JP2568385C - - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a probe,
Close to the probe, and the physical quantities (for example, tunnel current,
Scanning probe microscope that detects and measures changes in interchild force, photon amount, etc., and images it.
It is about. 2. Description of the Related Art In the above-mentioned scanning probe microscope, a probe is brought as close as possible to a sample surface.
Then, by detecting the change in physical quantity that occurs between the probe and the sample surface, the sample
Attracts attention as a device that can observe the surface shape of
I have. In this scanning probe microscope, the flow between the probe and the sample surface
A device that detects and measures the tunnel current and observes the sample surface is a scanning tunnel microscope.
This microscope is called a microscope (STM).
Is capable of detecting the electrons that have been
This is a unique surface observation device. [0004] The operation principle of such an STM will be described below. z direction actuator
The electron cloud is seeping from the probe tip with a sharp tip on the sample surface.
Are close enough to overlap each other, and a voltage (tunnel) is applied between the probe and the sample.
And a tunnel current flows from the probe to the sample. And this
Servo operation of the z-direction actuator so as to keep the channel current constant
The probe and the sample are moved relatively in the plane by the xy-direction actuator.
Perform a two-dimensional scan. At this time, a z-direction actuator that servos the probe is used.
The surface voltage of the sample is observed by reading the servo voltage to the sample and displaying the image.
That is, the probe scans the surface of the sample, and when it reaches a step on this surface, the tunnel current
Increases, the actuation in the z-direction continues until the tunnel current reaches a constant value (original value).
Separate the probe from the sample with a heater. This movement of the probe corresponds to the step on the surface.
Therefore, by reading the servo voltage while repeating this scan, the sample surface
A plane image is obtained. The above tunnel current J _T Is represented by the following equation. J _T ∞ exp (-A ・ Φ ^1/2 S: where A: constant, Φ: average work function between the probe and the sample S: distance between the probe and the sample _t Changes very sensitively to the distance S, and the atomic scale
Is obtained. As described above, the STM can obtain a surface image of a substance with extremely high resolution.
. In addition, the reciprocal lattice space obtained by conventional methods such as electron diffraction and ion scattering.
Unlike interim images, it has the feature that the arrangement of atoms can be observed in real space. Sa
Further, the voltage applied between the probe and the sample is a value equal to or less than the work function of the sample,
Since the detected tunnel current is of the order of nA, the power consumption is low and the sample is damaged.
There is also a feature that there is little. [0007] The conventional STM has a very high resolution table in real space.
After observing the observation area on the sample surface visually,
Due to the above observation operation, the observation site becomes ambiguous,
It was unsuitable for observation of only a specific site. In addition, STM images and other microscopes (optical
Cannot be compared with conventional images obtained with a scanning microscope, electron microscope, etc.
(TM field of view) and the conventional observation field of view do not always match. That is, each of the STM image and the optical image is observed with one device.
No attempt was made to do so. Therefore, the present invention is based on the above-mentioned prior art.
It was made in view of the point, the purpose is to make the image observed by the probe,
You can observe and measure optical observation images obtained with other microscopes etc.
To provide a scanning probe microscope. [0009] A scanning probe microscope according to the present invention includes a sample
Sample holding means for holding the sample and facing the sample so as to optically observe the sample
A sample observation optical system arranged at a position, and a probe arranged to face the sample
A needle, supporting means for supporting the probe, the sample observation optical system and the probe,
The probe is disposed at a position facing the sample, and is located within an optical field of view of the sample observation optical system.
Moving means for positioning a stylus and a sample measurement position by the probe,
In order to measure the sample measurement position with a probe, the sample and the probe
And actuator means for relatively driving the actuator. In the scanning probe microscope constructed as described above, the sample observation optical system and the probe
Are arranged at positions facing the sample, and the search is performed within the optical field of view of the sample observation optical system.
Moving means for positioning a stylus and a sample measurement position by the probe;
In addition to the image observed by the probe, the sample measurement position by the sample observation optical system
The optical observation image can be obtained, the sample measurement position can be easily specified by the probe in the optical field of view of the sample observation optical system, and a plurality of different states can be obtained.
Can be compared. DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A scanning probe microscope according to an embodiment of the present invention will now be described.
The case of a tunneling microscope will be described with reference to the accompanying drawings. It will be described below.
In each embodiment, members having substantially the same function are described with the same reference numerals.
Is omitted. In FIGS. 1 and 2 showing the first embodiment, reference numeral 1 denotes a substrate.
A movable stage 2 is provided on the substrate 1 so as to be movable in the z direction. This move
An STM visual field observation optical system (optical microscope) 3 is provided on the stage 2 by a support 2a.
, Has been fixed. This system 3 is a cylindrical light source side housing arranged side by side.
It has a jing 4 and an observation side housing 5. A light source 6 is provided in the light source side housing 4.
At one end, the first prism 7 near the other end, and the condenser lens 8 halfway,
Is provided. On the other hand, an imaging lens 9 is placed at one end in the observation side housing 5.
The second prisms 10 are respectively provided near the other ends. Also, both housings
One converging lens 11 (objective lens) is commonly attached to the other end of each of the lenses 4 and 5.
You. At the center of the converging lens 11, a through hole 11a is formed. In the STM visual field observation optical system having the above configuration, the light source 6
The emitted light is condensed by the condensing lens 8 and becomes a parallel light beam, and the first prism 7
Incident on. Here, the incident light beam is reflected twice at a right angle and passes through a part of the converging lens 11.
pass. As a result, the light beam is viewed from the sample 12 placed in front of the converging lens 11.
Converge on the surface. The reflected light beam from the sample 12 passes through the other part of the converging lens 11.
Into the observation side housing 5, the optical path is changed by the second prism 10,
The image is formed by a lens 9. Therefore, the observer views the sample through the imaging lens 9.
You can see the point of view. When focusing with this system, move stage 2
The convergent lens 11 is moved toward and away from the sample by moving in the z direction. Of course, try
The material 12 may be moved with respect to the converging lens 11 in the z direction. Transfer of this sample 12
The moving device will be described later. In FIG. 1, reference numeral 20 indicates an STM system. The system 20 has an actuator mount 21 fixed to the moving stage 2. In this mounting table 21,
A three-dimensional actuator 22 that can be finely moved in the x, y, and z directions is fixed. this
A probe holder 23 is protruded from the center of the actuator.
A probe 24 is detachably held at the proximal end of the Dar. This probe
The tip of 24 passes through a through hole 11a formed in the center of the
The tip extends to the material 12 side. The probe 24 moves through the through hole 11a.
The outer diameter is set so as to be movable in the axial direction (z direction). The probe
As shown in FIG. 3, the holder 23 has a crack 23a formed on a front end surface thereof.
The probe 24 is removed by press-fitting the base end of the probe 24 into the crack 23a.
And hold it as possible. The sample 12 is provided on a sample table 3 provided at the tip of the coarse movement device 30.
1 is held so as to face the converging lens 11. This coarse adjustment device
30 is fixed to the substrate 1 by a block 1a, and the sample table 31 is
It can be roughly moved, for example, by a differential micrometer. Next, the three-dimensional actuator 22 will be described with reference to FIGS.
explain. In the figure, reference numeral 40 denotes an actuator mounting base 21 fixed to the substrate 1.
