JP2539043B2 - Display method of shape measurement result - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION (Industrial field of application) The present invention relates to a shape suitable for use in displaying a state of deviation between a measurement result of the shape of an object and a reference shape of the object. The present invention relates to a method of displaying measurement results.

(Prior Art) In the case as described above, for example, when the object to be measured is manufactured based on the design by computer aided design (CAD), the design shape as the reference shape obtained in the CAD process is used. Teach the measuring procedure of the object to the coordinate measuring machine using the data to represent, and display the state of deviation between the measurement result by the coordinate measuring machine and the design shape on the screen of the image display device or on the paper. As a conventional display method in such a case, for example, as disclosed in Japanese Patent Laid-Open No. 60-238259, points that are color-coded according to the magnitude of deviation are measured points on the plan view of the object. To be displayed at a position corresponding to, disclosed in JP-A-60-242938.
There is one that displays contour lines connecting measurement points having the same magnitude of deviation on a plan view of an object.

(Problems to be Solved by the Invention) However, in all of the above-described conventional display methods, since the state of the deviation is generally displayed on the plan view of the object, the deviation about the undulation of a specific cross-sectional shape is displayed. However, in order to solve such a problem, the contour line of the reference shape in the predetermined cross section and the contour line based on the measurement result at the position corresponding to the contour line are not changed. It is possible to display them together, but
With this method, if the deviation is very small, it cannot be determined,
It is also possible to partially enlarge and display them, but in that case, there arises a problem that the entire cross section cannot be seen.

The present invention provides a display method that advantageously solves the above problems.

(Means for Solving the Problem) In the method of displaying the shape measurement result of the present invention, when displaying the state of deviation between the measurement result of the shape of the object and the reference shape of the object, first, the reference The deviation between the contour line in the predetermined cross section of the shape and the contour line in the predetermined direction with respect to the contour line, and the contour line based on the measurement result is obtained, and then the deviation is enlarged in the direction by a predetermined magnification, and then, The enlarged deviation is added to the contour line of the reference shape to obtain an enlarged contour line based on the measurement result, and then the contour line of the reference shape and the enlarged contour line are displayed together. It is convenient that the predetermined direction is the normal line direction of the reference shape.

(Operation) According to this display method, the contour line of the reference shape in the predetermined cross section and the contour line based on the measurement result at the position corresponding to the contour line are displayed together. The deviation state can be known for the entire cross section, and since the contour line obtained by enlarging the deviation in a predetermined direction is displayed, the tendency of the deviation can be clearly known even if the deviation is minute.

In addition, if the direction of the measurement result with respect to the contour line and the expansion direction of the deviation are the normal direction of each position on the contour line in the reference shape, the deviation state of the actual shape of the object is grasped as the degree of unevenness. It is easy to grasp because it is obtained, and when the actual shape of the object is corrected according to the reference shape by grinding or buildup, the thickness to be corrected can be directly grasped. Easy to fix.

Embodiment An embodiment of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a block diagram showing a functional block of a measuring system of a body panel molding die, to which an embodiment of a method for displaying a shape measurement result of the present invention is applied, in which 1 is a computer-aided design ( In addition to CAD, computer test processing (C
The host computer 2, which is also used for AM) and has a relatively large processing capacity and storage capacity, is smaller than the host computer 1 used for controlling the shape measuring device and processing the measurement data. A minicomputer 3 having capability and memory capacity is a three-dimensional measuring machine as a shape measuring device, which is used for measuring the shape of a body panel molding die.

The host computer 1 here is a die face
Four CAD parts, a CAD part 4, a free-form surface CAD part 5, a prescribed curved surface CAD part 6 and a mold structure CAD part 7, and a reference data creation part 8,
With the external communication unit 9, a database file 10, a molding surface shape data file 11, a trim, a flange shape data file 12, a structure shape data file 13,
It comprises six storage files of a reference data file 14 and a measurement data file 15, and the minicomputer 2 in this case includes an external communication unit 16 and an error amount calculation unit.
17, a measurement NC data creation unit 18, a device control unit 19, and a measurement data correction unit 20, and two storage files, a reference data file 21 and a measurement data file 22, and each keyboard Also, two input / output terminal devices 23 and 24 having an image display, an XY plotter 25 that draws a diagram based on input signals, and a printer 26 that prints out based on input signals are connected.

