JP2556705B2 - Thin film forming equipment - Google Patents

Description

Detailed Description of the Invention [Industrial applications]

The present invention relates to a thin film forming apparatus for printing / forming various thin films such as a liquid crystal alignment film or the like, a liquid crystal sealing seal or an insulating film of a semiconductor element on a printing medium.

[Prior art]

Generally, offset printing is known as a method for performing film-like printing on a printing medium such as paper. However, in this offset printing, the printing inks that can be used do not emulsify much with the fountain solution, so in order to faithfully transfer such inks to the plate, 80.00 to 100.000 cps
Only inks with a high viscosity of 1 could be used. Therefore, for example, a thin film that requires the use of low-viscosity printing ink with a viscosity of several tens to 30.000 cps, such as a liquid crystal alignment film or a liquid crystal sealing seal, should be printed on a rigid plate such as a glass plate. I couldn't. Therefore, the present applicant previously provided a thin film forming apparatus as shown in FIG. 3 (Japanese Utility Model Publication No. 58-170864). In this device, a flat plate intaglio 32 having a large number of ink cells and a printing medium 33 are placed side by side on a base 31. On the other hand, the above intaglio
A printing roll support frame 35 having an ink supply device (not shown) for filling the ink cell of the intaglio 32 with a printing roll 34, and an ink consisting of a polymer solution having a viscosity of several tens to 30.000 cps in the vicinity of 32 is provided. A doctor for movably providing the base 31 between the intaglio 32 and the material 33 to be printed, and for scraping excess ink out of the ink filled in the ink cells of the intaglio 32 on the printing roll support frame 35 from the intaglio It is roughly composed of 36. In this device, the ink is supplied from the ink supply device to the ink cells of the intaglio 32 and the doctor
After scraping off excess ink with 36, the printing roll 34 is rotated while being pressed against the intaglio 32, and the ink of the ink cell of the intaglio 32 is formed into a predetermined pattern on the surface of the soft convex portion 34a made of synthetic resin of the printing roll 34. The printing roll 34 with the ink adhered is conveyed onto the material 33 to be printed and printed.
There is one in which the ink of the convex portion 34a is printed on the surface of the printing object 33 while rotating the 34 to form the above-mentioned predetermined pattern. By the way, in forming the intaglio 32, it is possible to form the intaglio 32 only from the surface plate to form a predetermined pattern directly on the surface plate, but in this case, it is economically expensive. Further, if the pattern is formed directly on the surface plate, it is necessary to replace the entire surface plate when exchanging the pattern, which makes the replacement work very complicated. Therefore, in the above apparatus, the concave plate 32 is configured such that the color spreading plate 32b is detachably fixed to the upper surface of the surface plate 32a, and various kinds of thin plating is applied to the surface of the color spreading plate 32b to form ink cells. There is.

[Problems to be Solved by the Invention]

However, in the case of the above structure, it is difficult to dispose the spreading plate on the surface plate accurately and flatly over the entire surface, and from a microscopic viewpoint, the spreading plate inevitably has a wavy shape. Therefore, it is difficult to make the contact pressure of the convex portion of the printing roll to the color-developing plate constant over the entire surface, so that it becomes difficult to transfer a predetermined pattern of a constant thickness to the convex portion of the printing roll. However, there is a problem that it is difficult to form the thickness of the printing film printed on the printing medium to a predetermined thickness. Therefore, an object of the present invention is to solve the above-mentioned problems, and it is possible to transfer an ink having a constant thickness to a printing roll, and to accurately form a thin film having a predetermined thickness on a printing medium. It is to provide a thin film forming apparatus capable of printing.

[Means for solving problems]

