JPH0523920Y2 - - Google Patents

Description

[Detailed Description of the Invention] Industrial Application Field The present invention relates to a cylinder main valve opening/closing device, and more particularly to a cylinder main valve opening/closing device for opening and closing the main valve of a cylinder storing harmful gas.

Conventional technology For example, semiconductor material gases used in semiconductor manufacturing processes may be highly toxic, flammable, self-combustible, combustible, or a combination of these gases, depending on the type of gas. There are some things of a similar nature. The cylinders storing these harmful gases were housed in cylinder storage boxes equipped with exhaust ducts, and a main valve was attached to the top of the cylinders to open and close the cylinders in order to supply the gas inside the cylinders to the outside. For this reason, a cylinder main valve opening/closing device that automatically opens and closes the main valve for opening and closing the cylinder as described above by remote control is being developed.

The cylinder main valve opening/closing device that opens and closes the main valve of the cylinder has an actuator installed at a fixed position above the main valve of the cylinder, and an operation signal is supplied to this actuator to open and close the main valve. Ta. Further, the output shaft of the actuator was provided with a coupling member having a claw portion that was coupled to the outer circumferential recess of the operating handle of the main valve.

Problems to be Solved by the Invention However, in the cylinder main valve opening/closing device configured as described above, the actuator is attached to a fixed position above the cylinder, and the coupling member connected to the output shaft of the actuator is connected to the operating handle of the main valve. Therefore, when replacing the cylinder, for example, it is necessary to remove the coupling member from the operation handle of the main valve together with the output shaft of the actuator, which has the disadvantage that the cylinder replacement work is troublesome and time-consuming.

As a cylinder main valve opening/closing device other than the above, there is, for example, a device as shown in Japanese Utility Model Application No. 59-77700. In the device disclosed in this publication, the actuator is supported by a column that is slidable in the vertical direction.

However, in the case of this device, the entire actuator is moved up and down together with the support, so
The device is large in size, and has the drawbacks that not only does it take a lot of effort to install it to match the height of the cylinder, but it is also difficult to finely adjust the height.

Therefore, an object of the present invention is to provide a cylinder main valve opening/closing device that eliminates the above-mentioned drawbacks.

Means for Solving the Problems The present invention consists of a cylinder filled with gas, a main valve attached to the cylinder for opening and closing the cylinder, and a remote control valve attached to a fixed position spaced above the top of the cylinder. In a cylinder main valve opening/closing device comprising an actuator that opens and closes the main valve by supplying an operation signal from the actuator, the cylinder main valve opening/closing device is provided to extend vertically within the actuator and is rotatably supported on a shaft so as to be rotationally driven. an output shaft; a drive shaft fitted to the output shaft so as to be movable in the axial direction and rotated integrally with the output shaft in the rotational direction; and a drive shaft connected to the lower end of the drive shaft. It comprises a joint, and a chuck connected to the lower end of the universal joint and engaged with the operation handle of the main valve of the cylinder.

Function: Changes in the distance between the actuator and the main valve can be accommodated by moving the drive shaft relative to the output shaft of the actuator installed at a fixed position, making it easy to install cylinders of different heights. In addition, the output shaft of the actuator, which is essential for opening and closing the cylinder main valve, and the drive shaft connected to the chuck allow the height position of the chuck to be adjusted according to the height of the cylinder, resulting in a compact configuration and an operation handle. It can also absorb the vertical movement associated with opening and closing operations.

Embodiment FIGS. 1 and 2 show an embodiment of the cylinder main valve opening/closing device according to the present invention.

In both figures, for example, a cylinder 1 is filled with a highly concentrated semiconductor material gas. The cylinders 1 are stored in a cylinder storage box 2 while being kept vertically at a predetermined distance from each other. A main valve 3 is attached to the top of the cylinder 1. Genben 3
has an operating handle 3a on its top for opening and closing operations.

Therefore, the opening degree of the main valve 3 is adjusted by rotating the operating handle 3a. For this reason,
Gas flows out from the cylinder 1 at a flow rate corresponding to the opening degree of the main valve 3 and is supplied to the outside of the cylinder storage box 2 via a pipe 4 connected to the main valve 3 in communication.

5 is the actuator, cylinder storage box 2
It is fixed to the upper surface of the top plate 2a of the cylinder 1 via an L-shaped bracket 6, and is located at a fixed point spaced apart from the cylinder 1. The drive shaft 7 of the actuator 5 is connected to the top plate 2
It penetrates through a and protrudes into the cylinder storage box 2. Further, the lower end of the drive shaft 7 is connected to a universal joint 8.

Reference numeral 9 denotes a chuck, which is fitted onto the outer periphery of the operating handle 3a of the main valve 3. Further, a shaft 9a protruding from the top of the chuck 9 is connected to the lower end of the universal joint 8. Therefore, the drive shaft 7 of the actuator 5
is connected to chuck 9 via universal joint 8.

