JP2540960Y2 - Work mounting table for X-ray inspection equipment - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a work mounting table of an X-ray inspection apparatus.

(Prior Art) For example, X-rays are used to detect a perforated mark affixed on an intermediate layer substrate of a multilayer printed circuit board as a work, and to use the perforated mark as a mark to perforate a positioning hole in the multilayer printed circuit board. Line inspection (perforation) devices are conventionally used.

In this X-ray inspection drilling device, a multilayer printed circuit board is positioned between an X-ray irradiator and an X-ray receiving camera unit, a punch mark is detected by X-ray inspection, and the punch mark is compatible with the drill device (drill). And perforate. Usually, a multi-layer printed circuit board, which is a work, is mounted on a work mounting table and transported between the X-ray irradiator and the camera unit. After detecting a perforation mark, the multi-layer printed circuit board remains mounted on the work mounting table. The piercing mark moves to a position corresponding to the piercing device and is pierced.

Since the multilayer printed circuit board is sent between the X-ray irradiator and the camera unit while being placed on the work mounting table, the X-ray inspection is performed, so that the X-rays are not blocked by the work mounting table. Thus, a through hole is provided in the center of the work mounting table. The multilayer printed circuit board is supported at the edge of the through hole.

(Problems to be solved by the invention) However, the above-mentioned conventional X-ray inspection apparatus has the following problems.

There are various sizes of the work, and even in the case of the above-mentioned multilayer printed board, the size of the multilayer printed board is significantly different depending on the application. When mounting multilayer printed circuit boards of different sizes on the work mounting table, there is no problem if the size of the multilayer printed circuit board is larger than the through hole of the work mounting table. There is a problem that the multi-layer printed circuit board cannot be supported and the multi-layered printed circuit board falls.When placing a work of different size, replace the table with a dedicated work placement table or attach a dedicated support adapter to the table. There is a problem that the work becomes complicated and work efficiency is poor.

Therefore, an object of the present invention is to provide a work mounting table of an X-ray inspection apparatus which can easily cope with a change in the size of a work.

(Means for Solving the Problems) In order to solve the above problems, the present invention has the following configuration.

That is, a through hole provided in the center, a moving support means for supporting a work provided so as to be able to reciprocate in at least one direction on a plane parallel to the through hole, and A driving table for driving the X-ray inspection apparatus, comprising: a moving table formed to have a length straddling the through hole; And a pair of guides arranged in parallel and movably supporting the moving table, and an opening in a sliding surface of the moving table and at least one of the pair of guides provided on the moving table. And a vacuum generating device for connecting the opening to a negative pressure is connected to the opening.

(Action) The action will be described.

The moving table is supported by a guide on a plane parallel to the through hole at the center of the work mounting table and at least one
The work table can be moved by the driving means even if the work is smaller than the through hole, so that the distance between the edge of the through hole and the work table is set smaller than the size of the work. Thereby, the work can be supported on the work mounting table. Also, after setting the distance between the edge of the through hole and the moving table, when the vacuum generator is operated to make the opening a negative pressure, the moving table is attracted to the guide and the moving table is moved relative to the guide. Can be fixed without rattling.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In this embodiment, as an example of the X-ray inspection apparatus, an X-ray inspection punching apparatus that inspects and punches a multilayer printed circuit board as a work will be described as an example.

 FIG. 3 shows the appearance of the X-ray inspection perforation apparatus 10.

Reference numeral 12 denotes an inspection perforation portion, in which detection and perforation of a perforation mark of a multilayer printed circuit board (hereinafter referred to as a work) are performed.

 FIG. 4 shows the internal structure of the inspection hole 12.

An X-ray irradiator 14 is fixed on the first slider 16. The first slider 16 is movable along the guide 18 in the X-axis direction. The first slider 16 is a motor 20
And a screw rod 24 rotated by the belt 22, and moves in the X-axis direction by the rotation of the screw rod 24.

26 is a work placement table (hereinafter referred to as a table)
Although the structure will be described later, it is movable in the Y-axis direction along the guide 28. The table 26 is screwed with a screw rod 32 rotated by a motor 30, and moves in the Y-axis direction by the rotation of the screw rod 32.

