6)の上端を上側容器(12)の上端に、その下端を下側容器
(13)の下端にそれぞれ連通させて、上下容器(12)(13)内
でのハロン液の液量を検出できるようにしてある。
Then, the upper and lower containers (12) are set in the refrigerant storage tank (11).
A liquid level gauge (16) is arranged along (13). This level gauge (1
6) the upper end of the upper container (12) and the lower end of the lower container
The lower ends of (13) are communicated with each other so that the amount of the halon solution in the upper and lower containers (12) and (13) can be detected.

【0011】次に、このシステムを使用してハロン消火
器からのハロンガス回収手順を説明する。まず、ライン
中に配置してある圧縮機(3)を利用して、回収タンク
(2)や配管内部から排気する。このときは、回収路(5)
の対象容器への接続部に配置した弁(17)を閉じるととも
に、液体成分回収路(6)に介装してある各弁を開き、気
体成分回収路(7)の圧縮機(3)の吸入側に配置されてい
る弁を開くとともに、気体成分回収路(7)での圧縮機
(3)の吐出側に配置されている弁を閉じる。
Next, a procedure for recovering halon gas from a fire extinguisher using this system will be described. First, using the compressor (3) arranged in the line, the collection tank
(2) Exhaust from inside the piping. In this case, collection path (5)
The valve (17) arranged at the connection part to the target container is closed, and each valve interposed in the liquid component recovery path (6) is opened to open the compressor (3) of the gas component recovery path (7). Open the valve located on the suction side and open the compressor in the gas component recovery path (7).
Close the valve located on the discharge side of (3).

【0012】次いで、回収路(5)に対象容器(ハロン消
火器)(1)を接続し、圧縮機(3)の吸入側に配置した弁
を閉じ、回収路(5)の対象容器への接続部に配置した弁
(17)を開ける。すると、対象容器(1)内の自圧によって
対象容器(1)内のハロン液が回収タンク(2)に圧送され
る。対象容器(1)の内圧と回収容器(2)の内圧が均圧化
されると、ハロンの送給がとまる。
Next, the target container (halon fire extinguisher) (1) is connected to the recovery path (5), the valve arranged on the suction side of the compressor (3) is closed, and the recovery path (5) is connected to the target container. Valve located at connection
Open (17). Then, the halon liquid in the target container (1) is pumped to the collection tank (2) by the self-pressure in the target container (1). When the internal pressure of the target container (1) and the internal pressure of the collection container (2) are equalized, the supply of halon stops.

【0013】次に、液体成分回収路(6)と回収タンク
(2)との連通を遮断するとともに、液体成分回収路(6)
と気体成分回収路(7)との短絡路(8)を連通させて、対
象容器(1)内に残っている液体成分やガス成分を容器自
圧で液化冷却槽(4)に供給して、液化冷却槽(4)内に流
入して来たハロン液を下側容器(13)に貯溜するととも
に、流入して来たガス中のハロンガスは液化冷却槽(4)
内の冷媒で冷却されて液化し、下側容器(13)に滞留す
る。
Next, a liquid component recovery path (6) and a recovery tank
In addition to blocking communication with (2), the liquid component recovery path (6)
The liquid component and the gas component remaining in the target container (1) are supplied to the liquefaction cooling tank (4) by the container's own pressure by communicating the short circuit path (8) between the gas container and the gas component recovery path (7). The halon liquid flowing into the liquefaction cooling tank (4) is stored in the lower container (13), and the halon gas in the flowing gas is liquefied in the liquefaction cooling tank (4).
It is cooled and liquefied by the internal refrigerant, and stays in the lower container (13).

【0014】そして、対象容器(1)内の内圧が低下する
ことにより、自圧では対象容器(1)内の残ガスが流れな
くなると、液体成分回収路(6)を遮断するとともに、気
体成分回収路(7)を連通させて圧縮機(3)を作動させる
ことにより、対象容器(1)内に残留しているガス成分を
吸引加圧して冷却液化槽(4)に供給し、冷却液化槽(4)
で冷媒と熱交換させて液化する。
When the internal pressure in the target container (1) decreases and the residual gas in the target container (1) stops flowing under its own pressure, the liquid component recovery path (6) is shut off and the gas component is removed. By operating the compressor (3) by communicating the recovery path (7), the gas component remaining in the target container (1) is suctioned and pressurized, supplied to the cooling liquefaction tank (4), and cooled and liquefied. Tank (4)
Liquefaction by heat exchange with the refrigerant.

