JP2596833Y2 - Remote opening and closing device for container valve - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION The present invention relates to a rotary drive for remotely opening and closing a valve of a gas cylinder container filled with a toxic gas such as a semiconductor material gas, and always maintaining a fixed state when not in use. The present invention relates to a device for remotely opening and closing a container valve to which a machine is attached.

[0002]

2. Description of the Related Art In the production of semiconductor materials, gases such as arsine, phosphine, silane, diborane, dichlorsilane, hydrogen chloride, and chlorine are used. Furthermore, because of their corrosive properties, their diffusion into the atmosphere is extremely dangerous in terms of safety and health, and is not preferred. For this reason, in the unlikely event that the filled gas leaks from the container, the filled container is housed in a storage box so as to be isolated from the atmosphere so that the gas does not diffuse into the atmosphere.

For example, as shown in FIG. 3, a container (gas cylinder) 1 filled with a toxic gas has a door 2
A and 2A are fixed and accommodated in a container storage box 2 made of a material such as a steel plate so as not to fall down by a fixing member 3 such as a chain or a belt suspended on a back plate 2B.
The gas in the container 1 is supplied from a pipe 5 connected to a valve 4 of the container 1 to a use destination via a connection fitting 6 which is provided in a gastight manner through, for example, a side wall 2C of the storage box 2. An air inlet 7 is provided in a lower wall portion of the storage box 2, and an exhaust port 9 provided with a ventilation fan 8 is provided in a ceiling portion.

[0004] The container 1 thus filled with a toxic gas.
Is usually housed in the storage box 2 and is disposed separately from the surroundings by closing the doors 2A, 2A. Even if a dangerous toxic gas leaks, the dangerous toxic gas is not diffused to the surroundings and is connected to the exhaust port 9 as appropriate. It is sent to an abatement device (not shown) so that it can be processed.

However, in such a method, when dangerous toxic gas is used, the opening and closing of the valve 4 requires manual rotation of the handle 4A of the valve 4 with the doors 2A, 2A opened. Therefore, when the valve 4 is opened and closed by the rotation of the handle 4A, the airtightness of the joint of the pipe 5 is insufficient,
If the toxic gas leaks due to lack of airtightness of the gas itself, the gas is extremely dangerous because it directly touches workers or diffuses around.

Therefore, the doors 2A are closed, and the handle 4A is rotated by remote control in a state where the container is completely stored in the storage box 2.

[0007] The remote control is by electric power,
Conventionally, pneumatic devices and the like are known, and examples of pneumatic devices include those described in Japanese Utility Model Laid-Open No. 93098/1985. 4 to 6 show the above-mentioned conventional remote opening / closing device for a container valve. A handle member 11 for opening and closing the valve 4 of the container 1 has a plurality of claw members 12 projecting downward on the lower surface thereof. The handle member 11 is provided so as to be engaged with the handle 4 </ b> A, and a through hole 13 is formed in the center of the handle member 11.
A number of grooves 14 are engraved on the inner peripheral surface along the thickness direction.

On the other hand, a shaft member 15 inserted through the through hole 13
Is formed with a flange 16 at a lower end thereof and a plurality of narrow grooves 17 in an axial direction at an upper portion thereof.
The length corresponding to the thickness of No. 1 is engraved.

The shaft member 15 thus formed is inserted into the through hole 13 from below and integrally connected to form the handle turning tool 18. The handle rotation member 18 is integrally rotatably connected to the handle member 11 and the shaft member 15 by spline or serration engagement.

As described above, the handle member 11 and the shaft member 1
5 is used by connecting the upper end of the shaft member 15 to a conventionally known pneumatic rotary driving device 20. That is, FIG. 6 uses a pneumatic rotary drive device 20, which has two air inlets 2 at both ends.
In a hollow columnar rotary drive main body 23 provided with the first and second rotary drive main bodies 23, two pressure receiving plates 24A and 24B provided airtightly and movably on an inner wall 23A of the rotary drive main body 23 are mounted on a shaft rod 2.
The drive member 24 is fixed to both ends of the drive member 5. The pressure receiving plates 24A and 24B are arranged by adjusting the length of the shaft bar 25 so that a space 26 is formed in the rotary drive main body 23 so as to move left and right in the rotary drive main body 23.

The shaft 25 has a toothed groove 2 along the axial direction.
7 is engraved to form a rack, and the tooth-shaped groove 27 is engaged with a gear (pinion) 30 fixed at both ends to a rotating shaft 29 supported by bearings 28.

