JP2557250B2 - Fluid pumping device - Google Patents
Fluid pumping deviceInfo
- Publication number
- JP2557250B2 JP2557250B2 JP63068882A JP6888288A JP2557250B2 JP 2557250 B2 JP2557250 B2 JP 2557250B2 JP 63068882 A JP63068882 A JP 63068882A JP 6888288 A JP6888288 A JP 6888288A JP 2557250 B2 JP2557250 B2 JP 2557250B2
- Authority
- JP
- Japan
- Prior art keywords
- valve
- chamber
- plunger
- fluid
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Description
【発明の詳細な説明】 a. 産業上の利用分野 本発明は、超高圧で流体を圧送し得る流体圧送装置に
関する。TECHNICAL FIELD The present invention relates to a fluid pumping device capable of pumping a fluid at an ultrahigh pressure.
b. 従来の技術 ピストンの往復運動により弁を開閉し、水等の流体を
圧送するポンプとして往復ポンプがあり、ピストンの形
によってバケット形，プランジャ形，ピストン形の３種
がある。b. Conventional technology There is a reciprocating pump as a pump that opens and closes the valve by the reciprocating motion of the piston to pump fluid such as water, and there are three types of pistons, bucket type, plunger type and piston type.
これらの往復ポンプはそれぞれ用途によって使い分け
られているが、いずれも摺動部分が損傷し易い。These reciprocating pumps are properly used depending on the application, but the sliding parts are easily damaged.
そこで、往復ポンプの摺動部分が流体に直接接触しな
いようにピストンの前面にダイヤフラムを設け、ダイヤ
フラムの内側に液体を充満させてピストンの圧力を伝達
するようにした先行技術（特開昭48−35405号公報）が
知られている。Therefore, in order to prevent the sliding portion of the reciprocating pump from directly contacting the fluid, a diaphragm is provided on the front surface of the piston, and the inside of the diaphragm is filled with the liquid to transmit the pressure of the piston (Japanese Patent Laid-Open No. 48- No. 35405) is known.
c. 発明が解決しようとする課題 しかし、かかる先行技術は水噴流によってパイプの洗
浄等を行なうもので、ダイヤフラムの表面が流体に直接
曝されるためセメントミル等の粒子を含んだ流体の圧送
に用いると、流体の粒子が直接ダイヤフラムに当たり、
直ぐにダイヤフラムが損傷してしまう。c. Problem to be Solved by the Invention However, such a prior art is for cleaning a pipe with a water jet, and since the surface of the diaphragm is directly exposed to the fluid, it is necessary to pump fluid such as cement mill containing particles. When used, the particles of the fluid directly hit the diaphragm,
The diaphragm will be damaged immediately.
一方、セメントミル等の圧送に用いられていたプラン
ジャポンプは、セメント粒子によってパッキン部分の損
傷が激しく、圧力200kgf/cm2が限度であった。On the other hand, in the plunger pump used for pressure feeding of cement mills, the packing particles were severely damaged by cement particles, and the pressure was limited to 200 kgf / cm 2 .
