JP2547145Y2 - Pyroelectric element - Google Patents
Pyroelectric elementInfo
- Publication number
- JP2547145Y2 JP2547145Y2 JP1990079041U JP7904190U JP2547145Y2 JP 2547145 Y2 JP2547145 Y2 JP 2547145Y2 JP 1990079041 U JP1990079041 U JP 1990079041U JP 7904190 U JP7904190 U JP 7904190U JP 2547145 Y2 JP2547145 Y2 JP 2547145Y2
- Authority
- JP
- Japan
- Prior art keywords
- pyroelectric
- infrared
- protective film
- crystal
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Description
【考案の詳細な説明】 ［産業上の利用分野］ 本考案は赤外線検出器などに用いられる焦電素子に関
する。DETAILED DESCRIPTION OF THE INVENTION [Industrial application field] The present invention relates to a pyroelectric element used for an infrared detector or the like.
［従来の技術および課題］ 赤外線検出器は、0.75〜1000μｍの赤外線を感知し、
これをその量に応じて電気信号に変換するものであり、
光電変換型と焦電型とに分類される。光電変換型は感度
に優れているが極めて低い温度に冷却することが必要で
ある。これに対し、結晶の一部を加熱した時に電荷が生
じる現象を利用する焦電素子を用いた焦電型の赤外線検
出器は波長依存性がなく常温で使用でき安価であるとい
う利点を有する。[Conventional technology and problems] An infrared detector detects infrared rays of 0.75 to 1000 μm,
This is converted into an electric signal according to the amount,
It is classified into a photoelectric conversion type and a pyroelectric type. The photoelectric conversion type is excellent in sensitivity but needs to be cooled to an extremely low temperature. On the other hand, a pyroelectric infrared detector using a pyroelectric element utilizing a phenomenon in which an electric charge is generated when a part of a crystal is heated has an advantage that it is inexpensive and can be used at room temperature without wavelength dependence.
しかしながら、TGS、LATGS、DTGS、DLATGSなどの焦電
結晶は潮解性を有するため、これを用いた赤外線検出器
は内部雰囲気を乾燥窒素とし、TO−５型などのパッケー
ジ中に封入することにより湿気から保護する必要があ
る。このため、パッケージの一部に赤外光を透過する窓
材を設け焦電結晶への赤外線の到達をはかっている。However, pyroelectric crystals such as TGS, LATGS, DTGS, and DLATGS have deliquescent properties, so infrared detectors using them have a dry nitrogen internal atmosphere and can be humidified by enclosing them in a package such as TO-5. Need to be protected from For this reason, a window material that allows infrared light to pass therethrough is provided in a part of the package so that infrared rays reach the pyroelectric crystal.
特に、赤外線検出器が赤外分光分析に用いられる場合
は、分析器に必要な波長域において透過性に優れ、しか
も潮解性のない窓材であることが必要である。このよう
な材料としては従来KRS−５以外に適当な材料はない。
しかしながら、かかる窓材の赤外光透過率は60〜70％で
あり、また屈折率が高いため赤外光の入射角を大きくす
ることができないなどの欠点を有する。In particular, when an infrared detector is used for infrared spectroscopy, it is necessary that the window material has excellent transparency in a wavelength range required for the analyzer and has no deliquescence. There is no suitable material other than the conventional KRS-5 as such a material.
However, such a window material has drawbacks such as an infrared light transmittance of 60 to 70% and a high refractive index, which makes it impossible to increase the incident angle of infrared light.
本考案の目的は赤外線透過用の窓材を必要としない焦
電素子を提供することにある。An object of the present invention is to provide a pyroelectric element that does not require a window material for transmitting infrared light.
［課題を解決するための手段］ 本発明は、焦電結晶上に赤外線検出電極を設け、これ
らの上に前記焦電結晶を被覆する湿気非透過の保護膜を
設け、さらに該保護膜の上に金属黒よりなる光吸収膜を
設けたことを特徴とする焦電素子を提供するものであ
る。[Means for Solving the Problems] According to the present invention, an infrared detecting electrode is provided on a pyroelectric crystal, a moisture-impermeable protective film for covering the pyroelectric crystal is provided thereon, Provided with a light absorbing film made of metallic black.
［作用］ 本考案の焦電素子では、焦電結晶に電極を取り付けた
後、保護膜が設けられ、検出器のS/N比を減少させるこ
となく、結晶の潮解性が防止される。保護膜を設けた後
で光吸収膜を設けるため、光吸収特性が低下しない。[Operation] In the pyroelectric element of the present invention, a protective film is provided after the electrodes are attached to the pyroelectric crystal, and the deliquescent of the crystal is prevented without reducing the S / N ratio of the detector. Since the light absorption film is provided after the protection film is provided, the light absorption characteristics do not deteriorate.
［実施例］ つぎに本考案を図面を参照して実施例によりさらに具
体的に説明する。[Examples] Next, the present invention will be described more specifically with reference to the drawings.