Pedestal consisting of an electrically insulating plate, one side of which is mounted, square on the other side
Four common electrodes 41 provided at positions corresponding to the four corners are fixed.
You. An x electrode 42 and a y electrode 43 are provided between these common electrodes 41, respectively.
The piezoelectric element 44 is connected between the common electrode and the common electrode. Also,
In the center, another piezoelectric element 44 is provided between the x electrode 42 and the y electrode 43 between them.
A connected central electrode 45 is provided so as to be interposed. This central train
A piezoelectric element 46 that can expand and contract in the z direction is fixed to the pole 45,
The probe holder 23 is fixed via an insulating plate 47. These electrodes
In addition, the piezoelectric elements are both cubic, and the former has a slightly larger
Has mention. The piezoelectric element 44 is located on the right side of the center electrode 45 as a boundary.
It is arranged so that the polarization direction is opposite to that of the left one. For example, one
When a constant voltage is applied to the electrodes, the piezoelectric element 4 located on the right side of the center electrode 45
4 is set to contract, while the piezoelectric element located on the left side is set to extend. Hide
When the center electrode 45 is grounded and a voltage of Vx> 0 is applied to the x electrode 42, the center electrode 45
The pole 45 moves to the right, and conversely, moves to the left when a voltage Vx <0 is applied. As a result
By applying an AC voltage to the x electrode, the probe attached to the center electrode 45 is
It can be vibrated in the x direction. Similarly, a Vy AC voltage is applied to the y electrode.
Accordingly, the probe can be vibrated in the y direction. In this case, x
In order to vibrate simultaneously in the direction and the y direction, Vx + Vy
Must be applied. By using the AC voltage as described above, the probe
Can be moved in the xy directions to scan the observation surface of the sample 12. Also,
The servo operation for keeping the channel current constant is performed by the piezoelectric element 46 which can expand and contract in the z direction.
The servo signal from the control unit is input and the signal between the observation surface of the sample and the probe
This can be done by keeping the distance of. In the STM system 20 configured as described above, first, the moving stage
2 is roughly moved in the z-direction, and the probe 24 is placed on the sample 12 so that the optical system 3 is in focus.
Even closer. Next, the coarse movement device 30 is detected by detecting the tunnel current.
Until it can be closed, that is, so that the probe 24 and the sample 12 enter the tunnel region.
Save. Then, in this state, the signal described above is given to the three-dimensional actuator 22,
Keep the probe needle 22 constant in the tunnel current in the xy direction (plane direction) and the z direction (axial direction).
The observation surface of the sample 12 is scanned by slightly moving the sample 12 while keeping the position. Next, referring to FIG. 6 and FIG. 7, the scanning type tom according to the second embodiment will be described.
The tunnel microscope will be described. In this embodiment, a mechanism for holding the sample 12 and
The coarse movement drive mechanism of the STM visual field observation optical system 3 and the probe 24 is the same as in the above embodiment.
Therefore, the description is omitted. The optical system 3 includes a light source 50 and a light collector for converging light from the light source.
It has a lens 51. In front of this lens, the incident light beam is reflected by the transmitted light beam by 90 degrees.
A splitting prism 52 is provided for splitting the light into two beams. This prism 52
On the side of the transmitted light beam, the convex mirror 53 that diffuses and reflects the incident light beam and the light from the convex mirror 53
A concave mirror 54 for condensing the reflected light beam on the observation surface of the sample 12 is provided. This convex
The plane mirror 53 is fixed to the center of the rear surface of the transparent support plate 55. The concave mirror
The reflected light flux from the light source 54 passes through the periphery of the support plate 55 and enters the sample 12.
. The three-dimensional actuator 22 is fixed to the front surface of the support plate 55.
At the tip of the actuator, a probe 24 is interposed via an insulating plate 47 and a probe holder 23.
Has been supported. An imaging lens 56 is provided on the reflection side of the branch prism 52.
From the imaging lens 56, the observer can see the concave mirror 54 and the convex
A microscope from the observation surface of the sample 12 by reflected light through the mirror 53 and the prism 52
The image can be observed. The three-dimensional actuator 22 used in the apparatus of the second embodiment is a
Although it may have the same structure as that of the embodiment, here, another structure is used.
This will be described with reference to FIG. This actuator 22 has three piezoelectric elements 60, 61, 62.
I do. The first piezoelectric element 60 has a direction in which the voltage is applied and a direction in which the polarization is matched.
The electrodes 63 and 64 provided at both ends expand and contract in the arrow direction (z direction). No.
The second and third piezoelectric elements 61 and 62 apply a voltage in a direction orthogonal to the polarization direction.
When applied, a shear force acts, causing slippage in the polarization direction. Such second
The third piezoelectric elements 61 and 62 are arranged so that the polarization directions are orthogonal to each other, and
Between the electric element 61 and the third piezoelectric element 62 and between the third piezoelectric element 62 and the insulating plate 47.
Are provided with electrodes 65 and 66, respectively. Thus, the second piezoelectric element 6
1 can be expanded and contracted in the y direction by applying a voltage between the electrodes 64 and 65;
In addition, the third piezoelectric element 62 applies a voltage between the electrodes 65 and 66 to form the third piezoelectric element 62 in the x direction.
It can expand and contract in the direction. In the apparatus of the second embodiment, the same device as that of the first embodiment is used.
By scanning, the STM observation of the sample 12 can be performed, and the STM visual field can be changed.
It can be observed with an optical microscope. Incidentally, as in this embodiment, the optical field observation light
If the optical system is composed of a reflective objective lens system, the
W. D is large and the probe and sample come into contact and damage them
Optical field observation can be performed without any need for observation. Such an optical system also has chromatic aberration.
And there is no wavelength dependence in the focal position.
There is also an effect that point adjustment can be easily performed. Next, the optical system of the apparatus of the second embodiment is optically
An example in which a function of measuring a surface shape is added will be described with reference to FIG. In FIG. 8, reference numeral 70 denotes another transparent support fixed so that the front surface faces the transparent support plate 55.
Show the board. A first branch prism 71 is fixed to the rear surface of the support plate 70.
. A light source 73 is provided on the side of the prism 71 via a condenser lens 72.
ing. The light emitted from the light source 73 is condensed by the condenser lens 72 and
The light enters the first branching plinism 71, is reflected by 90 degrees, and is reflected by the convex mirror 53.
The sample 12 is radiated sequentially through the concave mirror 54. The reflected light beam from this sample 12 is
The light enters the first splitting prism 71 via the concave mirror 54 and the convex mirror 53. This minute
On the transmission side of the branch prism 71, a second branch prism 74 is provided.
An eyepiece 75 is provided on each of the reflection sides 4. Thus, the first branch pre
The reflected light flux incident on the prism 71 is partially reflected by the second branching prism.
It is guided to the eyepiece 75. As a result, as in the second embodiment, the observer can contact
Through the eye lens 75, the observation surface of the sample 12 can be observed with a microscope. Next, the surface shape measurement provided on the transmission side of the second branching prism 74 is performed.