d. 課題を解決するための手段 本発明は、上記課題を解決するため、シリンダに設け
られたピストンの往復運動により流体を弁室に導入し、
かつ弁室からの圧送を行なう流体圧送装置において、上
記シリンダと弁室との間に両室間を仕切る圧力応動体を
設け、この圧力応動体で仕切られたシリンダ側に、上記
ピストンの作動を伝える作用媒体を収容し、かつ圧力応
動体と弁室との間の通路に設定の粒子径以下の流体のみ
を通過させる選別器を設けたことにある。また、弁室を
設けたバルブボックスと、プランジャを設けたプランジ
ャボックスとを備え、上記プランジャの往復運動により
セメントミル等の粒子を含んだ流体を弁室に導入し、該
流体を高圧で弁室から圧送する流体圧送装置であって、
上記バルブボックスの弁室に通じる入口通路に入口側バ
ルブを設け、かつ出口通路に出口側バルブを設けるとと
もに、少なくとも該入口側バルブのバルブシートに複数
の細長小孔を形成し、上記プランジャボックスのシリン
ダと弁室との間に圧力作用室を設け、この圧力作用室に
シリンダと弁室との間を仕切る袋状の弾性膜を設け、こ
の弾性膜の曲面形状に沿って上記圧力作用室内壁面を形
成し、上記弾性膜で仕切られたシリンダ側に、上記プラ
ンジャの往復運動を伝える作用媒体を収容し、かつ弾性
膜と弁室との間の通路に、設定の粒子径以下の流体のみ
を通過させる選別器を設け、この選別器の上記圧力作用
室側の面を圧力作用室の内壁面に沿った曲面に形成した
構成である。d. Means for Solving the Problems In order to solve the above problems, the present invention introduces fluid into a valve chamber by reciprocating motion of a piston provided in a cylinder,
In addition, in the fluid pressure feeding device that feeds pressure from the valve chamber, a pressure responsive body is provided between the cylinder and the valve chamber to partition the two chambers, and the piston is operated on the cylinder side partitioned by the pressure responsive body. This is because a separator for accommodating the working medium to be transmitted and for allowing only a fluid having a particle size smaller than a set value to pass through is provided in the passage between the pressure responder and the valve chamber. Further, a valve box provided with a valve chamber and a plunger box provided with a plunger are provided, and a fluid containing particles such as cement mill is introduced into the valve chamber by the reciprocating motion of the plunger, and the fluid is supplied under high pressure to the valve chamber. A fluid pumping device for pumping from
An inlet-side valve is provided in the inlet passage leading to the valve chamber of the valve box, and an outlet-side valve is provided in the outlet passage, and a plurality of elongated small holes are formed in at least the valve seat of the inlet-side valve. A pressure action chamber is provided between the cylinder and the valve chamber, and a bag-shaped elastic film that partitions the cylinder and the valve chamber is provided in the pressure action chamber, and the wall surface of the pressure action chamber is formed along the curved shape of the elastic film. And a working medium for transmitting the reciprocating motion of the plunger is housed on the side of the cylinder partitioned by the elastic film, and only a fluid having a particle size equal to or less than a set particle size is stored in the passage between the elastic film and the valve chamber. A configuration is provided in which a separator that allows passage is provided, and the surface of the separator on the pressure action chamber side is formed into a curved surface along the inner wall surface of the pressure action chamber.
さらに、弁室を設けたバルブボックスと、プランジャ
を設けたプランジャボックスとを備え、上記プランジャ
の往復運動によりセメントミル等の粒子を含んだ流体を
弁室に導入し、該流体を高圧で弁室から圧送する流体圧
送装置において、 上記バルブボックスの弁室に通じる入口通路に入口側
バルブを設け、かつ出口通路に出口側バルブを設けると
ともに、少なくとも該入口側バルブのバルブシートに複
数の細長小孔を形成し、上記プランジャボックスのシリ
ンダと弁室との間に圧力作用室を設け、この圧力作用室
にプランジャによって直接押圧される弾性膜を設けると
共に上記弁室と圧力作用室を連通する通路に設定の粒子
径以下の流体のみを通過させる選別器を設けた構成とす
ることもできる。Further, a valve box provided with a valve chamber and a plunger box provided with a plunger are provided, and a fluid containing particles such as cement mill is introduced into the valve chamber by the reciprocating motion of the plunger, and the fluid is pressurized at a high pressure in the valve chamber. In the fluid pressure-feeding device for pressure-feeding from the valve box, an inlet-side valve is provided in the inlet passage leading to the valve chamber of the valve box, an outlet-side valve is provided in the outlet passage, and at least a plurality of elongated small holes are provided in the valve seat of the inlet-side valve. A pressure action chamber is provided between the cylinder of the plunger box and the valve chamber, and an elastic film directly pressed by the plunger is provided in the pressure action chamber, and a passage communicating between the valve chamber and the pressure action chamber is formed. It is also possible to employ a configuration in which a separator that allows only a fluid having a particle size equal to or smaller than a set particle diameter to pass therethrough is provided.
