JP2579468Y2 - Ultra high temperature heating furnace - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-zone independent control type heating furnace for creating an extremely high temperature environment.

[0002]

2. Description of the Related Art Various heating apparatuses for realizing a heating environment of an extremely high temperature (for example, about 2500 ° C.) have been put to practical use. Tungsten mesh heaters, molybdenum, and the like have been used for heating to such an extremely high temperature, and they all control heating of only a single zone. Some non-heated objects require that the temperature distribution be partially different from the shape thereof. On the other hand, in some cases, a temperature difference is required to make the temperature distribution uniform.

[0003]

However, since the conventional ultra-high-temperature heating furnace controls heating of only a single zone as described above, it is difficult to adjust the temperature distribution inside the heating furnace. Was. In addition, a general heating furnace (100
As a heating furnace at a low temperature of 0 ° C. to 1200 ° C., there was one capable of controlling the temperature distribution. However, since the temperature environment is completely different between the low temperature and the extremely high temperature, the configuration and the shape are not suitable for a heating furnace realizing the extremely high temperature environment. The object of the present invention is to divide a heating target zone into a plurality of zones, and to make it possible to control the temperature of each divided zone independently, thereby enabling a fine temperature control for a heated object. An object of the present invention is to provide an ultra-high temperature heating furnace.

[0004]

In order to achieve the above object, an ultra-high temperature heating furnace according to the present invention has one heating zone by arranging semi-cylindrical portions to face each other so as to include an object to be heated at a central portion. A plurality of mesh heaters are formed in multiple stages, the entire periphery of the mesh heaters arranged in multiple stages is surrounded by a heat shield, and a water-cooling jacket is installed around the heat shield. A detector is provided, and the temperature of each of the mesh heaters is independently controlled by obtaining a detection signal from the temperature detector.

[0005]

According to such a configuration, the temperature distribution of the object to be heated can be adjusted to be uniform or a temperature difference can be provided. Further, it is possible to cope with a change in temperature distribution due to a change in the shape of the object to be heated.

[0006]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in more detail with reference to the drawings. FIG. 1 is a cross-sectional view taken along the line AA of the embodiment of the ultrahigh-temperature heating furnace according to the present invention. FIG. 2 is a BB cross-sectional view as viewed from above. This embodiment is an example of a three-zone independent control system. This heating furnace is housed in a vacuum chamber and suspended from a support rod (not shown). The through holes 5a and 12a having the slot grooves of the electrode holders 5 and 12 are inserted into the support rods, and when the heating furnace is positioned in the front-back direction in the figure, the slot grooves are tightened by screws or the like (not shown) for heating. Fix the furnace position. The electrodes 8a, 8b and 13a, 13b of the heater are inserted into through holes 5b and 12b of the electrode holders 5 and 12, which are formed at right angles to the through holes 5a and 12a. 11 attaches to the electrode holders 5 and 12.

[0007] A first tungsten mesh heater (hereinafter referred to as "W heater") 1 having a semi-cylindrical shape is attached to the tips of the pair of electrodes 8a and 8b. Further, a second W heater 2 having a semi-cylindrical shape and a radius larger than the first W heater 1 is attached to the tips of the pair of electrodes 13a and 13b. The first and second W heaters 1 are obtained by bending a mesh of tungsten having a thickness of 0.1 to 0.2 mm into a semi-cylindrical shape, and attaching upper and lower ends thereof to the heater holders 14 and 16. It is formed. The heater holding portion 14 at the lower end of the first W heater 1 and the heater holding portion 16 at the upper end of the second W heater 1 are connected, and the first and second W heaters 1 and 2 are integrated. It can be moved up and down and its position is adjustable.

The first and second W heaters 1 and 2
Are provided facing each other (see FIG. 2). At this time, the W heater 1 'provided facing the first W heater 1 is provided on the electrodes 8'a and 8'b, and the W heater 2' provided provided facing the second W heater 2 is provided on the electrode 13 '. a and 13'b respectively. The first W heaters 1 and 1 ′ form a first heating zone, and the second W heaters 2 and 2 ′ form a second heating zone. The electrodes 9a and 9b supported by the electrode holder 17 are located below the second W heater 2.
A third W heater 3 attached to the tip of the third W heater is disposed. The third W heater 3 has the same configuration as the first W heater 1. A heater facing the third W heater 3 forms a third heating zone. Note that a support 7 is attached to enhance the holding of the third W heater.