The setting device will be described. This device includes a λ / 4 plate on the transmission side of the second branch prism 74.
There is provided a third branching prism 77 provided via the light source 76. This third branch
A laser diode 79 is provided on the side of the rhythm 77 via a condenser lens 78.
Have been. The transmission side of the third splitting prism 77 has a polarization beam splitter.
A fourth splitting prism 80 constituting a litter is provided. This fourth branch
On a reflection side of the rhythm 80, a first critical angle prism 81
An anode 82 and a second critical angle prism 83 on the transmission side are used for the second field.
Photodiodes 84 are provided respectively. The operation of the surface profile measuring device having the above configuration will be described below. First,
The light beam emitted from the diode 79 is converted into a parallel light beam by the condenser lens 78.
Incident on the third splitting prism 77, where it is reflected by 90 degrees. This reflected light flux
The light is transmitted through the λ / 4 plate 76, and the second splitting prism 74, the first splitting prism 71,
The light enters the sample 12 via the surface mirror 53 and the concave mirror 54, and a minute spot
To form The light beam reflected from the observation surface passes through the optical path opposite to the incident light beam and
The light enters the four plates 76 and further passes through the third branching prism 77. This beam is the third
Is p-polarized by the splitting prism 77, enters the fourth splitting prism 80, and is split into two. One light beam passes through the first critical angle prism 81 to the first photo
The diode 82 and the other light beam pass through the second critical angle prism 83 to the second beam.
, Respectively. In such an apparatus, the first
In addition, the luminous flux incident on the second critical angle prisms 81 and 83 respectively
The angle of incidence is different due to the unevenness, and the light beam incident beyond the critical angle is prisms 81 and 8.
3, the light quantity detected by the photodiodes 82 and 84 changes.
As a result, unevenness information on the observation surface of the sample 12 can be obtained optically. The principle of the optical shape measuring device will be briefly described with reference to FIG.
. The observation surface (measurement surface) a of the sample is focused on the objective lens b (corresponding to the convex mirror and the concave mirror).
At the point position, the reflected light passing through the objective lens b becomes a parallel light beam and is
The light enters the rhythm c. At this time, the angle between the reflection surface of the prism c and the incident light is the critical angle.
The optical system is set so that On the other hand, the observation surface a is on the objective lens b side (dotted line A).
(Position indicated by), the reflected light from the observation surface a is reflected by the objective lens b.
Divergent light beam, and conversely, at a position farther than the focal position (the position indicated by the dotted line C).
In this case, it becomes a convergent light beam. In these cases, only the central ray is at the critical angle and prism c
Incident on the beam and deviated to one side from the center, the incident angle becomes smaller than the critical angle
Part of the light is refracted, exits the prism c, and the remaining light is reflected. And the other
Has an incident angle larger than the critical angle and is totally reflected. Movement like above
The light quantity of the light beam incident on the two-segment photodiode d is
The photodiodes on the right differed in their sensing surface, resulting in the inputs being connected to them.
An error signal is obtained from the output terminal f via the operation amplifier e. Therefore, optically
By detecting the focal position of the objective lens b, it is possible to obtain information on the unevenness of the observation surface.
it can. Furthermore, by scanning the observation surface in a predetermined range in the xy directions, the observation surface is scanned.
A three-dimensional image is obtained. In the embodiment shown in FIG. 8 and FIG.
That is, the critical angle method has been described as an example of the displacement measurement optical system.
In particular, a known optical system that uses a focus detection method without limiting to the critical angle method can be used.
(U.S. Pat. Nos. 4,726,685 and 4,732,485)
reference). For example, an optical system using an astigmatism method can be used. The scanning tunneling microscope shown in FIG. 10 is different from that shown in FIG.
A monitoring device 100 is provided, which can easily determine the degree of approach between the probe 24 and the sample 12.
It is something that can be observed. This concave mirror has a three-dimensional actuator 22 and
It is fixed to the substrate 1 so as to be located at an intermediate position with respect to the coarse movement device 30 and is within the focal point of the concave mirror.
The probe 24 and the sample 12 are arranged so that the concave surface faces upward so that
By observing a standing virtual image through a concave mirror, it is possible to know the degree of the above approach
I have to. In the apparatus of each of the above embodiments, when observing with an optical microscope, the observation magnification
Polarization can be performed with an eyepiece, but the objective lens side is set to a revolver type.
Is also good. As in the embodiment shown in FIG. 6 and FIG.
In the case of the objective lens system, when the probe 24 comes in contact with the sample 12, the probe
The distance between the convex mirror 53 that moves together with the mirror 24 and the concave mirror 54 that is fixed is incorrect.
And the optical microscope image may be degraded. In such a case, the convex mirror 53 and the concave mirror
54 may be integrally formed, and an example thereof will be described below. FIG. 11 shows the apparatus shown in FIG.
Is deformed along. In FIG. 11, reference numeral 55 denotes both the front and rear surfaces.
Shows a transparent quartz plate having a predetermined curvature, and a vapor deposition film with high reflectivity
The concave mirror 54 is formed by vapor deposition except for the portion. This quartz plate 55
A circular recess is formed in the center of the front surface of the lens, and a convex mirror 53 is formed on the rear surface in the recess.
However, a transparent quartz support 57 formed by the same method as the concave mirror 54 is inserted and fixed.
Have been. A three-dimensional actuator for driving the probe 24 is provided on the front surface of the support.
22 is fixed. As a result, the convex mirror 53 and the concave mirror 54 are
Since they are formed integrally, the distance between them is such that the probe 24 contacts the sample 12.
No madness. In such a configuration, the radius of curvature of the convex mirror 53 is concave.
The support member is set so as to be smaller than the radius of curvature of the mirror 54 and in the front surface of the quartz plate 55.
The curvature of the surface not provided with 57 is set to be the same as the curvature of the convex mirror 53.
Have been. In the above example, light shielding for the purpose of shielding illumination light during STM observation
A plate may be provided between the condenser lens 51 and the branch prism 52. The actuator 22 is constituted by a one-dimensional actuator which drives the probe 24 only in the z-axis direction.
, The sample stage 31 is composed of a two-dimensional actuator capable of moving in the x direction and the y direction.
May be. In each of the above embodiments, the STM field observation optical system and the STM observation system are integrated.
The technology of the present invention can be used in a general-purpose optical microscope as it is
Not suitable to apply. For this reason, a general-purpose optical microscope will be
An example of a scanning tunnel microscope that can be used as it is will be described. In FIG. 12 showing a scanning tunnel microscope according to the third embodiment, reference numerals are used.
Reference numeral 110 denotes a cylindrical three-dimensional actuator 2 attached to an objective lens a1 of a general-purpose microscope.
2 shows an annular support member for supporting 2; This support member 110 is provided with an objective lens a
1 is detachably provided on the outer peripheral surface of the lens 1 and is provided concentrically therewith. This support member 110
The attachment between the lens and the objective lens a1 is performed by means such as screwing or bolting.
It is done. The upper end of the three-dimensional actuator 22 is fixed to the support member 110.
Or, it is attached detachably. At the lower end of this actuator 22, a transparent
A probe, for example a probe holder 23 made of a cover glass, is concentrically mounted.