The functions of the respective parts of the host computer 1 and the minicomputer 2 will be described in the description when teaching the measurement procedure described later.

The coordinate measuring machine 3 here has a measuring machine main body 27 having a configuration similar to that of a rectangular coordinate type robot and having improved operation accuracy, a sensor movement control device 28, a current position calculation device 29, A normal touch sensor 32, which includes an operation panel 30 and a position display device 31, is selectively attached to the lower end of the wrist of the moving arm of the measuring machine main body 27 and is moved with respect to the measuring object. And a linear sensor that continuously measures the distance to an object after it comes into contact with the object
33, and a manual pulse generator 34, a joystick pendant 35, and those manual pulse generators for moving the sensor position by manually inputting a signal.
34 and a joystick pendant 35 and an interface (I / F) 36 for connecting the sensor movement control device 28.

FIG. 2 is a block diagram showing the measurement control system of the coordinate measuring machine 3 described above. The sensor moving device 28 in this case is equipped with a normal microcomputer, and is provided in the measuring machine main body 27, and the X axis of the arm is provided. , X-axis linear encoder 37 that outputs the current position in the Y-axis and Z-axis directions, Y-axis linear encoder
Signals from the 38 and Z-axis linear encoder 39 and a θ-axis rotary encoder 40 that is connected to a connector for mounting the sensor on the wrist of the arm and outputs the current direction of the sensor are controlled by the arm and the connector. The present position and thus the present position of the sensor are directly detected, and the feedback control using the present position performs feedback control using the present position. The ball screw shaft 41 for driving the X-axis direction, the ball screw shaft 42 for driving the Y-axis direction, Z An X-axis motor 44, a Y-axis motor 45, which are respectively coupled to the axial driving ball screw shaft 43 and the wrist driving shaft,
Operate the Z-axis motor 46 and the θ-axis motor 47 to
Based on the NC program for automatic measurement given from the minicomputer 2, 32 or 33 is moved along a path corresponding to the shape of the object, and when the touch sensor 32 is used, the probe of that sensor is used during the movement. The process of taking in a signal from the sensor 32 indicating that the object has contacted the object and the contact direction, calculating the coordinates of the contact point on the measuring machine coordinate system from the position of the sensor, and outputting to the minicomputer 2. When the linear sensor 33 is repeatedly executed, only the movement is performed.

Incidentally, the sensor movement control device 28, the operation mode switching signal from the operation panel 30, other than the automatic operation mode described above,
A manual operation mode in which the sensor is moved based on the movement command signal from the operator operating the manual pulse generator 34 or joystick pendant 35 can also be performed, and the emergency stop signal from the operation panel 30 can be used. It is possible to stop the movement of the sensor in an emergency, and repeat the above-described automatic measurement by a cycle start signal from the operation panel 30.

Then, the touch sensor 32 and the linear sensor 33 are feedback-controlled by the minicomputer 2 to cause the probe to oscillate as shown by arrows α and γ in the drawing and rotate as shown by arrows β and δ in the drawing at arbitrary angles. You can do it and orient the probe in the desired direction.

On the other hand, the current position calculation device 29, which also includes an ordinary microcomputer, has three linear encoders 37-
The signals from 39 and the rotary encoder 40 are input, and the current position of the sensor is detected from these signals by the sensor movement control device 28.
Separately from this, the position is obtained substantially continuously and in an extremely short time, and the position is output to the position display device 31 via the minicomputer 2 and displayed there momentarily.

The current position calculation device 29 also receives a signal from the linear sensor 33, calculates the current position of the probe of the sensor from the signal, and outputs it to the minicomputer 2.

The host computer 1 of such a measuring system has the functions of CAD and CAM as described above, and the measurement in this embodiment is designed as follows using the CAD and CAM functions of the host computer 1. The target is the manufactured mold.