e. 作用 ピストンの吸引作用により圧力応動体が収縮し、その
容積変化分の流体が弁室内に導入される。流体のうち、
設定の粒子径以上のものは選別器で除去されて圧力応動
体には接触しない。次に、ピストンの押出作用によっ
て、圧力応動体は拡張し、弁室内の流体を圧送する。e. Action The pressure responder contracts due to the suction action of the piston, and the volume change fluid is introduced into the valve chamber. Out of the fluid
Particles having a particle size larger than the set particle size are removed by the separator and do not come into contact with the pressure responder. Next, due to the pushing action of the piston, the pressure responder expands and pumps the fluid in the valve chamber.
f. 実施例 以下本発明の一実施例を図面を参照しながら詳細に説
明する。f. Embodiment One embodiment of the present invention will be described in detail below with reference to the drawings.
第１図は、セメントミル等の粒子を含む流体の圧送に
用いるプランジャポンプに適用した実施例を示す概念断
面図である。FIG. 1 is a conceptual sectional view showing an embodiment applied to a plunger pump used for pressure-feeding a fluid containing particles such as a cement mill.
第１図において、流体圧送装置は弁室１を設けたバル
ブボックス２と、プランジャ３を設けたプランジャボッ
クス４と、バルブボックス２とプランジャボックス４と
の間に配設された後述する圧力作用室5aを形成したボッ
クス５とで構成されている。In FIG. 1, a fluid pumping device includes a valve box 2 provided with a valve chamber 1, a plunger box 4 provided with a plunger 3, and a pressure action chamber, which will be described later, disposed between the valve box 2 and the plunger box 4. And a box 5 forming 5a.
バルブボックス２は弁室１に通じる入口通路６と出口
通路７にそれぞれ入口側バルブ８および出口側バルブ９
が設けられている。入口側バルブ８および出口側バルブ
９は弁座部を略半球状の凹面形状に形成し、かつ該凹面
から軸方向に複数の小孔10を形成したバルブシート11
と、上記凹面形状に対応する球面を有するバルブ本体12
と、このバルブ本体12をバルブシート11に押圧するバル
ブスプリング13とで構成されている。上記バルブシート
11の小孔10は、流体14中における一定の粒子径以上の粒
子が弁室１内に流入するのを制限している。The valve box 2 has an inlet-side valve 8 and an outlet-side valve 9 in an inlet passage 6 and an outlet passage 7 communicating with the valve chamber 1, respectively.
Is provided. The valve seat 11 in which the valve seats of the inlet side valve 8 and the outlet side valve 9 are formed in a substantially hemispherical concave shape and a plurality of small holes 10 are formed in the axial direction from the concave surface.
And a valve body 12 having a spherical surface corresponding to the concave shape
And a valve spring 13 for pressing the valve body 12 against the valve seat 11. Above valve seat
The small holes 10 restrict the flow of particles having a certain diameter or more in the fluid 14 into the valve chamber 1.
入口側バルブ８のバルブ本体12は弁室１の内方に向け
て開放するもので、弁室１内壁面に一端を係止されたバ
ルブスプリング13によってバルブ押さえ15を介してバル
ブシート11側に付勢されている。一方、出口側バルブ９
のバルブ本体12は弁室１の外方に向けて開放するもの
で、バルブボックス２のバルブカバー16との間に設けら
れたバルブスプリング13によってバルブシート11側に付
勢されている。The valve body 12 of the inlet side valve 8 is opened toward the inside of the valve chamber 1, and is moved toward the valve seat 11 through a valve retainer 15 by a valve spring 13 having one end locked to the inner wall surface of the valve chamber 1. Being energized. On the other hand, the outlet valve 9
The valve body 12 is opened toward the outside of the valve chamber 1, and is urged toward the valve seat 11 by the valve spring 13 provided between the valve body 12 and the valve cover 16.
上記バルブボックス２の側壁2aには上記圧力作用室5a
と弁室１内を連通する通路17が穿設されており、該通路
17はバルブボックス２の側壁2aに形成した凹部18の下部
側に開口している。The pressure action chamber 5a is provided on the side wall 2a of the valve box 2.
And a passage 17 communicating with the inside of the valve chamber 1 is provided.