【0015】冷却液化槽(4)内の上下容器(12)(13)に液
体ハロンが所定量貯溜されたことを液面計(16)が検知す
ると、回収タンク(2)のガス排出ライン(18)を気体成分
回収路(6)に連通させるとともに、下側容器(13)を回収
タンク(2)に連通させて上下容器(12)(13)内に貯溜され
ている液体ハロンを回収タンク(2)にヘッド差で送給す
る。このとき、回収タンク(2)内のハロンガスは冷媒槽
(11)を通過するに冷却されて液化する。
When the liquid level gauge (16) detects that a predetermined amount of liquid halon has been stored in the upper and lower containers (12) and (13) in the cooling and liquefaction tank (4), the gas discharge line ( 18) is communicated with the gas component recovery path (6), and the lower vessel (13) is communicated with the recovery tank (2) to collect the liquid halon stored in the upper and lower vessels (12) and (13). (2) Feed by head difference. At this time, the halon gas in the recovery tank (2) is
It cools and liquefies when passing through (11).

【0016】なお、対象容器(1)内に加圧用の窒素ガス
が封入されている場合には、圧縮機(3)を使用しての回
収時に、窒素ガスは冷媒槽(11)での冷却では液化しない
ことを利用して液化したハロンとガス状態の窒素とを分
離する。そして、上下容器(12)(13)内に貯溜したハロン
液が所定量になったことを液面計が検出すると、下側容
器(13)を回収タンク(2)に連通させて、分離前の窒素ガ
ス圧力で液体ハロンを回収タンク(2)に圧送する。この
とき、下側容器(13)内の液位が所定液位まで低下したこ
とを液面計(16)で検出すると、下側容器(13)と回収タン
ク(2)との連通を遮断して窒素ガスが回収タンク(2)側
に流入することを防止するようにしてある。
When nitrogen gas for pressurization is sealed in the target container (1), the nitrogen gas is cooled in the refrigerant tank (11) during recovery using the compressor (3). in separating the nitrogen Halon gas a liquefied state by utilizing the fact that not liquefied. When the liquid level gauge detects that the amount of the halon liquid stored in the upper and lower containers (12) and (13) has reached a predetermined amount, the lower container (13) is communicated with the collection tank (2) and separated before the separation. The liquid halon is pumped to the recovery tank (2) at a nitrogen gas pressure of. At this time, when the liquid level in the lower container (13) is detected by the liquid level gauge (16) to drop to a predetermined liquid level, the communication between the lower container (13) and the collection tank (2) is cut off. Thus, nitrogen gas is prevented from flowing into the recovery tank (2).

【0017】冷却液化槽(4)内の上側容器(12)内に残留
している窒素ガスは、上側容器(12)から導出したガス放
出ラインから排出する。このとき、ハロンガスが放出さ
れないように下側容器(13)との連結路(14)は遮断してお
く。
The nitrogen gas remaining in the upper vessel (12) in the cooling and liquefaction tank (4) is discharged from a gas discharge line derived from the upper vessel (12). At this time, the connection path (14) with the lower container (13) is shut off so that the halon gas is not released.

【0018】上記実施例では、ハロン消火器からのハロ
ン回収ついて説明したが、冷凍機の冷媒として使用さ
れているフロンガスの回収に使用することもできる。こ
の場合、フロンガス中に油や窒素が混入していても、そ
の混入成分とフロンとを分離して回収することができ
る。
[0018] In the above embodiment has been described with the Halon recovery from halon extinguishers, it can also be used for the recovery of chlorofluorocarbons used as a refrigerant for refrigerators. In this case, even if oil or nitrogen is mixed in the chlorofluorocarbon gas, the mixed component and chlorofluorocarbon can be separated and collected.