In other words, the mold here is another CAD not shown.
The host computer 1 uses the CAD data that was created during the vehicle body design using the device and shows the shape of the vehicle body panel in the form of mathematical formulas.
And design the molding surface shape such as the punch of the mold by the die face CAD unit 4 based on the data in the database file 10 regarding the moldability such as the spring back and the elongation of the panel from the CAD data of the body panel, The CAD data showing the forming surface shape by a mathematical formula is transferred to the free-form surface CAD section 7 and stored in the forming-surface shape data file 13, and then the free-form surface CAD section 7 extracts the forming surface shape from the above-mentioned data file 13. It is suitable for teaching the moving path of tools and sensors to numerical control (NC) machine tools and the three-dimensional measuring machine 3 here from the above CAD data that expresses
A numerical model that represents the molding surface shape with a point cloud is created, and along with this, the trim and flange line shape data created from the contour shape of the vehicle body panel by the die face CAD section 4 is transferred to the specified curved surface CAD section 6 to perform trim and flange. Trim stored in the line shape data file 12 and then extracted by the specified curved surface CAD unit 6 from the data file 12,
Corresponding a relatively simple specified curved surface such as a cylindrical surface or flat surface to the flange line shape, and set the shape of the profile surface such as vertical wall surface or inclined wall surface used for trim processing or flange molding around the punch etc. A numerical model represented by is created, and based on the data in the structure portion shape data file 11 regarding the shape of the structure portion such as the cam surface and the positioning hole, the mold structure CAD unit 5 calculates the cam surface and the positioning hole of the mold. Design the layout, create a numerical model that shows the layout of those faces with a point cloud, and create the tool movement path of the NC machine tool from the numerical models created by the free-form surface CAD section 7 and the specified curved surface CAD section 6 above. Then, the punches, dies, pads, etc. of the mold are cut and finished by instructing the machine tool, and then these parts are assembled based on the mold structure designed by the mold structure CAD unit 5. .

The above numerical model is, for example, for a molding surface, as shown in FIG. 3, on a predetermined reference plane (usually a plane parallel to the plane including the x and y axes in the mold coordinate system) that covers the molding diagram. The reference line arranged in a grid pattern on the
When projected onto the molding surface in CAD data, the point group of each intersection (grid point) of the reference line on the molding surface represents the three-dimensional shape of the molding surface, and the above-mentioned mold of those grid points It consists of x, y, and z coordinate data in the coordinate system. However, the orientation and inclination of the reference plane can be selected as appropriate according to the orientation and inclination of the surface that should represent the shape.For example, for numerical data related to profile surfaces and mold structures, the reference for the orientation and inclination along the surface that should represent the shape It can be created using a plane.

Then, here, the procedure for measuring the shape of each part of the mold is taught to the coordinate measuring machine as described below.

That is, here, first, the reference data creation unit 8 is caused to create reference data serving as a teaching reference for the measurement procedure of the molding surface, the profile surface, and the die structure surface such as the cam surface and the positioning hole from the above numerical model.

The reference eter here is preferably on the same reference plane as that used for creating the numerical model, for example, for measurement of the molding surface, as shown in FIGS. Shows the cross-sectional shape when the three-dimensional shape of the numerical model is cut in a plane orthogonal to the above-mentioned reference plane by arranging the cross-section lines in a grid pattern or a striped pattern with coarse intervals by a sequence of points. Shall be represented in.
Therefore, this reference data can be used for the calculation of the deviation of the measurement result, which will be described later, as representing the reference shape.

Here, the cross-section lines are arranged in a striped pattern (the direction can be selected as appropriate) if the overall undulation features of the numerical model can be sufficiently captured in the striped pattern, and in a grid pattern if the striped pattern is not sufficient. And Further, if the cross-section line overlaps with the reference line of the numerical model, the data of the point sequence can be directly obtained from the grid point, so it is preferably arranged so as to overlap with the reference line.
It does not necessarily have to overlap with the reference line, and when they do not overlap, the data of the point sequence is obtained by calculation of linear or curved line interpolation between the grid points. The data of each point constituting the point sequence of the reference data is represented by x, x in the mold coordinate system as shown by a point sequence An (n = 1, 2 ...) When the cross section is viewed from the front in FIG.
In addition to the y- and z-axis coordinate values, the normal vector of the surface represented by the numerical model at that point for controlling the sensor orientation and approach direction described later. Shall be included.

Further, the reference data here is the above-mentioned lattice-shaped or striped cross-section by arbitrarily designating the start point S and the end point E of the section line on the reference plane as shown in FIG. For one or more cross-section lines that are arranged to incline at an arbitrary angle with respect to the line, the cross-sectional shape of the numerical model along with the grid-like or striped cross-section line described above is detailed using a point sequence. Shall be represented in. Such an inclined cross-section line is suitable for measuring a characteristic undulation (character portion) formed on a part of the vehicle body panel or a joggle processing portion.