. A through hole is formed in the center of the holder 23, and the base of the probe 24 is formed in the through hole.
The end is inserted, and the probe 24 is fixed to the holder 23 by an adhesive or the like.
I have. The probe 24 and the actuator 22 are connected concentrically with high precision.
In addition, these central axes are set so as to coincide with the optical axis of the objective lens a1.
Have been. As described above, the support member 110, the actuator 22,
The tunnel scanning unit 120 is constituted by the needle holder 23 and the probe 24.
ing. In a scanning tunneling microscope having such a configuration, a tunnel scanning unit is used.
The center axis of the probe 24 coincides with the optical axis of the objective lens a1.
As described above, while the lens is mounted on the objective lens a1, the test is performed through the transparent holder 23.
The STM scanning area on the observation surface of the sample 12 is observed with a microscope. And the same as the above embodiment
Next, the probe 22 is three-dimensionally moved by the actuator 22 to move the STM area.
The area is observed by STM. Thus, in the apparatus of this embodiment,
In the same manner as in the apparatus described above, the STM image and the conventional image can be observed and measured while being superimposed. In the fourth embodiment shown in FIG. 13, the three-dimensional actuator 22 is not attached to the objective lens a1, but supports the sample table 31 inside.
It is supported by a frame-shaped support member 130. This support member 130 is located at the center of the upper wall.
The opening has a circular opening, and a circular ring-shaped actuator 22 is provided around the opening.
It is fixed concentrically with the optical axis of the objective lens a1. Of this actuator 22
On the peripheral surface, a probe holder made of a transparent glass plate
23 are attached. The center of the holder 23 is located on the optical axis of the objective lens a1.
The probe 24 is attached so as to project in the direction of the sample 12. In the fifth embodiment shown in FIG.
The support shaft 131 extending parallel to the optical axis of the lens a1 is turned around a horizontal axis around the support shaft 131.
It is movably supported. As a result, the 3 provided on the free end side of the support member 130
A two-dimensional actuator 22, a transparent probe holder (not shown), and a probe 24
The tunnel scanning unit 120 composed of
It is possible to remove it. With such a configuration, the view of the conventional image can be obtained.
At the time of observation, the objective lens a1 can be made to approach the sample 12. Example shown in FIG.
Used a transparent probe holder.
Any area can be used as long as it is a non-slatchable area and the position of the probe can be specified.
It is. For example, a structure in which a probe is supported by a wire may be used. In the sixth embodiment shown in FIG. 15, reference numeral 140 denotes a known optical microscope.
Objective lens detachably attached to a microscope, for example, a revolver a2 of a metal microscope
Indicates a unit. This unit 140 is equipped with an objective lens screw of the revolver a2.
A male screw that can be screwed into the female screw has a protruding part formed on the peripheral surface on the upper surface, and the lower end is
An open cylindrical outer frame 141 is provided. At the center of the inner surface of the upper wall of this outer frame 141
The objective lens a1 is screwed into the screw hole at the upper end.
A cylindrical inner frame 14 is provided between the outer peripheral surface of the objective lens a1 and the inner peripheral surface of the outer frame 141.
2 are provided. The inner frame 142 is located at a predetermined interval from above and below
A pair of support portions 142a, and a piezoelectric member supported between the support portions and capable of expanding and contracting in a vertical direction.
And a cylindrical coarse and fine movement device 142b for moving the probe. This
These support portions 142a are provided on a peripheral wall of the outer frame 141 in a vertically spaced manner.
Can be selectively fixed by the upper inner frame fixing coarse / fine movement device 141a and the pair of lower inner frame fixing fine / fine movement devices 141b, respectively. These two pairs of coarse and fine movement devices 1
41a (141b) are provided 180 degrees apart from each other and extend and contract in the direction of the inner frame 142.
It is composed of possible piezoelectric elements. The inner frame 142 is provided on the upper support portion 142a.
Between the lens and the objective lens a1, a cylindrical three-dimensional aperture concentrically located with the objective lens a1.
The upper end of the actuator 22 is fixed. This actuator 22 is
The coarse and fine movement device 141a for fixing the inner frame and the coarse and fine movement device 141b for fixing the lower inner frame are alternately arranged.
To release the fixing of the upper and lower support portions 142a alternately.
In response to this release, the probe-moving coarse / fine movement device 142b is intermittently expanded and contracted.
It is moved in the z direction by the so-called inch worm method. This actuator 22
A circular metal frame 143 having a circular opening in the center is fixed to the lower end of the peripheral edge.
You. At this time, the metal frame 143 can be removed from the actuator 22 and replaced.
Preferably, this is done, for example, by means such as screws. This money
The metal frame 143 is covered with a cover glass so as to close the circular opening.
A stylus holder 23 is attached, and a probe 24 is provided at the center of the holder.
The projection is provided in the direction of the sample 12 along the optical axis of the objective lens a1. Sample 12 is x average
Further, it is fixed on a sample table 31 composed of a stage movable in the y direction. The operation of the scanning tunnel microscope shown in FIG. 15 will be described below.
The objective lens unit 140 is mounted on the revolver a2 of the optical microscope, and the
Perform microscopic observation. The focus of the optical microscope image (conventional image) at this time is
Perform by coarsely moving the table. In this case, the shadow of the probe 24 existing on the conventional image is
Since the portion corresponds to the STM scanning range, this allows the STM scanning range to be optically observed.
It can be confirmed with a microscope. On the other hand, to observe the STM surface image,
After setting the zoom unit 140 to the focus position of the optical microscope,
The fine adjustment of the probe 24 is performed by the fine movement device 141a to detect the tunnel current.
Thereafter, the sample 12 is searched for by operating the three-dimensional actuator 22 in the same manner as in the previous embodiment.
Scanning is performed by the stylus 24. The sample stage 31 for holding the sample so as to be movable moves in the x direction.
Combination of actuator to move and actuator to move in y direction
Alternatively, an actuator similar to the cylindrical three-dimensional actuator 22 may be provided below the sample. Next, the cylindrical three-dimensional actuator used in the above embodiment.
22 will be described with reference to FIG. 16 (a, b, c). In the drawing, reference numeral 150 is a piezoelectric material.
2 shows a cylindrical body formed of a material and having open ends. Below the outer peripheral surface of the main body 150
The X electrode 151a, the -Y electrode 151b, and the -X electrode are arranged at predetermined intervals in the circumferential direction.
A total of four poles 151c and one Y electrode 151d are provided. this
X electrode (Y electrode) and -X electrode (-Y electrode) are 180 degrees apart from each other
Are located to be. In addition, the upper part of the outer peripheral surface of
One Z electrode 152 is provided so as to extend. Of the main body 150
The inner peripheral surface is opposed to the electrodes 151a, 151b, 151c, 151d, and 152.
In this way, the back electrode 153 serving as the ground electrode is provided. like this
As shown in FIG. 16 (d), each electrode of the three-dimensional actuator
By applying a polarity voltage, the probe can be selectively moved in the x, y, and z directions.
24 can be scanned for STM observation. In the seventh embodiment shown in FIG. 17, the three-dimensional actuator 22
Instead of using a z-direction actuator 22z that can only expand and contract in the z-direction.