Reference numeral 17 is open to the lower side of a recess 18 formed in the side wall 2a of the valve box 2.
上記圧力作用室5aを形成したボックス５には上記凹部
18と圧力作用室5aとの間に第２図のような選別器19を設
けている。The box 5 in which the pressure action chamber 5a is formed has the concave portion
A separator 19 as shown in FIG. 2 is provided between 18 and the pressure action chamber 5a.
この選別器19は、網目状のシートを用いたもので、一
定の粒子径以上の粒子が圧力作用室5aに流入するのを阻
止するように径の一定な細長の通路20が形成してある。
該通路20は、ボックス５側面に一体成形してもよく、か
つその通路20を通路17側に向けて所定角度傾斜してあ
る。また、選別器19は、圧力作用室5a側の面を、圧力作
用室5aの内壁面に沿った曲面形状に形成されている。This sorter 19 uses a mesh sheet, and has an elongated passage 20 having a constant diameter so as to prevent particles having a certain particle diameter or more from flowing into the pressure action chamber 5a. .
The passage 20 may be integrally formed on the side surface of the box 5 and is inclined at a predetermined angle toward the passage 17 side. Further, in the separator 19, the surface on the pressure acting chamber 5a side is formed into a curved shape along the inner wall surface of the pressure acting chamber 5a.
一方、上記プランジャボックス４はシリンダ21内にＶ
パッキング22を介してプランジャ３を内蔵したもので、
駆動機構（図示せず）を介して先端部を圧力作用室5aに
突出させたプランジャ３を高速で往復動させるものであ
る。On the other hand, the plunger box 4 has a V inside the cylinder 21.
With the plunger 3 built-in via the packing 22,
The plunger 3 having the tip portion projected into the pressure action chamber 5a is reciprocated at high speed via a drive mechanism (not shown).
上記圧力作用室5aは内部にシリンダ21側Ａと弁室１側
Ｂを仕切る弾性膜23を張設したものであり、弾性膜23の
シリンダ側Ａにはプランジャボックス４の油通路24を介
して油等の作用媒体25が充填されている。The pressure action chamber 5a is provided with an elastic film 23 that partitions the cylinder 21 side A and the valve chamber 1 side B inside, and the cylinder side A of the elastic film 23 is provided with an oil passage 24 of the plunger box 4 therebetween. A working medium 25 such as oil is filled.
上記構成によれば、プランジャ３の吸引操作によって
弾性膜23が収縮すると、圧力作用室5aのシリンダ側Ａの
容積が収縮し、これに応じた量の流体14が弁室１内に流
入する。このとき、流体14中の一定以上の粒子径のもの
はバルブシート11によって除去され弁室１内への流入が
阻止される。また、弁室１内に流入した流体14は一定以
上の粒子径のものは選別器19を通過できないので圧力作
用室5aの弁室側Ｂに粒子が入り込むことはない。According to the above configuration, when the elastic film 23 contracts by the suction operation of the plunger 3, the volume of the pressure action chamber 5a on the cylinder side A contracts, and the fluid 14 in an amount corresponding to this contracts into the valve chamber 1. At this time, particles having a certain particle size or more in the fluid 14 are removed by the valve seat 11 and are prevented from flowing into the valve chamber 1. Further, the fluid 14 that has flowed into the valve chamber 1 cannot pass through the selector 19 if it has a particle diameter of a certain size or more, so that particles do not enter the valve chamber side B of the pressure action chamber 5a.
次に、プランジャ３の押出操作によって弾性膜23が拡
張し、弁室１内に導入された流体14を弁室１外に圧送す
る。Next, the elastic film 23 is expanded by the pushing operation of the plunger 3, and the fluid 14 introduced into the valve chamber 1 is pumped out of the valve chamber 1.