アルミナ製枠体の結晶支持体１に例えばトリグリシン
サルフェート（TGS）などの焦電結晶２の薄膜（約20μ
ｍ）を張り付ける。ついで該焦電結晶の上面および下面
に所定のパターンを有するメタルマスクを用いてスパッ
タリング法により赤外線検出用の白金製上部電極３およ
び下部電極４を形成する。さらに上部電極３、下部電極
４のパターンが形成された焦電結晶２の表面に湿気非透
過性の保護膜５を設ける。該保護膜５は焦電結晶２の潮
解性を防ぐ材料であればよく、例えばエポキシ樹脂、Si
O2膜、ダイヤモンド膜などであってよい。保護膜を形成
するには、スピンコート法、CVD法など公知の方法が用
いられる。保護膜の厚さは通常0.5〜1.0μｍであるのが
好ましい。A thin film (about 20 μm) of a pyroelectric crystal 2 such as triglycine sulfate (TGS) is formed on a crystal support 1 of an alumina frame.
m). Then, a platinum upper electrode 3 and a lower electrode 4 for infrared detection are formed by sputtering using a metal mask having a predetermined pattern on the upper and lower surfaces of the pyroelectric crystal. Further, a moisture-impermeable protective film 5 is provided on the surface of the pyroelectric crystal 2 on which the patterns of the upper electrode 3 and the lower electrode 4 are formed. The protective film 5 may be made of any material that prevents deliquescence of the pyroelectric crystal 2, such as epoxy resin, Si
It may be an O 2 film, a diamond film, or the like. To form the protective film, a known method such as a spin coating method and a CVD method is used. It is preferable that the thickness of the protective film is usually 0.5 to 1.0 μm.
つぎに上部の前記保護膜５の上にメタルマスクを用
い、スパッタリング法により所定のパターンの白金電極
６を形成する。ついでこの白金電極の表面を電気分解法
等を用いて白金黒とし光吸収膜７を形成する。このよう
にして得られた検出素子は赤外線検出器に組み立てられ
る。Next, a platinum electrode 6 having a predetermined pattern is formed on the upper protective film 5 by a sputtering method using a metal mask. Next, the surface of the platinum electrode is made platinum black using an electrolysis method or the like, and the light absorbing film 7 is formed. The detection element thus obtained is assembled into an infrared detector.
［考案の効果］ 本考案の焦電素子は窓材が不必要であるため、焦電結
晶に到達する赤外線の損失が少なく利用効率が高い。ま
た、入射角度も大きくできるため、広範囲より入射する
赤外線の検知が可能である。しかも、保護膜上に金属黒
よりなる光吸収膜を設けたため、従来と同様に光吸収膜
上にミクロンオーダの凹凸形成が可能となり、最適な赤
外線の吸収能が得られる。[Effects of the Invention] Since the pyroelectric element of the present invention does not require a window material, loss of infrared rays reaching the pyroelectric crystal is small, and utilization efficiency is high. In addition, since the incident angle can be increased, it is possible to detect infrared rays incident from a wide range. Moreover, since the light absorbing film made of metal black is provided on the protective film, it is possible to form irregularities on the order of microns on the light absorbing film in the same manner as in the prior art, and to obtain an optimum infrared absorbing ability.
第１図は本考案の焦電素子の一具体例を示す概略断面図
である。図中の主な符号はつぎのとおりである。 1:支持体、2:焦電結晶、3:上部電極、4:下部電極、5:保
護膜、6:白金電極、7:光吸収膜。FIG. 1 is a schematic sectional view showing a specific example of the pyroelectric element of the present invention. The main symbols in the figure are as follows. 1: support, 2: pyroelectric crystal, 3: upper electrode, 4: lower electrode, 5: protective film, 6: platinum electrode, 7: light absorbing film.
Claims (1)
らの上に前記焦電結晶を被覆する湿気非透過の保護膜を
設け、さらに該保護膜の上に金属黒よりなる光吸収膜を
設けたことを特徴とする焦電素子。An infrared detecting electrode is provided on a pyroelectric crystal, a moisture-impermeable protective film for covering the pyroelectric crystal is provided thereon, and a light absorbing film made of metallic black is provided on the protective film. A pyroelectric element comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990079041U JP2547145Y2 (en) | 1990-07-24 | 1990-07-24 | Pyroelectric element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990079041U JP2547145Y2 (en) | 1990-07-24 | 1990-07-24 | Pyroelectric element |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0436265U JPH0436265U (en) | 1992-03-26 |
| JP2547145Y2 true JP2547145Y2 (en) | 1997-09-10 |
Family
ID=31622850
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990079041U Expired - Lifetime JP2547145Y2 (en) | 1990-07-24 | 1990-07-24 | Pyroelectric element |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2547145Y2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007010445A (en) * | 2005-06-30 | 2007-01-18 | Shimadzu Corp | Pyroelectric sensor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60180180A (en) * | 1984-02-27 | 1985-09-13 | Matsushita Electric Ind Co Ltd | Detecting element for infrared ray |
-
1990
- 1990-07-24 JP JP1990079041U patent/JP2547145Y2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0436265U (en) | 1992-03-26 |
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