JP2546309B2 - Moisture-sensitive ceramic composition - Google Patents

Moisture-sensitive ceramic composition

Info

Publication number
JP2546309B2
JP2546309B2 JP62324925A JP32492587A JP2546309B2 JP 2546309 B2 JP2546309 B2 JP 2546309B2 JP 62324925 A JP62324925 A JP 62324925A JP 32492587 A JP32492587 A JP 32492587A JP 2546309 B2 JP2546309 B2 JP 2546309B2
Authority
JP
Japan
Prior art keywords
moisture
ceramic composition
sensitive ceramic
mol
humidity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP62324925A
Other languages
Japanese (ja)
Other versions
JPH01166503A (en
Inventor
達也 鈴木
行雄 坂部
康信 米田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP62324925A priority Critical patent/JP2546309B2/en
Publication of JPH01166503A publication Critical patent/JPH01166503A/en
Application granted granted Critical
Publication of JP2546309B2 publication Critical patent/JP2546309B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【発明の詳細な説明】 (産業上の利用分野) この発明は感湿セラミック組成物に関し、特にたとえ
ば湿度センサなどの材料として用いられる感湿セラミッ
ク組成物に関する。
TECHNICAL FIELD The present invention relates to a moisture-sensitive ceramic composition, and more particularly to a moisture-sensitive ceramic composition used as a material for a humidity sensor or the like.

(従来技術) 従来の感湿セラミック組成物としては、たとえばMg−
Cr−Ti系,Zn−Cr−Li系およびV−Ti系などの感湿セラ
ミック組成物がある。これらの感湿セラミック組成物を
用いて湿度センサが形成される。
(Prior Art) As a conventional moisture-sensitive ceramic composition, for example, Mg-
There are moisture-sensitive ceramic compositions such as Cr-Ti type, Zn-Cr-Li type and V-Ti type. Humidity sensors are formed using these moisture sensitive ceramic compositions.

(発明が解決しようとする問題点) しかしながら、従来の感湿セラミックイ組成物を用い
た湿度センサでは、100℃以下の低温度域では良好な感
度を得ることができるが、高温度域では十分な感度を得
ることができない。そのため、このような湿度センサを
たとえば電子レンジなどのような高温度域で絶対湿度を
検知することが要求される機器に使用する場合、その要
求を満たすことができなかった。また、従来の感湿セラ
ミック組成物を用いた湿度センサでは、その特性の経時
変化が大きく、このような湿度センサを実用化する上で
問題があった。
(Problems to be Solved by the Invention) However, a humidity sensor using a conventional moisture-sensitive ceramic composition can obtain good sensitivity in a low temperature range of 100 ° C. or lower, but is not sufficient in a high temperature range. It is not possible to obtain high sensitivity. Therefore, when such a humidity sensor is used in a device such as a microwave oven that is required to detect absolute humidity in a high temperature range, the demand cannot be satisfied. Further, the humidity sensor using the conventional moisture-sensitive ceramic composition has a large change in its characteristics over time, and there is a problem in putting such a humidity sensor into practical use.

それゆえに、この発明の主たる目的は、高温度域で感
度が良く、かつ特性の経時変化の小さい湿度センサを得
ることができる、感湿セラミック組成物を提供すること
である。
Therefore, a main object of the present invention is to provide a humidity-sensitive ceramic composition that can obtain a humidity sensor having high sensitivity in a high temperature range and having a small change in characteristics over time.

(問題点を解決するための手段) この発明は、80〜99.5モル%のAB1-xCxO3(ただし、
AはCa,SrおよびBaの中から選ばれる少なくとも1種
類、BはCeおよびZrの中から選ばれる少なくとも1種
類、Cはアクチノイドを除くIII a族の元素およびInの
中から選ばれる少なくとも1種類)と、0.5〜20モル%
のA′C′1-yDyO3(ただし、A′はCa,SrおよびBaの中
から選ばれる少なくとも1種類、C′はアクチノイドを
除くIII a族の元素およびInの中から選ばれる少なくと
も1種類、DはTaおよびNbの中から選ばれる少なくとも
1種類)とを含み、xが0≦x≦0.3の範囲にあり、y
が0.4≦y≦0.6の範囲にある、感湿セラミック組成物で
ある。
(Means for Solving Problems) The present invention provides 80 to 99.5 mol% of AB 1-x C x O 3 (however,
A is at least one selected from Ca, Sr and Ba, B is at least one selected from Ce and Zr, and C is at least one selected from Group IIIa elements other than actinides and In. ) And 0.5 to 20 mol%
A′C ′ 1-y D y O 3 (where A ′ is at least one selected from Ca, Sr and Ba, and C ′ is selected from the group IIIa elements excluding actinides and In) At least one kind, D is at least one kind selected from Ta and Nb), and x is in the range of 0 ≦ x ≦ 0.3, y
Is in the range of 0.4 ≦ y ≦ 0.6, which is a moisture-sensitive ceramic composition.

