JP2571968B2 - Method and apparatus for manufacturing disk substrate - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a method and an apparatus for manufacturing a disk substrate used for a magneto-optical disk for information storage or the like.

(Summary of the Invention) The present invention relates to a method and an apparatus for manufacturing a disk substrate used for a magneto-optical disk for information storage or the like, wherein a photopolymer used for transfer and molding of a stamper surface on which information recording unevenness is formed. Air bubbles are prevented from being generated, and the manufacturing process can be simplified.

(Prior Art) Conventionally, various methods of manufacturing this type of magneto-optical disk and the like have been proposed. However, bubbles are generated in a resin used for transferring and molding a stamper surface on which information recording irregularities are formed. There is a problem that it is easy or the process is complicated.

An example of the prior art is disclosed in Japanese Patent Application Laid-Open No. Sho 60-111355, which is characterized in that a support member having an ultraviolet curable resin adhered thereto is pressed against a stamper surface in a vacuum.

(Problems to be Solved by the Invention) By the way, a process in a vacuum as disclosed in Japanese Patent Application Laid-Open No. 60-111355 is advantageous from the viewpoint of preventing the generation of bubbles, but it is necessary for automation of the manufacturing process and mass production. It is rather disadvantageous.

In view of the above, the present invention does not require processing in a vacuum, is suitable for automation and simplification of a manufacturing process, and furthermore, eliminates generation of bubbles in a photopolymer used for transfer of a stamper surface and molding. It is an object of the present invention to provide a method and an apparatus for manufacturing a disk substrate used for a magneto-optical disk or the like which can be used.

(Means for Solving the Problems) In order to achieve the above object, a method of manufacturing a disk substrate according to the present invention comprises: Injecting a photopolymer from a nozzle into a gap between the stamper surface and the support member while rotating the stamper; and the photopolymer is provided in a region having a predetermined diameter in a surface of the support member facing the stamper surface. And stopping the injection of the photopolymer and stopping the rotation of the stamper after the arrival, and pressurizing and lowering the support member.

In addition, a method of manufacturing a disk substrate according to the present invention includes a mounting base movably provided from a first station to a second station and rotatably driven at the first station, and a mounting base mounted on an upper surface of the mounting base. A stamper provided with a stamper surface on which information recording irregularities are formed, a transparent plate-like supporting member held in the first station by holding means in parallel with the stamper surface, A nozzle provided at a station, for injecting a photopolymer into a gap between the stamper surface and the support member from a center side of the mounting table, a pressing unit for pressing down the support member at the first station; And a lamp for curing the photopolymer installed at the second station.

(Operation) In the present invention, the stamper surface on which the information recording unevenness of the stamper is formed is kept parallel to the transparent plate-like supporting member, and the photopolymer is supplied from the nozzle to the stamper surface and the supporting member by rotating the stamper. By injecting the photopolymer into the gap, the photopolymer can be spread to a required range of the supporting member without generating any bubbles. For this reason, a processing step in a vacuum is unnecessary, and there is no need to push out bubbles when bubbles are generated, so that mass productivity can be improved and the manufacturing process can be simplified. Further, after the photopolymer reaches a region having a predetermined diameter in the surface of the support member facing the stamper surface, the rotation of the stamper is stopped and the injection of the photopolymer is stopped to pressurize the support member. By pushing down, the film thickness of the photopolymer can be made uniform.

(Example) Hereinafter, an example of a method and an apparatus for manufacturing a disk substrate according to the present invention will be described with reference to the drawings.

In FIG. 1, reference numeral 1 denotes a base on which a moving table 2 has a first station P1 and a second station P2.
It is attached so that it can move between and. For example, the moving table 2 is linearly slidable on a rail 3 on the base 1. The driving of the moving table 2 can be performed by rotating a ball screw on the base 1 screwed to a nut on the moving table 2.

As shown in FIG. 2, a mounting table 5 made of glass, transparent plastic, or the like, which is rotatable by a rotary driving source, is disposed on the moving table 2, and a stamper 6 is mounted on a flat upper surface of the mounting table 5. Are arranged and fixed. The upper surface of the stamper 6 is a stamper surface 7 on which fine irregularities for recording information are formed.

A nozzle 9 for injecting an ultraviolet curable resin 8 as a photopolymer into the mounting table 5 in the first station P1 is provided so as to be movable up and down. The nozzle 9 has an inner diameter
The resin 8 can be supplied onto the stamper surface 7 from below the center of the mounting table at the ascending position at about 0.6 mm, and does not hinder the movement of the moving table 2 when descending.

Further, a vertical frame 10 is erected in the first station P1, and a positioning claw 11 is provided on the vertical frame 10. As shown in FIG. 2, the positioning claw 11 is a holding means for holding a transparent plate-like supporting member (a transparent plate-like member for carrying and holding a resin as a photopolymer) 20 such as a glass plate or a transparent plastic plate. Function as Also, a carrier member
On the upper side of 20, a pressurizing means constituted by a pressurizing plate 21 made of glass or the like and a pressure damper of variable pressure is provided.