And, such a pneumatic rotary drive 2
At 0, when pressurized air is introduced through the air inlet 21 on the left side, the pressure receiving plate 24A receives the pressurized air and the drive member 24 moves rightward. As a result, the shaft 25 moves to the right,
The gear 3 meshing with the toothed groove 27 formed in the shaft 25
0 rotates right. This clockwise rotation causes the shaft member 15 of the handle rotating tool 18 connected thereto via the rotating shaft 29 to rotate clockwise, and furthermore, the handle member 11 of the handle rotating tool 18 engaged with this rotates clockwise. Move the handle 4A of the valve 4 clockwise.

On the other hand, if the supply of pressurized air from the air inlet 21 on the left side is stopped and pressurized air is introduced from the air inlet 22 on the right side, the driving member 24 moves to the left and the shaft 25 moves. The gear 30 meshing with the toothed groove 27 of the shaft 25 is turned to the left, and the handle turning tool 18 connected thereto is turned to the left to turn the handle 4A of the container valve 4 to the left.
Can be rotated to the left.

Therefore, in the pneumatic rotary drive 20, the pressurized air is switched to the left and right air inlets 21 or 22 of the rotary drive main body 23 depending on the rotation direction of the opening and closing of the valve. Can be opened and closed. The position of the drive member 24 with respect to the rotary drive main body 23 indicates the opening of the handle, and the valve is opened by moving the drive member 24 in the space 26 direction.

[0015]

An invention is, however, remote opening and closing device of the conventional container valve introduces pressurized air, may be suitably used the gas in the container by rotating adjusting the handle, when the valve is closed
When the supply of pressurized air is stopped after the valve is closed , the drive member 24
Stops at that point. Therefore, at the time of the next operation, the initial setting position differs from time to time, making it difficult to operate, and there has been a problem that the position of the driving member 24 has to be manually set to the fixed position.

The present invention has been made in view of the above circumstances, and when the supply of pressurized air is stopped after the valve is closed and the drive member is made free, the drive member automatically rotates. It is an object of the present invention to provide a device for remotely opening and closing a container valve which is set to a predetermined initial position with respect to a main body.

[0017]

According to the present invention, there is provided a container valve remote opening / closing device according to the present invention, wherein a handle member is engaged with a handle of the container valve, and a pneumatic rotary drive for rotating the handle member via a shaft member. In the remote opening / closing device for a container valve provided with a rotary drive, the rotary drive is housed movably left and right inside a hollow column-shaped drive main body provided with air introduction ports at both ends, and this left and right movement is performed by rotating the handle. Han to exercise
A drive that is engaged with a shaft member connected to the dollar member and is fixed such that pressure-receiving plates are fixed to the respective vertical positions with respect to both ends of a shaft bar provided with tooth-shaped grooves in the longitudinal direction with respect to the shaft bar. Opening of the valve by the member and the left and right movement positions of the driving member
Indicator that displays the degree as a starting point based on the initial position
And the movement of the drive member when the valve is closed.
After closing the valve at the time of closing the valve, air is introduced into the space between the pressure receiving plate on the side pressed against the inner wall of the drive body and the inner end of the drive body.
When the open, front position in the driving machine body of the drive member
That formed by arranging the spring allowed to hold in place a closed initial set position of the serial indicator was a means of solving problems.

On the side where the spring is mounted, the space between the pressure receiving plate on the side where the drive member moves and the valve closes and the rotary drive unit main body is
This is preferable in operation because the moving width of the driving member can be small.

[0019]

[Function] The present invention has the above structure, so the valve is closed.
When the supply of pressurized air stops after the valve is closed , the driving member 2
4 is moved by a coil spring disposed between the pressure receiving plate and the inner end of the rotary drive main body, and an initial setting position of the drive member with respect to the rotary drive main body is set.

[0020]

FIG. 1 shows an embodiment of a rotary drive mechanism 31 according to the present invention. The same parts as those in FIG.

Reference numeral 32 in the figure denotes an indicator indicating the position of the drive member 24 with respect to the rotary drive main body.
The gear 30 rotates in a direction in which the valve 4 closes when the valve 4 moves to the opposite side of the space 26 of the rotary drive main body 23, and the closing ratio of the valve 4 depends on the pointer 33 fixed to the drive member 24. The position is indicated by the scale 32a.

A coil spring 34 is mounted between the pressure receiving plate 24B on the opposite side of the space 26 of the drive member 24 and the inner end of the rotary drive main body 23, and is used when the valve is closed.
When the supply of pressurized air to the air inlets 21 and 22 is stopped after the valve is closed, the drive member 24 for the rotary drive main body 23 is stopped.
Is set by the coil spring 34 and the pointer 33 is at the position S. 35 is the pressure receiving plate 2
O-ring attached to 4A, 24B.