(発明の効果) この発明によれば、高温度域でも絶対湿度を高感度で
検知することができ、かつその特性の経時変化の小さい
湿度センサを得ることができる。したがって、このよう
な感湿セラミック組成物を用いた湿度センサを電子レン
ジ,オーブンおよび食器乾燥機などの機器に使用するこ
とができる。
(Effect of the Invention) According to the present invention, it is possible to obtain a humidity sensor that can detect absolute humidity with high sensitivity even in a high temperature range and that has a small change in its characteristics over time. Therefore, the humidity sensor using such a moisture-sensitive ceramic composition can be used in equipment such as a microwave oven, an oven and a tableware dryer.

この発明の上述の目的,その他の目的,特徴および利
点は、以下の実施例の詳細な説明から一層明らかとなろ
う。
The above-mentioned objects, other objects, features and advantages of the present invention will become more apparent from the detailed description of the embodiments below.

(実施例) その一般式がAB1-xCxO3およびA′C′1-yDyO3で表さ
れる組成物において、表に示す組成が得られるように原
料となる金属酸化物を調合し、ボールミルで湿式混合す
ることによって2種類の混合物を得た。これらの混合物
を蒸発乾燥した後、1200℃で仮焼し粉砕して粉砕物を得
た。
(Example) In a composition whose general formula is represented by AB 1-x C x O 3 and A′C ′ 1-y D y O 3 , metal oxide used as a raw material is selected so that the composition shown in the table can be obtained. Two kinds of mixtures were obtained by blending the materials and wet mixing with a ball mill. After these mixtures were evaporated and dried, they were calcined at 1200 ° C. and pulverized to obtain pulverized products.

得られた2種類の粉砕物を表に示す割合で混合し、酢
酸ビニル系樹脂入を10重量%加えて約2.0tonの圧力で直
径10mm,厚み1.0mmの円板状に成型し成型物を得た。この
成型物を空気中において1350℃で2時間焼結し焼結物を
得た。この焼結物に白金電極を形成し感湿素子サンプル
を得た。
The obtained two kinds of pulverized products were mixed in the ratio shown in the table, and 10% by weight of vinyl acetate resin was added and molded into a disc with a diameter of 10 mm and a thickness of 1.0 mm at a pressure of about 2.0 tons to obtain a molded product. Obtained. This molded product was sintered in air at 1350 ° C. for 2 hours to obtain a sintered product. A platinum electrode was formed on this sintered product to obtain a moisture sensitive element sample.

これらの感湿素子サンプルを用いて、H1=104ppm(重
量比)の水蒸気を含む雰囲気中における抵抗値RH1およ
びH2=105ppm(重量比)の水蒸気を含む雰囲気中におけ
る抵抗値RH2を測定した。そして、次式から検湿感度s
を算出した。
Using these humidity sensitive element samples, resistance values in an atmosphere containing H 1 = 10 4 ppm (weight ratio) of water vapor R H1 and H 2 = resistance in an atmosphere containing water vapor of 10 5 ppm (weight ratio) The value R H2 was measured. Then, from the following equation, the moisture detection sensitivity s
Was calculated.

RH1=RH2(H1/H2-s そして、この測定結果を表に示した。R H1 = R H2 (H 1 / H 2 ) -s Then, the measurement results are shown in the table.

また、500℃の雰囲気中において、99.9モル%のBaZr
0.900.10O3と0.1モル%のBaNd0.5Nb0.5O3とを用いた
サンプルおよび95モル%のBaZr0.900.10O3と5モル%
のBaNd0.5Nb0.5O3とを用いたサンプルの抵抗値の経時変
化を図に示した。
Also, in an atmosphere of 500 ° C, 99.9 mol% of BaZr
Sample with 0.90 Y 0.10 O 3 and 0.1 mol% BaNd 0.5 Nb 0.5 O 3 and 95 mol% BaZr 0.90 Y 0.10 O 3 and 5 mol%
The change with time of the resistance value of the sample using BaNd 0.5 Nb 0.5 O 3 of is shown in the figure.