g. 他の実施例 なお、第３図は第１図と同一部分は同符号を付して示
す本発明の他の実施例で、この場合、弾性膜26をプラン
ジャ３に直接被せたもので、プランジャ３の往復動作に
よって直接弾性膜26を拡張するものである。この場合選
別器27に設ける通路20は通路17と対向しない上方にのみ
設けることで流体14中の粒子の流入が完全に阻止され
る。また、粒子を多く含むセメントミル等の圧送に用い
る場合、始動に際して予め、圧力作用室5aの弁室側Ｂに
水等の粒子を含まない流体を吸い込んでおくことによ
り、流体14中の大きな粒子が弁室側Ｂに流入することが
完全に阻止できる。g. Other Embodiments Incidentally, FIG. 3 shows another embodiment of the present invention in which the same parts as those in FIG. 1 are denoted by the same reference numerals. In this case, the elastic film 26 is directly covered on the plunger 3. The elastic membrane 26 is directly expanded by the reciprocating motion of the plunger 3. In this case, the passage 20 provided in the separator 27 is provided only above and not facing the passage 17, so that the inflow of particles in the fluid 14 is completely blocked. In addition, when used for pressure-feeding a cement mill or the like containing a large amount of particles, a large particle in the fluid 14 can be obtained by sucking a fluid containing no particles such as water into the valve chamber side B of the pressure action chamber 5a in advance at the time of starting. Can be completely prevented from flowing into the valve chamber side B.
h. 発明の効果 以上述べたように本発明の流体圧送装置によれば次の
ような効果を奏する。h. Effects of the Invention As described above, the fluid pressure feeding device of the present invention has the following effects.
請求項（１）において、選別器によって一定の粒子径
以上のものは通過を阻止されるので、大きな粒子が圧力
応動体に直接、接触することがない。よって、圧力応動
体が流体によって損傷することがないので耐久性の向上
を図ることができる。また、請求項（１）を前記構成と
したことにより、流体を200kgf/cm2以上の高圧で弁室か
ら圧送することができる。特に、土木作業における地盤
改良用のセメントミル等の圧送には、圧力を500kgf/cm2
に上げることができるので、広範囲の地盤改良を一度に
効率良く行うことができる。In claim (1), the separator prevents passage of particles having a certain particle size or more, so that large particles do not come into direct contact with the pressure responder. Therefore, the pressure responsive body is not damaged by the fluid, so that the durability can be improved. Further, by making the configuration of claim (1), the fluid can be pumped from the valve chamber at a high pressure of 200 kgf / cm 2 or more. In particular, pressure is 500 kgf / cm 2 when pumping cement mills for ground improvement in civil engineering work.
Therefore, a wide range of ground improvement can be efficiently performed at one time.
また、入口側バルブのバルブシートに複数の細長小孔
を形成し、かつ弾性膜と弁室との間の通路に、設定の粒
子径以下の流体のみを通過させる選別器を設けたので、
設定の粒子径以上の石などはバルブシートにより排除さ
れ、かつ、バルブシートを通過した石なども選別器によ
って除去されることから、弾性膜が石などに接触して破
損することがない。この弾性膜の曲面形状に沿って圧力
作用室内壁面を形成したので、圧力作用室内壁面に弾性
膜が接触して破損することがない。Further, since a plurality of elongated small holes are formed in the valve seat of the inlet side valve, and a passage between the elastic membrane and the valve chamber is provided with a separator that allows passage of only a fluid having a particle size equal to or smaller than a set particle diameter,
Stones having a particle size larger than the set particle size are removed by the valve seat, and stones that have passed through the valve seat are also removed by the sorter, so that the elastic film does not come into contact with stones and are damaged. Since the wall surface of the pressure action chamber is formed along the curved surface shape of the elastic film, the elastic film does not come into contact with and damage the wall face of the pressure action chamber.
請求項（２）において、弾性膜を介して流体を圧送で
きるので、ピストンの往復運動を確実に伝達できる。In claim (2), since the fluid can be pumped through the elastic film, the reciprocating motion of the piston can be reliably transmitted.
請求項（３）において、プランジャに直接弾性膜を被
せることで、請求項（１）と同様の効果を奏する。In claim (3), by covering the plunger directly with the elastic film, the same effect as that of claim (1) can be obtained.