You. This actuator 22z is a disc-shaped bimorph pressure having a circular opening in the center.
And is fixed to the support portion 142a below the inner frame 142 at the peripheral edge.
I have. At the center opening of this actuator 22z, as in the embodiment shown in FIG.
The probe 24 is fixed so that the optical axis of the objective lens a1 and the central axis coincide with each other,
A probe holder 23 made of glass is provided. Sample 12 is fixed on top
In the frame-shaped support member 130 accommodating the supported support 31, the support 31 is moved in the x direction.
And an x-direction actuator 22x and a y-direction actuator for slightly moving in the y-direction, respectively.
A heater 22y is provided. These x-direction actuators 22x and y
The direction actuator 22y is provided between the support table 31 and the support member 130.
It is composed of a piezoelectric element. These x-direction and y-direction actuators 22
The sample is moved in the plane direction (xy direction) by x and 22y, and the sample is moved in the z direction.
The probe 24 is moved in the z direction by the tuner 22z, and STM observation is performed.
Will be In this embodiment, the coarse and fine movement devices 141a and 141b for fixing the inner frame are used.
Unlike the embodiment shown in FIG. 15, only one is provided at each of the upper and lower sides.
This is the same as the above embodiment. In the eighth embodiment shown in FIG. 18, the objective lens a1 has the ST
An MTM scanning mechanism is not provided, and an STM scanning mechanism is provided on the side of the sample support mechanism that holds the sample 12.
I am. In this example, the center of the upper surface of the frame-shaped support member 130 has an opening at the center.
An xy-directional actuator 22xy having the following is attached. This actor
The probe 22xy has a probe 24 made of cover glass protruding from the sample side.
Rudder 23 is attached. The sample 12 is placed under the probe holder 23.
The z-direction actuator 22z held on the upper surface and this actuator 22z
A holding stage 31 is provided. The z-direction actuator 22z is the sample 1
2 is moved in the z direction so that the distance between the probe 2 and the probe 24 is within a predetermined range.
. Note that, instead of the z-direction actuator 22z, a three-dimensional actuator as described above is used.
A heater may be used. The ninth embodiment will be described with reference to FIGS. FIG.
In a and b), reference numeral 160 denotes a pedestal, which includes a rod-shaped piezoelectric member also serving as a sample stage.
Coarse movement for coarsely moving the element 31 and the piezoelectric element 31 in the x and y directions;
A support arm 161 for supporting the device 30 is projected from the front surface. Also this pedestal
A support arm 161 is moved in the z direction with respect to the pedestal 160.
Of the moving device 165 are provided. And, in the front corner of the pedestal 160,
A rotating shaft 162 extending in the direction is rotatably supported at the upper end and the lower end. This
The tunnel scanning unit 120 is provided on the rotating shaft 162 so as to be rotatable therewith.
Have been. The tunnel scanning unit 120 includes a support 1 protruding from a rotating shaft.
63, and the three-dimensional actuator 22 is fixed to the support 163.
. This actuator 22 has three rod-shaped piezoelectric elements extending at right angles to each other.
And composed of tri-pot actuators connected to each other at their proximal ends
I have. A probe 24 projects downward from the base end of these piezoelectric elements. Also
The support 163 is moved from the STM non-measurement position shown in FIG.
When the tunnel scanning unit 120 is rotated to the STM measurement position shown in
Locking means 16 for locking the tunnel scanning unit 120 to the pedestal 160 at the position
4 are provided. The locking means 164 includes a locking screw screwed to the support 163.
When the tip is pressed against the side surface of the pedestal 160, the lock is released.
Will be fulfilled. The coarse movement device 30 includes an x table and a y table for supporting the sample stage 31 thereon.
It has a table and these operating knobs 30a and 30b. FIG. 20 shows a state in which the pedestal 160 is incorporated in a known metallographic microscope.
Show. At this time, as described above, the optical axis of the objective lens a1 of the microscope and the probe 24
The optical observation and the STM observation are performed so that the axes coincide with each other. First, the tunnel scanning unit 120 is moved to a position (
19 (a), and the operating knob 3 while viewing the sample 12 with a metallographic microscope.
By rotating Oa and 30b, the STM observation position in the horizontal plane is determined. Operating knob
Adjusting the height and focusing by rotating the 165
The approximated position is almost the scanning position of the probe 24). The tunnel is placed on the objective lens a1.
At the same position as the probe 24 when the scanning unit 120 is set to the scanning state.
-Car (for example, +) is given and STM scanning range can be confirmed
The operator should be able to scan the sample position while looking through the metallographic microscope.
Sample and the sample in the scanning range can be accurately confirmed. After determining the scanning position, the tunnel scanning unit 120 is mounted on the pedestal 1.
At 60, the STM image measurement operation is performed. FIG. 21 shows the structure of the STM measurement system.
It is a block diagram showing composition. In the figure, reference numeral 85 denotes a controller. This controller 85
Has an input interface 91 and an output interface. Also
The controller 85 has a CPU graphic display and a frame memory.
, A plotter as a storage device, a printer, and the like are connected. In addition,
At the input end of the Roller 85, a measurement area selection button and a mouse as a control box
Input devices such as X, Y, Z position controller 8
6, the coarse movement device 87 for positioning the sample in the xy direction, and the automatic access device 88 are connected.
Has been continued. In the tunnel unit integrated with the optical microscope, the data obtained from the probe 24
The tunnel current thus amplified is amplified by a preamplifier 89 and an amplifier 90, and supplied to a controller 85 via the input interface 91. Also,
The channel current signal is amplified by a preamplifier 89 and an amplifier 90,
The data is input to the controller 85 via the tar 92. Optically coupled to and integrated with the STM tunnel unit
With a microscope (optical microscope with a tunnel unit built into the objective lens)
The obtained observation image is captured by a video camera 93, and the captured signal is
-96. In addition, a controller is provided via an input interface 91.
-85. Next, the operation method and the operation of the entire apparatus of this embodiment centering on the operation of the control system will be described.
And operation will be described. First, turn on the power before using the device.
Perform the following operations sequentially. I. The sample 12 is fixed to a sample stage, and a tunnel bias voltage applying electrode
Attach II. The sample is observed with the optical microscope 94 for positioning the STM image observation site.
At this time, the focus of the optical microscope is adjusted by an automatic focus mechanism. Out of focus
As a method, use the knife-etch method and observe changes in the optical image due to defocus.
An image is taken by the video camera 93 attached to the lens unit, and entered into the controller 85.
The auto focus mechanism control signal from the controller 85.
By inputting to the device, the relative position between the sample and the objective lens can be controlled,
The microscope image can be focused. The relative position between the objective lens and the sample is determined by using an automatic focusing mechanism.
Is adjusted to the focus position, so that S positioned between the objective lens and the sample is adjusted.
The distance between the TM probe and the sample can be reduced to a certain value (about 50 μm).
Wear. After the optical focusing is completed, the STM observation is performed.
Position the part. Marker at the center of the optical microscope image (S
(There is a TM probe), the part of the sample surface to be observed by STM
Rank together. At this time, adjust the sample position by operating the switch on the controller.