【0019】[0019]

【発明の効果】本発明では、フッ素系ガス貯蔵容器内に
液体と気体の混合体として貯蔵されているハロンやフロ
ン等の液化フッ素系ガスの液体成分をその自圧で回収タ
ンクに送給し、次いで貯蔵容器から取り出した気体成分
を圧縮したのち低温冷媒で冷却している冷却液化槽に導
入して冷却液化し、この液化ガスを回収タンクに送給し
て回収するようにしていることから、フッ素系ガスを液
体の状態で確実に回収することができる。また、回収タ
ンクのガス排出ラインを気体成分回収路での圧縮機より
も下流側に連通接続してあることから、回収タンク内で
気化したガス成分は圧力差により冷却液化槽に導入され
ることから、フッ素系ガス貯蔵容器内の圧縮機による取
り出し時は圧縮機の吸引能力一杯まで活用することがで
き、フッ素ガスの回収効率を高く維持することができ
る。
According to the present invention, the liquid component of the liquefied fluorine-based gas such as halon or chlorofluorocarbon stored in the fluorine-based gas storage container as a mixture of liquid and gas is sent to the recovery tank under its own pressure. Then, after compressing the gas component taken out from the storage container, it is introduced into a cooling liquefaction tank cooled with a low-temperature refrigerant and liquefied by cooling, and this liquefied gas is sent to a collection tank and collected. In addition, the fluorine-based gas can be reliably recovered in a liquid state. In addition, collection
Gas discharge line from the compressor in the gas component recovery path
Is also connected downstream, so that
The vaporized gas components are introduced into the cooling liquefaction tank due to the pressure difference.
From the compressor inside the fluorine gas storage container.
When starting up, it is possible to utilize the full suction capacity of the compressor.
High efficiency of fluorine gas recovery
You.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明装置の一例を示す概略構成図である。FIG. 1 is a schematic configuration diagram showing an example of the device of the present invention.

【符号の説明】[Explanation of symbols]

1…貯蔵容器、2…回収タンク、3…圧縮機、4…冷却
液化槽、5…回収路、6…液体成分回収路、7…気体成
分回収路、11…冷媒貯蔵槽、12…上側容器、13…下側容
器。
DESCRIPTION OF SYMBOLS 1 ... Storage container, 2 ... Recovery tank, 3 ... Compressor, 4 ... Cooling liquefaction tank, 5 ... Recovery path, 6 ... Liquid component recovery path, 7 ... Gas component recovery path, 11 ... Refrigerant storage tank, 12 ... Upper vessel , 13 ... lower container.