The reference data is created by using the image display of one terminal device 24 of the minicomputer 2 on the host computer 1
Displaying the shape of each part of the mold based on the numerical data input via the external communication units 9 and 16 from the computer, and observing the shape and transmitting the creation instruction input using the keyboard from the minicomputer 2 to the host computer 1. Select the grid line or stripe pattern for the layout of the cross-section lines, the direction of the cross-section line in the grid pattern or the stripe pattern (usually parallel to the x-axis or the y-axis, or both). ,), The designation of cross-section lines that are inclined with respect to those cross-section lines, and the designation of the spacing pitch of the grid or striped cross-section lines and the spacing pitch between the points forming the point sequence. The pitch between the lines and the points here may be equal intervals, but may be partially narrowed or widened as required.

However, since the numerical data of the forming surface and the profile surface also give the movement path of the tool of the machine tool, an edge portion is added around the original forming surface and profile surface. When creating the reference data, reference is made to trim, flange line shape data, etc., and for example, as shown in FIG. 7 as a sequence of points when the cross section along the above-mentioned inclined cross section line in FIG. 6 is viewed from the front direction. , Create it by removing the part where the measurement object is actually gone.

The reference data creation unit 8 of the host computer 1
The reference data created by is stored once in the reference data file 14 here, and then transferred from the host computer 1 to the mini computer 2 via the external communication units 9 and 16, and the reference data file 21 of the mini computer 2 is transferred. Memorize to. In this way, all the reference data are stored in the minicomputer 2.
By having it inside, it is possible to make a comparison between a measurement command and measurement data, which will be described later, and the reference data in an extremely short time.

Thereafter, here, the cross-section line of the reference data is displayed on the image display of the terminal device 24 of the minicomputer 2 as shown in FIG. 8, and the cross-section line displayed by the input means such as the keyboard and the mouse. Of these, the range in which actual measurement is required is specified as indicated by the broken line in the figure, and the basic approach amount A _P0 and additional approach amount A _P1 which will be described later are specified. If the cross-section line of the reference data is a grid, the striped measurement and its direction can be specified.

After inputting the designation of the measurement range, the type of section line, the approach amount, etc. as described above, the measurement NC data creation unit 18 of the minicomputer 2 fetches from the reference data file 21 according to the designation contents. The automatic measurement NC data for specifically teaching the movement path of the sensor and the measurement processing contents is created based on the reference data. Note that the specified content may be printed on the printer 26 for confirmation prior to its creation.

FIG. 9 exemplifies a specific movement path of a sensor for measuring a molding surface of a mold, in which 50 is an actual molding surface.
Reference numeral 32 indicates a touch sensor.

That is, here, on the clear plane P, which is a horizontal plane set at an arbitrary height at which the die and the sensor do not interfere with each other, the sensor 32 and the probe from the first measurement point A ₁ directed from the clear plane P In the direction of the normal vector, move to a position above the approach point B ₁ that is a distance that is the _{sum of the} basic approach amount A _P0 and the additional approach amount A _P1 at the rapid traverse speed as shown by the broken line in the figure, and then clear it. The probe of the sensor 32 is lowered from the plane P to the approach point B ₁ at a high cutting feed rate as shown by the solid line in the figure, and then the probe of the sensor 32 is passed along the normal line so as to pass the measurement point A _1. At the normal cutting speed (low speed) to approach the forming surface.
When a signal indicating that the contact sensor 32 is output to the corresponding seeking contact direction with obtaining the center position of the contact time of the probe from the position and orientation of the sensor from an output signal of the sensor, from these to the measurement point A ₁ Actual forming surface
Find the 50 position.

Then, after the contact of the probe, in parallel with the calculation for obtaining the position of the molding surface 50, the sensor 32 is moved in the opposite direction to the above at a high cutting feed rate, and the probe moves from the measurement point A ₁ to the basic approach amount A _P0 . After returning to the distance, then the probe,
Move from the next measurement point A ₂ to the approach point B _{1 in the} normal vector direction, which is a basic approach amount A _P0 away,
After that, the positions of the molding surface 50 corresponding to the measurement points A ₂ , A ₃ , and A ₄ are measured in the same manner as at the measurement point A ₁ .