Do it. At this time, the X and Y direction positioning signals output from the controller are input to the sample positioning coarse movement device 87, and the sample xy position, θ (in the xy plane),
It is possible to determine the angle in the ψ ((xz plane), γ (yz plane) directions.III. After performing the STM observation positioning as described above, the STM probe
Move the needle close to the distance where the tunnel current is observed using the auto access device 88
You. By optical focusing, the relative position between the STM probe and the sample is fixed to a certain value.
After approaching the position, a bias voltage is applied to the sample, and the
After amplifying the channel current with a preamplifier, amplifier, etc., input it to the controller and
An auto access device control signal from the controller is input to the auto access device.
The distance between the sample and the probe is adjusted so that the tunnel current becomes a predetermined value. Even when the tunnel current becomes very large, this auto access
Using a mechanism, the probe can be separated from the sample, and there is a danger that the probe contacts the sample.
The ruggedness disappears. Optical auto-access and auto using tunnel current as a sensor
The probe is approached by using a two-stage automatic access mechanism of access.
Can be shortened. IV. Next, the sample surface (as the entire sample surface) is the lens of the objective lens.
Adjust the tilt of the sample so that it is parallel to the
Adjust with a goniometer, etc. (so that the probe is perpendicular to the sample surface)
adjust). The adjustment of the inclination of the sample is performed in the following two stages. a. The optical microscope image taken by the video camera is focused over the entire field of view.
Control signals are supplied from the controller to the coarse positioning device 87 for sample positioning.
Then, the inclination of the sample is corrected. B. 3D scanner 95 was scanned over a wide area (about 10 μm)
After amplifying the tunnel current signal at the time, the signal is input to the waveform monitor 92. Waveform monitor
(The same frequency components as the x-axis and y-axis scanning signals) so that the output from the
The controller 85 and the coarse positioning device 87 for positioning the sample.
Input a control signal to correct the tilt of the sample.
By correcting the sample tilt using the two methods of using the sensor, it is possible to correct the sample tilt in a shorter time than in the case where only the tunnel current is used as the sensor.
Wear. V. A three-dimensional scanner 95 scans in the x and y directions, and the tunnel current is
Measure the STM image while controlling the position in the z direction so as to be constant
. In order to obtain a wide range STM image (same size as the optical microscope image),
Of the STM images using the coarse positioning device 87 (the STM image in a narrow range)
Are sequentially measured while changing the scanning position on the sample surface, and this is measured by software.
To join together). Next, an apparatus similar to the apparatus of the embodiment shown in FIG. 6 will be described with reference to FIG.
explain. In this embodiment, members having substantially the same functions as the members shown in FIG.
The same reference numerals are given and detailed description is omitted. In this example, the minute gap between the measurement surface of the sample 12 and the tip of the probe 24
Observation means for observing the septum are provided as described below. In the figure,
Reference numeral 200 denotes a sample supporting mechanism and an objective lens unit 120 which are connected to the unit frame 20.
1 shows a measurement unit configured to be incorporated in the device 1. One side of this unit frame 201
Of the optical fiber (cold fiber) 202 for guiding light to the sample 12
One end side is provided. The other side of the unit frame 201 has an optical fiber-2.
02 to receive the reflected light from the sample 12 by the auxiliary objective lens 203
Is provided. One end of the optical fiber 202 and the auxiliary objective lens 203
Is the observation surface of the sample 12 around the center of the surface of the sample 12 in the unit frame 201.
It is possible to tilt in a vertical plane within an angle range (α) of approximately 20 degrees. Said
The other end 202a of the optical fiber 202 extends near the light source 50 of the optical microscope.
I have. As a result, the light from the light source 50 is applied to the sample 12 via the illumination system of the optical microscope.
While being guided, it is also guided to the sample 12 via the optical fiber 202. The supplement
Auxiliary objective lens 203 has a supplementary optical axis on a rear optical axis via a rotatable reflecting mirror 204.
An auxiliary eyepiece 205 is provided, and reflects reflected light from the auxiliary objective lens 203.
By receiving light through the projection mirror 204, the light is received through the auxiliary eyepiece 205.
The distance between the observation surface of the sample 12 and the tip of the probe 24 can be visually checked. this
As a result, the probe 24 can be brought closer to the sample 12 while performing this measurement.
To prevent the probe 12 from being damaged due to the contact of the probe 12 with the sample 12.
it can. In the figure, reference numeral 206 denotes a vibration isolation table on which the measuring unit 200 is mounted.
Show. The configuration of the measuring unit 200 is shown in FIGS.
). The unit frame 201 includes an upper frame 201a, a lower frame 201b, and a pair of pairs.
Facing side frame 201c. In the center of the upper frame 201a, light from the light source 50 is used.
Pass the light through the knit frame 201 and the light inside the unit frame 201 toward the eyepiece 51.
A circular opening 201d is formed to pass through. Also, on the inner surface of the upper frame 201a,
A disk-shaped objective revolver 211 is rotatably mounted by a rotating shaft 211a.
ing. The objective revolver 211 has two objective lenses a having different magnifications.
One and one objective lens unit 140 are at the same distance from the rotation shaft 211a.
It is arranged. This separation distance is selected by the objective lens a1 and the unit 140.
When the central axis is moved to the opening 201d,
Is set so as to coincide with the central axis of. Lower frame 20 of this unit frame 201
1b, one end of the coarse screw 21 is projected into the unit frame 201.
3 is screwed from the outside. A coarse ball 214 is attached to the protruding end of the coarse screw.
The coarse movement table 215 is provided at both corners by the rotation of the coarse movement screw 213.
It is guided by the two pairs of guide rails 215a and moves in the vertical direction (z direction).
As supported. The upper surface of the coarse movement table 215 is scanned from outside.
X-direction adjustment knob 216a and y-direction adjustment knob 216b (FIG. 24B)
The xy direction table 216 with the XY direction table (see FIG. 2)
(x and y directions). This coarse movement table 215 and xy direction
The directional table 216 is engaged with concave and convex with play in the surface direction.
An xy direction table 216 is provided between the side surfaces in one direction with respect to the coarse movement table 215.
Since one biasing spring 216c is provided, the xy direction table 2
Sixteen moving amounts are defined. Also, the center of the xy direction table 216 in the width direction is used.
A rectangular groove 216d having both ends opened is formed on the upper surface of the central portion.
A medium / fine movement plate 217 is inserted therein. One end of the XY table 216 in the longitudinal direction
A first actuator 218 that can expand and contract in the z direction is fixed to the first actuator. This access
On the upper end of the tutor 218, a shape is formed on the lower surface of one end in the longitudinal direction of the middle / fine moving plate 217.
The first fine movement pin 219 engaged with the formed recess is abutted. In addition, the x
A first fixing pin 220 is interposed between the y-direction table 216 and the other end of the middle / fine moving plate 217.
Are located. Thus, by expanding and contracting the first actuator 218,
The middle and fine moving plate 217 is provided with an xy direction table 216 with the first fixing pin 220 as a fulcrum.
Is rotatable in a vertical plane. On the middle fine plate 217, a high fine plate
221 are provided. The other end in the longitudinal direction of the middle fine plate 217 extends in the z direction.
