JP2596633Y2 - Jig for blade attachment / detachment - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a jig for attaching and detaching a blade, which can be easily attached to and detached from a tip of a spindle of a dicing apparatus or the like via a flange member.

[0002]

2. Description of the Related Art Conventionally, in a dicing apparatus and the like, FIG.
As shown in the figure, a blade mounting portion is formed at the distal end portion of the spindle a, the blade mounting portion has a flange b and a shaft c, and a male screw d is provided at the distal end portion of the shaft c. An ultra-thin ring-shaped blade e is fitted, a flange member f having a shaft hole f 'is fitted, and a nut g is screwed and fastened to a male screw d of a shaft c protruding from the flange member f. Is fixed.

[0003]

According to the conventional blade mounting means, when the blade e is fitted to the shaft c of the blade mounting portion, the blade e is pinched or finger-tipped into the blade guide f ″ of the flange member f. The flange member f integrated with the blade e is inserted into the shaft c. Therefore, the mounting of the blade e is time-consuming and troublesome, and the blade e is contaminated, bent or deformed. Also, when removing the blade e at the time of replacement, the nut g and the flange member f must be removed and the blade e must be removed by hand, which makes the attaching and detaching work troublesome. SUMMARY OF THE INVENTION It is an object of the present invention to provide a blade attaching / detaching jig which is made in order to solve the conventional problems, and in which a blade can be easily attached / detached to / from a blade mounting portion.

[0004]

SUMMARY OF THE INVENTION As a means for technically solving this problem, the present invention provides a blade attaching / detaching jig for attaching / detaching a magnetically attachable blade together with a magnetically permeable flange member to / from a spindle. An arc-shaped curved plate including an engaging groove that engages with a peripheral groove formed in the flange member to form a holding portion, and an upper portion that is narrowed with a finger; A bottom plate on which the arc-shaped curved plate is disposed so as to divide the holding portion and the upper portion in the circumferential direction. The holding portion is configured such that the engaging groove engages with the circumferential groove of the flange member. A jig for attaching and detaching a blade, which has magnetism and magnetically attaches the blade via the flange member with the flange member held therebetween, is a gist. or,
The bottom plate is provided with three arc-shaped curved plates, and an elastic plate piece is press-fitted and locked inside the arc-shaped curved plate. The gist of the present invention is to expand the diameter and to return to the closed state when the constriction force is released.

[0005]

[Work] A flange member is sandwiched between jigs for attaching and detaching a blade, and the flange member is braided (it can be magnetically attached in a form in which abrasive grains such as diamond are fixed by nickel plating).
Then, the blade is magnetically attached to the flange member (magnetically permeable) by the magnet, the flange member is fitted to the spindle shaft as it is, then the blade attaching / detaching jig is removed, and the nut is screwed into the external thread of the shaft. If tightening is completed, the blade mounting operation is completed. On the other hand, when replacing the blade, if the nut is removed and the flange member is clamped by the jig for attaching / detaching the blade, the magnet can be used to magnetically attach the blade to the flange member again. Therefore, the flange member and the blade can be simultaneously detached from the shaft by holding the blade attaching / detaching jig, and the attaching / detaching operation is facilitated.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below in detail with reference to the accompanying drawings. FIG. 1 is an external view of a blade attachment / detachment jig 1, in which a jig body 2 formed of an elastic synthetic resin, a leaf spring 3 attached inside thereof, and an outer peripheral portion of the jig body 2 are provided. And a plurality of magnets 4 attached thereto.

The jig body 2 is composed of three arcuate curved plates 2a arranged in the circumferential direction at a fixed interval, and the three arcuate curved plates 2a slightly below the intermediate portion. And the bottom plate 2b is integrally formed, as if the bamboo tube was cut into three H-shaped portions at regular intervals along the circumferential direction, and the bottom plate had an appearance corresponding to a node of the bamboo tube. ing.

[0008] On the outer surface of the three arc-shaped curved plates 2a,
The bottom plate 2 is provided with a projection 2c having a semi-circular cross section in the circumferential direction.
b, a groove 2d for engaging with the flange member is provided in the lower end of the inner surface in the circumferential direction, and a hole 2e is provided in the center of the bottom plate 2b. Is formed with a holding portion 1a.