Reference numeral 34 denotes a camera unit that uses a CCD for receiving X-rays and forming an image, and at least during X-ray inspection,
It is located above the line irradiation device 14. The camera unit 34 is fixed on a second slider 40 movable in the Z-axis direction along a guide 38 fixed on the first plate 36. The second slider 40 is a screw rod 44 rotated by a motor 42.
, And moves in the Z-axis direction by the rotation of the screw rod 44. By moving the camera unit 34 in the Z-axis direction, the width of the field of view and the resolution of the image captured by the camera unit 34 can be adjusted.

Reference numeral 46 denotes a punching device (hereinafter, referred to as a drill), which is fixed on a third slider 52 movable in the Z-axis direction along a guide 50 fixed on a second plate 48. The third slider 52 is screwed with a screw rod 56 rotated by a motor 54, and moves in the Z-axis direction by the rotation of the screw rod 56. The blade 58 of the drill 46 is rotated by a motor 60. With the blade 58 of the drill 46 rotated, the third slider
Work (not shown) when 52 and drill 46 move down in the Z-axis direction
Drilling into the hole is possible.

The second slider 40 and the third slider 52 are arranged on a fourth slider 62, and the fourth slider 62 is movable in the X-axis direction along a guide 66 fixed on a back plate portion 64. . The fourth slider 62 is screwed with a screw rod 70 rotated by a motor 68, and moves in the X-axis direction by the rotation of the screw rod 70. Therefore, the drill 46 and the camera unit 34
Move together in the X-axis direction. Since the fourth slider 62 is movable in the X-axis direction, the table 26 moves only in the Y-axis direction to move the work on the table 26 in the XY direction relative to the camera unit 34 or the drill 46. It can be moved. Further, the drive mechanism of the table 26 can be simplified as much as there is no need to move the table 26 in the X-axis direction, and the planar size of the apparatus can be reduced.

72 is a work holder, and the third slider together with the drill 46
52 is provided on. The work retainer 72 is provided to prevent the work from escaping when the drill 46 pierces the work. At the right end of the work holder 72, the blade 58 of the drill 46
Are provided with a through hole 74 through which the can be freely inserted. The work holder 72 can be moved up and down by an air cylinder 76.

Reference numeral 78 denotes a work support, which is provided on the first slider 16. When the drill 46 pierces the work, the work support 78 sandwiches the work placed on the table 26 together with the work holding member 72 to prevent the work from bending and deforming. When drilling a work, the work is arranged corresponding to a through hole (described later) of the table 26, so that the work needs to be clamped between the work holder 72 and the work support 78 at the height of the upper surface of the table 26. . Therefore, the work support 78 is moved up and down by the air cylinder 80 on the first slider 16. The air cylinders 76 and 80 hold the work at the height of the upper surface of the table 26.
Are driven synchronously. The work support 78 is provided with a ring portion 82 having a through hole. The upper end surface of the ring portion 82 supports the work and allows the blade 58 of the drill 46 to enter. Therefore, the position of the work support 78 is always immediately below the blade 58 of the drill 46 at least during the drilling operation.

With the above configuration, the X-ray irradiation device on the first slider 16
The distance between 14 and the work support 78 is equal to the distance between the camera unit 34 on the fourth slider 62 and the drill 46.

Next, the work placement table 26, which is a feature of the present invention, will be described in detail with reference to FIG.

A through hole 84 is provided at the center of the table 26.
The through holes 84 allow the passage of X-rays and the passage of the blades 58 of the drill 46.

Reference numeral 86 denotes a vacuum table as a moving table which forms a part of the moving support means, and is movable in the Y-axis direction along a pair of guides 88 and 90 which also form a part of the moving support means. The length of the vacuum table 86 is formed so as to straddle the through-hole 84 in the Y-axis direction, and the left end of the vacuum table 86 is a screw rod that constitutes a part of the moving support means disposed on the table 26 in the Y-axis direction. It is screwed with 92. The screw rod 92 is rotated by a motor 94, which is an example of a driving means, so that the rotation of the screw rod 92 moves the vacuum table 86 in the Y-axis direction. Guide 88 is a vacuum table
Since the vacuum table 86 passes through the screw rod 92
It is prevented from rotating with it.

The value of the distance A can be adjusted by moving the vacuum table 86 in the Y-axis direction. As a result, by setting the value of A to be smaller than the size of the work, works of various sizes can be supported between the vacuum table 86 and the edge of the through hole 84.