In order to achieve the above object, the present invention configures an intaglio plate that supplies a constant amount of low-viscosity ink of several tens to 30,000 cps to a printing roll as a cylinder instead of a plate, and the surface of the cylinder, that is, the intaglio roll. It has a large number of ink cells with a depth of 10 to 90 μm. I.e. depth 10-90
an intaglio roll having a large number of μm ink cells on its surface and rotatably supported by a supporting frame of a base; nozzle means for supplying a low-viscosity ink of 10 to 30,000 cps to the surface of the intaglio roll; A doctor attached to the support frame at a predetermined position around the intaglio roll, which spreads the ink supplied to the intaglio roll on the surface of the intaglio roll to hold a certain amount of ink in the ink cells, and a lower portion of the intaglio roll. A printing roll, which is rotatably supported by the support frame and has a convex portion that comes into contact with the intaglio roll and transfers the ink in the ink cells on the surface of the intaglio roll to the convex portion, and a substrate to be printed are mounted. It is possible to slide horizontally between the printing position where it is placed and in contact with the printing roll on the board and the printing object mounting position that is separated to the printing material loading side or the unloading position that is separated to the printing material unloading side. Prepared for Driven platen, a drive device that drives the respective rotations of the printing roll and the intaglio roll and the horizontal slide movement of the platen in synchronization, and drives only the intaglio roll between the printing roll and the intaglio roll. A clutch for connecting or disconnecting the driving force transmission system is provided, and the clutch transmits the driving force transmission system when the platen horizontally slides in a direction away from the printing position to the printing object mounting position side. Disconnect.

[Operation of the invention]

In the above configuration, from the nozzle means a few 10-30,0
A low viscosity ink of 00c.ps is supplied to the surface of the intaglio roll. The intaglio roll is rotationally driven by the drive device. By contacting the doctor with the rotating intaglio roll, excess ink is removed, and a certain amount of ink is filled and held in the ink cell having a depth of 10 to 90 μm of the intaglio roll. After that, the intaglio roll and the printing roll are rotated by the driving device, and the ink filled in the ink cells of the intaglio roll is transferred to the convex portion of the printing roll. An object to be printed is placed on a surface plate that slides horizontally on a base below the printing roll, and the surface plate makes rolling contact with the printing roll at a printing position directly below the printing roll. At this time, the ink on the convex portion of the printing roll becomes a thin curtain and is printed on the printing medium. The horizontal slide movement of the surface plate is moved in synchronization with the rotational movement of the printing roll by a drive device that drives the rotation of the printing roll. That is, both the intaglio roll and the surface plate are driven in synchronization with the rotational movement of the printing roll. The printing roll is rotated in the forward and reverse directions by the driving device, and accordingly, the horizontal slide movement of the surface plate is made in the reciprocating direction, but the rotation of the intaglio roll is synchronized with the printing roll only in the forward rotation by the connection of the clutch. It rotates, and in the case of reverse rotation, the clutch is disengaged and does not rotate. Therefore, the intaglio roll, printing roll and surface plate are
During each printing operation, it is synchronized, but during each return operation, only the intaglio roll is stopped and is not synchronized with the other two. During the returning operation, the printing roll and the surface plate move in opposite directions while maintaining a synchronous state with each other. As a result,
The positional relationship between the printing roll and the surface plate is kept constant without being displaced from each other, and the intaglio roll is released from unnecessary movement during the returning operation. Further, in the contact relationship between the intaglio roll and the doctor, since the intaglio roll rotates only in one direction, the rotation is always in the forward direction with respect to the doctor and does not damage both the doctor and the intaglio roll.

【The invention's effect】

As is clear from the above description, according to the present invention, the following excellent effects are exhibited. That is, in general, the surface of the cylindrical body can be finished with higher accuracy than the surface of the flat plate, so that the surface of the intaglio roll forming a predetermined pattern can be finished with high accuracy, and the surface of the intaglio roll is A large number of ink cells arranged in a pattern can be directly provided, and the contact pressure of the convex portion of the printing roll with respect to the surface of the intaglio roll on which the predetermined pattern is formed tends to be constant over the entire surface. The thickness of the printing film printed on the entire surface can be set to a predetermined value with high accuracy over the entire surface. In particular, since it is the nozzle means that supplies the ink to the intaglio roll, it is possible to always supply fresh ink onto the intaglio roll, rather than using an ink supply means that immerses the intaglio roll in an ink pool, for example. It does not deteriorate the quality of the ink such as adherence. Further, the intaglio roll, the printing roll and the surface plate can be driven by one motor, which can contribute to cost reduction and downsizing of the apparatus. Further, the clutch does not disconnect the synchronous relationship between the printing roll and the surface plate, but only connects or disconnects the synchronous relationship between the printing roll and the intaglio roll to the surface plate, so that when the intaglio roll tries to rotate in reverse, this clutch After cutting, the intaglio roll stops rotating and does not damage the doctor contacting it. At this time, the printing roll absorbs or escapes the impact caused by the contact with the intaglio roll by the flexible convex portion, so that the printing roll is not damaged. When the intaglio roll rotates in the reverse direction, the platen does not come into contact with the printing roll and is not damaged because the printing medium has already been carried out. Also, if this clutch is disengaged when the intaglio roll tries to rotate in the reverse direction, the intaglio roll will not rotate in the reverse direction, and the unnecessary ink scraped off by the doctor during the forward rotation will be uneven on the surface of the intaglio roll over a certain amount. Never be spread out.