A retractable second actuator 222 protrudes. This actuator 2
A recess formed on the lower surface of the other end in the longitudinal direction of the high-fine movement plate 221
The second fine movement pin 223 that has been engaged with the contact is in contact. In addition, the middle and fine movement plate 217
Is located between one end of the center and one end of the high-precision moving plate 221.
A second fixing pin 224 supported by the inner wall of the fin is interposed. Thus,
By expanding and contracting the actuator 222 of the second, the fine movement plate 221 is moved to the second fixed position.
With the fixed pin 224 as a fulcrum, it can rotate in the vertical plane with respect to the
I have. An xy-direction actuator 22 is provided on the upper surface near one end of the fine movement plate 221.
xy is supported, and the sample 12 is mounted on the actuator 22xy.
You. The xy direction actuator 22xy moves the sample 12 in the x direction and the y direction.
Performs STM observation with fine movement, in cooperation with z-direction actuator 22z described later.
. In this embodiment, the distance between the sample 12 and the second fine movement pin 223 is equal to the second fixed pin.
It is ten times the distance between the fixed pin 224 and the sample 12. That is, the high fine moving plate 2
The lever ratio of 21 is set to 10: 1. Also, the first fine movement pin 219 and the first
Distance between the sample 12 and the second fine movement pin 223.
It is set to twice the separation. For this reason, the second actuator 222 is raised by 1 μm.
When it is moved to the direction, the surface of the sample 12 has a probe of 1 μm × 1/10 = 0.1 μm.
Approach 24. Further, the first actuator 222 is not operated, and the first actuator is not operated.
When only the tutor 218 is operated 1 μm upward, the surface of the sample 12 becomes 1 μm ×
The probe approaches the probe 24 by 1/20 × 1/10 = 0.0005 μm. That is, the second
Medium and minute movements by the actuator 222, and small and minute movements by the first actuator 218
Motion can be applied to the sample 12. Of the pair of side frames 201c of the unit frame 201
Spring receivers 230 and 231 are fixed between both ends. One spring receiver 2
Between the upper surface of the moving plate 30 and the upper surface of one end of the middle fine moving plate 217, a compression
232 is interposed. Similarly, the other spring receiver 231 and the high
A compression spring 233 for constantly urging the other end downward is interposed between the upper surfaces of the other ends.
You. In the measuring unit 200 having the above configuration, the components are firmly assembled by the unit frame 201.
As a result, it is excellent in earthquake resistance. In addition, the unit frame 201 and the like
The member is compactly formed by an amber with a small coefficient of thermal expansion, etc.
It is set to reduce the effect. Next, the objective lens unit 140 will be described with reference to FIG.
In the drawing, reference numeral 300 denotes an opening at the upper and lower ends, and a knurling portion 300a for attachment / detachment on the outer periphery.
6 shows a formed cylindrical upper housing. Lower outer periphery of this upper housing 300
Has a knurled portion 301a on its outer periphery.
Formed on the upper inner peripheral surface of a cylindrical lower housing 301 having an upper end opened.
Female screw is screwed. Thus, the upper housing 300 and the lower housing 3
01 is detachably attached by screw connection. Also, the upper housing 3
00 is formed with an internal thread on its inner peripheral surface.
At a predetermined interval, the upper support cylinder 302 and the lower support cylinder 303
It is screwed together by a male screw formed on the outer periphery. And, the upper housing 30
The female screw formed at the upper end cylindrical protrusion of the “0” has a set screw 304 formed on the outer periphery thereof.
It is screwed together by the formed male screw. This retaining screw 304 has upper and lower ends opened,
In addition, it has an inner flange portion and an outer flange portion at the upper end, has a cylindrical shape, and has an inner peripheral surface
Has an internal thread. The female screw of the retaining screw 304 has upper and lower ends opened.
A male screw formed on the outer periphery of the upper part of the cylindrical light guide member 305 is screwed. Stay
A first groove is provided between the inner flange portion of the female screw 304 and the upper end of the light guide member 305.
The lens 306 is fastened and fixed. Lower surface and lower support of the upper support cylinder 302
Between the step formed on the inner peripheral surface of the cylindrical body 303, a second hole having a through hole at the center is provided.
Lens 307 is fastened and fixed. In the lower part of the lower support cylinder 303,
The upper part of the lens mounting tube 308 is inserted and fixed by a fastening ring 309. A third lens 310 is provided at the lower end of the lens-equipped display tube 308 having a small diameter.
Has been attached. Incidentally, a concave mirror 54 is provided on the lower surface of the second lens, and a third lens is provided.
A convex mirror 53 is formed at the center of the upper surface of the lens. The lower housing
An opening is formed in the center of the lower end of 301, and a transparent member such as a stone is formed in the opening.
A support plate 311 made of English glass is attached. In this support plate 311
A z-direction actuator 22z is mounted in the center so as to project downward.
A probe 24 projects downward from the tip of the actuator 22z.
ing. The first to third lenses 306, 307, 310 and the concave mirror 5
4, the convex mirror 53, the probe 24, and the z-direction actuator 22z are coaxial.
Are located. Measurement unit 2 incorporating unit 140 having such a configuration
00 is attached to the optical microscope shown in FIG.
Observation of an image is substantially the same as in the other embodiments, and thus will not be described here. The search for the optical fiber 202 and the auxiliary objective lens 203
The stylus-sample spacing observation device will be described with reference to FIG. In the figure, reference numeral 401 denotes a uni.
A guide plate fixed along a vertical plane is attached to a cut frame 201 (see FIG. 23A).
Show. The guide plate 401 extends in an arc shape symmetrically to the left and right along the peripheral surface thereof.
First and second guide grooves 401a and 401b are formed. This guide plate 40
One end of the first and second rotating arms 402a and 402b is located in front of
I have. The other end of the first arm 402a is parallel to the arm 402a.
Thus, one end of the optical fiber 202 cooperates with the rotation of the arm 402a.
It is fixed so as to rotate. This arm is connected to the other end of the second arm section 402b.
The auxiliary objective lens 203 is set so as to be parallel to the arm section 402b.
It is mounted so as to rotate with the rotation of the part 402b. This auxiliary objective lens 2
Reference numeral 03 denotes an arm 402b which can be moved linearly along the optical axis by a pinion.
And a rack-pinion connection. First and second arm portions 402a
, 402b are fixed to one end of gears 403a, 403b, respectively.
Have been. The second gear 403b is meshed with the third gear 403c.
. Each of the first to third gears 403a, 403b, 403c is a unit
The frame 201 is rotatably supported by a frame 201 (see FIG. 23A). As a result, the first row
The second arm portions 402a and 402b are moved by the rotation of the gears 403a and 403b.
Are rotated about a central axis of these gears in a vertical plane. The third gear 40
3C, the first pulley 404a is rotated so as to rotate together with the gear 403c.
It is fixed axially. On the other hand, the counter provided on the light exit side of the auxiliary objective lens 203
A second pulley 404b is coaxially rotated with the reflecting mirror 204 to the mirror 204.