Reference numeral 10 denotes an operating device, which is provided at a position away from the cylinder storage box 2, and supplies an opening/closing signal to the actuator 5 for opening and closing the main valve 3. 1
Reference numeral 1 denotes an air pipe which supplies air pressure to the actuator 5 for rotationally driving the drive shaft 7 of the actuator 5.
supply to.

As shown in FIG. 1, in the actuator 5, branch pipes 13a and 13b branched from the air pipe 11 are connected to both sides of the cylinder portion 12. A piston 14 consisting of a pair of piston parts 14a, 14b and a connecting rod 14c connecting the pair of piston parts 14a, 14b is slidably fitted into the cylinder part 12. Further, the outer circumferential grooves of the piston portions 14a, 14b are provided with an oil for airtightly sealing between the piston portions 14a, 14b and the inner wall 12a of the cylinder portion 12.
A ring 15 is provided. The connecting rod 14c of the piston 14 has a rack 16 between the pair of piston parts 14a and 14b.

17 is an output shaft of the actuator 5, which extends in the vertical direction and has a pinion 17 meshed with the rack 6 on the outer periphery so as to be rotationally driven by the piston 14.
a, and has a hollow shape with a spline groove 17b formed along the axial direction on the inner circumference. Also,
The output shaft 17 has a relief portion 17c having a diameter larger than the spline groove 17b from its upper part to the upper end _17b1 of the spline groove 17b. Note that the output shaft 17 is rotatably supported by bearings 18 at upper and lower portions of the pinion 17a.

As shown in FIG. 3, the drive shaft 7 is inserted into the spline groove 17b of the output shaft 17 so as to be slidable in the axial direction. The drive shaft 7 is a spline shaft having an engaging portion 7a formed along the axial direction on its outer periphery to match the uneven shape of the spline groove 17 of the output shaft 17. Therefore, the drive shaft 7 is aligned in the axial direction (Y ₁ , Y ₂
The drive shaft 7 is slidably inserted into the output shaft 17 in the rotational direction, and is fitted into the spline groove 17a so that it cannot be relatively moved in the rotational direction, so that the drive shaft 7 rotates integrally with the output shaft 17. Further, the drive shaft 7 has a sufficient length in the axial direction to absorb displacement of the chuck 9 depending on the height position of the cylinder 1. Further, a retaining ring 19 as a stopper is fitted into the groove in the upper part of the drive shaft 7, which comes into contact with the upper end 17b1 of the spline groove 17b of the output shaft ₁₇ when the drive shaft 7 slides downward.

Here, when adjusting the inflow of gas into the cylinder 1 or when opening/closing the cylinder 1, first, an operation switch or the like of the operation device 10 is operated to supply an operation signal to the actuator 5. As a result, a solenoid valve (not shown) connected to the air pipe 11 is actuated, and the air pressure from the air pipe 11 is transferred to the branch pipe 13.
actuator 5 via either a or 13b
is introduced into the cylinder part 12 of the piston 14.
Displace in the X ₁ and X ₂ directions. That is, when air pressure is introduced into the cylinder part 12 from one branch pipe 13a, the piston 14a is pressed in the _X1 direction,
The piston 14 is slidably displaced in the _X1 direction.

Along with this, the output shaft 17 rotates via the rack 16 of the piston 14 and the pinion 17a. Further, the drive shaft 7 that engages with the spline groove 17b of the output shaft 17 is driven integrally in the same direction. The rotational driving force of the drive shaft 7 is transmitted to the chuck 9 via the universal joint 8. That is, the operating handle 3a of the main valve 3 is driven by the drive shaft 7 of the actuator 5 and rotates to open the main valve 3.

Further, when air pressure is introduced into the cylinder 12 from the other branch pipe 13b, the right piston 14b is pressed in the X ₂ direction and the piston 14
is displaced in the _X2 direction. Therefore, the output shaft 17
The drive shaft 7 is rotated in the opposite direction to the above, and the operating handle 3a of the main valve 3 is rotationally displaced in a direction to narrow the valve opening. In this way, the main valve 3 of the cylinder 1 is opened and closed by remote control of the operating device 10, and the degree of opening of the valve is adjusted.

In this way, the operating handle 3a moves up and down as the main valve 3 is driven to open and close, but since the drive shaft 7 can slide in the axial direction with respect to the output shaft 17, the up and down movement of the operating handle 3a is It is absorbed by the drive shaft 7. Therefore, the main valve 3 is opened and closed smoothly and reliably.

Next, the case of replacing the cylinder 1 will be explained.
First, the chuck 9 is removed from the operating handle 3a of the main valve 3 and displaced upward. Drive shaft 7 is output shaft 1
Since the chuck 9 is slidably provided in the spline groove 17b of No. 7 in the axial direction, the chuck 9 can be easily pushed up in the _Y1 direction. For this reason, cylinder 1
When the cylinder is taken out from the cylinder storage box 2, the chuck 9 does not get in the way and the cylinder exchange work can be facilitated.