A reflection box 15 is installed at the second station P2,
A metal halide lamp 16 for generating ultraviolet light is provided in the reflection box 15.

In the above configuration, first, the moving table 2 is disposed at the first station P1, and the stamper 6 adhered to the mounting table 5 is first placed.
A glass plate as shown in FIG.
A transparent plate-shaped support member 20 such as a transparent plastic plate is held by positioning claws 11. Note that a pressure plate 21 made of glass or the like is overlaid on the upper side of the support member 20. Reference numeral 22 denotes a center cone for centering the support member 20 (to make the center of rotation of the mounting table 5 and the stamper surface 7 coincide with the center of the support member 20).

When the holding member 20 is held parallel to the stamper surface 7 at an interval of about 0.5 ± 0.1 mm by the positioning claw 11, the mounting base 5 is rotated at a rotation speed of about 30 rpm, and the ultraviolet rays are emitted from the nozzle 9 at the ascending position. The curable resin 8 is injected at a slow rate of 3.5 cc / min for 50 to 60 seconds. At this time, the support member 20 is in the stopped state, and the position of the nozzle 9 does not move. In this injection, since the resin 8 is supplied from the center side of the rotating stamper 6 by the nozzle 9, the resin is effectively spread by the centrifugal force into the narrow gap between the stamper surface 7 and the support member 20, and generation of bubbles is observed. Absent.

When the ultraviolet curable resin 8 spreads to a region of about 100 mm in diameter of the support member 20, the nozzle 9 is lowered as shown by the imaginary line in FIG. 2 to stop the resin injection, and the rotation of the mounting table 5 is stopped. The lowering of the member 20 is started. At this time, centering of the supporting member 20 is performed by the center cone 22.

Next, the positioning claw 11 is opened in the direction of the arrow Q in FIG. 2 to open the support member 20, and the pressing member 21 presses the support member 20 in the direction of pushing down the support member (the direction of the arrow F in FIG. 2) at 1 kg / sheet. 0.1mm /
The thickness of the resin 8 is kept constant (about 20 μm) by pushing down the support member 20 at a speed of about seconds. The pressurization is performed by a variable pressure damper.

When the process at the first station P1 is completed, the moving table 2 moves to the second station P2. In the second station P2, the ultraviolet curable resin 8 is irradiated with ultraviolet rays by the metal halide lamp 16 to cure the resin 8. After that, remove the center cone 22 and set the stamper surface 7
Of the information recording micro unevenness transferred and molded on the surface 8
The carrier member 20 on which the film made of is formed is peeled off from the stamper 6.

In order to obtain the final product of the magneto-optical disk, a process of forming a recording layer on the resin film formed on the support member 20 or fixing a hub to the center of the support member 20 is performed. Is performed.

(Effects of the Invention) As described above, according to the present invention, treatment in a vacuum is unnecessary, and generation of bubbles in a photopolymer used for transferring and molding a stamper surface is eliminated. Therefore, the manufacturing process of a disk substrate used for a magneto-optical disk or the like can be automated and the number of processes can be reduced, which is also effective in improving mass productivity.

[Brief description of the drawings]

FIG. 1 is a front view showing an embodiment of a method and an apparatus for manufacturing a disk substrate according to the present invention, and FIG. 2 is a sectional view of a main part. 1 ... base, 2 ... moving table, 5 ... mounting base, 6 ...
… Stamper, 7… stamper surface, 8… ultraviolet curable resin, 9… nozzle, 11… positioning claw, 15… reflection box, 16… metal halide lamp, 20… carrying member.

 ──────────────────────────────────────────────────続 き Continuation of the front page (72) Inventor Yoshikazu Some 1-13-1 Nihombashi, Chuo-ku, Tokyo Inside TDK Corporation (56) References JP-A-2-167729 (JP, A)

Claims (2)

(57) [Claims] 1. A stamper surface on which a concave and convex portion for recording information of a stamper is formed and a transparent plate-like supporting member are kept parallel, and a photopolymer is supplied from a nozzle to a gap between the stamper surface and the supporting member while rotating the stamper. Injecting; and stopping the injection of the photopolymer and stopping the rotation of the stamper after the photopolymer reaches a region having a predetermined diameter in a surface of the support member facing the stamper surface, and stopping the rotation of the stamper. Pressurizing and pushing down a member. 2. A mounting table movably provided from a first station to a second station and rotatably driven at the first station, and an information recording medium disposed on an upper surface of the mounting table for recording information. A stamper having a stamper surface with irregularities, a transparent plate-shaped support member held in parallel with the stamper surface by holding means in the first station, and provided in the first station, A nozzle for injecting a photopolymer into a gap between the stamper surface and the support member from a center side of a mounting table; a pressurizing unit for pressing down the support member at the first station; and a pressurizing unit installed at the second station. An apparatus for manufacturing a disk substrate, comprising: a photopolymer curing lamp.