After that, since the measurement points A ₄ and A ₅ have different sectional lines, the sensor 32 is once moved up onto the clear plane P, and then the measurement points A ₅ and A ₆ are also measured in the same manner as described above.

If there is a hole in the actual molding surface or the horizontal contour of the molding surface is small and the probe does not contact the molding surface 50 even after the measurement point, as shown in FIG. When the measurement point A is further advanced by a predetermined distance T and there is still no contact, the fact is displayed and recorded, and the measurement of the next measurement point is started.

When the touch sensor 32 is used, automatic measurement NC data for instructing the movement path and measurement processing contents is created, and the NC data is transmitted to the sensor movement control device 28 of the coordinate measuring machine 3 via the device control unit 19. Input or teach.

On the other hand, when performing measurement using the linear sensor 33, while maintaining the distance between the surface of the measurement data on the reference data and the probe of the sensor within the measurable range of the linear sensor 33, NC data for automatic measurement is created so as to be continuously moved along, and the coordinate measuring machine 3 is instructed.

In the measurement using the linear sensor 33, the tip of the probe is a very small hemisphere, so if the measurement accuracy is not so high, the sensor is moved vertically while it is moved, but if high measurement accuracy is required. Is a manual operation using the joystick pendant 34, or by a normal vector in the reference data, moves the sensor while controlling the attitude so that it is perpendicular to the actual measurement surface or the surface on the reference data, and this causes the tip of the probe to move. It is assumed that the vicinity is brought into contact with the measurement surface, or the data measured with the sensor in the vertical state is corrected using the normal vector in the reference data.

The above example is for measuring the molding surface, but here, for the profile surface and the surface related to the mold structure, NC data for automatic measurement is created from the reference data in the same way, and it is taught to the coordinate measuring machine. To do. Therefore, according to this measuring system, not only the shape accuracy of the mold but also the assembly accuracy can be evaluated.

Then, after teaching the automatic measurement NC data, input a measurement start command from another input / output terminal device 23 installed so that other reference data and NC data can be created in parallel with the measurement. The coordinate measuring machine 3 is caused to perform mold measurement based on the inputted automatic measurement NC data.

And here, the sensor moving device 28 of the coordinate measuring machine 3
The device control section 19 determines the actual position of the measurement surface corresponding to the measurement point, which is output one after another by the minicomputer 2
Input into the measurement data, and correct the deformation amount due to the assembly error of the coordinate measuring machine main body 27 and the change of the ambient temperature to the measured position data, and the coordinate conversion from the measuring machine coordinate system to the mold coordinate system is measured data. Performed by the correction unit 20, the measurement data of each point obtained by this is sequentially stored in the measurement data file 22, and is input to the error amount calculation unit 17 together with the reference data of the measurement point corresponding to the measurement data. Then, after calculating the position error amount (deviation) of the measurement data with respect to the measurement point on the reference data in the normal direction of the reference data and converting the position error amount into the hue difference, it is shown in FIG. As described above, the image display of the input / output terminal device 23 is sequentially displayed at the position corresponding to the measurement point as a point of the hue corresponding to the position error amount, and the error amount is also displayed on the image display. Display the numerical value .

After the measurement operation and the display of the error amount during measurement are finished, here, as shown in FIG. 12 (a), the same as the figure showing the normal direction position error amount along the sectional line of the reference data, As shown in the figure (b), the contour line E of the cross-sectional shape based on the reference data along the cross-section line (indicated by the solid line in the figure) and the contour line F of the cross-sectional shape based on the measurement data (indicated by the dashed line in the figure). X and
-Y plot on the plotter 25. Here, the contour line F of the cross-sectional shape based on the measurement data is assumed to emphasize the error tendency, and specifically, as shown in FIG. 13, for each measurement point of the contour line E of the cross-sectional shape based on the reference data. , The above-mentioned vector is not the contour line G of the actual cross-sectional shape obtained by converting the actual measurement data, which is the point at the tip of the vector g · ₁ obtained by multiplying the unit vector ₁ in the normal direction It is assumed that the point at the tip of the vector ₂ ( ₂ = k · g · ₁ ) obtained by multiplying g · ₁ by the highlighting coefficient k (which can be arbitrarily specified) is made into a point sequence.

Even when the measurement is performed using the linear sensor 33, the measurement result may be displayed in the same manner as when the touch sensor is used.