Claims (4)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】 貯蔵容器(1)内に貯蔵されている液化フ
ッ素系ガスを回収するにあたり、まず、貯蔵容器(1)内
の液体成分をその自圧で回収タンク(2)に送給し、次い
で貯蔵容器(1)から取り出した気体成分を圧縮したのち
低温冷媒で冷却している冷却液化槽(4)に導入して冷却
液化し、この液化ガスを回収タンク(2)に送給するよう
に構成し、回収タンク(2)での気化ガスを冷却液化槽
(4)に導入して再液化するように構成したフッ素系ガス
の回収方法。
When recovering a liquefied fluorinated gas stored in a storage container (1), first, a liquid component in the storage container (1) is sent to a recovery tank (2) by its own pressure. Then, after compressing the gas component taken out of the storage container (1),
The liquefied gas is introduced into a cooling liquefaction tank (4) cooled by a low-temperature refrigerant and liquefied, and the liquefied gas is sent to a recovery tank (2). The vaporized gas in the recovery tank (2) is cooled. Liquefaction tank
A method for recovering a fluorine-based gas configured to be introduced into (4) and reliquefied .
【請求項2】 貯蔵容器(1)内に加圧用ガスとともに貯
蔵されている液化フッ素系ガスを回収するにあたり、ま
ず、貯蔵容器(1)内の液体成分をその自圧で回収タンク
(2)に送給し、次いで貯蔵容器(1)から取り出した気体
成分を圧縮したのち低温冷媒で冷却している冷却液化槽
(4)に導入して冷却することにより加圧用ガスと液化フ
ッ素系ガスとに分離し、この液化した液体フッ素系ガス
を回収タンク(2)に送給するように構成し、回収タンク
(2)での気化ガスを冷却液化槽(4)に導入して再液化す
るように構成したたフッ素系ガスの回収方法。
In recovering the liquefied fluorine-based gas stored in the storage container (1) together with the pressurizing gas, first, the liquid component in the storage container (1) is recovered by its own pressure in a recovery tank.
(2) A cooling liquefaction tank that compresses the gas component taken out from the storage container (1) and then cools it with a low-temperature refrigerant
Is introduced into (4) is separated into a pressurizing gas and liquefied fluorine gas by cooling, constitutes the liquefied liquid fluorine-based gas to deliver the collection tank (2), recovery tank
The vaporized gas from (2) is introduced into the cooling liquefaction tank (4) and reliquefied.
The method for recovering a fluorine-based gas configured as described above.
【請求項3】 液化フッ素系ガスを貯蔵している貯蔵容
器(1)に接続する回収路(5)を回収タンク(2)に連結
し、この回収路(5)を並列配置した液体成分回収路(6)
と気体成分回収路(7)とで構成し、気体成分回収路(7)
に圧縮機(3)と低温冷媒で冷却している液化冷却槽(4)
とを装着し、回収タンク(2)の上部から導出したガス排
出ライン(18)を気体成分回収路(7)での圧縮機(3)の下
流側に接続したフッ素系ガスの回収装置。
3. A collection path (5) connected to a storage container (1) storing liquefied fluorine-based gas is connected to a collection tank (2), and a liquid component collection in which the collection paths (5) are arranged in parallel. Road (6)
And a gas component recovery path (7), and a gas component recovery path (7).
Liquefied cooling tank (4) cooled with compressor (3) and low-temperature refrigerant
And exhaust gas from the upper part of the recovery tank (2).
The outlet line (18) is located below the compressor (3) in the gas component recovery path (7).
Fluorine gas recovery device connected to the upstream side .
【請求項4】 液化冷却槽(4)を冷媒貯蔵槽(11)の内部
に上下方向で連続する2つの容器(12)(13)を配置し、こ
の2つの容器(12)(13)同士の接続部分に気体成分回収路
(7)を接続した請求項3に記載のフッ素系ガスの回収装
置。
4. A liquefied cooling tank (4) is provided inside a refrigerant storage tank (11) with two vertically continuous containers (12) and (13), and the two containers (12) and (13) are connected to each other. Gas component recovery path at the connection
The fluorine gas recovery apparatus according to claim 3, wherein (7) is connected.
JP5070897A 1993-03-05 1993-03-05 Method and apparatus for recovering fluorine-based gas Expired - Fee Related JP2599086B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5070897A JP2599086B2 (en) 1993-03-05 1993-03-05 Method and apparatus for recovering fluorine-based gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5070897A JP2599086B2 (en) 1993-03-05 1993-03-05 Method and apparatus for recovering fluorine-based gas

Publications (2)

Publication Number Publication Date
JPH06257899A JPH06257899A (en) 1994-09-16
JP2599086B2 true JP2599086B2 (en) 1997-04-09

Family

ID=13444787

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Application Number Title Priority Date Filing Date
JP5070897A Expired - Fee Related JP2599086B2 (en) 1993-03-05 1993-03-05 Method and apparatus for recovering fluorine-based gas

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Country Link
JP (1) JP2599086B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3496510B2 (en) * 1998-03-19 2004-02-16 株式会社日立製作所 Refrigerant recovery method and refrigerant recovery device
JP2005024068A (en) * 2003-07-02 2005-01-27 Toyo Tanso Kk Feeder of halogen gas or halogen-contained gas

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0537666A3 (en) * 1991-10-18 1993-11-03 Eng & Sales Ass Apparatus for recovering a refrigerant fluid

Also Published As

Publication number Publication date
JPH06257899A (en) 1994-09-16

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