JP2549407Y2 - Assembled wafer boat with legs - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an assembled wafer boat with legs.

[0002]

2. Description of the Related Art There is a support used when a semiconductor wafer is heat-treated in a diffusion furnace, and a plurality of wafers are arranged side by side at regular intervals and can be stored in the diffusion furnace. This type of support is also referred to as a wafer boat and is of an assembling type. For example, as shown in FIG. 3, a pair of side plates a, a plurality of wafer support shafts b detachably supported by the side plates, And a plurality of intermediate support members c for supporting an intermediate portion of the wafer support shaft (Japanese Utility Model Laid-Open No. 2-73731).

[0003]

However, since the assembly type wafer boat has a relatively large number of parts, it takes a considerable time to assemble and disassemble, and is troublesome in terms of maintenance such as replacement of parts. There are problems to be solved for reduction.

SUMMARY OF THE INVENTION [0004] The present invention has been made to solve the above-mentioned conventional problems, and has a leg assembly capable of easily assembling and disassembling by reducing the number of parts without impairing the function of an assembling wafer boat. It is an object of the present invention to provide a type wafer boat.

[0005]

Means for Solving the Problems As a means for technically solving the above-mentioned problems, the present invention is a wafer boat for mounting a plurality of semiconductor wafers and performing a predetermined heat treatment. The gist is that the support shaft and the side plate holding both ends of the support shaft are configured, and the support shaft for supporting the wafer is formed with legs for suppressing deflection of itself. Things.

[0006]

[Function] Since the legs are formed integrally with the support shaft, a plurality of intermediate support members as in the conventional example are unnecessary, the number of parts can be reduced, and the function of the intermediate support member is imparted to the support shaft. be able to.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below in detail with reference to the accompanying drawings. In FIG. 1, reference numeral 1 denotes a pair of side plates, on which a plurality of prism-shaped support shafts 2 and 3 are inserted, and both ends thereof are detachably attached. The legs 4 for suppressing deflection are formed integrally with the support shaft.

The support shaft 2 is provided with wafer mounting grooves 2a at a constant pitch along the longitudinal direction of the support shaft from the inner edge of the upper surface to the upper edge of the inner surface. Similarly, a wafer mounting groove 3a is provided.

As shown in FIG. 2, the side plate 1 is provided with cut grooves 1a at both upper shoulder portions thereof.
The support shaft 2 can be removably mounted by fitting a notch (not shown) formed at the end of the support shaft 2 into the support shaft 2. FIG. 1 shows the inner surface of the side plate 1.
An oblique fitting recess 1b is formed so that
The support shaft 3 is removably attached to the lower portion of the side plate 1 by fitting the end of the support shaft 3 into the recess. That is, two support shafts 2, 3 are detachably mounted between the pair of side plates 1, and the wafer mounting grooves 2a, 3a of the support shafts 2, 3 are circular so that the wafer can be stably held. They are aligned along the circumferential direction.

A hole 1c for mounting a handle 5 is provided at an upper portion of the side plate 1 at a predetermined interval, and an engaging portion 5a provided at a lower portion of the handle 5 is provided in the mounting hole 1c. Insert the handle 5 into close contact with the outer surface of the side plate 1
The handle 5 is removably attached by fitting and locking a notch 6a provided at the lower part of the stopper 6 into a groove 5b provided at the front end of "a". At this time, the hook-shaped locking portion 6 provided on the stopper 6
b is adapted to be hooked on the lower frame 5c of the handle 5.

The wafer boat 7 thus formed is mounted with a plurality of wafers (not shown) mounted in the wafer mounting grooves 2a, 3a of the support shafts 2, 3, and stored in a diffusion furnace. Then, the heat treatment of the wafer is performed. The handle 5 is effectively used when transporting the wafer boat 7.

In the heat treatment of the wafer, the wafer boat 7 is exposed to a considerably high temperature or undergoes a considerable temperature change, but is not damaged or deformed. In particular, since the legs 4 are formed below the outermost support shaft 2, the legs 4 can provide a reinforcing effect to prevent deflection of the support shaft 2 itself and maintain the stability of the wafer boat 7. can do. This eliminates the need for a conventional intermediate support member.

It is desirable that all the components of the wafer boat are made of silicon, but the handle and the stopper can be made of quartz glass.

[0014]

[Effects of the Invention] As described above, according to the present invention,
Since the legs of the wafer boat are formed integrally with the support shaft, a plurality of intermediate support members as in the conventional example become unnecessary,
The number of parts can be reduced, and excellent effects such as easy assembly and disassembly and easy replacement of parts can be achieved.

[Brief description of the drawings]

FIG. 1 is a perspective view of a wafer boat showing an embodiment of the present invention.

FIG. 2 is an exploded perspective view of the side plate portion.

FIG. 3 is an explanatory diagram of a conventional example.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Side plate 1a ... Cut groove 1b ... Fitting recessed part 1c ... Mounting hole 2, 3 ... Support shaft 2a, 3a ...
Wafer mounting groove 4 ... Leg 5 ... Handle 5a ... Engagement part 5b ... Groove 5c ... Lower frame 6 ... Stopper 6
a: Notch 6b: Locking part 7: Wafer boat

Claims (2)

(57) [Scope of request for utility model registration] 1. A wafer boat on which a plurality of semiconductor wafers are placed and subjected to a predetermined heat treatment, comprising: two or more support shafts for supporting wafers; and side plates for holding both ends of the support shafts. An assembling wafer boat with legs, wherein legs are formed on a support shaft for supporting the wafers to suppress deflection of the wafer. 2. The assembled wafer boat with legs according to claim 1, wherein legs are formed on both outermost support shafts.