[0023] The rotary drive unit 20, so has a configuration such as described above, the introduction of pressurized air from the air inlet port 21 when the valve is closed, the coil spring 34 is compressed, the driving member 24 moves to the right , The pressure receiving plate 24B is the main body of the rotary drive
While being pressed against the inner end wall direction 23, the pointer 33 is moved to S _1, the container valve 4 is completely turned closed. In this state, when pressurized air is gradually introduced from the air inlet 22, the drive member 24 moves to the left,
An indicator 32 indicates the opening degree of the valve.

When the pressurized air is not supplied to the rotary drive 20, the drive member 24 is automatically returned to the initial set position by the coil spring 34, and the pointer 33
Position.

FIG. 2 shows the pressure receiving plate 24B to which the coil spring 34 is attached.
In order to increase the strength of attachment to the pressure receiving plate 24B of No. 5, reinforcing legs 36 are used. In this case, the shaft rod 25 may be directly attached to the pressure receiving plates 24A and 24B and further reinforced by the reinforcing legs 36, or may be fixed indirectly by the reinforcing legs 36.

Further, the coil spring is connected to the space 26.
Side, that is, between the pressure receiving plate 24A and the inner end of the rotary drive main body 23, but the length of the coil spring becomes longer, and the setting of the drive member 24 with respect to the rotary drive main body 23 becomes unstable. Therefore, it is desirable to mount it on the opposite side of the space 26.

[0026]

As described above, the remote opening / closing device for the container valve according to the present invention automatically returns to the initial setting position of the drive member with respect to the rotary drive main body by mounting the coil spring. There is an advantage that the need for manual operation is eliminated, the remote opening and closing of the container valve is greatly improved, and the operation is easy.

[Brief description of the drawings]

FIG. 1 is a partially sectional front view showing an embodiment of a rotary driving device according to the present invention.

FIG. 2 is a detailed view showing a state where a coil spring is set between a pressure receiving plate and an inner end portion of the rotary driving machine.

FIG. 3 is a perspective view of a normal storage box of a cylinder filled with a toxic gas.

FIG. 4 is a partially cutaway view of a conventional handle member and a shaft member.

FIG. 5 is a perspective view in which a conventional handle member and a shaft member are assembled.

FIG. 6 shows a handle member,
It is the perspective view in which the remote opening / closing apparatus of the container valve which consists of a shaft member and a rotary drive was partly broken.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Container 2 Storage box 2A Door 2B Back plate 2C Side wall 3 Fixing member 4 Valve 4A Handle 5 Piping 6 Connection fitting 7 Air intake 8 Ventilation fan 9 Exhaust port 11 Handle member 12 Claw member 13 Through hole 14 Groove 15 Shaft member 16 Flange 17 Narrow groove 18 Handle rotation tool 20 Rotary drive 21 and 22 Air inlet 23 Rotary drive main body 24 Drive member 24A, 24B Pressure receiving plate 25 Shaft bar 26 Space 27 Toothed groove 28 Bearing 29 Rotary shaft 30 Gear 31 Rotary drive 32 Indicator 32a Scale 33 Pointer 34 Coil spring 35 O-ring 36 Reinforcement leg S Position of driving member by spring S Position where ₁ valve is completely closed

──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Yamaguchi ▲ Shin ▼ 1 2-3-1, Higashiko, Kokurakita-ku, Kitakyushu-shi, Fukuoka Nippon Sanso Corporation In the Kitakyushu Plant (72) Kenji Hiromi Nishiizumi, Yukuhashi-shi, Fukuoka 3- 10-12 (72) Inventor Yasuo Toyoda 3-16-8, Kamitomino, Kokurakita-ku, Kitakyushu-shi, Fukuoka Prefecture Inside Fujikosan Co., Ltd. (56) References Real Opening Showa 60-93098 (JP, U) No. 61-41011 (JP, Y2) (58) Fields investigated (Int. Cl. ⁶ , DB name) F16K 37/00 F16K 31/12-31/165

Claims (1)

(57) [Scope of request for utility model registration] A container valve remote opening / closing device comprising a handle member engaged with a handle of a container valve and a pneumatic rotary drive device for rotating the handle member via a shaft member, wherein the rotary drive device comprises: across inlet air is affected movably housed inside the hollow columnar driving machine main body provided in the right and left movement in the handle member to the rotational movement of the handle
A drive member which is engaged with a shaft member to be connected and has pressure receiving plates fixed to both ends of a shaft rod provided with tooth-shaped grooves in a longitudinal direction so as to be at a vertical position with respect to the shaft rod.
And closing the valve opening by the left and right movement positions of the drive member
Set an indicator that displays the initial setting position as a base point.
And the drive member moves when the valve is closed.
After the valve was closed, air was released to the space between the pressure receiving plate on the side pressed against the body wall and the inner end of the driving device body .
When the position at the drive motor within the body of the drive member Indicator
A remote opening / closing device for a container valve, comprising a spring for holding a caterer at a fixed initial setting position .