Around the first, second, and third W heaters, a heat shield (reflector) 6 is provided, which is formed by stacking tungsten or molybdenum plates in multiple layers and held by a holding unit 10. The heat shield 6 is provided not only on the side surface but also on the upper surface and the lower surface. The heat shield 6 reflects the heat from the W heater to the inside, and efficiently adds the heat radiated by the W heater to the object to be heated. Further, around the heat shield 6, water cooling jackets 4 for shielding heat are attached to the peripheral surface, the upper surface and the lower surface.
Heating of the object to be heated can be controlled by housing the object to be heated inside the first, second and third W heaters having the same structure as above, facing each other.

FIG. 3 is a block diagram showing an embodiment of the temperature control circuit of the W heater. 1st W heater 1, 1 ', 2nd
The W heaters 2, 2 'and the third W heaters 3, 3' are provided with temperature detectors (not shown in FIG. 2) 20, 21, and 22, respectively.
6 is input. The temperature controller 26 drives the driving circuits 23, 24 and 25, respectively, to drive the first W heaters 1, 1 ', the second W heaters 2, 2' and the third W heaters 2, 2 '.
Of the W heaters 3 and 3 'can be controlled independently. The temperature controller 26 is constituted by a CPU. For example, the first zone of the first W heaters 1 and 1 ′ is set to T ₁ degrees C by the temperature setting means (not shown),
The 2 'second zone is T ₂ degrees C, and the third W heaters 3, 3'
Is set to T ₃ degrees C, the respective control zones are set to T ₁ , T _2, and T ₃ degrees C by a feedback system including a drive circuit, a W heater, a temperature detector, and a temperature controller, respectively. Is controlled. The temperature of each zone can also be adjusted by changing the position of each W heater in the vertical direction. The internal temperature distribution can be finely adjusted by changing the drive current and the position of each of the W heaters. Further, uneven heating due to the shape of the object to be heated can be eliminated. Conversely, it is also possible to perform heating by giving a temperature difference. The maximum value of the temperature to be controlled is approximately 2300 to 2500 ° C. In this embodiment, the second
Although the diameter of the W heater is larger than that of the first W heater, it may be smaller.

[0011]

As described above, the ultrahigh-temperature heating furnace according to the present invention has first, second, and third W heaters forming first, second, and third control zones. A reflector is provided around the periphery, and a water-cooling jacket is further provided around the reflector, so that the first, second, and third W heaters can be independently heated. Therefore, the temperature distribution of the object to be heated can be controlled uniformly. It can also be adjusted to provide a temperature difference. Furthermore, it is possible to cope with a change in the temperature distribution due to the shape of the object to be heated.

[Brief description of the drawings]

FIG. 1 is a sectional view taken along the line AA of the embodiment of the ultrahigh-temperature heating furnace according to the present invention.

FIG. 2 is a sectional view taken along line BB of FIG.

FIG. 3 is a block diagram showing an embodiment of a temperature control circuit of a W heater.

[Explanation of symbols]

 1, 1 'First W heater 2, 2' Second W heater 3, 3 'Third W heater 4 Water cooling jacket 5, 12, 17 Electrode holder 6 Heat shield (reflector) 7 Support 8a, 8b First Upper electrode for W heater 9a, 9b Lower electrode for third W heater 10 Heat shield holder 11 Screw 13a, 13b Upper electrode for second W heater 14, 15, 16 Heater holder 20, 21, 22 Temperature detection 23, 24, 25 Drive circuit 26 Temperature controller

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-4-52215 (JP, A) JP-A-58-133589 (JP, A) JP-A-2-119388 (JP, U) JP-A 61-133 87689 (JP, U) J. 50-50561 (JP, Y2) (58) Fields investigated (Int. Cl. ⁶ , DB name) H05B 3/00 310 F27B 17/00 H05B 3/08 H05B 3/62

Claims (1)

(57) [Scope of request for utility model registration] 1. A plurality of mesh heaters forming one heating zone by arranging semi-cylindrical portions facing each other so as to include an object to be heated in a central portion,
The entire periphery of the mesh heaters arranged in multiple stages is surrounded by a heat shield, water cooling jackets are installed around the heat shield, temperature detectors are provided for each of the mesh heaters, and a detection signal from the temperature detector is provided. And a multi-zone independent control type ultra-high temperature heating furnace configured to independently control the temperatures of the respective mesh heaters.