In addition to the display of the measurement result, here, the measurement data is further transferred from the minicomputer 2 to the host computer 1 and temporarily stored in the measurement data file 15, and the host computer 1 displays the actual mold based on the measurement data. Based on the shape, learning for correcting the mold design data in the database file 10 used in the die face CAD unit 4 is performed.

As described above, according to the measurement system here,
When measuring the mold, the cross-sectional shape can be measured in detail and the measurement results can be displayed, so that the characteristic uneven shape of the mold can be sensuously and appropriately evaluated. By expanding the amount in the normal direction and displaying the cross-sectional contour line of the measurement result, the shape can be evaluated more easily, and the actual shape of the die molding surface can be ground according to the design shape. When the thickness is to be corrected by overlaying or the like, the thickness to be corrected can be directly grasped and the correction can be easily performed.

Although the present invention has been described above based on the illustrated example, the present invention is not limited to the above-described example, and can be applied to measurement of other objects such as a vehicle body panel.

Further, in the above example, the deviation of the measurement result in the normal direction of the contour line of the reference shape is enlarged and displayed in the normal direction, but the direction is set to a fixed direction, for example, the Z-axis direction of the mold. This is also good, and if this is done, the control can be facilitated when performing further machining with an NC machine tool.

(Effect of the invention) Thus, according to the display method of the present invention, it is possible to know the deviation state of the undulation of the cross-sectional shape for the entire cross section, and even if the deviation is minute, the deviation tendency can be clearly known. You can

It should be noted that if the direction of the measurement result with respect to the contour line and the direction of expansion of the deviation are the normal direction of each position on the contour line in the reference shape, it is sensuous to grasp the state of deviation of the actual shape of the object. In addition, when the actual shape of the object is corrected according to the reference shape by grinding, build-up or the like, the thickness to be corrected can be directly grasped, so that the correction is facilitated.

[Brief description of drawings]

FIG. 1 is a block diagram showing a measuring system of a body panel molding die, which is a functional block, to which an embodiment of a method of displaying a shape measurement result of the present invention is applied, and FIG. FIG. 3 is a configuration diagram showing a measurement control system, FIG. 3 is an explanatory diagram illustrating a numerical model used in the measurement system, and FIGS. 4 (a) and 4 (b) are grids used as reference for creating reference data used in the measurement system. FIG. 5 is an explanatory view exemplifying cross-section lines having a striped shape and stripes, FIG. 5 is an explanatory view exemplifying a point sequence in the reference data, and FIG. 6 exemplifies an inclined cross-section line serving as a reference for creating the reference data. Explanatory diagram, FIG. 7 is an explanatory diagram illustrating a series of points in the reference data along the section line shown in FIG. 6, and FIG. 8 is an explanatory diagram showing a method of instructing a range necessary for actual measurement from the reference data. , Fig. 9 and Fig. 10 show the above measurement system. Diagram illustrating the method of moving the sensor of NC data for automatic measurement in the system, FIG. 11 is an explanatory diagram illustrating the method of displaying the measurement data during the measurement operation of the measurement system, and FIG. 12 is the measurement system. FIG. 13 is an explanatory diagram illustrating a method of displaying measurement data after the end of measurement operation, and FIG. 13 is an explanatory diagram illustrating a method of enhancing measurement data. 1 ... Host computer 2 ... Mini computer, 3 ... Three-dimensional measuring machine 4-7 ... CAD section, 8 ... Reference data creation section 17 ... Error amount calculation section 18 ... NC data creation section for measurement 20 …… Measurement data correction unit, 23,24 …… Input / output terminal device 25 …… XY plotter 27 …… Measuring machine main unit 28 …… Sensor movement control device 29 …… Current position calculation device 32,33 …… Sensor

Claims (2)

(57) [Claims] 1. When displaying a deviation state between a measurement result of a shape of an object and a reference shape of the object, first, with respect to a contour line of a predetermined cross section of the reference shape and a contour line thereof, The deviation between the contour line and the contour line based on the measurement result in a predetermined direction is obtained, and then the deviation is enlarged in the direction at a predetermined magnification, and then the contour line of the reference shape is added with the enlarged deviation to measure. A method of displaying a shape measurement result, characterized by obtaining an enlarged contour line based on a result and then displaying the contour line of the reference shape and the enlarged contour line together. 2. The method for displaying a shape measurement result according to claim 1, wherein the predetermined direction is a normal direction of the reference shape.