なお、試料番号4のようにxが0.30より大きいか試料
番号6のようにA′C′1-yDyO3の添加量が20モル%よ
り大きい場合、その検湿感度が小さくなる。
If x is larger than 0.30 as in sample No. 4 or the amount of A′C ′ 1-y D y O 3 added is larger than 20 mol% as in sample no. 6, the humidity detection sensitivity becomes low.

また、yが0.40より小さいかyが0.60より大きい場
合、またはA′C′1-yDyO3の添加量が0.5モル%より小
さい場合、図に示すように、抵抗値の経時変化が大きく
なる。
When y is less than 0.40 or y is greater than 0.60, or when the amount of A′C ′ 1-y D y O 3 added is less than 0.5 mol%, the resistance changes with time as shown in the figure. growing.

それに対して、この発明の組成物を用いた感湿素子サ
ンプルでは、高温度域で絶対湿度を高感度を検知するこ
とができ、かつその抵抗値の経時変化も小さい。したが
って、電子レンジなどの高温度域で湿度を検知する必要
のある機器にこの感湿セラミック組成物を用いた湿度セ
ンサを使用することができる。
On the other hand, in the humidity sensitive element sample using the composition of the present invention, the absolute humidity can be detected with high sensitivity in the high temperature range, and the change in resistance with time is small. Therefore, the humidity sensor using the moisture-sensitive ceramic composition can be used for a device such as a microwave oven that needs to detect humidity in a high temperature range.

【図面の簡単な説明】[Brief description of drawings]

図はこの発明の実施例の組成物およびこの発明の範囲外
の組成物を用いた感湿素子サンプルの抵抗値の経時変化
を示すグラフである。
The figure is a graph showing the change with time of the resistance value of the moisture sensitive element sample using the composition of the example of the present invention and the composition outside the scope of the present invention.

Claims (1)

(57)【特許請求の範囲】(57) [Claims] 【請求項1】80〜99.5モル%のAB1-xCxO3(ただし、A
はCa,SrおよびBaの中から選ばれる少なくとも1種類、
BはCeおよびZrの中から選ばれる少なくとも1種類、C
はアクチノイドを除くIII a族の元素およびInの中から
選ばれる少なくとも1種類)と、 0.5〜20モル%のA′C′1-yDyO3(ただし、A′はCa,S
rおよびBaの中から選ばれる少なくとも1種類、C′は
アクチノイドを除くIII a族の元素およびInの中から選
ばれる少なくとも1種類、DはTaおよびNbの中から選ば
れる少なくとも1種類)とを含み、 xが0≦x≦0.3の範囲にあり、yが0.4≦y≦0.6の範
囲にある、感湿セラミック組成物。
1. 80 to 99.5 mol% of AB 1-x C x O 3 (provided that A
Is at least one selected from Ca, Sr and Ba,
B is at least one selected from Ce and Zr, C
Is at least one element selected from Group IIIa elements and In excluding actinoids) and 0.5 to 20 mol% of A'C ' 1-y D y O 3 (where A'is Ca, S
at least one selected from r and Ba, C ′ is at least one selected from Group IIIa elements other than actinides and In, and D is at least one selected from Ta and Nb). A moisture-sensitive ceramic composition comprising: x is in the range of 0 ≦ x ≦ 0.3 and y is in the range of 0.4 ≦ y ≦ 0.6.
JP62324925A 1987-12-22 1987-12-22 Moisture-sensitive ceramic composition Expired - Fee Related JP2546309B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62324925A JP2546309B2 (en) 1987-12-22 1987-12-22 Moisture-sensitive ceramic composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62324925A JP2546309B2 (en) 1987-12-22 1987-12-22 Moisture-sensitive ceramic composition

Publications (2)

Publication Number Publication Date
JPH01166503A JPH01166503A (en) 1989-06-30
JP2546309B2 true JP2546309B2 (en) 1996-10-23

Family

ID=18171141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62324925A Expired - Fee Related JP2546309B2 (en) 1987-12-22 1987-12-22 Moisture-sensitive ceramic composition

Country Status (1)

Country Link
JP (1) JP2546309B2 (en)

Also Published As

Publication number Publication date
JPH01166503A (en) 1989-06-30

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