第１図は、本発明の流体圧送装置の一実施例を示す概念
断面図、第２図は第１図の一部拡大断面図、第３図は他
の実施例を示す概念断面図である。 １……弁室、２……バルブボックス、 ３……プランジャ、４……プランジャボックス、 5a……圧力作用室、８……入口側バルブ、 ９……出口側バルブ、11……バルブシート、 14……流体、17……通路、 19……選別器、23……弾性膜、 25……作用媒体。FIG. 1 is a conceptual sectional view showing an embodiment of a fluid pressure feeding device of the present invention, FIG. 2 is a partially enlarged sectional view of FIG. 1, and FIG. 3 is a conceptual sectional view showing another embodiment. . 1 ... valve chamber, 2 ... valve box, 3 ... plunger, 4 ... plunger box, 5a ... pressure action chamber, 8 ... inlet side valve, 9 ... outlet side valve, 11 ... valve seat, 14 ... Fluid, 17 ... Passage, 19 ... Sorter, 23 ... Elastic membrane, 25 ... Working medium.
───────────────────────────────────────────────────── フロントページの続き (73)特許権者 999999999 藤森 修一 神奈川県藤沢市鵠沼松が岡２丁目19番５ 号 (72)発明者 小岩 儀信 千葉県千葉市三角町703番地 栄興産業 株式会社内 (56)参考文献 実開 昭52−18401（ＪＰ，Ｕ) 実公 昭15−12247（ＪＰ，Ｙ２) ─────────────────────────────────────────────────── ─── Continuation of front page (73) Patent holder 999999999 Shuichi Fujimori 2-19-5, Kugenumamatsugaoka, Fujisawa-shi, Kanagawa (72) Inventor Yoshinobu Koiwa 703, Triangle-cho, Chiba-shi Eiko Sangyo Co., Ltd. (56 ) References Actual Development Sho 52-18401 (JP, U) Actual Public Sho 12-12247 (JP, Y2)
Claims (2)
ャを設けたプランジャボックスとを備え、上記プランジ
ャの往復運動によりセメントミル等の粒子を含んだ流体
を弁室に導入し、該流体を高圧で弁室から圧送する流体
圧送装置において、 上記バルブボックスの弁室に通じる入口通路に入口側バ
ルブを設け、かつ出口通路に出口側バルブを設けるとと
もに、少なくとも該入口側バルブのバルブシートに複数
の細長小孔を形成し、上記プランジャボックスのシリン
ダと弁室との間に圧力作用室を設け、この圧力作用室に
シリンダと弁室との間を仕切る袋状の弾性膜を設け、こ
の弾性膜の曲面形状に沿って上記圧力作用室内壁面を形
成し、上記弾性膜で仕切られたシリンダ側に、上記プラ
ンジャの往復運動を伝える作用媒体を収容し、かつ弾性
膜と弁室との間の通路に、設定の粒子径以下の流体のみ
を通過させる選別器を設け、この選別器の上記圧力作用
室側の面を圧力作用室の内壁面に沿った曲面に形成した
ことを特徴とする流体圧送装置。1. A valve box provided with a valve chamber and a plunger box provided with a plunger, wherein a fluid containing particles such as cement mill is introduced into the valve chamber by the reciprocating motion of the plunger, and the fluid is pressurized to a high pressure. In the fluid pressure-feeding device for pressure-feeding from the valve chamber, an inlet-side valve is provided in the inlet passage leading to the valve chamber of the valve box, an outlet-side valve is provided in the outlet passage, and at least a plurality of valve seats of the inlet-side valve are provided. An elongated small hole is formed, a pressure action chamber is provided between the cylinder of the plunger box and the valve chamber, and a bag-shaped elastic film that divides the pressure action chamber between the cylinder and the valve chamber is provided. Forming a wall surface of the pressure action chamber along the curved surface of the cylinder, and accommodating a working medium for transmitting the reciprocating motion of the plunger on the cylinder side partitioned by the elastic film, and The passage between the permeable membrane and the valve chamber is provided with a separator that allows passage of only a fluid having a particle size equal to or smaller than the set particle diameter, and the surface of the separator on the pressure action chamber side is a curved surface along the inner wall surface of the pressure action chamber. A fluid pressure-feeding device, characterized in that
ャを設けたプランジャボックスとを備え、上記プランジ
ャの往復運動によりセメントミル等の粒子を含んだ流体
を弁室に導入し、該流体を高圧で弁室から圧送する流体
圧送装置において、 上記バルブボックスの弁室に通じる入口通路に入口側バ
ルブを設け、かつ出口通路に出口側バルブを設けるとと
もに、少なくとも該入口側バルブのバルブシートに複数
の細長小孔を形成し、上記プランジャボックスのシリン
ダと弁室との間に圧力作用室を設け、この圧力作用室に
プランジャによって直接押圧される弾性膜を設けると共
に上記弁室と圧力作用室を連通する通路に設定の粒子径