Also, put a new cylinder 1 into cylinder storage box 2.
Even when the chuck 9 is transported and stored, the chuck 9 does not come into contact with the main valve 3, and replacement work can be performed quickly.

That is, when replacing the cylinder 1, there is no need to remove the actuator 5, and the installation of the chuck 9,
All you need to do is remove it. Therefore, when replacing the cylinder 1, the cylinder can be replaced easily without any extra effort.

Note that even when cylinders 1 of different capacities are stored in the cylinder storage box 2, the height of the chuck 9 can be adjusted by simply displacing the drive shaft 7 in the Y ₁ and Y ₂ directions along the spline groove 17b of the output shaft 17. The position can be adjusted according to the height position of the main valve 3 of the cylinder 1.

That is, when assembling the chuck 9 to the operating handle 3a of the main valve 3 of cylinders 1 of different heights, if the height of the cylinder 1 increases, the drive shaft 7 is slid upward, and conversely, the cylinder 1 If it becomes low, simply slide the drive shaft 7 downward.
It can absorb height changes and is extremely easy to install.

In addition, since the height displacement is absorbed by the output shaft 17 of the actuator 5, which is essential for opening and closing the main valve 3 of the cylinder 1, and the drive shaft 7 connected to the chuck 9, a separate independent height No adjustment mechanism is required, making the entire device compact.

In addition, the driving force of the actuator 5 is connected to the universal joint 8.
Since the main valve 3 is opened and closed via the main valve 3, there is no need to match the axial center position of the drive shaft 7 of the actuator 5 with the axial center position of the operating handle 3a of the main valve 3, and the respective mounting positions can be accurately set. It doesn't have to be.

Therefore, it does not take much time to exchange cylinders 1 of different capacities, and the cylinder exchange work can be easily performed.

Further, after the chuck 9 is removed from the operation handle 3a of the main valve 3 and the cylinder 1 is taken out from the cylinder storage box, the drive shaft 7 slides in the _Y2 direction due to its own weight. However, the retaining ring 19
The drive shaft 7 is prevented from falling off from the output shaft ₁₇ .

In addition, in the above description, the output shaft 17 is provided with the spline groove 17b along the axial direction, and the spline groove 17b is
The drive shaft 7 is shaped to fit into the spline groove 17b.
In the explanation, the output shaft 17 and the drive shaft 7
The engagement is not limited to splines, but may also use serrations, keys, or the like.

Effects of the invention As described above, according to the cylinder main valve opening/closing device of the present invention, the drive shaft axially slidably passes through the output shaft of the actuator and is integrally fitted with the output shaft of the actuator. Therefore, if the distance between the actuator and the main valve changes, this change can be absorbed by the vertical movement of the drive shaft. In other words, when assembling the chuck to the operation handle of the main valve of cylinders of different heights, if the cylinder height increases, the drive shaft is slid upward, and conversely, if the cylinder becomes lower, the drive shaft is moved upward. Changes in height can be absorbed by simply sliding downward, making installation extremely easy.

Since the height displacement is absorbed by the output shaft of the actuator, which is essential for opening and closing the cylinder main valve, and the drive shaft connected to the chuck, there is no need for a separate height adjustment mechanism. The entire device becomes compact.

In addition, when the main valve of the cylinder is opened and closed by driving the actuator, the drive shaft can slide in the axial direction (vertical direction) with respect to the output shaft of the actuator, so the vertical movement of the operating handle of the main valve during opening and closing operations is prevented. It has features such as being able to absorb the amount of water and opening and closing the main valve smoothly and reliably.

[Brief explanation of the drawing]

Fig. 1 is a diagram for explaining one embodiment of the cylinder main valve opening/closing device according to the present invention, Fig. 2 is a schematic configuration diagram of the device shown in Fig. 1, and Fig. 3 is along the line - in Fig. 1. FIG. 1...Cylinder, 2...Cylinder storage box, 3
... Main valve, 5 ... Actuator, 7 ... Drive shaft, 8 ... Universal joint, 9 ... Chuck, 12 ...
Cylinder part, 14...piston, 17...output shaft.

Claims (1)

[Scope of Claim for Utility Model Registration] A cylinder filled with gas, a main valve attached to the cylinder for opening and closing the cylinder, and a main valve attached to the cylinder at a fixed position spaced apart above the upper end of the cylinder to receive an operation signal by remote control. A cylinder main valve opening/closing device comprising an actuator that opens and closes the main valve by supply, an output shaft extending vertically within the actuator and rotatably supported so as to be rotationally driven; a drive shaft fitted to the output shaft so as to be movable in the axial direction and rotated integrally with the output shaft in the rotational direction; a universal joint connected to the lower end of the drive shaft; A cylinder main valve opening/closing device comprising: a chuck connected to a lower end of a universal joint and engaged with an operation handle of the main valve of the cylinder.