JP2579776B2 - Quartz glass fork - Google Patents
Quartz glass forkInfo
- Publication number
- JP2579776B2 JP2579776B2 JP24148187A JP24148187A JP2579776B2 JP 2579776 B2 JP2579776 B2 JP 2579776B2 JP 24148187 A JP24148187 A JP 24148187A JP 24148187 A JP24148187 A JP 24148187A JP 2579776 B2 JP2579776 B2 JP 2579776B2
- Authority
- JP
- Japan
- Prior art keywords
- quartz glass
- fork
- main body
- side walls
- bottom wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、半導体ウェーハを熱拡散処理する際等に用
いられる石英ガラス製フォークに関する。Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quartz glass fork used for performing a thermal diffusion process on a semiconductor wafer or the like.
従来、上記石英ガラス製フォーク１は、例えば第４図
に示すように、円形の石英ガラス管の先端部を肉厚と同
程度になるように平に切欠いて形成されている。Conventionally, as shown in FIG. 4, for example, the above quartz glass fork 1 is formed by notching the tip of a circular quartz glass tube flat so as to be substantially the same as the wall thickness.
しかしながら、上記従来の石英ガラス製フォーク１に
よれば、半導体ウェーハを移載する際に先端部が自重に
よって撓み、半導体ウェーハが落下するおそれがあり、
このような撓みは、熱雰囲気中において顕著となる。However, according to the conventional quartz glass fork 1 described above, when the semiconductor wafer is transferred, the distal end may be bent by its own weight, and the semiconductor wafer may fall,
Such bending becomes remarkable in a hot atmosphere.
又、石英ガラス製フォーク１を移載装置に固定する場
合には、被固定部分となる基端部の外径を移載装置の機
種に対応させて異ならせた石英ガラス製フォーク１を製
作しなければならない問題がある。Further, when the quartz glass fork 1 is fixed to the transfer device, the quartz glass fork 1 is manufactured in which the outer diameter of the base end serving as a fixed portion is changed according to the model of the transfer device. There are issues that must be addressed.
そこで、本発明は、先端部の撓みを防止し得、かつ各
種の移載装置に容易に対応し得るようにした石英ガラス
製フォークを提供しようとするものである。Accordingly, an object of the present invention is to provide a quartz glass fork capable of preventing bending of the distal end portion and easily adapting to various transfer devices.
前記問題点を解決するため、本発明は、矩形の樋状に
形成され、先端部の両側壁を底壁付近まで底壁と平行に
切欠いた石英ガラス製の本体と、本体の基端部両側壁に
跨って嵌合された石英ガラス製の被固定部材とからなる
ものである。In order to solve the above problems, the present invention provides a quartz glass main body formed in a rectangular gutter shape, in which both side walls at the tip are cut off in parallel with the bottom wall to near the bottom wall, and both sides at the base end of the main body. And a fixed member made of quartz glass fitted over the wall.
上記手段によれば、底壁の撓みが両側壁によって抑制
され、又、被固定部材のみの変更によりフォークの被固
定部材が変更される。According to the above means, the bending of the bottom wall is suppressed by the side walls, and the fixed member of the fork is changed by changing only the fixed member.
以下、本発明の一実施例を第１図〜第３図と共に説明
する。Hereinafter, an embodiment of the present invention will be described with reference to FIGS.
第１図は本発明に係る石英ガラス製フォーク10の斜視
図で、この石英ガラス製フォーク10は、矩形の樋状に形
成され、かつ先端部の両側壁11aを底壁11b付近まで底壁
11bと平行に切欠いた石英ガラス製の本体11と、カマボ
コ状に形成され、本体11の基端部両側壁11aに跨って嵌
合された石英ガラス製の被固定部材12とから構成されて
いる。FIG. 1 is a perspective view of a quartz glass fork 10 according to the present invention. The quartz glass fork 10 is formed in the shape of a rectangular gutter, and has both side walls 11a at the tip end near the bottom wall 11b.
It is composed of a quartz glass main body 11 cut out in parallel with 11b, and a quartz glass fixed member 12 formed in a skewed shape and fitted across the base end side walls 11a of the main body 11. .
本体11の先端部の両側壁11aの高さは、底壁11bの撓み
を防止するに充分な高さであり、両端部の両側壁11a
は、適宜角度の斜面部によって接合されている。又は、
被固定部材12は、種々の移載装置（図示せず）に対応す
る各種の形状のものが製作されるものであり、その体部
には、フォーク10を移載装置に取付ける際に、レーザー
光を通し、炉芯に対してフォーク10の芯を出すための穴
13が貫設されているが、この穴13は、必ずしも設けなく
てもよい。The height of both side walls 11a at the end of the main body 11 is high enough to prevent the bottom wall 11b from bending, and the side walls 11a at both ends are provided.