以下の流体のみを通過させる選別器を設けたことを特徴
とする流体圧送装置。2. A valve box provided with a valve chamber and a plunger box provided with a plunger, wherein a fluid containing particles such as cement mill is introduced into the valve chamber by the reciprocating motion of the plunger, and the fluid is pressurized to a high pressure. In the fluid pressure-feeding device for pressure-feeding from the valve chamber, an inlet-side valve is provided in the inlet passage leading to the valve chamber of the valve box, an outlet-side valve is provided in the outlet passage, and at least a plurality of valve seats of the inlet-side valve are provided. An elongated small hole is formed, a pressure action chamber is provided between the cylinder of the plunger box and the valve chamber, and an elastic film directly pressed by the plunger is provided in the pressure action chamber, and the valve chamber and the pressure action chamber are communicated with each other. A fluid pressure feeding device, characterized in that a separator for allowing only a fluid having a particle diameter equal to or less than a set particle diameter to pass through is provided in the passage.
Priority Applications (12)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63068882A JP2557250B2 (en) | 1988-03-23 | 1988-03-23 | Fluid pumping device |
| DE68920306T DE68920306T2 (en) | 1988-03-23 | 1989-03-16 | Fluid pump arrangement. |
| EP90201568A EP0393800B1 (en) | 1988-03-23 | 1989-03-16 | Valve device |
| DE89302606T DE68910726T2 (en) | 1988-03-23 | 1989-03-16 | Liquid pump and valve device. |
| EP90201581A EP0390298B1 (en) | 1988-03-23 | 1989-03-16 | Fluid pump apparatus |
| DE68917587T DE68917587T2 (en) | 1988-03-23 | 1989-03-16 | Valve arrangement. |
| EP89302606A EP0343773B1 (en) | 1988-03-23 | 1989-03-16 | Fluid pump apparatus and valve device |
| KR1019890003401A KR0181711B1 (en) | 1988-03-23 | 1989-03-18 | Fluid pump apparatus and valve device |
| CA000594378A CA1338102C (en) | 1988-03-23 | 1989-03-21 | Fluid pump apparatus and valve device |
| AU31606/89A AU626838B2 (en) | 1988-03-23 | 1989-03-22 | Fluid pump apparatus and valve device |
| AU71133/91A AU639071C (en) | 1988-03-23 | 1991-02-18 | Fluid pump apparatus and valve device |
| CA000616863A CA1338322C (en) | 1988-03-23 | 1994-05-17 | Fluid pump apparatus and valve device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63068882A JP2557250B2 (en) | 1988-03-23 | 1988-03-23 | Fluid pumping device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01244182A JPH01244182A (en) | 1989-09-28 |
| JP2557250B2 true JP2557250B2 (en) | 1996-11-27 |
Family
ID=13386470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63068882A Expired - Lifetime JP2557250B2 (en) | 1988-03-23 | 1988-03-23 | Fluid pumping device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2557250B2 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2671055B2 (en) * | 1990-08-21 | 1997-10-29 | 栄興産業株式会社 | Fluid pumping equipment |
| DE10145183C2 (en) * | 2001-09-13 | 2003-10-16 | Infineon Technologies Ag | Process for automatic monitoring and analysis of manufacturing defects caused by objective lens focus fluctuation in an exposure system |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5218401U (en) * | 1975-07-28 | 1977-02-09 |
-
1988
- 1988-03-23 JP JP63068882A patent/JP2557250B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01244182A (en) | 1989-09-28 |
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