The vacuum table 86 is connected to a vacuum generator (not shown), and can make the opening 94 a negative pressure. Therefore, after being placed on the vacuum table 86, the work can be sucked by operating the vacuum generator to make the opening 94 a negative pressure. An opening 96 is also provided on the sliding surface of the vacuum table 86 that slides with the guide 90.
And the position of the vacuum table 86 can be fixed.

Reference numerals 98 and 100 denote mechanical clamps, which clamp and fix the work at the distal end portion 102. The position of the work on the table 26 can be fixed by the clamping of the mechanical clamp and the suction of the vacuum table 86.

The clamping of the mechanical clamps 98 and 100 will be described with reference to FIG. FIG. 2 is a side view of the mechanical clamp 100. FIG.
An air cylinder 104 is provided on the mechanical clamp 100, and link pieces 106 and 108 are fixed to a tip of a rod 110 of the air cylinder 104. FIG. 2 shows a state in which the work 112 is sandwiched, and when the rod 110 is extended, the link mechanism including the link pieces 106 and 108 operates, and the link piece 106 rotates clockwise about the shaft 114, The tip 102 is turned in the direction of arrow B so that the pinch can be released. The boss 116 fits into a positioning hole of the work 112.

Referring again to FIG. 1, the mechanical clamp 98 is fixed in position, while the other mechanical clamp 100 is
It is movable in the axial direction. Mechanical clamps 98 and 100
May be selected as appropriate depending on the size of the work 112 to be placed. To change the position of the mechanical clamp 100, the handle 120 is rotated in the loosening direction. By rotating the handle 120, a known holding mechanism 122 for holding a part of the table 26 provided on the mechanical clamp 100 can be loosened or tightened (see FIG. 2). Therefore, the operator adjusts the position of the mechanical clamp 100, turns the handle 120 in the tightening direction, and fixes the position of the mechanical clamp 100.

The rotation of the motor 94 is manually operated by an operator to adjust the position of the vacuum table 86. The operator also operates the vacuum generator to which the vacuum table 86 is connected.

As described above, various preferred embodiments of the present invention have been described. However, the present invention is not limited to the above-described embodiments. For example, the X-ray inspection apparatus may not have a perforation function.
Of course, many modifications can be made without departing from the spirit of the invention.

(Effect of the Invention) When the work mounting table of the X-ray inspection apparatus according to the present invention is used, at least one moving table is supported by the guide on a surface parallel to the through hole at the center of the work mounting table. The work table can be moved by the driving means even if the work is smaller than the through hole, so that the distance between the edge of the through hole and the work table is set smaller than the size of the work. Thereby, the work can be supported on the work mounting table. Accordingly, it is possible to cope with works of various sizes, and the versatility is improved.

Further, after setting the distance between the edge of the through hole and the moving table, the vacuum generating device is operated to make the opening negative, so that the moving table is attracted to the guide and the moving table is guided. This has the effect of being able to be fixed without rattling.

[Brief description of the drawings]

FIG. 1 is a plan view showing an embodiment of a work mounting table of the X-ray inspection apparatus according to the present invention, FIG. 2 is a side view of the mechanical clamp, and FIG. 3 is an X-ray inspection punching apparatus of the embodiment. 4 is a perspective view showing the internal structure of the inspection hole. 10 X-ray inspection punching device, 26 Workpiece mounting table, 84 Through hole, 86 Vacuum table, 92
Screw rod, 94 ... Motor, 112 ... Work.

Continued on the front page (51) Int.Cl. ⁶ Identification number Agency reference number FI Technical display location H05K 3/46 H05K 3/46 X B23Q 1/14 Z

Claims (1)

(57) [Scope of request for utility model registration] 1. A through hole provided at a central portion, a moving supporting means for supporting a work provided reciprocally in at least one direction on a plane parallel to the through hole, and a moving supporting means. In a work placement hand table of an X-ray inspection apparatus, comprising: a driving unit for reciprocating; a moving table formed to have a length straddling the through hole; A pair of guides disposed in parallel to the rim and movably supporting the moving table; and a slide provided on the moving table and sliding between the moving table and at least one of the pair of guides. A hand table for mounting a work of the X-ray inspection apparatus, comprising: an opening that opens to the moving surface; and a vacuum generator that makes the opening a negative pressure is connected to the opening.