Are joined by inclined portions having an appropriate angle. Or
The fixed member 12 is manufactured in various shapes corresponding to various transfer devices (not shown). When the fork 10 is attached to the transfer device, the fixed member 12 has a laser beam. Hole for passing light through and fork 10 core to furnace core
Although the hole 13 is provided, the hole 13 is not necessarily provided.
上記石英ガラス製フォーク10の本体11は、第２図に示
す石英ガラス製の角管111を二点鎖線に沿って切って得
られ、又、被固定部材12は、第３図に示す半円柱状の石
英ガラス棒121の一部を二点鎖線に沿って切除して得ら
れるものであり、両者は、本体11のみの洗浄を可能とす
べく取り外し可能に嵌合されるものである。The main body 11 of the quartz glass fork 10 is obtained by cutting a quartz glass square tube 111 shown in FIG. 2 along a two-dot chain line, and the fixed member 12 is a semicircle shown in FIG. It is obtained by cutting off a part of the columnar quartz glass rod 121 along the two-dot chain line, and both are removably fitted so that only the main body 11 can be washed.
以上のように本発明によれば、底壁の撓みが両側壁に
よって抑制されるので、先端部の撓みを防止できる。As described above, according to the present invention, since the bending of the bottom wall is suppressed by the side walls, the bending of the distal end portion can be prevented.
又、被固定部材のみの変更よりフォークの被固定部分
が変更されるので、従来に比して各種の移載装置に容易
に対応させることができ、かつ本体が損耗した場合に
は、本体のみの変換により被固定部材を繰返して使用す
ることができる。Further, since the fixed portion of the fork is changed by changing only the fixed member, it is possible to easily cope with various transfer devices as compared with the conventional case, and when the main body is worn, only the main body is replaced. The member to be fixed can be used repeatedly by the above conversion.
更に、本体を角管から得る場合には、何等の無駄を出
すことなく角管１本から２個の本体が得られるので、省
資源化と原価低減を図ることができる。Further, when the main body is obtained from a square tube, two main bodies can be obtained from one square tube without any waste, so that resource saving and cost reduction can be achieved.
第１図〜第３図は本発明の一実施例を示すもので、第１
図は石英ガラス製フォークの斜視図、第２図及び第３図
はそれぞれ本体及び被固定部材の製作説明斜視図、第４
図は従来の石英ガラス製フォークの斜視図である。 11……本体、11a……側壁 11b……底壁、12……被固定部材1 to 3 show one embodiment of the present invention.
The figure is a perspective view of a fork made of quartz glass. FIGS.
The figure is a perspective view of a conventional quartz glass fork. 11 ... body, 11a ... side wall 11b ... bottom wall, 12 ... fixed member
Claims (1)
底壁付近まで底壁と平行に切欠いた石英ガラス製の本体
と、本体の基端部両側壁に跨がって嵌合された石英ガラ
ス製の被固定部材とからなる石英ガラス製フォーク。1. A main body made of quartz glass, which is formed in a rectangular gutter shape and has both side walls at a tip portion cut out in parallel with the bottom wall up to the vicinity of the bottom wall, and fits over both side walls at a base end portion of the main body. A quartz glass fork comprising a fused quartz glass fixed member.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24148187A JP2579776B2 (en) | 1987-09-25 | 1987-09-25 | Quartz glass fork |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24148187A JP2579776B2 (en) | 1987-09-25 | 1987-09-25 | Quartz glass fork |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6482647A JPS6482647A (en) | 1989-03-28 |
| JP2579776B2 true JP2579776B2 (en) | 1997-02-12 |
Family
ID=17074954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24148187A Expired - Lifetime JP2579776B2 (en) | 1987-09-25 | 1987-09-25 | Quartz glass fork |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2579776B2 (en) |
-
1987
- 1987-09-25 JP JP24148187A patent/JP2579776B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6482647A (en) | 1989-03-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2579776B2 (en) | Quartz glass fork | |
| JPS6361173U (en) | ||
| JPS62162860U (en) | ||
| JPH0231163U (en) | ||
| JPH0635472Y2 (en) | Wafer boat | |
| JPH0224556U (en) | ||
| JPS5940446Y2 (en) | Diffusion jig | |
| JPH0149014B2 (en) | ||
| JPH01117049U (en) | ||
| JPS6092894U (en) | heat sink | |
| JPS61112108A (en) | Light emitting element module | |
| JPS60850U (en) | fluorescent display tube | |
| JPS62145328U (en) | ||
| JPH0165161U (en) | ||
| JPS62134232U (en) | ||
| JPS5997302U (en) | Heat transfer tube support device | |
| JPS60107563U (en) | Rapid start type fluorescent lamp manufacturing equipment | |
| JPS58135967U (en) | Gas laser tube resonant mirror fixing structure | |
| JPS6041066U (en) | Optical semiconductor device | |
| JPH03122549U (en) | ||
| JPS6153931U (en) | ||
| JPH02121706U (en) | ||
| JPS6027430U (en) | wafer holder | |
| JPH0362662U (en) | ||
| JPH0371554U (en) |