It is provided to be rollable. Then, the first pool 40a and the second pool 404b
And an endless belt 405 is stretched between them. In addition, the first and the second
The second arm portions 402a, 402b have their tips in the guide grooves 401a, 401b.
And engagement pins 406a and 406b guided along this guide groove are provided in a protruding manner.
Have been. In the distance measuring apparatus having the above-described configuration, the auxiliary objective lens 20
3, the gears 403a, 403b and the arm portions 402a,
The optical fiber 202 also rotates by the same amount of rotation via the optical fiber 402b.
The reflected light of the light incident on the sample from the fiber 202 is always efficiently used as the auxiliary objective lens.
203. In addition, the gear 403 is moved according to the rotation of the auxiliary objective lens 203.
b, 403c, pulleys 404a, 404b and endless belt 405
As a result, the reflecting mirror 204 also rotates, and as a result,
In this case, the light emitted from the auxiliary objective lens 203 is supplemented by the reflecting mirror 204.
It is guided to the auxiliary eyepiece 205 (FIG. 22). Therefore, the auxiliary objective lens 203 is rotated.
To move the probe to the sample at a position that is easy to measure.
it can. FIG. 27 and FIG. 28 show the measuring unit 200 shown in FIG.
26 shows a modification of the interval measuring device shown in FIG. 26, in which the unit 140 is a microscope
(Not shown) and is supported by a support arm 501 fixed to the
The fact that the actuator 140 and the probe 24 are not attached to the
Different from the embodiment. In the figure, reference numeral 502 denotes a fixing member, which includes a pivot shaft 5.
03 and the position where the rotating plate 504 comes to the lower side of the unit 140,
At one end, it is rotatably supported in a horizontal plane between the offset positions. This rotation
A through hole is formed in the center of the plate 504, and a probe plate 23 made of a transparent plate, for example, cover glass is provided on the upper surface of the through hole so as to cover the through hole.
Have been killed. The probe holder 23 is placed downward, that is, the sample 12 direction.
The probe 24 is fixed through the z-direction actuator 22z so as to project in the
Is defined. The sample is placed below the probe 24 in an xy direction actuator.
22xy. In this figure, reference numeral 505 denotes the rotating plate 50.
4 shows a click mechanism for holding the 4 in the illustrated STM observation position. Also, this example
Then, the optical fiber 202 and the auxiliary objective lens 203 are rotated synchronously.
The first and second gears 403a and 403b and the reflecting mirror 204 are rotated.
Gears 403c are rotatably supported by the support arms 501, respectively.
I have. In the present invention, the optical microscope for observing the STM scanning area is a real one.
An optical microscope other than the metal microscope described in the embodiment may be used.
Microscope, Nomarski differential interference microscope, fluorescence microscope, infrared microscope, stereo microscope,
A surface shape measuring device, a microphotometry system, and the like can be used. According to the scanning probe microscope of the present invention, a sample observation optical system and
The probe and the probe are arranged at positions facing the sample, and within the optical field of view of the sample observation optical system.
Moving means for positioning the probe and the sample measurement position by the probe;
With this, the sample observation optical system and the sample
An optical observation image at a fixed position can be obtained, and it can be searched within the optical field of view of the sample observation optical system.
The sample measurement position can be easily specified using the stylus, and multiple different
Observation images in different states can be compared.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a plan view showing an entire scanning tunneling microscope according to an embodiment of the present invention. FIG. 2 is a side view of the scanning tunnel microscope. FIG. 3 is a perspective view showing a probe of the scanning tunnel microscope and its holder. FIG. 4 is a perspective view of a three-dimensional actuator of the scanning tunneling microscope. FIG. 5 is a plan view of the three-dimensional actuator. FIG. 6 is a view schematically showing a scanning tunneling microscope according to a second embodiment. FIG. 7 is a side view showing a three-dimensional actuator used in the second embodiment. FIG. 8 is a diagram schematically showing a modification in which a surface shape measuring function is added to the device of the second embodiment. FIG. 9 is a diagram for explaining the principle of surface shape measurement. FIG. 10 is a side view showing a modification in which a monitoring device is added to the device of the first embodiment. FIG. 11 is a view showing a modification of the embodiment shown in FIG. 6; FIG. 12 is a sectional view of an objective lens unit showing a third embodiment. FIG. 13 is a sectional view of a tunnel scanning unit according to a fourth embodiment. FIG. 14 is a sectional view showing a fifth embodiment. FIG. 15 is a sectional view of an objective lens unit showing a sixth embodiment. 16A and 16B are views for explaining a three-dimensional actuator used in the embodiment, where FIG. 16A is a plan view of the actuator, FIG. 16B is a side view of the actuator, and FIG.
() Is a sectional view of the actuator, and (d) is a diagram showing the relationship between the applied voltage for driving the three-dimensional actuator and the driving direction of the actuator. FIG. 17 is a sectional view showing a scanning tunneling microscope according to a seventh embodiment. FIG. 18 is a view showing a scanning tunnel microscope according to an eighth embodiment. FIGS. 19A and 19B are views showing a scanning tunneling microscope according to a ninth embodiment, in which FIG. 19A shows a state in which the tunnel scanning unit is not at the STM scanning position, and FIG. Is shown. FIG. 20 is a diagram showing a state in which a tunnel scanning unit and an optical microscope are combined. FIG. 21 is a block diagram illustrating a configuration of an STM measurement system. FIG. 22 is a diagram showing an optical system of a scanning tunneling microscope according to a tenth embodiment. FIGS. 23A and 23B show the measuring unit shown in the tenth embodiment, wherein FIG. 23A is a cross-sectional view and FIG. 24A is a diagram showing a positional relationship between an objective revolver, an objective lens, and an objective lens unit in the measurement unit shown in the tenth embodiment, and FIG. FIG. FIG. 25 is a partially cutaway side view showing the objective lens unit used in the measurement unit. FIG. 26 is a partially cutaway side view showing an interval measuring device used in the tenth embodiment. 27A and 27B show a modification of the measurement unit, FIG. 27A is a partially cutaway top view, and FIG.
() Is a sectional view. 28 is a side view showing a part of the interval measuring device of the measuring unit shown in FIG. 27. [Explanation of Signs] a1 ... microscope objective lens, 12 ... sample, 22 ... three-dimensional actuator, 23 ...
Probe holder, 24 Probe, 110, 130 Support member, 120 Tunnel scanning unit, 140 Objective lens unit, 200 Measurement unit, 211
Objective revolver.

Claims (1)

Claims: 1. A sample holding means for holding a sample, a sample observation optical system disposed at a position facing the sample so as to optically observe the sample, and a sample observation optical system facing the sample. Probe, supporting means for supporting the probe, the sample observation optical system and the probe are arranged at positions facing the sample, and the optical system of the sample observation optical system Moving means for positioning the probe and the sample measurement position by the probe within the field of view, and the sample and the probe to measure the sample measurement position by the probe. A scanning probe microscope, comprising: actuator means for relatively driving the scanning probe microscope. 2. The moving means so that the center axis of the probe is substantially coincident with the optical axis when the sample observation optical system is facing the sample at a position facing the sample. 2. The scanning probe microscope according to claim 1, wherein the scanning probe microscope is detachably supported on the scanning probe microscope.