【Example】

Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings. As shown in FIG. 1, an ink supply device 5, a doctor 6, an intaglio roll 3, and a printing roll 4 are supported by a support frame 2 of a base 1, respectively. By driving the printing roll driving device, that is, driving the printing roll driving motor 7, the printing roll 4 and the intaglio roll 3 are synchronously rotated based on the meshing of the gears 8 and 9. In addition, on the base 1 below the support frame 2,
An object-to-be-printed support platen 11 on which an object to be printed 10 made of a rigid plate such as a glass plate is placed is movably arranged. By driving the printing roll drive motor 7, the second gear 9, the fifth gear 19,
By rotating the sixth gear 20, the fourth gear 18, the platen drive shaft 17 and the third gear 16 and further moving the rack 13, the printing medium 10 placed on the platen 11 moves to the printing position A. After that, a horizontal slide movement is performed on the base 1 between the printing object mounting position B and the unloading position C. The ink is supplied from the ink supply device 5 to the intaglio roll 3, the excess ink is scraped off by the doctor 6, and further transferred from the intaglio roll 3 to the printing roll to form a predetermined pattern. After that, the printing roll 4 to which the ink of the predetermined pattern has been transferred is brought into contact with the surface of the printing medium 10 at the printing position A, and finally a polymer thin film having the predetermined pattern is formed by printing on the printing medium 10. Therefore, the thin film forming apparatus of the present embodiment has a general structure. The support frame 2 is arranged such that a pair of support plates 2a, 2a face each other at a predetermined position in the center of the base 1 made of a rectangular base. A support frame 2 including the pair of support plates 2a, 2a
In addition, the intaglio roll 3 is rotatably supported on the upper part thereof, and the printing roll 4 is rotatably supported at a position diagonally below the intaglio roll 3. Also,
A doctor 6 having a doctor blade 6a for contacting the surface of the intaglio roll 3 and scraping off excess ink is fixed to the upper end of the support frame near the intaglio roll 3. The ink supply device 5 is a doctor blade of this doctor 6.
Ink is supplied onto the surface of the intaglio roll 3 from a position above 6a. In the ink supply device 5, a pair of rails 15 and 15 are installed on the upper end of the supporting frame of the doctor 6 opposite to the intaglio roll 3, and the ink supply body 5a is movably provided on the rails 15 and 15. At the same time, the ink nozzle 5b of the ink supply member 5a is configured to extend above the doctor 6 and above the surface of the intaglio roll 3. The ink supply body 5a reciprocates along the pair of rails 15 and 15 by driving a motor or an air silling through a wire (not shown) or the like to drop ink on the surface of the intaglio roll 3. This ink has, for example, a viscosity of about several tens to 30,000 cps, and is made of a synthetic resin or a mixture of a resin precursor and a solvent. The doctor 6 is equipped with a doctor blade 6a that moves to a position where it comes into contact with the intaglio roll 3 and a position where it leaves the intaglio roll 3 by driving an air cylinder (not shown), and this blade 6a comes into contact with the surface of the intaglio roll 3. Then, the ink dropped on the surface of the intaglio roll 3 is spread along the surface so that the ink is filled in the ink cells 3b of the intaglio roll 3. The intaglio roll 3 has a body 3a fixed to a rotary shaft 3c, and the body 3a is formed by forming a plating layer on the surface of a copper core. The surface of the plating layer is as shown in FIG. , And a large number of ink cells 3b, ..., 3b. This ink cell 3b
Has a depth of 10 to several tens of μm, for example. The body 3a supported by the rotating shaft 3c is in contact with the convex portion 4a of the body 4b of the printing roll 4 with a constant pressure. Both ends of the rotary shaft 3c of the intaglio roll 3 are rotatably supported by the support plates 2a, 2a of the support frame 2, and the rotary shaft 3c has one end protruding outward from one support plate 2a of the support frame 2. Is connected via the toothed clutch 12.
A first gear 8 is attached so as to be freely cut. Further, the printing roll 4 has a body 4b fixed to a rotary shaft 4c thereof, and a rubber such as butyl rubber or a synthetic resin such as nylon resin, a photosensitive rubber or a photosensitive rubber is provided at a predetermined position on the body circumferential surface. Soft protrusion made of resin, etc.
4a, and the ink of the intaglio roll 3 is transferred to the convex portion 4a. Both ends of the rotary shaft 4c have support plates 2a, 2
The one support plate 2 of the support frame 2 which is rotatably supported by a.
The second gear 9 is provided at one end of the rotary shaft 4c protruding outward from a.
Has been fixed. The second gear 9 and the first gear 8 are meshed with each other. Rotating shaft 4c of the printing roll 4
The other end, that is, the one end to which the second gear 9 is not fixed, protrudes outward from the other support plate 2a of the support frame 2 and is connected to the print roll drive motor 7.
Therefore, when the printing roll 4 is rotationally driven by the driving of the printing roll driving motor 7, when the toothed clutch 12 is connected, the intaglio roll 3 is also printed by the meshing of the second gear 9 and the first gear 8. It rotates synchronously with 4. On the other hand, the surface plate 11 is placed on the base 1. On the upper surface of the base 1, a print position A below the support frame and a print object placement position B separated from below the support frame to the print object carry-in side.