In the leaf spring 3, a substrate 3a having substantially the same shape as the bottom plate 2b is fixed to the bottom plate 2b by rivets 5, and the elastic plate pieces 3b raised from three ends of the substrate 3a are the three pieces described above. Each of the arc-shaped curved plates 2a is pressed and locked to the inner surface. Therefore, when a finger is attached to the upper outer surfaces of the three arc-shaped curved plates 2a and simultaneously contracted against the elastic plate pieces 3b, the diameter of the lower end portion is enlarged, and the holding portion 1a is opened, and the force for contracting is obtained. Is released, the holding portion 1a is closed by the restoring force of the elastic plate piece 3b and returns to the original state.

The jig 1 for attaching and detaching the blade according to the present invention is constructed as described above. To use this jig, first, as shown in FIG. Of the three arcuate curved plates 2a of
When a is opened and the lower end is brought into contact with the flange member 6 and then the squeezing force of the finger is released, the holding portion 1a is closed and the flange member 6 can be held as described above.

At this time, as shown in FIG. 4, the front end of the holding portion 1a fits into the circumferential groove 6b of the flange member 6, and at the same time,
Since the outer peripheral edge of the projection 6a is engaged with the engagement groove 2d, the state of holding the flange member 6 by the blade attaching / detaching jig 1 is ensured without rattling, and the flange member 6 slides down even when lifted. Never.

Next, as shown in FIG. 5, when the blade attaching / detaching jig 1 is brought close to the ring-shaped blade 7 while holding the flange member 6 therebetween, the flange member 6 is made of titanium and has magnetic permeability, so that the magnet 4 Thereby, the blade 7 can be magnetically attached to the flange member 6.

The magnetic force of the magnet 4 is set in advance to such an extent that the blade 7 is lightly attracted so as not to bend or deform the ultra-thin blade 7 because it is too strong. If the center of the blade 7 is slightly deviated from the center of the guide portion 6c of the flange member 6 at the time of magnetic attachment, if the wrist is lightly hit with the blade attaching / detaching jig 1 facing upward, the vibration of the blade 7 Can move slightly to bring the centers together. If the magnet 4 is formed of an electromagnet, there is a merit that the magnetic force can be easily adjusted. The magnet in this specification includes not only a permanent magnet but also an electromagnet.

Further, as shown in FIG. 6, the blade 7 may be magnetically attached to the flange member 6 held by the blade attaching / detaching jig 1 in the same manner as described above, with the cover of the storage case 8 being removed. It is possible.

After magnetically attaching the blade 7 to the flange member 6 in this manner, as shown in FIG. 7, the blade attaching / detaching jig 1 is laid sideways and a blade provided on the tip of a spindle 9 of a dicing machine or the like. The flange member 6 is fitted to the shaft 10a of the mounting portion 10, and the blade 7 is
Contact.

Thereafter, when the upper portions of the three arc-shaped curved plates 2a of the jig main body 2 are narrowed by a finger, the holding portion 1a is opened to release the holding of the flange member 6, and in this state, the blade attaching / detaching jig is provided. By pulling 1 forward, it can be detached from the flange member 6. As described above, the material of the flange member 6 is titanium and has no magnetism, and is not attracted by the magnet 4 of the blade attaching / detaching jig 1, and thus remains on the shaft 10 a of the blade mounting portion 10 as it is.

When the blade attaching / detaching jig 1 is detached, the blade 7 is released from the flange member 6 and is held by the flange 10b of the blade mounting portion 10. At this time,
Experiments have shown that the blade 7 has no magnetization.

Next, a nut 11 (FIG. 8) is screwed and fastened to a male screw 10c protruding from a shaft hole of the flange member 6, so that the flange member 6 and the blade mounting portion 10 are screwed.
The blade 7 can be sandwiched and fixed with the flange 10b, and the mounting operation of the blade 7 is completed.

FIG. 8 shows an example of use in a dicing apparatus. A wafer 14 to be cut is placed and fixed on a chuck table 13 which is moved by an X-axis moving mechanism 12, and a Y-axis moving mechanism 15 and The blade 7 is mounted on the blade mounting portion 10 of the spindle 9 of the spindle unit 17 moved by the Z-axis moving mechanism 16, and the wafer 14 is diced by the blade 7.