Guide rails 14 and 14 are fixed to both ends between a carry-out position C separated from the lower part of the support frame to the print-material carrying-out side. The surface plate 11 engages with the guide rails 14, 14 and moves on the base 1 along the guide rails 14, 14 between the positions A, B, C. The platen 11 has a plate-shaped object to be printed 10 placed on its upper surface, determines the position of the object to be printed 10 and holds it. The bottom surface of the surface plate 11 has a rack 13 parallel to the guide rails 14, 14.
Is attached. A third gear 16 meshes with the rack 13, and the forward and reverse rotations of the third gear 16 cause the surface plate 11 to rotate.
Are configured to reciprocate with the rack 13. The third gear 16 is fixed to a surface plate drive shaft 17 that is rotatably installed between the support frames 2a, 2a, and one end of the surface plate drive shaft 17 projects outward from one of the support frames 2a and Four gears 18 are attached. The fourth gear 18 is connected to the second gear 9 via the fifth gear 19 and the sixth gear 20, and the rotation direction thereof is connected to the second gear 9 so as to rotate in the reverse direction. Therefore, the rotation of the printing roll 4 and the horizontal sliding movement of the surface plate 11 move synchronously in a unique positional relationship. Then, the printing medium 10 comes into contact with the printing roll 4 at the printing position A of the surface plate 11, and the ink of the printing roll 4 is transferred onto the printing medium 10 to print / form. The rotation of the printing roll 4 and the horizontal sliding movement of the object to be printed 10 cause the second gear 9 and the fourth, fifth, sixth gears 18, 19, 2 to move.
It is mechanically synchronized by the meshing of 0 and the meshing of the third gear 16 and the rack 13. According to the above configuration, when the print roll drive motor 7 is rotated in the direction of arrow R from the state of FIG.
And the intaglio roll 3 rotates from the second gear 9 via the first gear 8 and the toothed clutch 12 as the printing roll 4 rotates, while the second gear 9 rotates and the fifth
The gear 19, the sixth gear 20, the fourth gear 18, and the third gear 16 rotate, respectively, and the rack 13 is synchronized with the rotation of the printing roll 4.
At the same time, the surface plate 11 moves to the carry-out position C via the printing position A. On the contrary, when the printing roll drive motor 7 is rotated in the arrow L direction from the state where the surface plate 11 is at the carry-out position C,
Even if the toothed clutch 12 is disengaged and the printing roll 4 rotates in the reverse direction, the intaglio roll 3 does not rotate in the reverse direction, and the platen 11 moves from the carry-out position C to the printing position A to the printing medium mounting position B. With respect to the rotation direction of the intaglio roll 3, when it rotates, it always rotates in the forward direction with respect to the doctor blade 6a, and neither the blade 6a nor the intaglio roll 3 is damaged. Further, since the intaglio roll 3 is always rotated in the direction in which the ink is scraped off by the doctor 6 and then transferred to the printing roll 4,
Unwanted ink does not spread evenly over the surface of the intaglio roll and spread evenly. According to the above-described embodiment, generally, in machining, the surface of the cylindrical body or the cylindrical body can be finished with higher accuracy than the surface of the flat plate, so that the surface of the intaglio roll 3 forming the ink cell can be processed with high accuracy. The surface of the intaglio roll 3 can be finished and can be directly provided with a large number of ink cells 3b, ..., 3b having a depth of 10 to several tens of μm, and printing can be performed on the surface of the intaglio roll 3 on which a predetermined pattern is formed. The contact pressure of the soft convex portion 4a of the roll 4 tends to be constant over the entire surface, and the thickness of the printing film printed on the printing medium can be set to a predetermined value with high accuracy over the entire surface. it can. Further, since the printing roll 4 and the intaglio roll 3 are synchronously rotated by the printing roll driving motor 7 and the printing roll 4 and the surface plate 11 are also synchronously interlocked with each other, these synchronous operation mechanisms are simple. Will be things. If the intaglio roll 3 is replaced with an intaglio roll 3 having a different pattern and fitted into the support frame 2, the pattern can be replaced easily and surely, and the protrusion 4a of the printing roll 4 and the covered portion can be replaced. Print 10
The positional relationship with In addition, the printed substrate 10 moves on the base 1 from the substrate loading side at one end of the substrate 1 to the printing substrate unloading side at the other end of the substrate 1, so that it is different from the conventional substrate 1 in the conventional manner. Since the print target carry-in position and the print target carry-out position are not at the same position, the print target 10 can be carried in and out smoothly, and the printing work efficiency can be improved. The present invention is not limited to the above embodiment, but can be implemented in various other modes. For example, the drive motor is not provided in the printing roll 4 but in the intaglio roll 3
The gears 18, 1, 9, 20 and the like may be provided.

[Brief description of drawings]

FIG. 1 is a perspective view of a thin film forming apparatus according to an embodiment of the present invention, FIG. 2 is a sectional view of an essential part showing an ink cell of an intaglio roll, and FIG. 3 is an explanatory view showing a conventional thin film forming apparatus. 1 ... Base, 2 ... Support frame, 2a ... Support plate, 3 ... Intaglio roll, 3a ... Body part, 3b ... Ink cell, 4 ... Printing roll, 4a ... Convex part, 5 ... Ink supply device, 5a ... Ink supply body, 5b ... Ink nozzle, 6 ... Doctor, 6a ...
Doctor blade, 7 ... Printing roll drive motor, 8 ...
1st gear, 9 ... 2nd gear, 10 ... Printed material, 11 ... Surface plate, 12 ... Toothed clutch, 13 ... Rack, 14 ... Guide rail, 15 ... Rail, 16 ... 3rd gear, 17 ... surface plate drive shaft, 18 ... 4th gear, 19 ... 5th gear, 20 ...
6th gear

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁶ Identification code Internal reference number FI Technical indication location H01L 21/31 H01L 21/31 A (56) References JP-A-55-161650 (JP, A) JP-A-58-12758 (JP, A) JP-A-56-51892 (JP, A) JP-A-61-242096 (JP, A)

Claims (1)

(57) [Claims] 1. A large number of ink cells (3b) having a depth of 10 to 90 μm.
And a surface of the intaglio roll (3) rotatably supported by the support frame (2) of the base (1), and a low-viscosity ink of 10 to 30,000 cps on the surface of the intaglio roll (3). The nozzle means (5b) for supplying and the ink supplied to the intaglio roll (3) attached to the support frame (2) at a predetermined position around the intaglio roll (3) and the surface of the intaglio roll (3). A doctor (6) for spreading a predetermined amount of ink in the ink cell (3b) and rotatably supported by the support frame (2) below the intaglio roll (3), and A printing roll (4) having a convex portion (4a) in contact with the convex plate (4a) and transferring the ink in the ink cell (3b) on the surface of the intaglio roll (3) to the convex portion (4a); A printing position on which the (10) is placed and which is in contact with the printing roll (4) on the base (1); A platen (11) provided so as to be horizontally slidable between a print object placement position distant to the print object carry-in side or a carry-out position distant to the print object carry-out side; the printing roll (4); Driving device (7,8,9,13,16,17,18,19,20) for driving each rotation of the intaglio roll (3) and the horizontal slide movement of the surface plate (11) in synchronization with each other.
And a clutch (12) for connecting or disconnecting a driving force transmission system for driving only the intaglio roll (3) between the printing roll (4) and the intaglio roll (3), the clutch (12)
Is a thin film forming apparatus characterized in that the driving force transmission system is disconnected when the surface plate (11) horizontally slides in a direction away from the printing position to the printing object mounting position side.