The replacement work of the blade 7 can be easily performed by using the blade attaching / detaching jig 1. That is, when the nut 11 is loosened and removed, and the flange member 6 is clamped by the blade attaching / detaching jig 1, the blade 7 can be magnetically attached to the flange member 6 again by the magnet 4.
If the blade attaching / detaching jig 1 is pulled forward as it is, the flange member 6 and the blade 7 can be simultaneously removed from the shaft 10 a of the blade mounting portion 10. Therefore, the operation is simple and efficient.

After the flange member 6 and the blade 7 are detached at the same time, when the holding of the blade attaching / detaching jig 1 is released, the blade 7 separates from the flange member 6. The blade 7
Is removed, the flange member 6 is again sandwiched by the blade attaching / detaching jig 1, a new blade (not shown) is magnetically attached to the flange member 6, and the blade mounting portion 10 is formed in the same manner as described above.
Can be attached to In the jig for attaching and detaching the blade according to the present invention, the magnet 4 is provided outside the holding portion 1a. However, the present invention is not limited to this, and the magnet 4 may be provided inside. If necessary, the holding portion 1a may be constituted by a magnet.

[0022]

[Effects of the Invention] As described above, according to the present invention,
While holding the flange member with the blade attachment / detachment jig,
Since the blade can be attached to and detached from the blade mounting part of a dicing machine etc. while the blade is magnetically attached to the flange member, the work of attaching and detaching the blade is greatly facilitated, and the blade can be contaminated or damaged. Has excellent effects such as no.

[Brief description of the drawings]

FIG. 1 is a perspective view of a blade attaching / detaching jig showing an embodiment of the present invention.

2A is a bottom view of FIG. 1, and FIG. 2B is a sectional view taken along line AA of FIG.

FIG. 3 is a state diagram when a flange member is held by a blade attaching / detaching jig.

FIG. 4 is a sectional view when the flange member is clamped by the blade attaching / detaching jig.

FIG. 5 is a state diagram when a blade is magnetically attached while holding a flange member.

FIG. 6 is a state diagram when the blade is magnetically attached with the cover of the storage case removed.

FIG. 7 is a state diagram when a blade is mounted on a blade mounting portion such as dicing.

FIG. 8 is an explanatory diagram showing an example of use in a dicing apparatus.

FIG. 9 is an explanatory view showing a conventional blade mounting example.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Blade attachment / detachment jig 1a ... Nipping part 2 ... Jig main body 2a ... Arc-shaped curved plate 2b ... Bottom plate 2c ...
Projection 2d ... engaging groove 2e ... hole 3 ... leaf spring
3a ... substrate 3b ... elastic plate piece 4 ... magnet 5 ...
Rivet 6 ... Flange member 6a ... Protrusion 6
b: circumferential groove 6c: guide portion 7: blade 8:
Storage case 9 ... Spindle 10 ... Blade mounting part 10a ... Shaft 10b ... Flange 10
c: male screw 11: nut 12: X-axis moving mechanism 13: chuck table 1
4 Wafer 15 Y-axis moving mechanism 16 Z-axis moving mechanism 17 Spindle unit

Claims (2)

(57) [Scope of request for utility model registration] 1. A magnetic adhesion property with a magnetically permeable flange member.
Blade attachment and detachment for attaching and detaching blade to spindle
A jig for engaging a peripheral groove formed in the flange member to form a holding portion.
Arc including an engaging groove to be formed and an upper part narrowed by a finger
Separate the holding part and upper part in the circumferential direction at a certain interval from the curved plate
And a bottom plate on which the arcuate curved plate is disposed.
The holding portion may be configured such that the engaging groove is a peripheral groove of the flange member.
This flange is engaged with the flange
It has magnetism to magnetically attach the blade via a member
A jig for attaching and detaching a blade. 2. The bottom plate is provided with three arc-shaped curved plates.
An elastic plate piece is pressed and locked inside the arcuate curved plate.
When the upper part of this arcuate curved plate is narrowed,
The part expands and expands, and the clamping part closes when the constriction force is released
The blade attaching / detaching jig according to claim 1, which returns to a state.